JPH0130422Y2 - - Google Patents
Info
- Publication number
- JPH0130422Y2 JPH0130422Y2 JP8314784U JP8314784U JPH0130422Y2 JP H0130422 Y2 JPH0130422 Y2 JP H0130422Y2 JP 8314784 U JP8314784 U JP 8314784U JP 8314784 U JP8314784 U JP 8314784U JP H0130422 Y2 JPH0130422 Y2 JP H0130422Y2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- reversing
- shaft
- reversing shaft
- stopper
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 73
- 239000007788 liquid Substances 0.000 description 7
- 238000000034 method Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 3
- 238000001035 drying Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000003213 activating effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
Landscapes
- Attitude Control For Articles On Conveyors (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Registering Or Overturning Sheets (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8314784U JPS60195829U (ja) | 1984-06-04 | 1984-06-04 | 基板反転装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8314784U JPS60195829U (ja) | 1984-06-04 | 1984-06-04 | 基板反転装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60195829U JPS60195829U (ja) | 1985-12-27 |
JPH0130422Y2 true JPH0130422Y2 ( ) | 1989-09-18 |
Family
ID=30631509
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8314784U Granted JPS60195829U (ja) | 1984-06-04 | 1984-06-04 | 基板反転装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60195829U ( ) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH053477Y2 ( ) * | 1986-05-08 | 1993-01-27 | ||
JP2521318Y2 (ja) * | 1993-12-10 | 1996-12-25 | 東京エレクトロン 株式会社 | 搬送装置 |
-
1984
- 1984-06-04 JP JP8314784U patent/JPS60195829U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS60195829U (ja) | 1985-12-27 |
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