JP7343314B2 - ステージ、物性測定装置および測定方法 - Google Patents
ステージ、物性測定装置および測定方法 Download PDFInfo
- Publication number
- JP7343314B2 JP7343314B2 JP2019124424A JP2019124424A JP7343314B2 JP 7343314 B2 JP7343314 B2 JP 7343314B2 JP 2019124424 A JP2019124424 A JP 2019124424A JP 2019124424 A JP2019124424 A JP 2019124424A JP 7343314 B2 JP7343314 B2 JP 7343314B2
- Authority
- JP
- Japan
- Prior art keywords
- stage
- optical film
- film
- less
- protrusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/04—Optical benches therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0228—Testing optical properties by measuring refractive power
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/025—Testing optical properties by measuring geometrical properties or aberrations by determining the shape of the object to be tested
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0242—Testing optical properties by measuring geometrical properties or aberrations
- G01M11/0278—Detecting defects of the object to be tested, e.g. scratches or dust
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0285—Testing optical properties by measuring material or chromatic transmission properties
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Geometry (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Biochemistry (AREA)
- Life Sciences & Earth Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Polarising Elements (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018132392 | 2018-07-12 | ||
JP2018132392 | 2018-07-12 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2020016645A JP2020016645A (ja) | 2020-01-30 |
JP7343314B2 true JP7343314B2 (ja) | 2023-09-12 |
Family
ID=69210093
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019124424A Active JP7343314B2 (ja) | 2018-07-12 | 2019-07-03 | ステージ、物性測定装置および測定方法 |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP7343314B2 (zh) |
KR (1) | KR20200007690A (zh) |
CN (1) | CN110715793B (zh) |
TW (1) | TW202022360A (zh) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116465826B (zh) * | 2023-03-15 | 2023-10-24 | 东阳市诰源闪光材料有限公司 | 一种用于光学膜偏光率测试装置及测试方法 |
Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008151714A (ja) | 2006-12-19 | 2008-07-03 | Horiba Ltd | 板状部材検査装置 |
JP2011196708A (ja) | 2010-03-17 | 2011-10-06 | Mitsubishi Electric Corp | 外形検出装置および外形検出方法 |
JP2011209078A (ja) | 2010-03-29 | 2011-10-20 | Sumitomo Chemical Co Ltd | 目視検査方法および目視検査装置 |
CN202216828U (zh) | 2011-08-17 | 2012-05-09 | 奥普镀膜技术(广州)有限公司 | 光学膜片光学性能测试台 |
JP2013228363A (ja) | 2012-03-29 | 2013-11-07 | Dainippon Screen Mfg Co Ltd | 基板検査装置および基板検査方法 |
WO2017150222A1 (ja) | 2016-02-29 | 2017-09-08 | 旭硝子株式会社 | 形状測定装置 |
CN107390307A (zh) | 2016-05-16 | 2017-11-24 | 惠和株式会社 | 液晶显示装置用光学片、液晶显示装置用背光单元及液晶显示装置用光学片的制造方法 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0961319A (ja) * | 1995-08-29 | 1997-03-07 | Shimadzu Corp | 吸引式試料台 |
JP3110707B2 (ja) * | 1997-08-25 | 2000-11-20 | 株式会社日本マクシス | 水晶基板用載置台及び水晶基板の傷検査装置 |
JP4469659B2 (ja) * | 2004-06-11 | 2010-05-26 | 株式会社ミツトヨ | 載物台装置、画像測定装置 |
JP2008189494A (ja) * | 2007-02-02 | 2008-08-21 | Tosoh Corp | 石英ガラス部品及びその製造方法 |
JP2010107902A (ja) * | 2008-10-31 | 2010-05-13 | Nippon Zeon Co Ltd | 光学部材及び液晶表示装置 |
JP2011008195A (ja) * | 2009-06-29 | 2011-01-13 | Nitto Denko Corp | 光学シート部材の巻回体および液晶表示装置の連続製造方法 |
JP5570900B2 (ja) * | 2010-07-26 | 2014-08-13 | 東京エレクトロン株式会社 | 基板載置面に樹脂突起物層を形成する方法及び樹脂突起物層転写部材 |
JP2012037683A (ja) * | 2010-08-06 | 2012-02-23 | Sumitomo Chemical Co Ltd | 光学部材及びこれを備えた液晶パネル並びに液晶表示装置 |
JP2013088438A (ja) * | 2011-10-13 | 2013-05-13 | Konica Minolta Advanced Layers Inc | 光学フィルム、その製造方法及び画像表示装置 |
JP2014002322A (ja) * | 2012-06-20 | 2014-01-09 | Asahi Kasei E-Materials Corp | 光学素子及び導電性光学素子 |
JP2017191190A (ja) * | 2016-04-13 | 2017-10-19 | 三菱ケミカル株式会社 | 光学フィルムの製造方法 |
-
2019
- 2019-07-03 JP JP2019124424A patent/JP7343314B2/ja active Active
- 2019-07-09 CN CN201910617937.6A patent/CN110715793B/zh active Active
- 2019-07-10 TW TW108124299A patent/TW202022360A/zh unknown
- 2019-07-10 KR KR1020190083139A patent/KR20200007690A/ko unknown
Patent Citations (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008151714A (ja) | 2006-12-19 | 2008-07-03 | Horiba Ltd | 板状部材検査装置 |
JP2011196708A (ja) | 2010-03-17 | 2011-10-06 | Mitsubishi Electric Corp | 外形検出装置および外形検出方法 |
JP2011209078A (ja) | 2010-03-29 | 2011-10-20 | Sumitomo Chemical Co Ltd | 目視検査方法および目視検査装置 |
CN202216828U (zh) | 2011-08-17 | 2012-05-09 | 奥普镀膜技术(广州)有限公司 | 光学膜片光学性能测试台 |
JP2013228363A (ja) | 2012-03-29 | 2013-11-07 | Dainippon Screen Mfg Co Ltd | 基板検査装置および基板検査方法 |
WO2017150222A1 (ja) | 2016-02-29 | 2017-09-08 | 旭硝子株式会社 | 形状測定装置 |
CN107390307A (zh) | 2016-05-16 | 2017-11-24 | 惠和株式会社 | 液晶显示装置用光学片、液晶显示装置用背光单元及液晶显示装置用光学片的制造方法 |
Also Published As
Publication number | Publication date |
---|---|
CN110715793A (zh) | 2020-01-21 |
JP2020016645A (ja) | 2020-01-30 |
TW202022360A (zh) | 2020-06-16 |
KR20200007690A (ko) | 2020-01-22 |
CN110715793B (zh) | 2023-11-28 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
TWI627478B (zh) | 偏光板套組及前面板一體型液晶顯示面板 | |
CN108431650B (zh) | 光学膜的制造方法 | |
WO2014163212A1 (ja) | 偏光板のセットおよび前面板一体型液晶表示パネル | |
TWI290232B (en) | Scratch-resistant optical film | |
KR20060126378A (ko) | 차광층 부착 플라이아이렌즈시트 및 그 제조방법, 투과형스크린 및 배면투영형 화상 표시장치 | |
TW200841086A (en) | Multifunctional optical multilayer film using light diffusers | |
US8998429B2 (en) | Printed material and photographic material | |
KR20080088428A (ko) | 편광판-보정판 조립체 및 그의 제조 방법 | |
KR20160143542A (ko) | 점착 시트, 점착제를 갖는 광학 필름, 및 화상 표시 장치의 제조 방법 | |
KR101797879B1 (ko) | 광학 필름의 제조 방법, 광학 필름 및 화상 표시 장치 | |
KR20160037758A (ko) | 편광판 | |
KR20160076435A (ko) | 편광판 및 그 제조 방법, 그리고 편광판의 세트, 액정 패널, 액정 표시 장치 | |
JP7343314B2 (ja) | ステージ、物性測定装置および測定方法 | |
JP2017211514A (ja) | 偏光板、及び液晶表示装置 | |
JP2017211515A (ja) | 偏光板、及び液晶表示装置 | |
KR20160034285A (ko) | 위상차 필름, 위상차 필름의 제조 방법, 이 위상차 필름을 사용한 편광판 및 화상 표시 장치, 이 화상 표시 장치를 사용한 3d 화상 표시 시스템 | |
WO2022004137A1 (ja) | 粘着剤層付き偏光板 | |
JP7312013B2 (ja) | 光学積層体及び表示装置 | |
TW201723535A (zh) | 偏光板及液晶顯示裝置 | |
TWI666475B (zh) | 偏光板片狀體的製造方法 | |
JP6782676B2 (ja) | 偏光板、及び液晶表示装置 | |
TW201944104A (zh) | 偏光板及其製造方法 | |
TWI839517B (zh) | 光學膜的檢查方法及光學膜的製造方法 | |
JP7217764B2 (ja) | 円偏光板 | |
WO2021200364A1 (ja) | 積層体 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220519 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20221228 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230110 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230215 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230404 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230601 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20230620 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230727 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20230804 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230822 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230831 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7343314 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |