JP7387501B2 - 半導体装置およびその制御方法 - Google Patents
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- 239000004065 semiconductor Substances 0.000 title claims description 122
- 238000000034 method Methods 0.000 title claims description 9
- 239000010410 layer Substances 0.000 claims description 158
- 239000011229 interlayer Substances 0.000 claims description 15
- 239000012535 impurity Substances 0.000 claims description 7
- 230000004048 modification Effects 0.000 description 11
- 238000012986 modification Methods 0.000 description 11
- 238000009825 accumulation Methods 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 229910052814 silicon oxide Inorganic materials 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000002347 injection Methods 0.000 description 2
- 239000007924 injection Substances 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229920005591 polysilicon Polymers 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005685 electric field effect Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000002123 temporal effect Effects 0.000 description 1
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Description
図1は、第1実施形態に係る半導体装置1を例示する模式断面図である。半導体装置1は、例えば、独立して制御される複数のゲート電極を有するIGBT(Insulated Gate Bipolar Transistor)である。
第1層(以下、n形ベース層11)は、コレクタ電極20とエミッタ電極30との間に延在する。ゲートトレンチGT1およびGT2は、半導体部10の表面からn形ベース層11中に延在するように設けられる。ゲート電極60は、n形ベース層11中に位置する。
エミッタ電極30とゲート電極40との間には、ゲート配線33を介して、ゲート電圧VG1が印加される。
エミッタ電極30とゲート電極50との間には、ゲート配線35を介して、ゲート電圧VG2が印加される。
エミッタ電極30とゲート電極60との間には、ゲート配線37を介して、ゲート電圧VG3が印加される。
以下、図1および図3を参照して、半導体装置1の制御方法を説明する。
図6は、図2(b)に示す断面に対応する断面図である。
図8は、第2実施形態に係る半導体装置7を例示する模式断面図である。この例では、ゲート電極40、50および60は、1つのゲートトレンチGT1の内部に設けられる。
Claims (6)
- 半導体部と、
前記半導体部の裏面側に設けられた第1電極と、
前記半導体部の表面側に設けられた第2電極と、
前記半導体部と前記第2電極との間に設けられ、前記半導体部中に位置し、前記半導体部から第1絶縁部により電気的に絶縁され、前記半導体部から第1層間絶縁膜により電気的に絶縁された第1制御電極と、
前記半導体部と前記第2電極との間において、前記半導体部の前記表面に沿った第1方向に前記第1制御電極と並べて配置され、前記半導体部中に位置し、前記半導体部から第2絶縁部により電気的に絶縁され、前記半導体部から第2層間絶縁膜により電気的に絶縁され、前記第1制御電極から電気的に分離された第2制御電極と、
前記第1制御電極と前記第1電極との間、および、前記第2制御電極と前記第1電極との間のそれぞれ設けられ、前記半導体部中に位置し、前記半導体部から第3絶縁部により電気的に絶縁され、前記第1および第2制御電極から第4絶縁部によりそれぞれ電気的に絶縁された複数の第3制御電極と、
前記第1制御電極に電気的に接続された第1配線と、
前記第2制御電極に電気的に接続された第2配線と、
前記複数の第3制御電極に接続された第3配線と、
を備え、
前記半導体部は、第1導電形の第1層と、第2導電形の第2層と、前記第1導電形の第3層と、前記第2導電形の第4層と、を含み、
前記第1層は、前記第1電極と前記第2電極との間に延在し、前記複数の第3制御電極は、前記第1層中に位置し、
前記第2層は、前記第1層と前記第2電極との間に設けられ、前記第1絶縁部を介して前記第1制御電極に向き合い、前記第2絶縁部を介して前記第2制御電極に向き合い、
前記第3層は、前記第2層と前記第2電極との間に選択的に設けられ、前記第1絶縁部に接し、前記第2電極に電気的に接続され、
前記第4層は、前記第1層と前記第1電極との間に設けられ、前記第1電極に電気的に接続される半導体装置。 - 前記半導体部は、前記第2層と前記第2電極との間に選択的に設けられ、前記第2電極に電気的に接続された第2導電形の第5層をさらに含み、
前記第5層は、前記第2層の第2導電形不純物よりも高濃度の第2導電形不純物を含む請求項1記載の半導体装置。 - 前記複数の第3制御電極のうちの1つは、前記第1制御電極の前記第3層と前記第1層間絶縁膜を介して向き合う部分と前記第1電極との間に位置する第1部分と、前記第1制御電極のそれ以外の部分と前記第1電極との間に位置する第2部分と、を含み、
前記第1部分は、前記半導体部の前記表面に直交する方向に第1厚さを有し、前記第2部分は、前記半導体部の前記表面に直交する方向に前記第1厚さよりも薄い第2厚さを有する請求項1または2に記載の半導体装置。 - 前記第1電極と前記第2電極との間において、前記半導体部中を前記半導体部の前記表面に直交する方向に延在し、前記半導体部から絶縁膜により電気的に絶縁され、前記第2電極に電気的に接続された第3電極をさらに含み、
前記第3電極は、前記第1制御電極と前記第2制御電極との間に設けられる請求項1~3のいずれか1つに記載の半導体装置。 - 前記複数の第3制御電極は、前記第1電極と前記第3電極との間に設けられた別の1つを含む請求項4記載の半導体装置。
- 請求項1~請求項5のいずれか1つに記載の半導体装置の制御方法であって、
前記第2電極を前記第1電極の第1電位より低い第2電位にバイアスし、
第1時点において、前記第2電極と前記第1制御電極との間に印加される第1制御電圧を、前記第1制御電極の第1閾値電圧よりも低いレベルから、前記第1閾値電圧よりも高いレベルに変化させ、
前記第1時点において、前記第2電極と前記第2制御電極との間に印加される第2制御電圧を、前記第2制御電極の第2閾値電圧よりも低いレベルから、前記第2閾値電圧よりも高いレベルに変化させ、
前記第1時点において、前記第3制御電極の電位が、前記第2電位よりも低いレベルから前記第2電位よりも高いレベルになるように、前記第2電極と前記第3制御電極との間に印加される第3制御電圧を上昇させ、
前記第1時点よりも後の第2時点において、前記第2制御電圧を、前記第2閾値電圧よりも高いレベルから、前記第2閾値電圧よりも低いレベルに変化させ、
前記第2時点において、前記第3制御電極の電位が、前記第2電位よりも高いレベルから前記第2電位よりも低いレベルになるように、前記第3制御電圧を降下させ、
前記第2時点よりも後の第3時点において、前記第1制御電圧を、前記第1閾値電圧よりも高いレベルから、前記第1閾値電圧よりも低いレベルに変化させる制御方法。
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Citations (7)
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WO2005065385A3 (en) | 2003-12-30 | 2006-04-06 | Fairchild Semiconductor | Power semiconductor devices and methods of manufacture |
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