JPH01121164A - 微粉研摩材 - Google Patents

微粉研摩材

Info

Publication number
JPH01121164A
JPH01121164A JP62280243A JP28024387A JPH01121164A JP H01121164 A JPH01121164 A JP H01121164A JP 62280243 A JP62280243 A JP 62280243A JP 28024387 A JP28024387 A JP 28024387A JP H01121164 A JPH01121164 A JP H01121164A
Authority
JP
Japan
Prior art keywords
fine powder
weight
powder
particle size
less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62280243A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0424187B2 (enrdf_load_stackoverflow
Inventor
Kunihiko Takahashi
邦彦 高橋
Koichi Matsumoto
松本　孝一
Isao Terajima
功 寺島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Chemical Co Ltd
Original Assignee
Shin Etsu Chemical Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Chemical Co Ltd filed Critical Shin Etsu Chemical Co Ltd
Priority to JP62280243A priority Critical patent/JPH01121164A/ja
Publication of JPH01121164A publication Critical patent/JPH01121164A/ja
Publication of JPH0424187B2 publication Critical patent/JPH0424187B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Compositions Of Oxide Ceramics (AREA)
JP62280243A 1987-11-05 1987-11-05 微粉研摩材 Granted JPH01121164A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62280243A JPH01121164A (ja) 1987-11-05 1987-11-05 微粉研摩材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62280243A JPH01121164A (ja) 1987-11-05 1987-11-05 微粉研摩材

Publications (2)

Publication Number Publication Date
JPH01121164A true JPH01121164A (ja) 1989-05-12
JPH0424187B2 JPH0424187B2 (enrdf_load_stackoverflow) 1992-04-24

Family

ID=17622292

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62280243A Granted JPH01121164A (ja) 1987-11-05 1987-11-05 微粉研摩材

Country Status (1)

Country Link
JP (1) JPH01121164A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03220810A (ja) * 1990-01-25 1991-09-30 Shin Etsu Chem Co Ltd 圧電体単結晶ウエーハおよびその製造方法
US5527370A (en) * 1994-04-15 1996-06-18 Fujimi Incorporated Lapping composition
WO2013141225A1 (ja) * 2012-03-19 2013-09-26 株式会社 フジミインコーポレーテッド ラッピング加工用研磨材およびそれを用いた基板の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03220810A (ja) * 1990-01-25 1991-09-30 Shin Etsu Chem Co Ltd 圧電体単結晶ウエーハおよびその製造方法
US5527370A (en) * 1994-04-15 1996-06-18 Fujimi Incorporated Lapping composition
WO2013141225A1 (ja) * 2012-03-19 2013-09-26 株式会社 フジミインコーポレーテッド ラッピング加工用研磨材およびそれを用いた基板の製造方法

Also Published As

Publication number Publication date
JPH0424187B2 (enrdf_load_stackoverflow) 1992-04-24

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