JPH0228847U - - Google Patents

Info

Publication number
JPH0228847U
JPH0228847U JP10699288U JP10699288U JPH0228847U JP H0228847 U JPH0228847 U JP H0228847U JP 10699288 U JP10699288 U JP 10699288U JP 10699288 U JP10699288 U JP 10699288U JP H0228847 U JPH0228847 U JP H0228847U
Authority
JP
Japan
Prior art keywords
shaft
spline
guide rail
bearing plate
sliding table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10699288U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0617787Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10699288U priority Critical patent/JPH0617787Y2/ja
Publication of JPH0228847U publication Critical patent/JPH0228847U/ja
Application granted granted Critical
Publication of JPH0617787Y2 publication Critical patent/JPH0617787Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP10699288U 1988-08-15 1988-08-15 基板搬送装置 Expired - Lifetime JPH0617787Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10699288U JPH0617787Y2 (ja) 1988-08-15 1988-08-15 基板搬送装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10699288U JPH0617787Y2 (ja) 1988-08-15 1988-08-15 基板搬送装置

Publications (2)

Publication Number Publication Date
JPH0228847U true JPH0228847U (enEXAMPLES) 1990-02-23
JPH0617787Y2 JPH0617787Y2 (ja) 1994-05-11

Family

ID=31340998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10699288U Expired - Lifetime JPH0617787Y2 (ja) 1988-08-15 1988-08-15 基板搬送装置

Country Status (1)

Country Link
JP (1) JPH0617787Y2 (enEXAMPLES)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016055384A (ja) * 2014-09-10 2016-04-21 株式会社Taiyo 電動グリッパ装置
JP2016055393A (ja) * 2014-09-11 2016-04-21 株式会社Taiyo 電動グリッパ装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1063186A1 (en) * 1997-12-03 2000-12-27 Nikon Corporation Substrate transferring device and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016055384A (ja) * 2014-09-10 2016-04-21 株式会社Taiyo 電動グリッパ装置
JP2016055393A (ja) * 2014-09-11 2016-04-21 株式会社Taiyo 電動グリッパ装置

Also Published As

Publication number Publication date
JPH0617787Y2 (ja) 1994-05-11

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