JPH0424187B2 - - Google Patents
Info
- Publication number
- JPH0424187B2 JPH0424187B2 JP62280243A JP28024387A JPH0424187B2 JP H0424187 B2 JPH0424187 B2 JP H0424187B2 JP 62280243 A JP62280243 A JP 62280243A JP 28024387 A JP28024387 A JP 28024387A JP H0424187 B2 JPH0424187 B2 JP H0424187B2
- Authority
- JP
- Japan
- Prior art keywords
- weight
- particle size
- particles
- abrasive
- fine powder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000002245 particle Substances 0.000 claims description 27
- 239000000843 powder Substances 0.000 claims description 11
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 6
- 238000009826 distribution Methods 0.000 claims description 6
- 229910052845 zircon Inorganic materials 0.000 claims description 6
- GFQYVLUOOAAOGM-UHFFFAOYSA-N zirconium(iv) silicate Chemical compound [Zr+4].[O-][Si]([O-])([O-])[O-] GFQYVLUOOAAOGM-UHFFFAOYSA-N 0.000 claims description 6
- 239000003082 abrasive agent Substances 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 3
- 238000005498 polishing Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229910006501 ZrSiO Inorganic materials 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 239000002002 slurry Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Compositions Of Oxide Ceramics (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62280243A JPH01121164A (ja) | 1987-11-05 | 1987-11-05 | 微粉研摩材 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62280243A JPH01121164A (ja) | 1987-11-05 | 1987-11-05 | 微粉研摩材 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01121164A JPH01121164A (ja) | 1989-05-12 |
| JPH0424187B2 true JPH0424187B2 (enrdf_load_stackoverflow) | 1992-04-24 |
Family
ID=17622292
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62280243A Granted JPH01121164A (ja) | 1987-11-05 | 1987-11-05 | 微粉研摩材 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01121164A (enrdf_load_stackoverflow) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03220810A (ja) * | 1990-01-25 | 1991-09-30 | Shin Etsu Chem Co Ltd | 圧電体単結晶ウエーハおよびその製造方法 |
| JP3416855B2 (ja) * | 1994-04-15 | 2003-06-16 | 株式会社フジミインコーポレーテッド | 研磨用組成物および研磨方法 |
| TWI547552B (zh) * | 2012-03-19 | 2016-09-01 | 福吉米股份有限公司 | 硏光加工用硏磨材及使用此之基板的製造方法 |
-
1987
- 1987-11-05 JP JP62280243A patent/JPH01121164A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01121164A (ja) | 1989-05-12 |
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