JPH01282834A - ウェハ移載用の吸着ハンド - Google Patents
ウェハ移載用の吸着ハンドInfo
- Publication number
- JPH01282834A JPH01282834A JP63112264A JP11226488A JPH01282834A JP H01282834 A JPH01282834 A JP H01282834A JP 63112264 A JP63112264 A JP 63112264A JP 11226488 A JP11226488 A JP 11226488A JP H01282834 A JPH01282834 A JP H01282834A
- Authority
- JP
- Japan
- Prior art keywords
- suction
- wafer
- hand
- suction plate
- pressing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000001105 regulatory effect Effects 0.000 claims abstract description 10
- 238000003825 pressing Methods 0.000 claims description 47
- 239000003463 adsorbent Substances 0.000 claims description 12
- 238000001514 detection method Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 abstract description 69
- 238000000034 method Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 description 4
- 238000001179 sorption measurement Methods 0.000 description 4
- 230000001629 suppression Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 238000005019 vapor deposition process Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63112264A JPH01282834A (ja) | 1988-05-09 | 1988-05-09 | ウェハ移載用の吸着ハンド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63112264A JPH01282834A (ja) | 1988-05-09 | 1988-05-09 | ウェハ移載用の吸着ハンド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01282834A true JPH01282834A (ja) | 1989-11-14 |
| JPH0566021B2 JPH0566021B2 (enrdf_load_stackoverflow) | 1993-09-20 |
Family
ID=14582351
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63112264A Granted JPH01282834A (ja) | 1988-05-09 | 1988-05-09 | ウェハ移載用の吸着ハンド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01282834A (enrdf_load_stackoverflow) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02291144A (ja) * | 1989-05-01 | 1990-11-30 | Nidek Co Ltd | ウェーハ搬送装置 |
| JPH04247638A (ja) * | 1991-02-04 | 1992-09-03 | Nippon Telegr & Teleph Corp <Ntt> | 着脱移送装置 |
| JP2007329506A (ja) * | 2003-03-31 | 2007-12-20 | Asml Netherlands Bv | 支持構造体、リソグラフィ投影装置、およびデバイス製造方法 |
-
1988
- 1988-05-09 JP JP63112264A patent/JPH01282834A/ja active Granted
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02291144A (ja) * | 1989-05-01 | 1990-11-30 | Nidek Co Ltd | ウェーハ搬送装置 |
| JPH04247638A (ja) * | 1991-02-04 | 1992-09-03 | Nippon Telegr & Teleph Corp <Ntt> | 着脱移送装置 |
| JP2007329506A (ja) * | 2003-03-31 | 2007-12-20 | Asml Netherlands Bv | 支持構造体、リソグラフィ投影装置、およびデバイス製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0566021B2 (enrdf_load_stackoverflow) | 1993-09-20 |
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