JPH0214312B2 - - Google Patents

Info

Publication number
JPH0214312B2
JPH0214312B2 JP58213478A JP21347883A JPH0214312B2 JP H0214312 B2 JPH0214312 B2 JP H0214312B2 JP 58213478 A JP58213478 A JP 58213478A JP 21347883 A JP21347883 A JP 21347883A JP H0214312 B2 JPH0214312 B2 JP H0214312B2
Authority
JP
Japan
Prior art keywords
silicon carbide
sintering
sintered body
target material
sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58213478A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60108370A (ja
Inventor
Morinobu Endo
Jinichiro Suzuki
Takashi Tode
Minoru Takamizawa
Yasushi Kobayashi
Tatsuhiko Motomya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin-Etsu Chemical Co Ltd
Original Assignee
Shin-Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin-Etsu Chemical Co Ltd filed Critical Shin-Etsu Chemical Co Ltd
Priority to JP58213478A priority Critical patent/JPS60108370A/ja
Publication of JPS60108370A publication Critical patent/JPS60108370A/ja
Publication of JPH0214312B2 publication Critical patent/JPH0214312B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Ceramic Products (AREA)
JP58213478A 1983-11-14 1983-11-14 高純度炭化けい素スパッタリング用ターゲット材の製造方法 Granted JPS60108370A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58213478A JPS60108370A (ja) 1983-11-14 1983-11-14 高純度炭化けい素スパッタリング用ターゲット材の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58213478A JPS60108370A (ja) 1983-11-14 1983-11-14 高純度炭化けい素スパッタリング用ターゲット材の製造方法

Publications (2)

Publication Number Publication Date
JPS60108370A JPS60108370A (ja) 1985-06-13
JPH0214312B2 true JPH0214312B2 (enExample) 1990-04-06

Family

ID=16639861

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58213478A Granted JPS60108370A (ja) 1983-11-14 1983-11-14 高純度炭化けい素スパッタリング用ターゲット材の製造方法

Country Status (1)

Country Link
JP (1) JPS60108370A (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100487262B1 (ko) * 1996-02-29 2005-09-02 가부시키가이샤 브리지스톤 탄화규소 소결체 및 그의 제조방법
US6090733A (en) 1997-08-27 2000-07-18 Bridgestone Corporation Sintered silicon carbide and method for producing the same
JP5466087B2 (ja) * 2010-06-07 2014-04-09 株式会社ブリヂストン 炭化ケイ素焼結体の製造方法

Also Published As

Publication number Publication date
JPS60108370A (ja) 1985-06-13

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