JPS60195829U - Substrate reversing device - Google Patents
Substrate reversing deviceInfo
- Publication number
- JPS60195829U JPS60195829U JP8314784U JP8314784U JPS60195829U JP S60195829 U JPS60195829 U JP S60195829U JP 8314784 U JP8314784 U JP 8314784U JP 8314784 U JP8314784 U JP 8314784U JP S60195829 U JPS60195829 U JP S60195829U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- board
- utility
- substrate reversing
- reversing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
第１図と本煮案の実施例の斜視図、第２図は第１図の一
部破断要部図、第３図は第２図のＡ〜Ａ視断面断面図４
図は第３図の要部斜視図、第５図は第３図の別の実施例
断面図、第６図゛は従来例の模型図、第７図は他の従来
例の模型図を示す。 −１・・・基板、２・
・・基板反転用軸、３・・・長孔、９・・・ローイレ、
１１・・・ストッパー。Fig. 1 is a perspective view of the embodiment of the main boiling plan, Fig. 2 is a partially broken main part view of Fig. 1, and Fig. 3 is a sectional view 4 taken from A to A in Fig. 2.
The figure is a perspective view of the main part of Figure 3, Figure 5 is a sectional view of another embodiment of Figure 3, Figure 6 is a model diagram of a conventional example, and Figure 7 is a model diagram of another conventional example. . -1... board, 2...
...Axle for board reversal, 3...Long hole, 9...Roile,
11...Stopper.
Claims (1)
軸線方向に前記基板を通過させる長孔を透設し、軸線回
りに回転可能に支承された基板反転用軸と、前記反転用
軸の端部に、軸線方向に移動可能に嵌装され、前記基板
の通過に際し基板前縁の少な（とも端部に当接して通過
を制止する位置と、その外方で基板に当接しない位置と
に移動するストッパーと、前記長孔に基板前縁部が挿入
された状態で、前記反転用軸を約１８０度回転させる回
転駆動装置とを備えてなる基板反転・、（２）”？’）
↓ｔ＜−４＠’ＡＷｍｒｔ＝□３１７．ユ父保持される
溝を刻設した実用新案登録請求の範囲第（１）項に記載
の基板反転装置。 （３） 基板反転用軸の少なくとも一端に、基板の側
縁部を支持する支持腕を固設した実用新案登録請＊の範
囲第（１）項または第（２）項に記載の基板反転装置。[Claims for Utility Model Registration] 1.(1) Installed across the transport path of the substrate to be reversed
A substrate reversing shaft is provided with a long hole through which the substrate passes in the axial direction, and is rotatably supported around the axis; When the board passes, there is a stopper that moves to a position where the front edge of the board contacts the edge of the board and stops the board from passing, and a position outside of the stopper where it does not contact the board; and a rotation drive device that rotates the reversing shaft approximately 180 degrees in the inserted state. (2) "?')
↓t<-4@'AWmrt=□317. The substrate reversing device according to claim (1), which is registered as a utility model, is provided with grooves for holding the substrate. (3) The substrate reversing device according to paragraph (1) or (2) of the utility model registration request, wherein a support arm for supporting the side edge of the substrate is fixed to at least one end of the substrate reversing shaft. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8314784U JPS60195829U (en) | 1984-06-04 | 1984-06-04 | Substrate reversing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8314784U JPS60195829U (en) | 1984-06-04 | 1984-06-04 | Substrate reversing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60195829U true JPS60195829U (en) | 1985-12-27 |
| JPH0130422Y2 JPH0130422Y2 (en) | 1989-09-18 |
Family
ID=30631509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8314784U Granted JPS60195829U (en) | 1984-06-04 | 1984-06-04 | Substrate reversing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60195829U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62181540U (en) * | 1986-05-08 | 1987-11-18 | ||
| JPH073138U (en) * | 1993-12-10 | 1995-01-17 | 東京エレクトロン株式会社 | Semiconductor wafer transfer device |
-
1984
- 1984-06-04 JP JP8314784U patent/JPS60195829U/en active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62181540U (en) * | 1986-05-08 | 1987-11-18 | ||
| JPH073138U (en) * | 1993-12-10 | 1995-01-17 | 東京エレクトロン株式会社 | Semiconductor wafer transfer device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0130422Y2 (en) | 1989-09-18 |
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