JPS60195829U - 基板反転装置 - Google Patents
基板反転装置Info
- Publication number
- JPS60195829U JPS60195829U JP8314784U JP8314784U JPS60195829U JP S60195829 U JPS60195829 U JP S60195829U JP 8314784 U JP8314784 U JP 8314784U JP 8314784 U JP8314784 U JP 8314784U JP S60195829 U JPS60195829 U JP S60195829U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- board
- utility
- substrate reversing
- reversing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Attitude Control For Articles On Conveyors (AREA)
- Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
- Registering Or Overturning Sheets (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8314784U JPS60195829U (ja) | 1984-06-04 | 1984-06-04 | 基板反転装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8314784U JPS60195829U (ja) | 1984-06-04 | 1984-06-04 | 基板反転装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60195829U true JPS60195829U (ja) | 1985-12-27 |
JPH0130422Y2 JPH0130422Y2 ( ) | 1989-09-18 |
Family
ID=30631509
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8314784U Granted JPS60195829U (ja) | 1984-06-04 | 1984-06-04 | 基板反転装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60195829U ( ) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62181540U ( ) * | 1986-05-08 | 1987-11-18 | ||
JPH073138U (ja) * | 1993-12-10 | 1995-01-17 | 東京エレクトロン株式会社 | 半導体ウエハの搬送装置 |
-
1984
- 1984-06-04 JP JP8314784U patent/JPS60195829U/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62181540U ( ) * | 1986-05-08 | 1987-11-18 | ||
JPH073138U (ja) * | 1993-12-10 | 1995-01-17 | 東京エレクトロン株式会社 | 半導体ウエハの搬送装置 |
Also Published As
Publication number | Publication date |
---|---|
JPH0130422Y2 ( ) | 1989-09-18 |
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