JP7402715B2 - ウエハを処理する方法 - Google Patents
ウエハを処理する方法 Download PDFInfo
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- JP7402715B2 JP7402715B2 JP2020039233A JP2020039233A JP7402715B2 JP 7402715 B2 JP7402715 B2 JP 7402715B2 JP 2020039233 A JP2020039233 A JP 2020039233A JP 2020039233 A JP2020039233 A JP 2020039233A JP 7402715 B2 JP7402715 B2 JP 7402715B2
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- film
- hard mask
- silicon
- etching
- wafer
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- 238000000034 method Methods 0.000 title claims description 68
- 235000012431 wafers Nutrition 0.000 title description 80
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- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 17
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 3
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- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 8
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 description 8
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- WNUPENMBHHEARK-UHFFFAOYSA-N silicon tungsten Chemical compound [Si].[W] WNUPENMBHHEARK-UHFFFAOYSA-N 0.000 description 2
- 238000003860 storage Methods 0.000 description 2
- 238000001947 vapour-phase growth Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
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- 101150102561 GPA1 gene Proteins 0.000 description 1
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- 101150015163 GPA3 gene Proteins 0.000 description 1
- 101150010789 GPB1 gene Proteins 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- AOWPVIWVMWUSBD-RNFRBKRXSA-N [(3r)-3-hydroxybutyl] (3r)-3-hydroxybutanoate Chemical compound C[C@@H](O)CCOC(=O)C[C@@H](C)O AOWPVIWVMWUSBD-RNFRBKRXSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
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- 150000002148 esters Chemical class 0.000 description 1
- LMRFGCUCLQUNCZ-UHFFFAOYSA-N hydrogen peroxide hydrofluoride Chemical compound F.OO LMRFGCUCLQUNCZ-UHFFFAOYSA-N 0.000 description 1
- 229920001477 hydrophilic polymer Polymers 0.000 description 1
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- 239000012535 impurity Substances 0.000 description 1
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- VSZWPYCFIRKVQL-UHFFFAOYSA-N selanylidenegallium;selenium Chemical compound [Se].[Se]=[Ga].[Se]=[Ga] VSZWPYCFIRKVQL-UHFFFAOYSA-N 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
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- 239000010409 thin film Substances 0.000 description 1
- WQJQOUPTWCFRMM-UHFFFAOYSA-N tungsten disilicide Chemical compound [Si]#[W]#[Si] WQJQOUPTWCFRMM-UHFFFAOYSA-N 0.000 description 1
- 229910021342 tungsten silicide Inorganic materials 0.000 description 1
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- H01L21/0332—Making masks on semiconductor bodies for further photolithographic processing not provided for in group H01L21/18 or H01L21/34 comprising inorganic layers characterised by their composition, e.g. multilayer masks, materials
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
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- H01L21/02225—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer
- H01L21/0226—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process
- H01L21/02282—Forming insulating materials on a substrate characterised by the process for the formation of the insulating layer formation by a deposition process liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32135—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only
- H01L21/32136—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas
- H01L21/32137—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by vapour etching only using plasmas of silicon-containing layers
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- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
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- Plasma & Fusion (AREA)
- Drying Of Semiconductors (AREA)
Description
Claims (11)
- ウエハを処理する方法であって、
基板と該基板上に設けられたシリコン含有膜とを有するウエハを準備する工程と、
前記シリコン含有膜上にハードマスクを形成する工程と、
前記ハードマスクをエッチングして、該ハードマスクにパターンを形成する工程と、
前記パターンが形成された前記ハードマスクを用いて前記シリコン含有膜をエッチングする工程と、
を備え、
前記ハードマスクは、前記シリコン含有膜上に設けられタングステン及びシリコンを含む第1の膜と、該第1の膜上に設けられジルコニウム又はチタン及び酸素を含む第2の膜とを有する、
方法。 - ウエハを処理する方法であって、
基板と該基板上に設けられたシリコン含有膜とを有するウエハを準備する工程と、
前記シリコン含有膜上にタングステン及びシリコンを含む第1の膜を形成する工程と、
前記第1の膜上にジルコニウム又はチタン及び酸素を含む第2の膜を形成する工程と、
前記第2の膜をマスクとして前記第1の膜をエッチングして、該第1の膜にパターンを形成する工程と、
前記パターンが形成された前記第1の膜をマスクとして、前記シリコン含有膜をエッチングする工程と、
を備える、
方法。 - 第1の膜を形成する前記工程では、スパッタリングによって前記第1の膜を前記シリコン含有膜上に形成する、
請求項2に記載の方法。 - 第1の膜を形成する前記工程では、化学気相成長法によって前記第1の膜を前記シリコン含有膜上に形成する、
請求項2に記載の方法。 - 第2の膜を形成する前記工程では、塗布処理によって前記第2の膜を前記第1の膜上に形成する、
請求項2~4の何れか一項に記載の方法。 - 前記塗布処理は、スピンコート処理である、
請求項5に記載の方法。 - 第2の膜を形成する前記工程では、化学気相成長法又は原子層堆積法によって前記第2の膜を前記第1の膜上に形成する、
請求項2~4の何れか一項に記載の方法。 - 第2の膜にパターンを形成する前記工程において行われる前記第2の膜のエッチング、及び第1の膜にパターンを形成する前記工程において行われる前記第1の膜のエッチングのそれぞれは、ハロゲン原子を含むガスのプラズマを用いた異方的なエッチングである、
請求項2~7の何れか一項に記載の方法。 - 前記第1の膜及び前記第2の膜のそれぞれは、アモルファス膜である、
請求項1~8の何れか一項に記載の方法。 - シリコン含有膜をエッチングする前記工程において行われる前記シリコン含有膜のエッチングは、フルオロカーボン系ガスのプラズマ又はハイドロフルオロカーボン系ガスのプラズマを用いた異方的なエッチングである、
請求項1~9の何れか一項に記載の方法。 - 前記シリコン含有膜は、単結晶シリコンの膜、多結晶シリコンの膜、酸化シリコンの膜、及び窒化シリコンの膜のうち何れか一つの膜を有する単層膜、或いは、何れか二以上の膜を有する多層膜である、
請求項1~10の何れか一項に記載の方法。
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TW110106262A TW202139288A (zh) | 2020-03-06 | 2021-02-23 | 處理晶圓之方法 |
US17/190,818 US20210280419A1 (en) | 2020-03-06 | 2021-03-03 | Wafer processing method |
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