JPH0228139B2 - - Google Patents

Info

Publication number
JPH0228139B2
JPH0228139B2 JP57032926A JP3292682A JPH0228139B2 JP H0228139 B2 JPH0228139 B2 JP H0228139B2 JP 57032926 A JP57032926 A JP 57032926A JP 3292682 A JP3292682 A JP 3292682A JP H0228139 B2 JPH0228139 B2 JP H0228139B2
Authority
JP
Japan
Prior art keywords
photosensitive
film
containing compound
quinonediazide group
solution
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57032926A
Other languages
English (en)
Japanese (ja)
Other versions
JPS58149042A (ja
Inventor
Cho Yamamoto
Hisashi Nakane
Akira Yokota
Takashi Komine
Koichiro Hashimoto
Shozo Toda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP3292682A priority Critical patent/JPS58149042A/ja
Publication of JPS58149042A publication Critical patent/JPS58149042A/ja
Publication of JPH0228139B2 publication Critical patent/JPH0228139B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/0226—Quinonediazides characterised by the non-macromolecular additives

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
JP3292682A 1982-03-02 1982-03-02 ポジ型感光性組成物 Granted JPS58149042A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3292682A JPS58149042A (ja) 1982-03-02 1982-03-02 ポジ型感光性組成物

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3292682A JPS58149042A (ja) 1982-03-02 1982-03-02 ポジ型感光性組成物

Publications (2)

Publication Number Publication Date
JPS58149042A JPS58149042A (ja) 1983-09-05
JPH0228139B2 true JPH0228139B2 (en, 2012) 1990-06-21

Family

ID=12372508

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3292682A Granted JPS58149042A (ja) 1982-03-02 1982-03-02 ポジ型感光性組成物

Country Status (1)

Country Link
JP (1) JPS58149042A (en, 2012)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61219951A (ja) * 1985-03-27 1986-09-30 Japan Synthetic Rubber Co Ltd ポジ型感放射線性組成物
JP2791032B2 (ja) * 1988-03-28 1998-08-27 株式会社東芝 ポジ型レジスト組成物
JPH07207188A (ja) * 1993-12-15 1995-08-08 Minnesota Mining & Mfg Co <3M> 光硬化性組成物
TW546540B (en) 1997-04-30 2003-08-11 Wako Pure Chem Ind Ltd An agent for reducing the substrate dependence of resist and a resist composition

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3661582A (en) * 1970-03-23 1972-05-09 Western Electric Co Additives to positive photoresists which increase the sensitivity thereof
JPS6038863B2 (ja) * 1980-06-22 1985-09-03 フア−イ−ストエンジニアリング株式会社 電解コンデンサの電解液含浸方法及び装置

Also Published As

Publication number Publication date
JPS58149042A (ja) 1983-09-05

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