JPH0228847U - - Google Patents
Info
- Publication number
- JPH0228847U JPH0228847U JP10699288U JP10699288U JPH0228847U JP H0228847 U JPH0228847 U JP H0228847U JP 10699288 U JP10699288 U JP 10699288U JP 10699288 U JP10699288 U JP 10699288U JP H0228847 U JPH0228847 U JP H0228847U
- Authority
- JP
- Japan
- Prior art keywords
- shaft
- spline
- guide rail
- bearing plate
- sliding table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003028 elevating effect Effects 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 4
- 230000013011 mating Effects 0.000 claims 1
- 210000000078 claw Anatomy 0.000 description 1
Landscapes
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
Description
第１図は本考案の１実施例装置の右半部を示す
斜視図、第２図は同じく左半部を示す斜視図、第
３図は基板保持部の平面図、第４図は同じく側面
図、第５図は本搬送経路とバイパス経路とを示す
略図、第６図は基板保持具の実施例を示す斜視図
である。
１……基台、８……ガイドレール、９……摺動
台、１１……水平駆動用モーター、１８……昇降
駆動軸、１９……昇降梁、２０……エアシリンダ
、２４……昇降ガイド軸、２７……軸受板、２８
……スプライン管軸、２９……スプライン軸、３
０……クランク、３１……カムローラ、３２……
開閉駆動用バー、３３……腕、３６……エアシリ
ンダ、３８，３９……リンク腕、４１，４２……
基板支持バー、４５，４６……基板保持用爪、４
７……保持板。
Fig. 1 is a perspective view showing the right half of a device according to an embodiment of the present invention, Fig. 2 is a perspective view showing the left half thereof, Fig. 3 is a plan view of the substrate holder, and Fig. 4 is a side view. FIG. 5 is a schematic view showing the main transport path and the bypass path, and FIG. 6 is a perspective view showing an embodiment of the substrate holder. 1... Base, 8... Guide rail, 9... Sliding base, 11... Horizontal drive motor, 18... Elevating drive shaft, 19... Elevating beam, 20... Air cylinder, 24... Elevating Guide shaft, 27...Bearing plate, 28
... Spline tube shaft, 29 ... Spline shaft, 3
0...Crank, 31...Cam roller, 32...
Opening/closing drive bar, 33... arm, 36... air cylinder, 38, 39... link arm, 41, 42...
Board support bar, 45, 46... Board holding claw, 4
7...Retaining plate.
Claims (1)
レールと、 該ガイドレールに摺動可能に装着した摺動台と
、 該摺動台を前記ガイドレールに沿つて往復駆動
する駆動手段と、 前記ガイドレールに平行に、かつ、昇降可能に
架設した昇降梁と、 該昇降梁を昇降駆動する昇降駆動手段と、 前記摺動台に垂直方向に嵌着され、前記昇降梁
に当接して、昇降梁に従動して昇降する昇降ガイ
ド軸と、 該昇降ガイド軸の上端に水平に固着された軸受
板と、 該軸受板に垂直方向に枢着され、その上端が軸
受板の上面に突出し、かつ、下方の垂下部にスプ
ラインを形成したスプライン軸と、 前記摺動台に垂直方向に枢着され、上端部が前
記スプライン軸に係合するスプライン管軸と、 該スプライン管軸の下端に固着され、その先端
部の下面にカムローラを軸支したクランクと、 前記軸受板の上面に配置され、前記スプライン
軸により駆動される平行リンクにより、互いに逆
方向に移動するように支持され、先端部に基板保
持具を装着した長短一対の基板支持バーと、 前記ガイドレールに平行な位置を保持して前後
方向に移動するように設定され、その上面に前記
クランクのカムローラが係合する係合部を長さ方
向に形成した開閉駆動用バーと、 該開閉駆動用バーを前後方向へ移動させる開閉
駆動手段とを、備えてなる基板搬送装置。[Claims for Utility Model Registration] A guide rail installed along the transport direction of a substrate to be processed, a sliding table slidably mounted on the guide rail, and a sliding table that reciprocates along the guide rail. a driving means for driving; an elevating beam installed parallel to the guide rail so as to be able to rise and fall; an elevating driving means for driving the elevating beam upward and downward; A lifting guide shaft that comes into contact with a beam and moves up and down following the lifting beam; a bearing plate fixed horizontally to the upper end of the lifting guide shaft; and a bearing plate that is pivoted vertically to the bearing plate and whose upper end is a bearing a spline shaft that protrudes from the upper surface of the plate and has a spline formed on a lower hanging portion; a spline pipe shaft that is pivoted vertically to the sliding table and whose upper end engages with the spline shaft; and the spline A crank fixed to the lower end of the tube shaft and having a cam roller pivotally supported on the lower surface of the tip end thereof, and a parallel link arranged on the upper surface of the bearing plate and driven by the spline shaft are used to move in opposite directions. A pair of long and short board support bars each having a board holder attached to the tip thereof are supported, and are set to move in the front and back direction while maintaining a position parallel to the guide rail, and the cam roller of the crank is engaged with the upper surface of the bar. A substrate transport device comprising: an opening/closing driving bar having mating engagement portions formed in the length direction; and opening/closing driving means for moving the opening/closing driving bar in the front-back direction.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10699288U JPH0617787Y2 (en) | 1988-08-15 | 1988-08-15 | Substrate transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10699288U JPH0617787Y2 (en) | 1988-08-15 | 1988-08-15 | Substrate transfer device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0228847U true JPH0228847U (en) | 1990-02-23 |
| JPH0617787Y2 JPH0617787Y2 (en) | 1994-05-11 |
Family
ID=31340998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10699288U Expired - Lifetime JPH0617787Y2 (en) | 1988-08-15 | 1988-08-15 | Substrate transfer device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0617787Y2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016055384A (en) * | 2014-09-10 | 2016-04-21 | 株式会社Taiyo | Electric gripper device |
| JP2016055393A (en) * | 2014-09-11 | 2016-04-21 | 株式会社Taiyo | Electric gripper device |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1999028220A1 (en) * | 1997-12-03 | 1999-06-10 | Nikon Corporation | Substrate transferring device and method |
-
1988
- 1988-08-15 JP JP10699288U patent/JPH0617787Y2/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016055384A (en) * | 2014-09-10 | 2016-04-21 | 株式会社Taiyo | Electric gripper device |
| JP2016055393A (en) * | 2014-09-11 | 2016-04-21 | 株式会社Taiyo | Electric gripper device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0617787Y2 (en) | 1994-05-11 |
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