JPH01317197A - ダイヤモンド薄膜基板およびその製法 - Google Patents

ダイヤモンド薄膜基板およびその製法

Info

Publication number
JPH01317197A
JPH01317197A JP14890388A JP14890388A JPH01317197A JP H01317197 A JPH01317197 A JP H01317197A JP 14890388 A JP14890388 A JP 14890388A JP 14890388 A JP14890388 A JP 14890388A JP H01317197 A JPH01317197 A JP H01317197A
Authority
JP
Japan
Prior art keywords
film
thin film
substrate
diamond thin
diamond
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14890388A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519520B2 (show.php
Inventor
Kenji Yamamoto
憲治 山本
Yoshihisa Owada
善久 太和田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanegafuchi Chemical Industry Co Ltd
Original Assignee
Kanegafuchi Chemical Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanegafuchi Chemical Industry Co Ltd filed Critical Kanegafuchi Chemical Industry Co Ltd
Priority to JP14890388A priority Critical patent/JPH01317197A/ja
Publication of JPH01317197A publication Critical patent/JPH01317197A/ja
Publication of JPH0519520B2 publication Critical patent/JPH0519520B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP14890388A 1988-06-16 1988-06-16 ダイヤモンド薄膜基板およびその製法 Granted JPH01317197A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14890388A JPH01317197A (ja) 1988-06-16 1988-06-16 ダイヤモンド薄膜基板およびその製法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14890388A JPH01317197A (ja) 1988-06-16 1988-06-16 ダイヤモンド薄膜基板およびその製法

Publications (2)

Publication Number Publication Date
JPH01317197A true JPH01317197A (ja) 1989-12-21
JPH0519520B2 JPH0519520B2 (show.php) 1993-03-16

Family

ID=15463247

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14890388A Granted JPH01317197A (ja) 1988-06-16 1988-06-16 ダイヤモンド薄膜基板およびその製法

Country Status (1)

Country Link
JP (1) JPH01317197A (show.php)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02263789A (ja) * 1989-03-31 1990-10-26 Kanagawa Pref Gov ダイヤモンド単結晶膜を有するシリコン基板とその製造方法
JPH04132692A (ja) * 1990-09-25 1992-05-06 Semiconductor Energy Lab Co Ltd ダイヤモンド薄膜とその作製方法
US5144380A (en) * 1989-10-04 1992-09-01 Sumitomo Electric Industries, Ltd. Diamond semiconductor device with a non-doped diamond thin film between a diamond active layer and a substrate
US5260106A (en) * 1990-08-03 1993-11-09 Fujitsu Limited Method for forming diamond films by plasma jet CVD
JPH0864527A (ja) * 1994-05-04 1996-03-08 Daimler Benz Ag 電子部品用複合構造
US5626963A (en) * 1993-07-07 1997-05-06 Sanyo Electric Co., Ltd. Hard-carbon-film-coated substrate and apparatus for forming the same
US5691010A (en) * 1993-10-19 1997-11-25 Sanyo Electric Co., Ltd. Arc discharge plasma CVD method for forming diamond-like carbon films
JPH11255599A (ja) * 1998-03-11 1999-09-21 Kobe Steel Ltd 単結晶ダイヤモンド合成用基板
US6066399A (en) * 1997-03-19 2000-05-23 Sanyo Electric Co., Ltd. Hard carbon thin film and method of forming the same
US6335863B1 (en) * 1998-01-16 2002-01-01 Sumitomo Electric Industries, Ltd. Package for semiconductors, and semiconductor module that employs the package
US6821624B2 (en) * 2000-02-25 2004-11-23 Sumitomo Electric Industries, Ltd. Amorphous carbon covered member
WO2005014886A1 (ja) * 2003-08-07 2005-02-17 Ebara Corporation ダイアモンド電極の成膜方法
JP2006527791A (ja) * 2003-06-16 2006-12-07 コミサリア、ア、レネルジ、アトミク 少なくとも一つの水素含有アモルファスカーボンを含んでなる、機械部品用コーティング、およびコーティングの堆積方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6325662A (ja) * 1986-07-18 1988-02-03 Fuji Electric Co Ltd 電子写真感光体
JPS63138395A (ja) * 1986-12-01 1988-06-10 小糸工業株式会社 情報表示装置
JPS63153275A (ja) * 1986-08-11 1988-06-25 Sumitomo Electric Ind Ltd ダイヤモンド被覆アルミナ

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6325662A (ja) * 1986-07-18 1988-02-03 Fuji Electric Co Ltd 電子写真感光体
JPS63153275A (ja) * 1986-08-11 1988-06-25 Sumitomo Electric Ind Ltd ダイヤモンド被覆アルミナ
JPS63138395A (ja) * 1986-12-01 1988-06-10 小糸工業株式会社 情報表示装置

Cited By (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02263789A (ja) * 1989-03-31 1990-10-26 Kanagawa Pref Gov ダイヤモンド単結晶膜を有するシリコン基板とその製造方法
US5144380A (en) * 1989-10-04 1992-09-01 Sumitomo Electric Industries, Ltd. Diamond semiconductor device with a non-doped diamond thin film between a diamond active layer and a substrate
US5306928A (en) * 1989-10-04 1994-04-26 Sumitomo Electric Industries, Ltd. Diamond semiconductor device having a non-doped diamond layer formed between a BN substrate and an active diamond layer
US5260106A (en) * 1990-08-03 1993-11-09 Fujitsu Limited Method for forming diamond films by plasma jet CVD
US5382293A (en) * 1990-08-03 1995-01-17 Fujitsu Limited Plasma jet CVD apparatus for forming diamond films
JPH04132692A (ja) * 1990-09-25 1992-05-06 Semiconductor Energy Lab Co Ltd ダイヤモンド薄膜とその作製方法
US5695832A (en) * 1993-07-07 1997-12-09 Sanyo Electric Co., Ltd. Method of forming a hard-carbon-film-coated substrate
US5626963A (en) * 1993-07-07 1997-05-06 Sanyo Electric Co., Ltd. Hard-carbon-film-coated substrate and apparatus for forming the same
US5691010A (en) * 1993-10-19 1997-11-25 Sanyo Electric Co., Ltd. Arc discharge plasma CVD method for forming diamond-like carbon films
JPH0864527A (ja) * 1994-05-04 1996-03-08 Daimler Benz Ag 電子部品用複合構造
US5744825A (en) * 1994-05-04 1998-04-28 Daimler-Benz Ag Composite structure for an electronic component comprising a growth substrate, a diamond layer, and an intermediate layer therebetween
US6066399A (en) * 1997-03-19 2000-05-23 Sanyo Electric Co., Ltd. Hard carbon thin film and method of forming the same
US6528115B1 (en) 1997-03-19 2003-03-04 Sanyo Electric Co., Ltd. Hard carbon thin film and method of forming the same
US6335863B1 (en) * 1998-01-16 2002-01-01 Sumitomo Electric Industries, Ltd. Package for semiconductors, and semiconductor module that employs the package
JPH11255599A (ja) * 1998-03-11 1999-09-21 Kobe Steel Ltd 単結晶ダイヤモンド合成用基板
US6821624B2 (en) * 2000-02-25 2004-11-23 Sumitomo Electric Industries, Ltd. Amorphous carbon covered member
JP2006527791A (ja) * 2003-06-16 2006-12-07 コミサリア、ア、レネルジ、アトミク 少なくとも一つの水素含有アモルファスカーボンを含んでなる、機械部品用コーティング、およびコーティングの堆積方法
WO2005014886A1 (ja) * 2003-08-07 2005-02-17 Ebara Corporation ダイアモンド電極の成膜方法

Also Published As

Publication number Publication date
JPH0519520B2 (show.php) 1993-03-16

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