JPH0121626B2 - - Google Patents

Info

Publication number
JPH0121626B2
JPH0121626B2 JP62311980A JP31198087A JPH0121626B2 JP H0121626 B2 JPH0121626 B2 JP H0121626B2 JP 62311980 A JP62311980 A JP 62311980A JP 31198087 A JP31198087 A JP 31198087A JP H0121626 B2 JPH0121626 B2 JP H0121626B2
Authority
JP
Japan
Prior art keywords
wiring
glass layer
film
sog
layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP62311980A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63158853A (ja
Inventor
Takahiko Takahashi
Akio Anzai
Kensuke Nakada
Choshi Kamata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP31198087A priority Critical patent/JPS63158853A/ja
Publication of JPS63158853A publication Critical patent/JPS63158853A/ja
Publication of JPH0121626B2 publication Critical patent/JPH0121626B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP31198087A 1987-12-11 1987-12-11 多層配線形成法 Granted JPS63158853A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP31198087A JPS63158853A (ja) 1987-12-11 1987-12-11 多層配線形成法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP31198087A JPS63158853A (ja) 1987-12-11 1987-12-11 多層配線形成法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP10912379A Division JPS5633899A (en) 1979-08-29 1979-08-29 Method of forming multilayer wire

Publications (2)

Publication Number Publication Date
JPS63158853A JPS63158853A (ja) 1988-07-01
JPH0121626B2 true JPH0121626B2 (enrdf_load_stackoverflow) 1989-04-21

Family

ID=18023753

Family Applications (1)

Application Number Title Priority Date Filing Date
JP31198087A Granted JPS63158853A (ja) 1987-12-11 1987-12-11 多層配線形成法

Country Status (1)

Country Link
JP (1) JPS63158853A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100314806B1 (ko) 1998-10-29 2002-02-19 박종섭 스핀온글래스막형성방법

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5133575A (en) * 1974-09-17 1976-03-22 Nippon Telegraph & Telephone Tasohaisenkozo
JPS5214365A (en) * 1975-07-25 1977-02-03 Hitachi Ltd Process for formation of insulating membrane by spreading

Also Published As

Publication number Publication date
JPS63158853A (ja) 1988-07-01

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