JPH0228605Y2 - - Google Patents

Info

Publication number
JPH0228605Y2
JPH0228605Y2 JP1982137480U JP13748082U JPH0228605Y2 JP H0228605 Y2 JPH0228605 Y2 JP H0228605Y2 JP 1982137480 U JP1982137480 U JP 1982137480U JP 13748082 U JP13748082 U JP 13748082U JP H0228605 Y2 JPH0228605 Y2 JP H0228605Y2
Authority
JP
Japan
Prior art keywords
sample
ray tube
cathode ray
chamber
signal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982137480U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5941967U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13748082U priority Critical patent/JPS5941967U/ja
Publication of JPS5941967U publication Critical patent/JPS5941967U/ja
Application granted granted Critical
Publication of JPH0228605Y2 publication Critical patent/JPH0228605Y2/ja
Granted legal-status Critical Current

Links

JP13748082U 1982-09-09 1982-09-09 走査電子顕微鏡等における試料位置表示装置 Granted JPS5941967U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13748082U JPS5941967U (ja) 1982-09-09 1982-09-09 走査電子顕微鏡等における試料位置表示装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13748082U JPS5941967U (ja) 1982-09-09 1982-09-09 走査電子顕微鏡等における試料位置表示装置

Publications (2)

Publication Number Publication Date
JPS5941967U JPS5941967U (ja) 1984-03-17
JPH0228605Y2 true JPH0228605Y2 (enrdf_load_stackoverflow) 1990-07-31

Family

ID=30308784

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13748082U Granted JPS5941967U (ja) 1982-09-09 1982-09-09 走査電子顕微鏡等における試料位置表示装置

Country Status (1)

Country Link
JP (1) JPS5941967U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9129773B2 (en) 2012-06-08 2015-09-08 Hitachi High-Technologies Corporation Charged particle beam apparatus

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5638755A (en) * 1979-09-05 1981-04-14 Mitsubishi Electric Corp Sample location displaying device

Also Published As

Publication number Publication date
JPS5941967U (ja) 1984-03-17

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