WO2017150222A1 - 形状測定装置 - Google Patents
形状測定装置 Download PDFInfo
- Publication number
- WO2017150222A1 WO2017150222A1 PCT/JP2017/005963 JP2017005963W WO2017150222A1 WO 2017150222 A1 WO2017150222 A1 WO 2017150222A1 JP 2017005963 W JP2017005963 W JP 2017005963W WO 2017150222 A1 WO2017150222 A1 WO 2017150222A1
- Authority
- WO
- WIPO (PCT)
- Prior art keywords
- base material
- shape measuring
- shape
- support
- bent
- Prior art date
Links
- 238000005259 measurement Methods 0.000 claims abstract description 41
- 239000000758 substrate Substances 0.000 claims abstract description 41
- 239000000463 material Substances 0.000 claims description 147
- 238000005452 bending Methods 0.000 claims description 49
- 239000011521 glass Substances 0.000 claims description 27
- 238000013461 design Methods 0.000 abstract description 10
- 239000002585 base Substances 0.000 description 197
- 238000006073 displacement reaction Methods 0.000 description 25
- 238000000034 method Methods 0.000 description 11
- 239000010410 layer Substances 0.000 description 9
- 230000002950 deficient Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000007689 inspection Methods 0.000 description 5
- 238000005728 strengthening Methods 0.000 description 5
- 238000001816 cooling Methods 0.000 description 4
- 238000003426 chemical strengthening reaction Methods 0.000 description 3
- 238000011156 evaluation Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 229920005989 resin Polymers 0.000 description 3
- 239000011347 resin Substances 0.000 description 3
- 239000000523 sample Substances 0.000 description 3
- 229910001415 sodium ion Inorganic materials 0.000 description 3
- 229920003002 synthetic resin Polymers 0.000 description 3
- 239000000057 synthetic resin Substances 0.000 description 3
- 229920001971 elastomer Polymers 0.000 description 2
- 229910001416 lithium ion Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- FGIUAXJPYTZDNR-UHFFFAOYSA-N potassium nitrate Chemical compound [K+].[O-][N+]([O-])=O FGIUAXJPYTZDNR-UHFFFAOYSA-N 0.000 description 2
- 239000005060 rubber Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 229920002284 Cellulose triacetate Polymers 0.000 description 1
- NNLVGZFZQQXQNW-ADJNRHBOSA-N [(2r,3r,4s,5r,6s)-4,5-diacetyloxy-3-[(2s,3r,4s,5r,6r)-3,4,5-triacetyloxy-6-(acetyloxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6s)-4,5,6-triacetyloxy-2-(acetyloxymethyl)oxan-3-yl]oxyoxan-2-yl]methyl acetate Chemical compound O([C@@H]1O[C@@H]([C@H]([C@H](OC(C)=O)[C@H]1OC(C)=O)O[C@H]1[C@@H]([C@@H](OC(C)=O)[C@H](OC(C)=O)[C@@H](COC(C)=O)O1)OC(C)=O)COC(=O)C)[C@@H]1[C@@H](COC(C)=O)O[C@@H](OC(C)=O)[C@H](OC(C)=O)[C@H]1OC(C)=O NNLVGZFZQQXQNW-ADJNRHBOSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 229910001413 alkali metal ion Inorganic materials 0.000 description 1
- 230000003666 anti-fingerprint Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005034 decoration Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000009477 glass transition Effects 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000005342 ion exchange Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000000123 paper Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- -1 polyethylene terephthalate Polymers 0.000 description 1
- 229920000139 polyethylene terephthalate Polymers 0.000 description 1
- 239000005020 polyethylene terephthalate Substances 0.000 description 1
- 235000010333 potassium nitrate Nutrition 0.000 description 1
- 239000004323 potassium nitrate Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002787 reinforcement Effects 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 229920003051 synthetic elastomer Polymers 0.000 description 1
- 239000005061 synthetic rubber Substances 0.000 description 1
- 238000005496 tempering Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 239000002023 wood Substances 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/20—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring contours or curvatures, e.g. determining profile
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
- G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
- G01B5/213—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures for measuring radius of curvature
Definitions
- the present invention relates to a shape measuring apparatus.
- Patent Document 1 As an apparatus for inspecting the curvature and dimensions of a glass plate, an apparatus described in Patent Document 1 is known. As shown in FIGS. 18 and 19, in the inspection apparatus 100 of Patent Document 1, first, the glass plate 100 ⁇ / b> A is aligned with the stopper 109 and placed on the upper surface of the inspection mold 101. Thereby, the glass plate 100 ⁇ / b> A is positioned on the mold body 103 in such a manner that the peripheral edge thereof follows the trim line 106. Then, the block body 110A of the inspection jig 102A is set on the mold body 103, and the measuring element 110 of the dial gauge 111 is abutted against the upper surface in the vicinity of the edge of the glass plate 100A.
- the height of the upper surface of the glass plate 100A with respect to the curvature reference surface 107 is measured, and the curvature of the glass plate 100A is obtained based on the measured value.
- the curvature reference surface 107 and the block body 110A in contact with the curvature reference surface 107A improve the position setting accuracy of the dial gauge 111 attached to the block body 110A, and the measurement by the dial gauge 111 can be performed with high accuracy. Trying to do.
- the mold body 103 has a rectangular ring shape so that the periphery of the glass plate 100A is placed. Therefore, since only the periphery of the glass plate 100A is supported by the mold body 103, a force directed upward by the mold body 103 acts on the periphery of the glass plate 100A, and a force directed downward by gravity at the center of the glass plate 100A. Act. As a result, the glass plate 100A is bent and it is difficult to obtain a correct curvature. Moreover, since the center part of 100 A of glass plates is not supported, it is easy to shake and the error at the time of curvature measurement will become large. Further, the curvature is measured only at the periphery of the glass plate 100A, and it is not assumed that the curvature of the central portion is measured. The curvature of the entire glass plate 100A could not be measured.
- the present invention has been made in view of the above-described problems, and an object thereof is to provide a shape measuring apparatus capable of accurately measuring the curvature of a bent base material and a normal deviation from the design.
- the base material support portion includes a curved surface parallel to the second surface, and the plurality of support pieces.
- the base material support portion includes a surface that is not parallel to the second surface, and the plurality of support pieces.
- the shape measuring apparatus according to (3) wherein a plurality of types of the plurality of support pieces are provided on the surface, whereby a virtual curved surface connecting tips of the plurality of support pieces is parallel to the second surface.
- the shape measuring unit includes at least one shape measuring device that measures the shape of the bent base material, and a measuring device support unit that supports the at least one shape measuring device.
- the shape measuring apparatus according to any one of the above.
- the shape measuring device according to (6), wherein the measuring instrument support section is separate from the base material support section.
- the shape measuring device according to (6) or (7), wherein the at least one shape measuring instrument is arranged in a direction perpendicular to a virtual curved surface connecting tips of the plurality of support pieces.
- the shape measuring unit includes a plurality of the shape measuring devices, The shape measuring apparatus according to any one of (6) to (8), wherein corresponding portions of the plurality of shape measuring instruments exist on a virtual curved surface parallel to the first surface.
- the shape measuring device according to any one of (6) to (9), wherein the shape measuring device is supported by the measuring device support portion so as to be movable.
- (11) The shape measuring apparatus according to (10), wherein a virtual curved surface formed by a movement locus of the shape measuring instrument is parallel to the first surface.
- (12) The shape measuring apparatus according to any one of (6) to (11), wherein the shape measuring device is a curvature measuring device.
- the base material support portion includes a measuring element of a dimension measuring device that measures the dimension of the bent base material, and a measurement groove for bringing the measuring element into contact with a side surface of the bent base material.
- (1)-(12) The shape measuring apparatus according to any one of (12).
- (14) The shape measuring apparatus according to any one of (1) to (13), wherein the bent base material is glass.
- the present invention it is possible to provide a shape measuring device capable of accurately measuring the curvature of the bent base material and the normal deviation from the design.
- the bent base material of the present embodiment has a first surface and a second surface facing the first surface.
- the bent base material is a base material having a three-dimensional shape, and has a bent portion at least partially.
- the “bent portion” means a portion that is bent such that the first surface or the second surface is a curved surface and the average curvature is not zero.
- Such a bent substrate forms a curved surface having a predetermined curvature as a whole. Examples of the form of the bent substrate include a plate and a film.
- the material of the bent base material includes glass, metal, resin, silicon, wood, paper, and the like.
- the resin include polyethylene terephthalate and triacetyl cellulose.
- glass is preferable from the viewpoint of safety and strength. Furthermore, it is preferable from the viewpoint of high heat resistance and high weather resistance to use glass as a vehicle-mounted substrate.
- inorganic glass and organic glass such as polycarbonate and acrylic can be used.
- inorganic glass, organic glass, synthetic resin, and the like may be substrates of the same type or different types, and various adhesive layers may be inserted therebetween.
- the thickness of the substrate used for the bent substrate is preferably 0.5 mm or more and 5 mm or less. Since the base material having a thickness equal to or greater than the lower limit has high strength and good texture, there is an advantage that a bent base material having both high strength and good texture can be obtained. Furthermore, since it becomes easy to bend in the case of the above thin base materials, using the shape measuring apparatus of this invention can reduce a bend and can implement an exact measurement.
- the lower limit is more preferably 0.7 mm or more, and further preferably 1 mm or more.
- the upper limit is more preferably 3 mm or less.
- the radius of curvature of the bent portion of the bent substrate is preferably 5000 mm or less, more preferably 3000 mm or less, and even more preferably 1000 mm or less. Even a bent substrate having a bent portion having a radius of curvature as large as the upper limit value can be used to measure a subtle change by using the shape measuring apparatus according to the present invention, so that the shape can be measured accurately.
- limiting in particular in the curvature radius of the bending part of a bending base material 1 mm or more is preferable, 5 mm or more is preferable and 10 mm or more is preferable.
- the bent portion having a radius of curvature As small as the lower limit value, it is difficult to measure, but even if the width is narrow, it is possible to measure subtle changes by using the shape measuring apparatus according to the present invention.
- the shape can be measured accurately.
- a distance between a line segment connecting the two end portions and a tangent line in contact with the bent portion of the bent base material among the straight lines parallel to the end is defined as “bending depth h”
- the bending depth h is preferably 5 mm or more, more preferably 10 mm or more, and further preferably 20 mm or more.
- the problem is that it is more difficult to confirm the forming accuracy as the bending substrate has a larger bending depth h.
- the molding accuracy of such a substrate can also be measured accurately and easily.
- a layer antiglare layer
- AR layer antireflection layer
- AFP layer anti-fingerprint layer
- the bent base material may be subjected to processing such as chamfering, may be subjected to polishing treatment, and may be subjected to reinforcement treatment.
- air cooling strengthening physical strengthening
- chemical strengthening are known as typical strengthening treatment methods for forming a compressive stress layer.
- the air cooling strengthening method is a method of rapidly cooling the main surface of the base material heated to near the softening point by air cooling or the like.
- the substrate is immersed in molten potassium nitrate at a temperature not higher than the glass transition point, and ion exchange is performed.
- alkali metal ions typically Li ions and Na ions
- alkali ions typically Na ions for Li ions
- K ions, and Na ions are K ions.
- the above-mentioned bent base material can be used for various applications, and in particular, it can be suitably used by being mounted on a transport machine such as an automobile, a train, a ship, and an aircraft.
- a transport machine such as an automobile, a train, a ship, and an aircraft.
- interior parts of transport aircraft such as instrument panels, head-up displays (HUD), dashboards, center consoles, shift knobs, etc.
- the interior parts can be given high designability and luxury, and the interior of the transport aircraft.
- the design can be improved.
- the first surface is also referred to as the upper surface
- the second surface is also referred to as the lower surface.
- FIG. 1 and FIG. 2 show a bent substrate 1 having a bent portion 7 and a side surface 9 that is sandwiched between a lower surface 3 and an upper surface 5 to connect them.
- the Z direction in a figure is a direction parallel to the thickness direction in the center part of the bending base material 1, and the X and Y directions are directions perpendicular
- the bent base material 1 in FIG. 1 includes a bent portion 7 that bends toward the lower surface 3 side (downward in the Z direction) as the whole moves toward both ends in the X direction.
- the bent substrate 1 does not bend in the Z direction in the Y direction.
- the lower surface 3 and the upper surface 5 are parallel to each other. Therefore, the bent base material 1 forms a curved surface shape having a predetermined curvature as a whole.
- the bent base material 1 in FIG. 2 has the same cross-sectional shape as in FIG. 1, but in FIG. 1, the bent portion 7 extends only toward both ends in the X direction of the base material.
- the configuration is different in that the bent portion 7 extends from the center of the bent base material 1 toward the peripheral portion (from the center toward the X and Y directions). Therefore, the bent base material 1 in FIG. 2 has a bottomed shape having an opening on the lower surface 3 side. In this bent base material 1, the lower surface 3 and the upper surface 5 are parallel to each other.
- the lower surface in the Z direction is referred to as the lower surface 3 and the upper surface in the Z direction is referred to as the upper surface 5, but the lower surface in the Z direction is referred to as the upper surface 5 and the upper surface in the Z direction is referred to as the lower surface 3. It goes without saying.
- the lower surface 3 and the upper surface 5 do not need to be parallel to each other, and the lower surface 3 and the upper surface 5 having an arbitrary shape may be applied to the bent base material 1.
- the bending base 1 may have a lower surface 3 having a planar shape and an upper surface 5 having a curved shape.
- the side surface 9 may be provided as a portion for connecting the upper surface 5 and the lower surface 3 as shown in FIG. 4A, and the side surface 9 may not be provided as shown in FIG.
- the bent substrate 1 may have a lower surface 3 having a curved shape and an upper surface 5 having a planar shape.
- the curvature and dimensions of the bent substrate 1 as described above completely match the design curvature and dimensions, but errors may occur depending on the conditions of the molding process and chemical strengthening process. .
- the shape measuring apparatus 10 As shown in FIGS. 5 to 8, the shape measuring apparatus 10 according to the present embodiment includes a planar base 11 extending in the XY directions, and a substrate support that is disposed on the upper surface of the base 11 and supports the bent substrate 1. And a curvature measuring unit 20 that measures the curvature of the bent substrate 1.
- the base material support part 12 has a support base 13 fixed to the upper surface of the base 11 and a plurality of support pieces 14 arranged on the upper surface 13 a of the support base 13.
- the support base 13 is made of, for example, metal, carbon, glass, or ceramics
- the support piece 14 is made of, for example, synthetic resin or rubber.
- the support base 13 has a lower surface that is a plane parallel to the X and Y directions (a plane parallel to the base 11), and an upper surface 13 a that is a curved surface parallel to the lower surface 3 of the bending substrate 1.
- the shape measuring device 10 measures the shape of the bent base material 1 (see FIGS. 1 and 3) configured by the bent portion 7 that bends toward the lower surface 3 as the whole goes toward both ends in the X direction. An example will be described. Therefore, similarly to the shape of the bent base 1, the upper surface 13a of the support base 13 has a shape that bends downward in the Z direction toward the both ends in the X direction and does not bend in the Z direction in the Y direction. is doing.
- a plurality of support piece fixing grooves 13b are formed on the upper surface 13a of the support base 13 at equal intervals in the X and Y directions.
- a total of 12 support piece fixing grooves 13b are provided, three at equal intervals in the X direction and four at equal intervals in the Y direction.
- the support piece fixing groove 13b is recessed so as to be perpendicular to the upper surface 13a of the support base 13 (perpendicular to the tangent to the upper surface 13a).
- the support piece 14 has a base portion 14a having a shape substantially equal to the support piece fixing groove 13b, and a spherical portion 14b formed at the tip of the base portion 14a. And the support piece 14 is provided in the upper surface 13a of the support stand 13 by the base part 14a being inserted in the support piece fixing groove 13b, and being fixed detachably. In the illustrated example, a total of twelve support pieces 14 having the same shape are provided, three at equal intervals in the X direction and four at equal intervals in the Y direction. The support piece 14 is arranged so as to be perpendicular to the upper surface 13 a of the support base 13.
- the virtual curved surface A connecting the tips (upper ends in the Z direction) of the spherical portions 14 b of the plurality of support pieces 14 is parallel to the upper surface 13 a of the support base 13 and the lower surface 3 of the bent base material 1.
- the support piece 14 is not fixed to the support base 13 and integrated as in the present embodiment, but the support piece 14 and the support base 13 are formed directly on the support base 13 as convex portions. May be integrated. Further, the number of support piece fixing grooves 13b and the support pieces 14 and the positions where they are provided are not particularly limited.
- a stopper 16 for positioning the bent base material 1 at a desired position is provided on the upper surface 13 a of the support base 13.
- one stopper 16 is provided on one end side in the X direction of the upper surface 13a and two stoppers 16 are provided on one end side in the Y direction.
- the stopper 16 is detachably fixed to a stopper fixing groove 13c formed on the upper surface 13a. Therefore, by providing the stopper fixing groove 13c at various positions, the stopper fixing groove 13c for mounting the stopper 16 is selected according to the dimensions of the bent base material 1 in the X and Y directions, and the bent base material 1 is appropriately selected. Can be positioned. In the example of FIG.
- a stopper 16 is mounted in the groove 13c.
- the stopper 16 is mounted in the outer stopper fixing groove 13c.
- the bending base material 1 is arrange
- a plurality of stoppers 16 abut on the side surfaces of the bent base material 1 in the X and Y directions, and the bent base material 1 is positioned in the X and Y directions.
- the shape change of the bending base material 1 can be suppressed, and the curvature measuring part 20 Accurate shape measurement by this is possible.
- the base material support portion 12 has a plurality of support pieces 14 that are in point contact with the lower surface 3 of the bent base material 1, and a virtual curved surface A connecting the upper ends of the plurality of support pieces 14 is the lower surface of the bent base material 1. 3, the contact area between the bent base material 1 and the base material support portion 12 is reduced, and it is possible to prevent the bent base material 1 from being damaged. Furthermore, when the support piece 14 is made of a synthetic resin, it can be easily replaced. Therefore, the measurement accuracy can be maintained by appropriately replacing the support piece 14. In addition, when the support piece 14 is made of rubber, it is possible to prevent the bent base material 1 from being displaced due to vibration during measurement or the like, so that measurement accuracy can be maintained.
- the measurement groove 13e is formed on the upper surface 13a of the support base 13 at a position facing the X-direction side surfaces 9a and the Y-direction side surfaces 9b of the bent base 1 in the Z direction.
- a measuring element for example, a caliper jaw
- the measuring element is in contact with the X-direction side surface 9a and the Y-direction side surface 9b of the bent base material 1.
- the dimension of the X direction of the bending base material 1 is measured based on the distance of the measuring elements contact
- the curvature measuring unit 20 includes a plurality of dial gauges 21 (curvature measuring devices) that measure the curvature of the bent base material 1, and a measuring instrument support unit 23 that supports the plurality of dial gauges 21.
- the measuring instrument support portion 23 of the present embodiment has three portal brackets 24 arranged at equal intervals in the X direction.
- the curvature measuring device only needs to be able to measure the distance and displacement from a certain reference.
- a dial gauge or a laser displacement meter can be used, but is not particularly limited.
- a plurality of objects to be measured can be measured in the plane by this curvature measuring device, and the curvature of the object to be measured and the normal deviation from the design can be estimated from the results.
- the bracket 24 includes a pair of column portions 24a that are spaced apart from each other in the Y direction, and a beam portion 24b that connects the pair of column portions 24a in the Y direction.
- the pair of column portions 24a are detachably fixed to bracket fixing grooves 13d provided on the upper surface 13a of the support base 13, respectively. Since the bracket fixing groove 13d is recessed so as to be perpendicular to the upper surface 13a of the support table 13 (perpendicular to the tangent to the upper surface 13a), the bracket 24 is similarly formed on the upper surface 13a of the support table 13. Is arranged in a plane. Note that it is not always necessary to provide a pair of column portions 24a.
- the beam portion 24b may be supported by one column portion 24a.
- the column part 24a may have a rotatable mechanism, and the beam part 24b may thereby be rotatable.
- the bracket fixing groove 13d does not necessarily have to be recessed straight with respect to the upper surface 13a of the support base 13.
- the beam part 24b of the bracket 24 has a plurality (nine in this example) of gauge fixing holes 24c at equal intervals in the Y direction.
- four of the nine gauge fixing holes 24 c are formed at positions facing the support piece 14 in the direction perpendicular to the upper surface 13 a of the support base 13. That is, when the four gauge fixing holes 24c are extended to the upper surface 13a side of the support base 13, the support piece 14 is positioned on the extension line.
- the four gauge fixing holes 24c formed at positions facing the support piece 14 are referred to as first gauge fixing holes 24h, and the other five gauge fixing holes 24c are referred to as second gauge fixing holes 24i.
- the first and second gauge fixing holes 24h and 24i are alternately arranged in the Y direction.
- the bracket 24 is arranged perpendicular to the upper surface 13 a of the support base 13. Therefore, as shown in FIG. 7, the stem 21a of the dial gauge 21 fixed to the gauge fixing hole 24c, the spindle 21b extending from the stem 21a, and the probe 21c are perpendicular to the upper surface 13a of the support base 13, that is, It extends in a direction perpendicular to the bent substrate 1.
- the stem 21a, the spindle 21b, and the measuring element 21c of the dial gauge 21 fixed to the first gauge fixing hole 24h face the support piece 14. In this manner, the probe 21c is brought into contact with the upper surface 5 of the bent base material 1 in a plane, and the curvature and normal deviation of the bent base material 1 are obtained based on the measurement results of the plurality of dial gauges 21. .
- the measurement result obtained by bringing the measuring element 21c into contact with the support piece 14 is a reference (so-called zero point) for determining the curvature of the bent base material 1.
- Used as And the curvature of the bending base material 1 is calculated
- the measurement result obtained by bringing the measuring element 21c into contact with the upper surface 13a of the support base 13 is used as a reference (zero) when calculating the curvature of the bent base material 1.
- Point the curvature of the bending base material 1 is calculated
- the dial gauge 21 may be fixed to a dedicated jig to obtain the zero point. That is, any method may be adopted as long as the zero point can be appropriately obtained.
- the dial gauge 21 is arranged in a direction perpendicular to the measurement point on the upper surface 5 of the bent base 1 so that the measuring element 21c abuts the measurement point in a perpendicular direction. Can be improved.
- a virtual curved surface B (in FIG. 7 and 8, a virtual curved surface connecting the upper ends of the stems 21a) connecting corresponding portions of the plurality of dial gauges 21 is connected to the upper surface 13a of the support base 13 or the bent base material 1. Parallel. As a result, even when the substrate is curved like the bent substrate 1, the deviation in the normal direction can be measured, so that measurement with a small error can be performed with respect to the measurement position deviation error.
- the dial gauge 21 may be movably supported by the measuring instrument support portion 23 so that the curvature of the entire bent base material 1 can be measured. Further, even when a plurality of dial gauges 21 are provided, the dial gauge 21 may be movably supported by the measuring instrument support portion 23 (for example, the bracket 24).
- the dial gauge 21 when the dial gauge 21 is movable, the virtual curved surface formed by the movement trajectory is similar to the above-described virtual curved surface B (see FIGS. 7 and 8), and the upper surface 5 of the bending base 1 or the support base 13. It is preferable to be parallel to the upper surface 13a.
- the material of the probe 21c is preferably a material that can reduce friction with the upper surface, for example, a fluororesin.
- the bracket 24 does not need to be fixed to the support base 13 integrally, but may be fixed to a structure such as a floor or a ceiling and separated from the support base 13.
- a structure such as a floor or a ceiling and separated from the support base 13.
- automatic measurement is possible. Further, in the repeated measurement, a portion where the play is likely to occur due to wear or the like at the contact portion between the bracket 24 and the measuring instrument can be easily replaced. Further, the change of the measuring element is facilitated by exchanging the bracket 24.
- the shape and number of brackets 24 are not particularly limited.
- the base material support part 12 does not need to have the support piece 14, and the lower surface 3 of the bending base material 1 is supported by the upper surface 13a of the support base 13 having a curvature equal to the design curvature of the bending base material 1. It doesn't matter. Even in this case, the bent base material 1 is supported by the base material support part 12 having a curvature equal to the curvature of the lower surface 3 on the design of the bent base material 1, so that the shape change of the bent base material 1 is suppressed. In addition, accurate shape measurement by the curvature measuring unit 20 is possible.
- the base material support part 12 has the upper surface 13a of the support stand 13 parallel to the lower surface 3 of the bending base material 1, and the some support piece 14, and several support pieces of the same shape mutually.
- the virtual curved surface A connecting the upper ends of the plurality of support pieces 14 is parallel to the lower surface 3 of the bent substrate 1. According to this, since it is only necessary to fix the plurality of support pieces 14 having the same shape to the upper surface 13a of the support base 13, it is very simple.
- the configuration of the support base 13 and the plurality of support pieces 14 is not limited as long as the virtual curved surface A connecting the upper ends of the plurality of support pieces 14 is parallel to the lower surface 3 of the bent base material 1.
- the upper surface 13 a of the support base 13 is a surface (for example, a plane) that is not parallel to the lower surface 3 of the bent base material 1, and a plurality of types of support pieces 14 having different lengths are used.
- the virtual curved surface A connecting the tips of the plurality of support pieces 14 may be set to be parallel to the lower surface 3 of the bent base material 1. According to this, it is possible to cope with various bent base materials 1 having different curvatures and curved surfaces only by changing the length of the support piece 14.
- the curvature measuring unit 20 may apply a laser displacement meter 25 instead of the dial gauge 21 as a curvature measuring device for measuring the curvature of the bent base material 1.
- the measuring instrument support 23 that supports the plurality of laser displacement meters 25 differs from the example shown in FIGS. 5 to 9 in the configuration of the beam 24b.
- the inner side of the two stopper fixing grooves 13 c provided on one end side in the X direction of the upper surface 13 a of the support base 13 in accordance with the dimensions in the X and Y directions of the bent base material 1.
- a stopper 16 is mounted in the stopper fixing groove 13c.
- Each of the beam portions 24b extends in the Y direction and connects the pair of long side portions 24d that are separated from each other in the X direction so as to sandwich the column portion 24a, and both ends in the Y direction of the pair of long side portions 24d.
- a pair of pins 24g for fixing the fixing jig 26 of the laser displacement meter 25 is provided at both ends in the X direction of the connecting portion 24f.
- the laser displacement meter 25 connected to the fixing jig 26 is configured to oscillate a laser perpendicular to the beam portion 24b (in the drawing). (See the dashed arrows in.)
- the bracket 24 is arranged perpendicular to the upper surface 13a of the support base 13
- the laser emitted from the laser displacement meter 25 is perpendicular to the upper surface 13a of the support base 13, that is, bent.
- the process proceeds in a direction perpendicular to the substrate 1.
- the curvature of the bending base material 1 is calculated
- the laser displacement meter 25 is arranged in a direction perpendicular to the measurement point on the upper surface 5 of the bent substrate 1, so that the laser is irradiated perpendicularly to the measurement point, and the measurement point is applied to the measurement point.
- the measurement accuracy can be improved.
- the reflected light reflected vertically may be detected by the laser displacement meter 25, and the scattered light is detected at an arbitrary angle ⁇ .
- Detection may be performed by a detector (not shown) arranged at a position that is tilted only.
- a laser may be incident on the measurement point from a direction inclined by ⁇ from the normal line of the upper surface 5 and detected by a detector disposed at a position inclined by + ⁇ .
- a laser may be incident on the measurement point from a direction inclined by the normal line - ⁇ of the upper surface 5 and detected by a detector arranged in a direction perpendicular to the surface.
- a virtual curved surface connecting corresponding portions of the plurality of laser displacement meters 25 is parallel to the upper surface 13a of the support base 13 or the bent base material 1.
- a plurality of laser displacement meters 25 are not necessarily provided, and at least one laser displacement meter may be provided.
- the laser displacement meter 25 may be movably supported by the measuring device support portion 23 so that the curvature of the entire bent substrate 1 can be measured.
- the laser displacement meters 25 may be movably supported by the measuring instrument support 23 (for example, the bracket 24).
- the virtual curved surface formed by the movement locus is preferably parallel to the upper surface 5 of the bending base 1 or the upper surface 13a of the support base 13.
- the laser displacement meter 25 can be continuously measured by moving it on the upper surface 5 of the bent base 1, so that the number of measurement points is increased and more accurate measurement is possible.
- the laser displacement meter 25 can be moved in a non-contact manner with respect to the upper surface 5 of the bent base material 1, no scratches or the like occur on the upper surface 5.
- the determination as to whether the bent base material 1 is a good product or a defective product is made, for example, as shown in FIG. This is performed based on whether or not it is between the standard upper limit Smax and the standard lower limit Smin.
- the standard upper limit Smax is located above the reference surface Sbase having a curvature equal to the design curvature of the bent base material 1 by a predetermined tolerance
- the standard lower limit Smin is relative to the reference surface Sbase. Therefore, it is positioned below the plane direction by a predetermined tolerance.
- the reference surface Sbase, the standard upper limit Smax, and the standard lower limit Smin are parallel to each other.
- the lower surface of the bent base material 1 is shown by the upper surface 13 a of the support base 13 having a curvature equal to the curvature of the lower surface 3 in the design of the bent base material 1. 3 is shown.
- the upper surface 13a of the support base 13 coincides with the reference surface Sbase. In this case, since the bending base material 1 shown in FIG. 14 is disposed between the reference surface Sbase and the standard upper limit Smax, it is determined as a non-defective product.
- the bent base material 1 shown in FIG. 15 should be judged as a non-defective product, but it is judged as a defective product because there is a portion located above the standard upper limit Smax. This is because the range from the reference surface Sbase to the standard lower limit Smin exists in the support base 13.
- the bent base material 1 similar to FIG. 15 is also located between the standard lower limit Smin and the standard upper limit Smax. It is possible to accurately determine that the product is non-defective.
- the position of the upper surface 13a of the support base 13 is not particularly limited as long as the upper surface 13a is between the standard lower limit Smin and the standard upper limit Smax. Preferably it is located.
- FIG. 17 a configuration is adopted in which a plurality of support pieces 14 each in point contact with the lower surface 3 of the bent base 1 are arranged on the upper surface 13 a of the support base 13. It is preferable to do. According to this, the contact area of the bending base material 1 and the base material support part 12 becomes small, and it can suppress that a damage
- FIG. 14 by configuring the support piece 14 from a material having a large friction coefficient such as rubber, it is possible to suppress the bending base material 1 from being displaced due to vibration during measurement or the like.
- the tip of the support piece 14 coincides with the reference surface Sbase.
- the range from the reference surface Sbase to the standard lower limit Smin does not exist in the support base 13. Therefore, the bent base material 1 similar to that in FIG. 15 is located between the standard lower limit Smin and the standard upper limit Smax, and can be accurately determined as a non-defective product.
- the position of the tip of the support piece 14 is not particularly limited as long as it is between the standard lower limit Smin and the standard upper limit Smax. However, in order to accurately determine whether the bent base material 1 is good or bad, it is located on the reference surface Sbase. It is preferable.
- the type of curvature measuring device is not limited to a dial gauge or a laser displacement meter, and an arbitrary displacement meter can be applied.
- evaluation of optical properties such as substrate color, light transmittance, and reflectance, surface shape evaluation for surface roughness and waviness, contact angle measurement of water, etc. It can be used for surface strength evaluation using a contact such as a pencil.
- the bent base material of the present invention may be a combination of a curved surface shape and a planar shape. Also in this case, the curved surface and the flat surface of the base material support portion, or the virtual curved surface and the virtual plane connecting the tips of the plurality of support pieces of the base material support portion are parallel to the second surface, for example, substantially the same shape. That's fine.
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- A Measuring Device Byusing Mechanical Method (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Abstract
Description
(1) 第1面と第2面とを有する屈曲基材の形状を測定する形状測定装置であって、
前記屈曲基材の第2面を支持する基材支持部と、
前記屈曲基材の形状を測定する形状測定部と、
を備える形状測定装置。
(2) 前記基材支持部は、前記第2面を支持し、前記第2面と平行な曲面を有する、(1)に記載の形状測定装置。
(3) 前記基材支持部は、前記第2面とそれぞれ点接触する複数の支持片を有し、
前記複数の支持片の先端を結んだ仮想曲面が、前記第2面と平行である、(1)に記載の形状測定装置。
(4) 前記基材支持部は、前記第2面と平行な曲面と、前記複数の支持片と、を有し、
互いに同一形状の前記複数の支持片が前記曲面上に設けられることにより、前記複数の支持片の先端を結んだ仮想曲面が、前記第2面と平行である、(3)に記載の形状測定装置。
(5) 前記基材支持部は、前記第2面と平行ではない面と、前記複数の支持片と、を有し、
複数種類の前記複数の支持片が前記面に設けられることにより、前記複数の支持片の先端を結んだ仮想曲面が、前記第2面と平行である、(3)に記載の形状測定装置。
(6) 前記形状測定部は、前記屈曲基材の形状を測定する少なくとも一つの形状測定器と、前記少なくとも一つの形状測定器を支持する測定器支持部と、を有する(1)~(5)の何れか一つに記載の形状測定装置。
(7) 前記測定器支持部は、前記基材支持部と別体である、(6)に記載の形状測定装置。
(8) 前記少なくとも一つの形状測定器は、前記複数の支持片の先端を結んだ仮想曲面に対して、面直方向に配置される、(6)又は(7)に記載の形状測定装置。
(9) 前記形状測定部は、複数の前記形状測定器を有し、
前記複数の形状測定器同士の対応する部位が、前記第1面と平行となる仮想曲面上に存在する、(6)~(8)の何れか一つに記載の形状測定装置。
(10) 前記形状測定器は、前記測定器支持部に移動可能に支持される、(6)~(9)の何れか一つに記載の形状測定装置。
(11) 前記形状測定器の移動軌跡によってなる仮想曲面は、前記第1面と平行である、(10)に記載の形状測定装置。
(12) 前記形状測定器が曲率測定器である、(6)~(11)のいずれか一つに記載の形状測定装置。
(13) 前記基材支持部が、前記屈曲基材の寸法を測定する寸法測定装置の測定子と、当該測定子を前記屈曲基材の側面に当接させるための測定用溝と、を有する、(1)~(12)の何れか一つに記載の形状測定装置。
(14) 前記屈曲基材がガラスである、(1)~(13)の何れか一つに記載の形状測定装置。
本実施形態の屈曲基材は、第1面と、第1面に対向する第2面と、を有する。当該屈曲基材は、三次元形状を有する基材であって、少なくとも一部に屈曲部を有する。「屈曲部」とは、第1面または第2面が曲面となるように屈曲し、その平均曲率がゼロではない部分を意味する。このような屈曲基材は全体として所定の曲率を有する曲面形状を構成する。屈曲基材の形態としては、板、フィルム等が挙げられる。
屈曲基材の屈曲部の曲率半径は特に制限はないが、1mm以上が好ましく、5mm以上が好ましく、10mm以上が好ましい。下限値ほどの小さな曲率半径の屈曲部は幅が細くなり測定を実施することが困難であったが、本発明に係る形状測定装置を使用することで幅が狭くても微妙な変化を測定でき、正確に形状測定を実施できる。
上述のような比較的に薄い無機ガラスを強化処理する場合には、化学強化処理が適切である。
図5~8に示すように、本実施形態の形状測定装置10は、XY方向に延びる平面状の基台11と、基台11の上面に配置され、屈曲基材1を支持する基材支持部12と、屈曲基材1の曲率を測定する曲率測定部20と、を備える。
また、形状測定だけでなく、基材の色味や光の透過率、反射率などの光学特性評価、表面の粗さやうねりを求める表面形状評価、水などの接触角測定などの対液体界面評価、鉛筆などの接触子を使用した表面強度評価などに使用できる。
3 下面(第2面)
5 上面(第1面)
7 屈曲部
9 側面
9a X方向側面
9b Y方向側面
10 形状測定装置
11 基台
12 基材支持部
13 支持台
13a 上面
13b 支持片固定溝
13c ストッパ固定溝
13d ブラケット固定溝
13e 測定用溝
14 支持片
14a 基部
14b 球状部
16 ストッパ
20 曲率測定部
21 ダイヤルゲージ(曲率測定器)
21a ステム
21b スピンドル
21c 測定子
23 測定器支持部
24 ブラケット
24a 柱部
24b 梁部
24c ゲージ固定孔
24d 長辺部
24e 短辺部
24g ピン
24h 第1ゲージ固定孔
24i 第2ゲージ固定孔
25 レーザー変位計
26 固定治具
A、B 仮想曲面
Sbase 基準面
Smax 規格上限
Smin 規格下限
Claims (14)
- 第1面と第2面とを有する屈曲基材の形状を測定する形状測定装置であって、
前記屈曲基材の第2面を支持する基材支持部と、
前記屈曲基材の形状を測定する形状測定部と、
を備える形状測定装置。 - 前記基材支持部は、前記第2面を支持し、前記第2面と平行な曲面を有する、請求項1に記載の形状測定装置。
- 前記基材支持部は、前記第2面とそれぞれ点接触する複数の支持片を有し、
前記複数の支持片の先端を結んだ仮想曲面が、前記第2面と平行である、請求項1に記載の形状測定装置。 - 前記基材支持部は、前記第2面と平行な曲面と、前記複数の支持片と、を有し、
互いに同一形状の前記複数の支持片が前記曲面上に設けられることにより、前記複数の支持片の先端を結んだ仮想曲面が、前記第2面と平行である、請求項3に記載の形状測定装置。 - 前記基材支持部は、前記第2面と平行ではない面と、前記複数の支持片と、を有し、
複数種類の前記複数の支持片が前記面に設けられることにより、前記複数の支持片の先端を結んだ仮想曲面が、前記第2面と平行である、請求項3に記載の形状測定装置。 - 前記形状測定部は、前記屈曲基材の形状を測定する少なくとも一つの形状測定器と、前記少なくとも一つの形状測定器を支持する測定器支持部と、を有する請求項1~5の何れか1項に記載の形状測定装置。
- 前記測定器支持部は、前記基材支持部と別体である、請求項6に記載の形状測定装置。
- 前記少なくとも一つの形状測定器は、前記複数の支持片の先端を結んだ仮想曲面に対して、面直方向に配置される、請求項6又は7に記載の形状測定装置。
- 前記形状測定部は、複数の前記形状測定器を有し、
前記複数の形状測定器同士の対応する部位が、前記第1面と平行となる仮想曲面上に存在する、請求項6~8の何れか1項に記載の形状測定装置。 - 前記形状測定器は、前記測定器支持部に移動可能に支持される、請求項6~9の何れか1項に記載の形状測定装置。
- 前記形状測定器の移動軌跡によってなる仮想曲面は、前記第1面と平行である、請求項10に記載の形状測定装置。
- 前記形状測定器が曲率測定器である、請求項6~11のいずれか1項に記載の形状測定装置。
- 前記基材支持部が、前記屈曲基材の寸法を測定する寸法測定装置の測定子と、当該測定子を前記屈曲基材の側面に当接させるための測定用溝と、を有する、請求項1~12の何れか1項に記載の形状測定装置。
- 前記屈曲基材がガラスである、請求項1~13の何れか1項に記載の形状測定装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202311163098.8A CN117146758A (zh) | 2016-02-29 | 2017-02-17 | 形状测定装置 |
JP2018503031A JP6714882B2 (ja) | 2016-02-29 | 2017-02-17 | 形状測定装置 |
CN201780013839.0A CN108779983A (zh) | 2016-02-29 | 2017-02-17 | 形状测定装置 |
KR1020187018445A KR20180116236A (ko) | 2016-02-29 | 2017-02-17 | 형상 측정 장치 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2016-038024 | 2016-02-29 | ||
JP2016038024 | 2016-02-29 |
Publications (1)
Publication Number | Publication Date |
---|---|
WO2017150222A1 true WO2017150222A1 (ja) | 2017-09-08 |
Family
ID=59743897
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
PCT/JP2017/005963 WO2017150222A1 (ja) | 2016-02-29 | 2017-02-17 | 形状測定装置 |
Country Status (5)
Country | Link |
---|---|
JP (1) | JP6714882B2 (ja) |
KR (1) | KR20180116236A (ja) |
CN (2) | CN108779983A (ja) |
TW (1) | TWI726056B (ja) |
WO (1) | WO2017150222A1 (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107966082A (zh) * | 2017-11-27 | 2018-04-27 | 宁波邦盛汽车零部件有限公司 | 一种用于检测汽车曲面零件面轮廓度的检具 |
CN109772723A (zh) * | 2019-03-14 | 2019-05-21 | 福耀集团长春有限公司 | 一种汽车玻璃检测系统及检测方法 |
CN110715793A (zh) * | 2018-07-12 | 2020-01-21 | 住友化学株式会社 | 载物台、物性测定装置及测定方法 |
CN111928748A (zh) * | 2019-05-13 | 2020-11-13 | 安徽科瑞特模塑有限公司 | 一种车辆导流罩加工用通用检具 |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP7153231B2 (ja) * | 2018-12-21 | 2022-10-14 | 日本電気硝子株式会社 | ガラス板の撓み測定装置及びガラス板の製造方法 |
KR102142961B1 (ko) * | 2019-03-20 | 2020-08-10 | 한전케이피에스 주식회사 | 보일러 주급수 펌프의 케이싱과 임펠러의 센터링 작업용 장치 |
CN110500935A (zh) * | 2019-08-29 | 2019-11-26 | 京东方科技集团股份有限公司 | 曲率检测装置 |
CN111765836B (zh) * | 2020-07-15 | 2022-04-19 | 东莞宇龙通信科技有限公司 | 一种弧度检测装置 |
KR102413483B1 (ko) * | 2021-07-28 | 2022-06-28 | 주식회사 프로시스템 | 3차원 곡면 형상 검사 장치 및 3차원 곡면 형상 검사 방법 |
KR102599039B1 (ko) * | 2021-08-13 | 2023-11-06 | 권중학 | 백패널 열변형 측정지그 |
CN115556025B (zh) * | 2022-12-05 | 2023-03-14 | 成都市鸿侠科技有限责任公司 | 一种自适应曲率的蒙皮渗透检测托架 |
KR102611367B1 (ko) * | 2023-03-30 | 2023-12-08 | 도림공업(주) | 에어백박스 검사 장치 |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6367903U (ja) * | 1986-10-24 | 1988-05-07 | ||
JPS63142710U (ja) * | 1987-03-12 | 1988-09-20 | ||
JPH06235603A (ja) * | 1993-02-09 | 1994-08-23 | Ngk Insulators Ltd | 最大円筒度検査装置 |
CN102252643A (zh) * | 2011-04-20 | 2011-11-23 | 中海阳新能源电力股份有限公司 | 太阳能热发电反射镜镜片曲面测试系统 |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201780094U (zh) * | 2010-06-22 | 2011-03-30 | 嘉兴海盛电子有限公司 | 一种研磨盘平面度测量仪 |
CN202885758U (zh) * | 2012-05-04 | 2013-04-17 | 上海申菲激光光学系统有限公司 | 方形掩膜版玻璃基片平面度检测仪 |
KR102147084B1 (ko) | 2012-11-15 | 2020-08-24 | 자피오텍 게엠베하 | 소염성 활성 물질 또는 면역 억제성 활성물질로서 델피니딘 복합제 |
-
2017
- 2017-02-17 KR KR1020187018445A patent/KR20180116236A/ko unknown
- 2017-02-17 JP JP2018503031A patent/JP6714882B2/ja active Active
- 2017-02-17 CN CN201780013839.0A patent/CN108779983A/zh active Pending
- 2017-02-17 CN CN202311163098.8A patent/CN117146758A/zh active Pending
- 2017-02-17 WO PCT/JP2017/005963 patent/WO2017150222A1/ja active Application Filing
- 2017-02-23 TW TW106106084A patent/TWI726056B/zh active
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6367903U (ja) * | 1986-10-24 | 1988-05-07 | ||
JPS63142710U (ja) * | 1987-03-12 | 1988-09-20 | ||
JPH06235603A (ja) * | 1993-02-09 | 1994-08-23 | Ngk Insulators Ltd | 最大円筒度検査装置 |
CN102252643A (zh) * | 2011-04-20 | 2011-11-23 | 中海阳新能源电力股份有限公司 | 太阳能热发电反射镜镜片曲面测试系统 |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107966082A (zh) * | 2017-11-27 | 2018-04-27 | 宁波邦盛汽车零部件有限公司 | 一种用于检测汽车曲面零件面轮廓度的检具 |
CN110715793A (zh) * | 2018-07-12 | 2020-01-21 | 住友化学株式会社 | 载物台、物性测定装置及测定方法 |
JP2020016645A (ja) * | 2018-07-12 | 2020-01-30 | 住友化学株式会社 | ステージ、物性測定装置および測定方法 |
JP7343314B2 (ja) | 2018-07-12 | 2023-09-12 | 住友化学株式会社 | ステージ、物性測定装置および測定方法 |
CN110715793B (zh) * | 2018-07-12 | 2023-11-28 | 住友化学株式会社 | 载物台、物性测定装置及测定方法 |
CN109772723A (zh) * | 2019-03-14 | 2019-05-21 | 福耀集团长春有限公司 | 一种汽车玻璃检测系统及检测方法 |
CN109772723B (zh) * | 2019-03-14 | 2021-05-28 | 福耀集团长春有限公司 | 一种汽车玻璃检测系统及检测方法 |
CN111928748A (zh) * | 2019-05-13 | 2020-11-13 | 安徽科瑞特模塑有限公司 | 一种车辆导流罩加工用通用检具 |
CN111928748B (zh) * | 2019-05-13 | 2022-05-13 | 安徽科瑞特模塑有限公司 | 一种车辆导流罩加工用通用检具 |
Also Published As
Publication number | Publication date |
---|---|
KR20180116236A (ko) | 2018-10-24 |
CN108779983A (zh) | 2018-11-09 |
JP6714882B2 (ja) | 2020-07-01 |
JPWO2017150222A1 (ja) | 2018-12-20 |
CN117146758A (zh) | 2023-12-01 |
TWI726056B (zh) | 2021-05-01 |
TW201734440A (zh) | 2017-10-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
WO2017150222A1 (ja) | 形状測定装置 | |
US7440089B2 (en) | Method of measuring decentering of lens | |
BR112015024512B1 (pt) | Método e sistema para determinar a estrutura espacial de um objeto, método para determinar o efeito óptico dependente de localização e direção de um objeto e uso de um sistema | |
JP4049272B2 (ja) | 光学式3次元測定機の検査マスタ用基準部材 | |
WO2020004222A1 (ja) | 検査マスタ | |
CN209842399U (zh) | 机床几何误差及旋转台转角定位误差检定装置 | |
CN111556953A (zh) | 用于测量多个待评估材料的中凹表面和参考材料的中凹表面之间的几何偏差的方法 | |
JP4584029B2 (ja) | 3次元測定機の校正治具及び校正方法 | |
CN102840833A (zh) | 晶圆厚度测量方法及装置 | |
US7349161B1 (en) | Molding lens with indentation for measuring eccentricity and method for measuring eccentricity thereof | |
JP2008008879A (ja) | 測定装置、測定基準及び精密工作機械 | |
JP2013130417A (ja) | ガラス板の反り測定方法およびガラス板の製造方法 | |
CN103837091A (zh) | 一种玻璃翘曲度测试装置及方法 | |
Dong et al. | Developing on-machine 3D profile measurement for deterministic fabrication of aspheric mirrors | |
Jäger | Three-dimensional nanopositioning and nanomeasuring machine with a resolution of 0.1 nm | |
CN1327412C (zh) | 硬磁盘驱动器磁头浮动高度测试仪的校准系统和方法 | |
US20060192979A1 (en) | Optical measuring process and precision measuring machine for determining the deviations from ideal shape of technically polished surfaces | |
JP4326356B2 (ja) | 位相補正値測定方法 | |
Michal et al. | Swing arm profilometer as a tool for measuring the shape of large optical surfaces | |
JP7201208B2 (ja) | 校正ゲージ及び校正方法 | |
GB2499660A (en) | Surface measurement apparatus and calibration method | |
CN106969682A (zh) | 测量装置 | |
KR20120075901A (ko) | 사출물 검사 장치 | |
KR200450894Y1 (ko) | 고체의 굴절률 측정장치 | |
JP6482061B2 (ja) | マスクステージ及びステージ装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ENP | Entry into the national phase |
Ref document number: 20187018445 Country of ref document: KR Kind code of ref document: A |
|
WWE | Wipo information: entry into national phase |
Ref document number: 2018503031 Country of ref document: JP |
|
NENP | Non-entry into the national phase |
Ref country code: DE |
|
121 | Ep: the epo has been informed by wipo that ep was designated in this application |
Ref document number: 17759691 Country of ref document: EP Kind code of ref document: A1 |
|
122 | Ep: pct application non-entry in european phase |
Ref document number: 17759691 Country of ref document: EP Kind code of ref document: A1 |