JPH0222556B2 - - Google Patents
Info
- Publication number
- JPH0222556B2 JPH0222556B2 JP24123084A JP24123084A JPH0222556B2 JP H0222556 B2 JPH0222556 B2 JP H0222556B2 JP 24123084 A JP24123084 A JP 24123084A JP 24123084 A JP24123084 A JP 24123084A JP H0222556 B2 JPH0222556 B2 JP H0222556B2
- Authority
- JP
- Japan
- Prior art keywords
- wiring conductor
- conductor layer
- layer
- wiring
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004020 conductor Substances 0.000 claims description 111
- 239000000758 substrate Substances 0.000 claims description 14
- 238000000034 method Methods 0.000 claims description 13
- 238000004519 manufacturing process Methods 0.000 claims description 12
- 230000015572 biosynthetic process Effects 0.000 claims 1
- 239000010410 layer Substances 0.000 description 106
- 238000010304 firing Methods 0.000 description 8
- 239000011521 glass Substances 0.000 description 7
- SWELZOZIOHGSPA-UHFFFAOYSA-N palladium silver Chemical compound [Pd].[Ag] SWELZOZIOHGSPA-UHFFFAOYSA-N 0.000 description 7
- 238000009413 insulation Methods 0.000 description 4
- 239000010970 precious metal Substances 0.000 description 4
- 238000001035 drying Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 239000006059 cover glass Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000003792 electrolyte Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910001925 ruthenium oxide Inorganic materials 0.000 description 2
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- -1 silver ions Chemical class 0.000 description 1
Landscapes
- Production Of Multi-Layered Print Wiring Board (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24123084A JPS61119096A (ja) | 1984-11-15 | 1984-11-15 | 多層配線基板の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24123084A JPS61119096A (ja) | 1984-11-15 | 1984-11-15 | 多層配線基板の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61119096A JPS61119096A (ja) | 1986-06-06 |
| JPH0222556B2 true JPH0222556B2 (zh) | 1990-05-18 |
Family
ID=17071136
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24123084A Granted JPS61119096A (ja) | 1984-11-15 | 1984-11-15 | 多層配線基板の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61119096A (zh) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6374163B2 (ja) * | 2013-12-27 | 2018-08-15 | 京セラ株式会社 | 圧電発振器 |
| JP6347605B2 (ja) * | 2013-12-27 | 2018-06-27 | 京セラ株式会社 | 圧電発振器 |
| JP6396019B2 (ja) * | 2013-12-27 | 2018-09-26 | 京セラ株式会社 | 圧電発振器の製造方法 |
-
1984
- 1984-11-15 JP JP24123084A patent/JPS61119096A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61119096A (ja) | 1986-06-06 |
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