JPH02273944A - リード付き半導体素子の製造方法 - Google Patents

リード付き半導体素子の製造方法

Info

Publication number
JPH02273944A
JPH02273944A JP1096950A JP9695089A JPH02273944A JP H02273944 A JPH02273944 A JP H02273944A JP 1096950 A JP1096950 A JP 1096950A JP 9695089 A JP9695089 A JP 9695089A JP H02273944 A JPH02273944 A JP H02273944A
Authority
JP
Japan
Prior art keywords
wire
tool
semiconductor element
electrode
cutting part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1096950A
Other languages
English (en)
Other versions
JP2727352B2 (ja
Inventor
Nobuhito Yamazaki
山崎　信人
Akihiro Nishimura
明浩 西村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shinkawa Ltd
Original Assignee
Shinkawa Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shinkawa Ltd filed Critical Shinkawa Ltd
Priority to JP1096950A priority Critical patent/JP2727352B2/ja
Priority to US07/510,035 priority patent/US5056217A/en
Publication of JPH02273944A publication Critical patent/JPH02273944A/ja
Application granted granted Critical
Publication of JP2727352B2 publication Critical patent/JP2727352B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L24/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies
    • H01L24/78—Apparatus for connecting with wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/4501—Shape
    • H01L2224/45012—Cross-sectional shape
    • H01L2224/45014—Ribbon connectors, e.g. rectangular cross-section
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/45001—Core members of the connector
    • H01L2224/45099—Material
    • H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
    • H01L2224/45144—Gold (Au) as principal constituent
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554—Coating
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H01L2224/4554—Coating
    • H01L2224/45599—Material
    • H01L2224/456—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48091—Arched
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805—Shape
    • H01L2224/4809—Loop shape
    • H01L2224/48095—Kinked
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481—Disposition
    • H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484—Connecting portions
    • H01L2224/4847—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond
    • H01L2224/48472—Connecting portions the connecting portion on the bonding area of the semiconductor or solid-state body being a wedge bond the other connecting portion not on the bonding area also being a wedge bond, i.e. wedge-to-wedge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/484—Connecting portions
    • H01L2224/48475—Connecting portions connected to auxiliary connecting means on the bonding areas, e.g. pre-ball, wedge-on-ball, ball-on-ball
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42—Wire connectors; Manufacturing methods related thereto
    • H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H01L2224/491—Disposition
    • H01L2224/4912—Layout
    • H01L2224/49175—Parallel arrangements
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/7825—Means for applying energy, e.g. heating means
    • H01L2224/783—Means for applying energy, e.g. heating means by means of pressure
    • H01L2224/78313—Wedge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/74—Apparatus for manufacturing arrangements for connecting or disconnecting semiconductor or solid-state bodies and for methods related thereto
    • H01L2224/78—Apparatus for connecting with wire connectors
    • H01L2224/787—Means for aligning
    • H01L2224/78743—Suction holding means
    • H01L2224/78744—Suction holding means in the lower part of the bonding apparatus, e.g. in the apparatus chuck
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/85009—Pre-treatment of the connector or the bonding area
    • H01L2224/85051—Forming additional members, e.g. for "wedge-on-ball", "ball-on-wedge", "ball-on-ball" connections
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/8512—Aligning
    • H01L2224/85148—Aligning involving movement of a part of the bonding apparatus
    • H01L2224/85169—Aligning involving movement of a part of the bonding apparatus being the upper part of the bonding apparatus, i.e. bonding head, e.g. capillary or wedge
    • H01L2224/8518—Translational movements
    • H01L2224/85181—Translational movements connecting first on the semiconductor or solid-state body, i.e. on-chip, regular stitch
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
    • H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
    • H01L2224/852—Applying energy for connecting
    • H01L2224/85201—Compression bonding
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
    • H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
    • H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L24/42—Wire connectors; Manufacturing methods related thereto
    • H01L24/47—Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L24/49—Structure, shape, material or disposition of the wire connectors after the connecting process of a plurality of wire connectors
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01005—Boron [B]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01006—Carbon [C]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01033—Arsenic [As]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01079—Gold [Au]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/01—Chemical elements
    • H01L2924/01082—Lead [Pb]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/1515—Shape
    • H01L2924/15153—Shape the die mounting substrate comprising a recess for hosting the device
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15—Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151—Die mounting substrate
    • H01L2924/15165—Monolayer substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/30—Technical effects
    • H01L2924/301—Electrical effects
    • H01L2924/30107—Inductance
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49121—Beam lead frame or beam lead device
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T29/00—Metal working
    • Y10T29/49—Method of mechanical manufacture
    • Y10T29/49002—Electrical device making
    • Y10T29/49117—Conductor or circuit manufacturing
    • Y10T29/49174—Assembling terminal to elongated conductor
    • Y10T29/49179—Assembling terminal to elongated conductor by metal fusion bonding

Landscapes

  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Wire Bonding (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 ［産業上の利用分野］ 本発明はリード付き半導体素子の製造方法に関する。
［従来の技術］ 従来、リード付き半導体素子は、第３図の方法によって
製造される。同図（ａ）に示すように、タブテープ１に
形成されたり−ド２を半導体素子３の電極４に接合した
後、同図（ｂ）に示すようにリード２をフォーミング及
び切断してタブテープ１より分離する。これにより、リ
ード付き半導体素子５が得られる。
なお、第３図（ａ）に示すようにタブテープｌに設けら
れたり−ド２を半導体素子３に接合する方法としては、
例えば特開昭４６−２１０９号公報、特開昭５９−１１
０１２８号公報が知られている。
［発明が解決しようとする課題］ 上記従来技術は、タブテープ１に予めリード２を形成し
ておく必要があり、タブテープｌは無駄なものとなり、
材料的にコスト高となる。またタブテープ１へのリード
形成工程、フォーミング及び切断工程が必要であり、多
くの工程を経て製造され、また設備費用がかかること等
により、この点からもコスト高になる。
本発明の目的は、大幅なコスト低減が図れるリード付き
半導体素子の製造方法を提供することにある。
［課題を解決するための手段］ 上記目的は、半導体素子を基台に位置決め保持し、ツー
ルの下面に延在したワイヤを該ツールで前記電極に押圧
して接合し、その後ワイヤの繰り出し動作を伴なってツ
ールを前記基台のワイヤ切断部上に移動させてワイヤを
該ワイヤ切断部に押し付け、その後ワイヤを切断するこ
とにより、半導体素子の電極にワイヤよりなるリードを
形成することにより達成される。
［作用］ 上記手段によれば、ワイヤ（リード）自体がツールによ
って半導体素子の電極に接合される。このため、従来の
ようにリードを予めタブテープに形成する必要がなく、
またフォーミング及び切断工程も必要ない。
［実施例］ 以下、本発明の一実施例を第１図及び第２図により説明
する。半導体素子３を位置決め保持する基台６には、半
導体素子３を吸着保持する真空吸着穴６ａとワイヤ切断
部６ｂとが形成されている０図示しないスプールに巻回
されたワイヤ７の先端は、図示しないワイヤガイド及び
クランパ８を通ってツール９の下面下方に一定量延在し
ている。前記ワイヤ７は断面が長方形又は正方形のリボ
ン状となっている。そこで、第１図（ａ）に示す状態よ
りツール９が半導体素子３の電極４の上方より下降し、
同図（ｂ）に示すようにワイヤ７を電極４に押圧して接
合する。
次に同図（Ｃ）に示すようにクランパ８が開き、ツール
９が上昇すると共にワイヤ７が繰り出される。そして、
ツール９は同図（ｄ）（ｅ）の動作を伴なって基台６の
ワイヤ切断部６ｂ上に下降し、ワイヤ７をワイヤ切断部
６ｂに押し付ける。この状態でクランパ８が閉じ、同図
（ｆ）に示すようにクランパ８を斜め上方に上昇させる
と、ワイヤ７は引っ張られてツール９の根元部より切断
される０次に同図（ｇ）に示すように、ツール９は上昇
し、またクランパ８は開、上昇、閉、下降の動作を行っ
てワイヤ７の先端はツール９の下面下方に延在される。
その後、ツール９゜ワイヤ７及びクランパ８はこの状態
を保って同図（Ｌ）に示すように次に接合する電極４上
の上方に位置させられる。
半導体素子３の一辺に形成された電極４については前記
一連の動作を順次繰り返してワイヤ７を接合する０例え
ば、第２図に示す一辺の電極群４ａへのワイヤ７の接合
が終了すると、次に他の辺の電極群４ｂにワイヤ７を接
合するために、ツール９が電極群４ｂに合うようにツー
ル９又は基台６が９０”回転させられる。その後は前記
した動作によって電極群４ｂに順次ワイヤ７が接合され
る。電極群４ｂへのワイヤ接合が終了すると、電極群４
Ｃ１４ｄへも同様にワイヤ７が接合される。
これにより、ｓ２図に示すように全ての電極４にワイヤ
７が接合される。その後、基台６の真空を切り、半導体
素子３を取り出すと、第３図（ｂ）に示すリード付き半
導体素子５とほぼ同じ形態のリード付き半導体素子が得
られる。
このように、無駄な材料を用いる必要がなく、また工程
もワイヤボンディング方法で行えるので、工数的及び設
備的にも優れており、大幅なコストダラシが図れる。
なお、本実施例の場合は、基台６のワイヤ切断部６ｂの
高さＨを変えること及びツール９の移動軌跡を変更する
ことにより、半導体素子３に接続されたワイヤ７のフォ
ーミングは様々な形に変更することができる。ところで
、半導体素子３に接続されたワイヤ７は、切断後にその
スプリングバックによって該ワイヤ７の端部が若干上昇
するので、基台６のワイヤ切断部６ｂの高さはそのスプ
リングバック量を見込んで設定するのが好ましい。
またワイヤ７は導電性のものであればその材質は限定さ
れないが、例えばＡｕ線又はＡｕメツキしたものを使用
すると、ツール９の押圧部或は後工程でこのワイヤ７を
押圧する別のツールの押圧面に加熱、加圧時に伴なう酸
化物等の汚れを防止することができる。
またワイヤ７は断面が長方形又は正方形のものに限定さ
れないが、信号伝達時間の速い半導体素子３では、イン
ダクタンスによる信号域を伴なうため、大型のものより
長方形又は正方形の方が優れている。
また本実施例は、ツール９としてウェッジを使用した場
合について説明したが、キャピラリを使用してもよい。
［発明の効果］ 以上の説明から明らかなように１本発明によれば、半導
体素子を基台に位置決め保持し、ツールの下面に延在し
たワイヤを該ツールで前記電極に押圧して接合し、その
後ワイヤの繰り出し動作を伴なってツールを前記基台の
ワイヤ切断部上に移動させてワイヤを該ワイヤ切断部に
押し付け、その後ワイヤを切断することにより、半導体
素子の電極にワイヤよりなるリードを形成するので、大
幅なコスト低減が図れる。
【図面の簡単な説明】
第１図（ａ）乃至（ｇ）は本発明の一実施例を示す動作
説明図、第２図は第１図の方法によって得られたリード
付き半導体素子を示し、（ａ）は平面図、（ｂ）は断面
図、第３図（ａ）（ｂ）は従来の方法を示す説明図であ
る。 ２：リード、　　　　　　３：半導体素子、４：電極、
　　　　　　６：基台、 ６ｂ＝ワイヤ切断部、　　７：ワイヤ、９：ツール。 第１図 （ｂ） （Ｃ） 第２図 （ｄ） （ｅ） （ｆ） ４・ミル ６二基台 ３：手噂体！、キ

Claims (2)

    【特許請求の範囲】
  1. （１）半導体素子の電極にリードを接合する方法におい
    て、半導体素子を基台に位置決め保持し、ツールの下面
    に延在したワイヤを該ツールで前記電極に押圧して接合
    し、その後ワイヤの繰り出し動作を伴なってツールを前
    記基台のワイヤ切断部上に移動させてワイヤを該ワイヤ
    切断部に押し付け、その後ワイヤを切断することにより
    、半導体素子の電極にワイヤよりなるリードを形成する
    ことを特徴とするリード付き半導体素子の製造方法。
  2. （２）前記ワイヤは、断面が長方形又は正方形よりなる
    ことを特徴とする請求項１記載のリード付き半導体素子
    の製造方法。
JP1096950A 1989-04-17 1989-04-17 リード付き半導体素子の製造方法 Expired - Fee Related JP2727352B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP1096950A JP2727352B2 (ja) 1989-04-17 1989-04-17 リード付き半導体素子の製造方法
US07/510,035 US5056217A (en) 1989-04-17 1990-04-16 Method for manufacturing semiconductor elements equipped with leads

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1096950A JP2727352B2 (ja) 1989-04-17 1989-04-17 リード付き半導体素子の製造方法

Publications (2)

Publication Number Publication Date
JPH02273944A true JPH02273944A (ja) 1990-11-08
JP2727352B2 JP2727352B2 (ja) 1998-03-11

Family

ID=14178574

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1096950A Expired - Fee Related JP2727352B2 (ja) 1989-04-17 1989-04-17 リード付き半導体素子の製造方法

Country Status (2)

Country Link
US (1) US5056217A (ja)
JP (1) JP2727352B2 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5152056A (en) * 1991-08-27 1992-10-06 Sun Microsystems, Inc. Method for replacing tape automated bonding components on a printed circuit board
JP2558976B2 (ja) * 1991-11-08 1996-11-27 松下電器産業株式会社 電子部品の電極とリードとの接合方法
US5216803A (en) * 1991-12-11 1993-06-08 Microelectronics And Computer Technology Corporation Method and apparatus for removing bonded connections
KR960011257B1 (ko) * 1993-05-14 1996-08-21 삼성전자 주식회사 번인 소켓 및 이를 사용한 번인 테스트 방법
US5398863A (en) * 1993-07-23 1995-03-21 Tessera, Inc. Shaped lead structure and method
US5735030A (en) * 1996-06-04 1998-04-07 Texas Instruments Incorporated Low loop wire bonding
US6109508A (en) * 1998-03-11 2000-08-29 Texas Instruments Incorporated Fine pitch bonding method using rectangular wire and capillary bore
JP3377748B2 (ja) * 1998-06-25 2003-02-17 株式会社新川 ワイヤボンディング方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5449066A (en) * 1977-09-27 1979-04-18 Nec Corp Semiconductor device
JPS54100256A (en) * 1978-01-24 1979-08-07 Cho Onpa Kogyo Co Device for cutting wire

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3430835A (en) * 1966-06-07 1969-03-04 Westinghouse Electric Corp Wire bonding apparatus for microelectronic components
DE1912315B1 (de) * 1969-03-11 1970-10-08 Kupex Ag Beregnungsvorrichtung
US3673681A (en) * 1969-04-01 1972-07-04 Inforex Electrical circuit board wiring
DE2528806C2 (de) * 1975-06-27 1983-09-15 Texas Instruments Deutschland Gmbh, 8050 Freising Schweißvorrichtung
DE2608250C3 (de) * 1976-02-28 1985-06-05 Telefunken electronic GmbH, 7100 Heilbronn Verfahren zum Thermokompressions-Verbinden von auf Halbleiterkörpern befindlichen Metall-Anschlußkontakten mit zugeordneten Gehäuseanschlußteilen und Vorrichtung zur Durchführung des Verfahrens
JPS63256267A (ja) * 1987-04-10 1988-10-24 Mitsubishi Electric Corp 半田付け方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5449066A (en) * 1977-09-27 1979-04-18 Nec Corp Semiconductor device
JPS54100256A (en) * 1978-01-24 1979-08-07 Cho Onpa Kogyo Co Device for cutting wire

Also Published As

Publication number Publication date
US5056217A (en) 1991-10-15
JP2727352B2 (ja) 1998-03-11

Similar Documents

Publication Publication Date Title
JPS61125062A (ja) ピン取付け方法およびピン取付け装置
JPH02273944A (ja) リード付き半導体素子の製造方法
US5850332A (en) Process for making solid electrolyic capacitor
JPH09148360A (ja) 被覆ワイヤのワイヤボンディング装置及びその方法
JP3049515B2 (ja) ワイヤボンデイング方法
JP3128718B2 (ja) ワイヤボンデイング方法
JPH03289149A (ja) ワイヤボンディング方法
JP3128717B2 (ja) バンプ形成方法
JPS63173345A (ja) バンプ電極形成方法
JPS6052585B2 (ja) ワイヤボンディング法
JPH07106203A (ja) アルミ電解コンデンサの電極箔とリードの接続方法
JP2977990B2 (ja) ワイヤボンディング方法
JPS5925377B2 (ja) ワイヤボンデイング方法
JPS5855665B2 (ja) ワイヤボンデイング方法
KR970007598B1 (ko) 와이어 본딩방법
JP2846095B2 (ja) 半導体装置の製造方法
JPS5914652A (ja) 半導体容器
JPH0394435A (ja) 半導体装置
JPH0346497Y2 (ja)
JPH08758Y2 (ja) インナリードボンダ
JPS633423A (ja) ワイヤボンデイング方法
JPS61133637A (ja) 接続電極の形成方法
JPH08162488A (ja) 電子部品製造方法
JPH0644142U (ja) ワイヤーボンディング装置
JPS6145857B2 (ja)

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees