JP7806814B2 - ジョセフソン素子、超伝導回路、量子演算装置及びジョセフソン素子の製造方法 - Google Patents

ジョセフソン素子、超伝導回路、量子演算装置及びジョセフソン素子の製造方法

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Publication number
JP7806814B2
JP7806814B2 JP2023575022A JP2023575022A JP7806814B2 JP 7806814 B2 JP7806814 B2 JP 7806814B2 JP 2023575022 A JP2023575022 A JP 2023575022A JP 2023575022 A JP2023575022 A JP 2023575022A JP 7806814 B2 JP7806814 B2 JP 7806814B2
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Prior art keywords
metal layer
superconducting metal
superconducting
substrate
layer
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JP2023575022A
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Japanese (ja)
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JPWO2023139779A1 (https=
JPWO2023139779A5 (https=
Inventor
剛 高橋
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Fujitsu Ltd
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Fujitsu Ltd
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06N—COMPUTING ARRANGEMENTS BASED ON SPECIFIC COMPUTATIONAL MODELS
    • G06N10/00—Quantum computing, i.e. information processing based on quantum-mechanical phenomena
    • G06N10/40—Physical realisations or architectures of quantum processors or components for manipulating qubits, e.g. qubit coupling or qubit control
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/10—Junction-based devices
    • H10N60/12—Josephson-effect devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/80—Constructional details
    • H10N60/805—Constructional details for Josephson-effect devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/80—Constructional details
    • H10N60/85—Superconducting active materials

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  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Mathematical Analysis (AREA)
  • Evolutionary Computation (AREA)
  • Data Mining & Analysis (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Mathematical Optimization (AREA)
  • Pure & Applied Mathematics (AREA)
  • Computing Systems (AREA)
  • General Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Software Systems (AREA)
  • Computational Mathematics (AREA)
  • Artificial Intelligence (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP2023575022A 2022-01-24 2022-01-24 ジョセフソン素子、超伝導回路、量子演算装置及びジョセフソン素子の製造方法 Active JP7806814B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/002371 WO2023139779A1 (ja) 2022-01-24 2022-01-24 ジョセフソン素子、超伝導回路、量子演算装置及びジョセフソン素子の製造方法

Publications (3)

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JPWO2023139779A1 JPWO2023139779A1 (https=) 2023-07-27
JPWO2023139779A5 JPWO2023139779A5 (https=) 2024-10-02
JP7806814B2 true JP7806814B2 (ja) 2026-01-27

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JP2023575022A Active JP7806814B2 (ja) 2022-01-24 2022-01-24 ジョセフソン素子、超伝導回路、量子演算装置及びジョセフソン素子の製造方法

Country Status (4)

Country Link
US (1) US20240431216A1 (https=)
EP (1) EP4471830B1 (https=)
JP (1) JP7806814B2 (https=)
WO (1) WO2023139779A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116940217A (zh) 2022-03-29 2023-10-24 腾讯科技（深圳）有限公司 约瑟夫森结制备方法及生产线设备
JP2025149087A (ja) * 2024-03-26 2025-10-08 富士通株式会社 ジョセフソン素子、量子ビット、及びジョセフソン素子の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160093790A1 (en) 2014-09-26 2016-03-31 International Business Machines Corporation Diamond substrates for superconducting quantum circuits
JP2020535461A (ja) 2017-09-18 2020-12-03 グーグル エルエルシー ２段階成膜プロセスにおける接合抵抗の変動の低減

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02288403A (ja) 1989-04-27 1990-11-28 Nec Corp 超伝導モノリシック集積回路およびその製造方法
JPH03190289A (ja) * 1989-12-20 1991-08-20 Fujitsu Ltd ジョセフソン接合素子及びその製造方法
JP2827572B2 (ja) * 1991-05-24 1998-11-25 日本電気株式会社 層状超伝導体回路とその製造方法
JPH05102547A (ja) * 1991-05-30 1993-04-23 Fujitsu Ltd ジヨセフソン集積回路装置の製造方法
JPH05243628A (ja) * 1992-02-28 1993-09-21 Fujitsu Ltd ジョセフソン接合素子及びその製造方法
JPH05315659A (ja) 1992-05-06 1993-11-26 Nippon Steel Corp 放射線検出素子
US7060508B2 (en) 2003-02-12 2006-06-13 Northrop Grumman Corporation Self-aligned junction passivation for superconductor integrated circuit
US7615385B2 (en) * 2006-09-20 2009-11-10 Hypres, Inc Double-masking technique for increasing fabrication yield in superconducting electronics
US9177814B2 (en) 2013-03-15 2015-11-03 International Business Machines Corporation Suspended superconducting qubits
WO2019117883A1 (en) * 2017-12-13 2019-06-20 Intel Corporation Qubit devices with josephson junctions fabricated using air bridge or cantilever
US10256392B1 (en) * 2018-03-23 2019-04-09 International Business Machines Corporation Vertical transmon qubit device
CN113921691B (zh) * 2021-12-07 2022-03-18 材料科学姑苏实验室 一种约瑟夫森结、约瑟夫森结阵列、其制备方法和用途

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20160093790A1 (en) 2014-09-26 2016-03-31 International Business Machines Corporation Diamond substrates for superconducting quantum circuits
JP2020535461A (ja) 2017-09-18 2020-12-03 グーグル エルエルシー ２段階成膜プロセスにおける接合抵抗の変動の低減

Also Published As

Publication number Publication date
JPWO2023139779A1 (https=) 2023-07-27
US20240431216A1 (en) 2024-12-26
EP4471830A1 (en) 2024-12-04
EP4471830B1 (en) 2025-12-10
WO2023139779A1 (ja) 2023-07-27
EP4471830A4 (en) 2025-03-12

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