JP2006527791A - 少なくとも一つの水素含有アモルファスカーボンを含んでなる、機械部品用コーティング、およびコーティングの堆積方法 - Google Patents
少なくとも一つの水素含有アモルファスカーボンを含んでなる、機械部品用コーティング、およびコーティングの堆積方法 Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
- C23C28/30—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer
- C23C28/34—Coatings combining at least one metallic layer and at least one inorganic non-metallic layer including at least one inorganic non-metallic material layer, e.g. metal carbide, nitride, boride, silicide layer and their mixtures, enamels, phosphates and sulphates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/02—Pretreatment of the material to be coated
- C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/26—Deposition of carbon only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/32—Carbides
- C23C16/325—Silicon carbide
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/30—Self-sustaining carbon mass or layer with impregnant or other layer
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Inorganic Chemistry (AREA)
- Chemical Vapour Deposition (AREA)
- Carbon And Carbon Compounds (AREA)
- Physical Vapour Deposition (AREA)
Abstract
【解決手段】本発明のコーティングは、機械部品(2)と接触するように意図された水素含有アモルファス炭化ケイ素の第一層(3)、積層構造(4)、および水素含有アモルファスカーボンの外側層(5)を含んでなる。上記の積重構造(4)は、水素含有アモルファスカーボンと水素含有アモルファス炭化ケイ素との交互層(4a、4b)を含んでなる。被覆の総厚は、好ましくは10〜20マイクロメートルである。
Description
水素含有アモルファス炭化ケイ素の第一層、
水素含有アモルファスカーボンと水素含有アモルファス炭化ケイ素との交互層、および
水素含有アモルファスカーボンの外側層
を堆積させる方法により達成される。
Claims (10)
- 少なくとも1つの、水素含有アモルファスカーボンの外側層(5)を含んでなる、機械部品用コーティングであって、前記コーティング(1)が、前記機械部品(2)と接触するように意図された水素含有アモルファス炭化ケイ素の第一層(3)、および、前記第一層(3)と前記外側層(5)との間に配置された、水素含有アモルファスカーボンと水素含有アモルファス炭化ケイ素との交互層(4a、4b)により形成された積層構造(4)から形成される、コーティング。
- 前記コーティング(1)の総厚が10〜20マイクロメートルである、請求項1に記載のコーティング。
- 前記第一層(3)の厚さが150〜300ナノメートルである、請求項1または2に記載のコーティング。
- 前記外側層(5)の厚さが0.5〜2マイクロメートルである、請求項1〜3のいずれか一項に記載のコーティング。
- 前記積層構造(4)の水素含有アモルファス炭化ケイ素の各層(4b)の厚さが5〜50ナノメートルである、請求項1〜4のいずれか一項に記載のコーティング。
- 前記積層構造(4)の水素含有アモルファスカーボンの各層(4a)の厚さが10〜150ナノメートルである、請求項1〜5のいずれか一項に記載のコーティング。
- 前記積層構造(4)中の前記層(4a、4b)の数が400〜1000である、請求項1〜6のいずれか一項に記載のコーティング。
- 請求項1〜7のいずれか一項に記載の機械部品(2)用コーティングを堆積させる方法であって、
同じプラズマ強化化学蒸着ケース中で、順次、
水素含有アモルファス炭化ケイ素の第一層(3)、
水素含有アモルファスカーボンと水素含有アモルファス炭化ケイ素との交互層(4a、4b)、および
水素含有アモルファスカーボンの外側層(5)
を堆積させる、方法。 - 各層を堆積させる際の前記ケース中の圧力が0.05ミリバール〜0.5ミリバールである、請求項8に記載の方法。
- 前記機械部品(2)を予め清浄にし、イオンストリッピングを施す、請求項8または9に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0307221A FR2856078B1 (fr) | 2003-06-16 | 2003-06-16 | Revetement pour une piece mecanique comprenant au moins du carbone amorphe hydrogene et procede de depot d'un tel revetement. |
FR03/07221 | 2003-06-16 | ||
PCT/FR2004/001486 WO2004113586A1 (fr) | 2003-06-16 | 2004-06-15 | Revetement pour une piece mecanique comprenant au moins du carbone amorphe hydrogene et procede de depot d’un tel revetement |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2012062046A Division JP2012112047A (ja) | 2003-06-16 | 2012-03-19 | 少なくとも一つの水素含有アモルファスカーボンを含んでなる、機械部品用コーティング、およびコーティングの堆積方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2006527791A true JP2006527791A (ja) | 2006-12-07 |
JP5064027B2 JP5064027B2 (ja) | 2012-10-31 |
Family
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JP2006516294A Expired - Fee Related JP5064027B2 (ja) | 2003-06-16 | 2004-06-15 | 少なくとも一つの水素含有アモルファスカーボンを含んでなる、機械部品用コーティング、およびコーティングの堆積方法 |
JP2012062046A Withdrawn JP2012112047A (ja) | 2003-06-16 | 2012-03-19 | 少なくとも一つの水素含有アモルファスカーボンを含んでなる、機械部品用コーティング、およびコーティングの堆積方法 |
Family Applications After (1)
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JP2012062046A Withdrawn JP2012112047A (ja) | 2003-06-16 | 2012-03-19 | 少なくとも一つの水素含有アモルファスカーボンを含んでなる、機械部品用コーティング、およびコーティングの堆積方法 |
Country Status (9)
Country | Link |
---|---|
US (1) | US7488536B2 (ja) |
EP (1) | EP1636399B1 (ja) |
JP (2) | JP5064027B2 (ja) |
KR (1) | KR20060026042A (ja) |
AT (1) | ATE500349T1 (ja) |
DE (1) | DE602004031609D1 (ja) |
ES (1) | ES2361916T3 (ja) |
FR (1) | FR2856078B1 (ja) |
WO (1) | WO2004113586A1 (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007327350A (ja) * | 2006-06-06 | 2007-12-20 | Tocalo Co Ltd | 真空ポンプ用部材及びその製造方法 |
JP2009544844A (ja) * | 2006-07-26 | 2009-12-17 | ロバート ボッシュ ゲーエムベーハー | コーティング材料を適用する方法及び金属表面のためのコーティング |
JP2015227493A (ja) * | 2014-06-02 | 2015-12-17 | 地方独立行政法人山口県産業技術センター | 複合硬質皮膜部材及びその製造方法 |
Families Citing this family (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7709759B2 (en) * | 2005-07-15 | 2010-05-04 | Abb Research Ltd. | Contact element and a contact arrangement |
FR2896807B1 (fr) * | 2006-01-30 | 2008-03-14 | Eads Ccr Groupement D Interet | Structure multicouche mince, piece la comprenant et son procede de depot |
JP2007327349A (ja) * | 2006-06-06 | 2007-12-20 | Tocalo Co Ltd | 送液ポンプ用部材及びその製造方法 |
US8039096B2 (en) * | 2008-06-30 | 2011-10-18 | Eaton Corporation | Friction- and wear-reducing coating |
US8550792B2 (en) * | 2008-06-30 | 2013-10-08 | Eaton Corporation | Energy conversion device and method of reducing friction therein |
JP5306242B2 (ja) * | 2010-01-12 | 2013-10-02 | 株式会社東芝 | ガス絶縁開閉装置 |
CN102358940B (zh) * | 2011-10-12 | 2014-06-04 | 湖北久之洋红外系统股份有限公司 | 一种在物件基底上沉积抗腐蚀类金刚石薄膜的方法 |
US20150004362A1 (en) * | 2013-07-01 | 2015-01-01 | General Electric Company | Multilayered coatings with diamond-like carbon |
FR3075231B1 (fr) * | 2017-12-18 | 2019-11-15 | Compagnie Generale Des Etablissements Michelin | Sol et dispositif et procedes associes |
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JPH01201820A (ja) * | 1988-02-05 | 1989-08-14 | Idemitsu Petrochem Co Ltd | 磁気記録媒体 |
JPH01317197A (ja) * | 1988-06-16 | 1989-12-21 | Kanegafuchi Chem Ind Co Ltd | ダイヤモンド薄膜基板およびその製法 |
JPH02305095A (ja) * | 1989-05-18 | 1990-12-18 | Yamaha Corp | スピーカー振動板 |
JPH04158298A (ja) * | 1990-10-22 | 1992-06-01 | Toshiba Ceramics Co Ltd | シンクロトロン放射光用反射ミラー |
JPH0565625A (ja) * | 1991-09-04 | 1993-03-19 | Sumitomo Electric Ind Ltd | 硬質炭素積層膜 |
JPH06148908A (ja) * | 1992-11-11 | 1994-05-27 | Fuji Xerox Co Ltd | 静電荷像担持用誘電体部材 |
JPH07228962A (ja) * | 1994-02-21 | 1995-08-29 | Kyocera Corp | 硬質層被覆部材 |
JPH11100671A (ja) * | 1997-09-25 | 1999-04-13 | Sanyo Electric Co Ltd | 硬質炭素系被膜 |
JP2000178738A (ja) * | 1998-12-15 | 2000-06-27 | Tdk Corp | ダイヤモンド状炭素膜を被覆した部材 |
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US5900289A (en) * | 1995-11-29 | 1999-05-04 | Antec Angewandte Neue Technologien Gmbh | Method of producing a colorating coating |
US20020032073A1 (en) * | 1998-02-11 | 2002-03-14 | Joseph J. Rogers | Highly durable and abrasion resistant composite diamond-like carbon decorative coatings with controllable color for metal substrates |
US6545809B1 (en) * | 1999-10-20 | 2003-04-08 | Flex Products, Inc. | Color shifting carbon-containing interference pigments |
-
2003
- 2003-06-16 FR FR0307221A patent/FR2856078B1/fr not_active Expired - Fee Related
-
2004
- 2004-06-15 JP JP2006516294A patent/JP5064027B2/ja not_active Expired - Fee Related
- 2004-06-15 WO PCT/FR2004/001486 patent/WO2004113586A1/fr active Application Filing
- 2004-06-15 AT AT04767349T patent/ATE500349T1/de not_active IP Right Cessation
- 2004-06-15 ES ES04767349T patent/ES2361916T3/es not_active Expired - Lifetime
- 2004-06-15 US US10/560,776 patent/US7488536B2/en not_active Expired - Fee Related
- 2004-06-15 EP EP04767349A patent/EP1636399B1/fr not_active Expired - Lifetime
- 2004-06-15 KR KR1020057023659A patent/KR20060026042A/ko not_active Application Discontinuation
- 2004-06-15 DE DE602004031609T patent/DE602004031609D1/de not_active Expired - Lifetime
-
2012
- 2012-03-19 JP JP2012062046A patent/JP2012112047A/ja not_active Withdrawn
Patent Citations (10)
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JPS6325662A (ja) * | 1986-07-18 | 1988-02-03 | Fuji Electric Co Ltd | 電子写真感光体 |
JPH01201820A (ja) * | 1988-02-05 | 1989-08-14 | Idemitsu Petrochem Co Ltd | 磁気記録媒体 |
JPH01317197A (ja) * | 1988-06-16 | 1989-12-21 | Kanegafuchi Chem Ind Co Ltd | ダイヤモンド薄膜基板およびその製法 |
JPH02305095A (ja) * | 1989-05-18 | 1990-12-18 | Yamaha Corp | スピーカー振動板 |
JPH04158298A (ja) * | 1990-10-22 | 1992-06-01 | Toshiba Ceramics Co Ltd | シンクロトロン放射光用反射ミラー |
JPH0565625A (ja) * | 1991-09-04 | 1993-03-19 | Sumitomo Electric Ind Ltd | 硬質炭素積層膜 |
JPH06148908A (ja) * | 1992-11-11 | 1994-05-27 | Fuji Xerox Co Ltd | 静電荷像担持用誘電体部材 |
JPH07228962A (ja) * | 1994-02-21 | 1995-08-29 | Kyocera Corp | 硬質層被覆部材 |
JPH11100671A (ja) * | 1997-09-25 | 1999-04-13 | Sanyo Electric Co Ltd | 硬質炭素系被膜 |
JP2000178738A (ja) * | 1998-12-15 | 2000-06-27 | Tdk Corp | ダイヤモンド状炭素膜を被覆した部材 |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007327350A (ja) * | 2006-06-06 | 2007-12-20 | Tocalo Co Ltd | 真空ポンプ用部材及びその製造方法 |
JP2009544844A (ja) * | 2006-07-26 | 2009-12-17 | ロバート ボッシュ ゲーエムベーハー | コーティング材料を適用する方法及び金属表面のためのコーティング |
JP2015227493A (ja) * | 2014-06-02 | 2015-12-17 | 地方独立行政法人山口県産業技術センター | 複合硬質皮膜部材及びその製造方法 |
Also Published As
Publication number | Publication date |
---|---|
FR2856078A1 (fr) | 2004-12-17 |
EP1636399B1 (fr) | 2011-03-02 |
JP5064027B2 (ja) | 2012-10-31 |
FR2856078B1 (fr) | 2006-11-17 |
EP1636399A1 (fr) | 2006-03-22 |
US20060134424A1 (en) | 2006-06-22 |
DE602004031609D1 (de) | 2011-04-14 |
ES2361916T3 (es) | 2011-06-24 |
ATE500349T1 (de) | 2011-03-15 |
US7488536B2 (en) | 2009-02-10 |
WO2004113586A1 (fr) | 2004-12-29 |
JP2012112047A (ja) | 2012-06-14 |
KR20060026042A (ko) | 2006-03-22 |
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