JP7313131B2 - 3次元半導体メモリ装置及びその製造方法 - Google Patents
3次元半導体メモリ装置及びその製造方法 Download PDFInfo
- Publication number
- JP7313131B2 JP7313131B2 JP2018210362A JP2018210362A JP7313131B2 JP 7313131 B2 JP7313131 B2 JP 7313131B2 JP 2018210362 A JP2018210362 A JP 2018210362A JP 2018210362 A JP2018210362 A JP 2018210362A JP 7313131 B2 JP7313131 B2 JP 7313131B2
- Authority
- JP
- Japan
- Prior art keywords
- vertical
- memory device
- pattern
- semiconductor memory
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000004065 semiconductor Substances 0.000 title claims description 263
- 238000004519 manufacturing process Methods 0.000 title description 14
- 238000013500 data storage Methods 0.000 claims description 76
- 239000000758 substrate Substances 0.000 claims description 52
- 238000009413 insulation Methods 0.000 claims description 11
- 238000003860 storage Methods 0.000 claims description 9
- 230000000903 blocking effect Effects 0.000 claims description 8
- 230000000149 penetrating effect Effects 0.000 claims description 8
- 239000010410 layer Substances 0.000 description 168
- 239000010408 film Substances 0.000 description 64
- 101000984710 Homo sapiens Lymphocyte-specific protein 1 Proteins 0.000 description 43
- 102100027105 Lymphocyte-specific protein 1 Human genes 0.000 description 43
- 238000000034 method Methods 0.000 description 31
- 101100455541 Drosophila melanogaster Lsp2 gene Proteins 0.000 description 30
- 101000607909 Homo sapiens Ubiquitin carboxyl-terminal hydrolase 1 Proteins 0.000 description 28
- 102100039865 Ubiquitin carboxyl-terminal hydrolase 1 Human genes 0.000 description 28
- 230000008569 process Effects 0.000 description 27
- 238000005530 etching Methods 0.000 description 26
- 230000002093 peripheral effect Effects 0.000 description 26
- 239000012212 insulator Substances 0.000 description 25
- 239000011229 interlayer Substances 0.000 description 23
- 239000000463 material Substances 0.000 description 19
- 101000939517 Homo sapiens Ubiquitin carboxyl-terminal hydrolase 2 Proteins 0.000 description 14
- 102100029643 Ubiquitin carboxyl-terminal hydrolase 2 Human genes 0.000 description 14
- 239000012535 impurity Substances 0.000 description 14
- 239000010409 thin film Substances 0.000 description 13
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 12
- 229910052710 silicon Inorganic materials 0.000 description 12
- 239000010703 silicon Substances 0.000 description 12
- 239000011810 insulating material Substances 0.000 description 10
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 7
- 230000010354 integration Effects 0.000 description 7
- 229910052814 silicon oxide Inorganic materials 0.000 description 7
- 229910052751 metal Inorganic materials 0.000 description 6
- 239000002184 metal Substances 0.000 description 6
- 229910052581 Si3N4 Inorganic materials 0.000 description 5
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 5
- 102100029563 Somatostatin Human genes 0.000 description 5
- 239000013256 coordination polymer Substances 0.000 description 5
- 229910052732 germanium Inorganic materials 0.000 description 5
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 5
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 5
- 102100030851 Cortistatin Human genes 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- LEVVHYCKPQWKOP-UHFFFAOYSA-N [Si].[Ge] Chemical compound [Si].[Ge] LEVVHYCKPQWKOP-UHFFFAOYSA-N 0.000 description 3
- 239000005380 borophosphosilicate glass Substances 0.000 description 3
- 239000005388 borosilicate glass Substances 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000005360 phosphosilicate glass Substances 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 238000009966 trimming Methods 0.000 description 3
- 229910000530 Gallium indium arsenide Inorganic materials 0.000 description 2
- 102100031885 General transcription and DNA repair factor IIH helicase subunit XPB Human genes 0.000 description 2
- 101000920748 Homo sapiens General transcription and DNA repair factor IIH helicase subunit XPB Proteins 0.000 description 2
- 101100049574 Human herpesvirus 6A (strain Uganda-1102) U5 gene Proteins 0.000 description 2
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 2
- KXNLCSXBJCPWGL-UHFFFAOYSA-N [Ga].[As].[In] Chemical compound [Ga].[As].[In] KXNLCSXBJCPWGL-UHFFFAOYSA-N 0.000 description 2
- FTWRSWRBSVXQPI-UHFFFAOYSA-N alumanylidynearsane;gallanylidynearsane Chemical compound [As]#[Al].[As]#[Ga] FTWRSWRBSVXQPI-UHFFFAOYSA-N 0.000 description 2
- 238000000231 atomic layer deposition Methods 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000002955 isolation Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- 239000005368 silicate glass Substances 0.000 description 2
- 101150064834 ssl1 gene Proteins 0.000 description 2
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- HMDDXIMCDZRSNE-UHFFFAOYSA-N [C].[Si] Chemical compound [C].[Si] HMDDXIMCDZRSNE-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 239000002717 carbon nanostructure Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 239000000460 chlorine Substances 0.000 description 1
- 125000001309 chloro group Chemical class Cl* 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 229910021641 deionized water Inorganic materials 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- -1 etc.) Substances 0.000 description 1
- 238000007667 floating Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 229910000449 hafnium oxide Inorganic materials 0.000 description 1
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910021423 nanocrystalline silicon Inorganic materials 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 230000007261 regionalization Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 1
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 1
- 239000010936 titanium Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052723 transition metal Inorganic materials 0.000 description 1
- 150000003624 transition metals Chemical class 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/50—EEPROM devices comprising charge-trapping gate insulators characterised by the boundary region between the core and peripheral circuit regions
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/20—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B41/23—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B41/27—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/10—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the top-view layout
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
- H10B41/35—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region with a cell select transistor, e.g. NAND
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/40—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region
- H10B41/41—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the peripheral circuit region of a memory region comprising a cell select transistor, e.g. NAND
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/10—EEPROM devices comprising charge-trapping gate insulators characterised by the top-view layout
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B43/23—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B43/27—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/30—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region
- H10B43/35—EEPROM devices comprising charge-trapping gate insulators characterised by the memory core region with cell select transistors, e.g. NAND
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/40—EEPROM devices comprising charge-trapping gate insulators characterised by the peripheral circuit region
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/10—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions with semiconductor regions connected to an electrode not carrying current to be rectified, amplified or switched and such electrode being part of a semiconductor device which comprises three or more electrodes
- H01L29/1025—Channel region of field-effect devices
- H01L29/1029—Channel region of field-effect devices of field-effect transistors
- H01L29/1033—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure
- H01L29/1037—Channel region of field-effect devices of field-effect transistors with insulated gate, e.g. characterised by the length, the width, the geometric contour or the doping structure and non-planar channel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/41—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions
- H01L29/423—Electrodes ; Multistep manufacturing processes therefor characterised by their shape, relative sizes or dispositions not carrying the current to be rectified, amplified or switched
- H01L29/42312—Gate electrodes for field effect devices
- H01L29/42316—Gate electrodes for field effect devices for field-effect transistors
- H01L29/4232—Gate electrodes for field effect devices for field-effect transistors with insulated gate
- H01L29/42356—Disposition, e.g. buried gate electrode
- H01L29/4236—Disposition, e.g. buried gate electrode within a trench, e.g. trench gate electrode, groove gate electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/792—Field effect transistors with field effect produced by an insulated gate with charge trapping gate insulator, e.g. MNOS-memory transistors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/792—Field effect transistors with field effect produced by an insulated gate with charge trapping gate insulator, e.g. MNOS-memory transistors
- H01L29/7926—Vertical transistors, i.e. transistors having source and drain not in the same horizontal plane
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/50—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the boundary region between the core region and the peripheral circuit region
Description
11 バッファ絶縁膜
15 ゲート絶縁膜
50 平坦絶縁膜
60 第1層間絶縁膜
70 第2層間絶縁膜
80 第3層間絶縁膜
BL ビットライン
BPLG ビットラインコンタクトプラグ
BLPAD ビットラインパッド
CAR セルアレイ領域
CNR 連結領域
CPLG セルコンタクトプラグ
CSL 共通ソースライン
CSP 共通ソースプラグ
CSTR セルストリング
DMC ダミーセルトランジスタ
DPAD ダミービットラインパッド
EL 電極
GST 接地選択トランジスタ
ILD 絶縁膜
MCT メモリセルトランジスタ
ST 電極構造体
VS1 第1垂直構造体
VS2 第2垂直構造体
Claims (24)
- 第1領域及び第2領域を含む半導体層と、
前記第1領域で前記半導体層の上面に対して垂直な第1方向に延在される複数の第1垂直構造体と、
前記第2領域で前記第1方向に延在される複数の第2垂直構造体と、を含み、
前記第1垂直構造体の各々は、前記第1方向に延在されて前記半導体層と接触する垂直半導体パターン及び前記垂直半導体パターンを囲む第1データ格納パターンを含み、
前記第2垂直構造体の各々は、前記第1方向に延在されて前記半導体層と接触する絶縁構造体及び前記絶縁構造体を囲む第2データ格納パターンを含み、前記絶縁構造体と前記第2データ格納パターンとの間に半導体パターンを有しない、3次元半導体メモリ装置。 - 前記第1垂直構造体は、第1幅を有し、前記第2垂直構造体は、前記第1幅より大きい第2幅を有する、請求項1に記載の3次元半導体メモリ装置。
- 前記第1データ格納パターンは、第1厚さを有し、前記第2データ格納パターンは、前記第1厚さと実質的に同一であるか、或いは小さい第2厚さを有する、請求項2に記載の3次元半導体メモリ装置。
- 前記第1及び第2データ格納パターンの各々は、順に積層されたトンネル絶縁膜、電荷格納膜、及びブロッキング絶縁膜を含む、請求項1に記載の3次元半導体メモリ装置。
- 前記第2垂直構造体の各々の前記絶縁構造体の底面は、前記半導体層の前記上面より下に位置する、請求項1に記載の3次元半導体メモリ装置。
- 前記第2垂直構造体の各々の前記絶縁構造体の底面は、前記第2データ格納パターンの底面より下に位置する、請求項1に記載の3次元半導体メモリ装置。
- 前記半導体層は、
前記第1領域で前記第1垂直構造体の各々の前記垂直半導体パターンと連結される第1エピタキシャル層と、
前記第2領域で前記第2垂直構造体の各々の前記絶縁構造体と接触する第2エピタキシャル層と、を含む、請求項1に記載の3次元半導体メモリ装置。 - 前記第1エピタキシャル層は、第1高さを有し、前記第2エピタキシャル層は、前記第1高さより小さい第2高さを有する、請求項7に記載の3次元半導体メモリ装置。
- 前記半導体層上に前記第1方向に積層された電極を含む電極構造体をさらに含み、
前記電極構造体は、前記第1領域で前記半導体層の前記上面に平行である第2方向に延在され、前記第2領域で階段式構造を有する、請求項1に記載の3次元半導体メモリ装置。 - 前記電極の各々は、前記第2領域で前記階段式構造をなすパッド部を含み、
前記第2垂直構造体のうち一部は、前記各電極の前記パッド部を貫通する、請求項9に記載の3次元半導体メモリ装置。 - 前記電極のパッド部に各々接続されるコンタクトプラグをさらに含み、
前記第2垂直構造体は、平面視で、前記各コンタクトプラグを囲む、請求項10に記載の3次元半導体メモリ装置。 - 前記コンタクトプラグは、前記電極のうち最下層電極に接続される下部コンタクトプラグを含み、
前記下部コンタクトプラグの幅は、前記コンタクトプラグの幅より大きい、請求項11に記載の3次元半導体メモリ装置。 - 第1領域及び第2領域を含む基板と、
前記基板上に垂直方向に積層された電極を含む電極構造体と、
前記第1領域で前記電極構造体を貫通する複数の第1垂直構造体と、
前記第2領域で前記電極構造体を貫通する複数の第2垂直構造体と、を含み、
前記第1垂直構造体の各々は、前記電極構造体を貫通する垂直半導体パターン及び前記垂直半導体パターンと前記電極構造体との間に配置された第1データ格納パターンを含み、
前記第2垂直構造体の各々は、前記電極構造体を貫通する絶縁構造体及び前記絶縁構造体と前記電極構造体との間に配置された第2データ格納パターンを含み、前記絶縁構造体と前記第2データ格納パターンとの間に半導体パターンを有さず、
前記絶縁構造体の底面は、前記垂直半導体パターンの底面及び前記第2データ格納パターンの底面より下に位置する、3次元半導体メモリ装置。 - 前記第2データ格納パターンは、前記絶縁構造体の側壁を囲む、請求項13に記載の3次元半導体メモリ装置。
- 前記第1垂直構造体は、第1幅を有し、前記第2垂直構造体は、前記第1幅より大きい第2幅を有する、請求項13に記載の3次元半導体メモリ装置。
- 前記第1データ格納パターンは、前記垂直半導体パターンの側壁上で第1厚さを有し、
前記第2データ格納パターンは、前記絶縁構造体の側壁上で前記第1厚さと実質的に同一であるか、或いは小さい第2厚さを有する、請求項15に記載の3次元半導体メモリ装置。 - 前記第1垂直構造体及び前記第2垂直構造体の各々は、順に積層されたトンネル絶縁膜、電荷格納膜、及びブロッキング絶縁膜を含む、請求項13に記載の3次元半導体メモリ装置。
- 前記垂直半導体パターンの厚さは、前記絶縁構造体の幅の1/2より小さい、請求項13に記載の3次元半導体メモリ装置。
- 前記絶縁構造体は、前記基板と直接接触する、請求項13に記載の3次元半導体メモリ装置。
- 前記第1垂直構造体の各々は、前記基板と前記垂直半導体パターンとの間の第1エピタキシャル層を含み、
前記第2垂直構造体の各々は、前記基板と前記絶縁構造体との間に第2エピタキシャル層を含み、
前記絶縁構造体の底面は、前記第2エピタキシャル層と接触する、請求項13に記載の3次元半導体メモリ装置。 - 前記第2垂直構造体は、前記電極構造体の一部分を貫通する、請求項13に記載の3次元半導体メモリ装置。
- 前記電極構造体は、前記第2領域で階段式構造を有し、前記電極の各々は、前記第2領域で階段式構造をなすパッド部を含み、
前記第2垂直構造体は、前記各電極の前記パッド部を貫通する、請求項13に記載の3次元半導体メモリ装置。 - 前記第2領域で前記電極の前記パッド部に各々接続されるセルコンタクトプラグをさらに含み、
前記セルコンタクトプラグの各々は、互いに隣接する前記第2垂直構造体の間に配置される、請求項22に記載の3次元半導体メモリ装置。 - 前記セルコンタクトプラグの各々は、平面視で、前記第2垂直構造体によって囲まれている、請求項23に記載の3次元半導体メモリ装置。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR10-2017-0155163 | 2017-11-20 | ||
KR1020170155163A KR102522164B1 (ko) | 2017-11-20 | 2017-11-20 | 3차원 반도체 메모리 장치 및 그 제조 방법 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019096870A JP2019096870A (ja) | 2019-06-20 |
JP7313131B2 true JP7313131B2 (ja) | 2023-07-24 |
Family
ID=63713623
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2018210362A Active JP7313131B2 (ja) | 2017-11-20 | 2018-11-08 | 3次元半導体メモリ装置及びその製造方法 |
Country Status (5)
Country | Link |
---|---|
US (2) | US10777565B2 (ja) |
EP (1) | EP3493260A1 (ja) |
JP (1) | JP7313131B2 (ja) |
KR (1) | KR102522164B1 (ja) |
CN (1) | CN109817628B (ja) |
Families Citing this family (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR102570901B1 (ko) * | 2017-11-20 | 2023-08-25 | 삼성전자주식회사 | 3차원 반도체 소자 |
KR102522164B1 (ko) * | 2017-11-20 | 2023-04-17 | 삼성전자주식회사 | 3차원 반도체 메모리 장치 및 그 제조 방법 |
KR20190122431A (ko) * | 2018-04-20 | 2019-10-30 | 삼성전자주식회사 | 반도체 메모리 소자 |
KR20200024630A (ko) | 2018-08-28 | 2020-03-09 | 삼성전자주식회사 | 3차원 반도체 메모리 장치 |
KR102546653B1 (ko) * | 2018-12-11 | 2023-06-22 | 삼성전자주식회사 | 콘택 플러그를 갖는 반도체 소자 |
KR20200078784A (ko) * | 2018-12-21 | 2020-07-02 | 삼성전자주식회사 | 3차원 반도체 메모리 장치 |
KR20200116573A (ko) * | 2019-04-01 | 2020-10-13 | 삼성전자주식회사 | 반도체 소자 |
KR20200132136A (ko) | 2019-05-15 | 2020-11-25 | 삼성전자주식회사 | 3차원 반도체 메모리 장치 |
KR20210002775A (ko) * | 2019-06-27 | 2021-01-11 | 삼성전자주식회사 | 반도체 메모리 소자 |
KR20210011214A (ko) * | 2019-07-22 | 2021-02-01 | 삼성전자주식회사 | 도핑 영역을 갖는 저항 소자 및 이를 포함하는 반도체 소자 |
KR20210047717A (ko) | 2019-10-22 | 2021-04-30 | 삼성전자주식회사 | 수직형 메모리 장치 |
KR20210090929A (ko) * | 2020-01-13 | 2021-07-21 | 에스케이하이닉스 주식회사 | 반도체 장치 및 그의 제조 방법 |
KR20210156460A (ko) * | 2020-06-18 | 2021-12-27 | 삼성전자주식회사 | 수직형 메모리 장치 및 그 제조 방법 |
KR20210157027A (ko) * | 2020-06-19 | 2021-12-28 | 삼성전자주식회사 | 3차원 반도체 메모리 장치 |
KR20220039970A (ko) | 2020-09-22 | 2022-03-30 | 삼성전자주식회사 | 반도체 장치 및 이를 포함하는 전자 시스템 |
KR20220060382A (ko) * | 2020-11-04 | 2022-05-11 | 에스케이하이닉스 주식회사 | 반도체 장치 및 반도체 장치의 제조 방법 |
JP2022127522A (ja) * | 2021-02-19 | 2022-08-31 | キオクシア株式会社 | 半導体記憶装置 |
KR20220148630A (ko) * | 2021-04-29 | 2022-11-07 | 삼성전자주식회사 | 반도체 메모리 소자 |
JP2023045154A (ja) * | 2021-09-21 | 2023-04-03 | キオクシア株式会社 | 半導体記憶装置 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150145015A1 (en) | 2013-11-26 | 2015-05-28 | Yoocheol Shin | Three-dimensional semiconductor memory device |
WO2017034646A1 (en) | 2015-08-21 | 2017-03-02 | Sandisk Technologies Llc | A three dimensional memory device with epitaxial semiconductor pedestal for peripheral transistors |
US20170077137A1 (en) | 2015-09-10 | 2017-03-16 | Ki Jeong Kim | Memory device and method of manufacturing the same |
US20170103997A1 (en) | 2015-10-08 | 2017-04-13 | Samsung Electronics Co., Ltd. | Semiconductor device and method of fabricating the same |
US20170221921A1 (en) | 2016-01-28 | 2017-08-03 | Kohji Kanamori | Vertical memory devices and methods of manufacturing the same |
US20170294445A1 (en) | 2016-04-11 | 2017-10-12 | Yong-Hoon Son | Nonvolatile semiconductor devices including non-circular shaped channel patterns and methods of manufacturing the same |
Family Cites Families (40)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8541831B2 (en) | 2008-12-03 | 2013-09-24 | Samsung Electronics Co., Ltd. | Nonvolatile memory device and method for fabricating the same |
KR101549858B1 (ko) * | 2009-07-31 | 2015-09-03 | 삼성전자주식회사 | 수직 채널 구조의 플래쉬 메모리 소자 |
KR20110015337A (ko) | 2009-08-07 | 2011-02-15 | 주식회사 하이닉스반도체 | 수직채널형 비휘발성 메모리 소자 제조 방법 |
KR20120003677A (ko) | 2010-07-05 | 2012-01-11 | 삼성전자주식회사 | 반도체 장치 및 그의 형성 방법 |
KR101738103B1 (ko) | 2010-09-10 | 2017-05-22 | 삼성전자주식회사 | 3차원 반도체 기억 소자 |
KR101787041B1 (ko) * | 2010-11-17 | 2017-10-18 | 삼성전자주식회사 | 식각방지막이 구비된 반도체 소자 및 그 제조방법 |
KR101113766B1 (ko) | 2010-12-31 | 2012-02-29 | 주식회사 하이닉스반도체 | 비휘발성메모리장치 및 그 제조 방법 |
US9076879B2 (en) * | 2012-09-11 | 2015-07-07 | Samsung Electronics Co., Ltd. | Three-dimensional semiconductor memory device and method for fabricating the same |
US9230987B2 (en) | 2014-02-20 | 2016-01-05 | Sandisk Technologies Inc. | Multilevel memory stack structure and methods of manufacturing the same |
KR102078852B1 (ko) * | 2013-08-29 | 2020-02-18 | 삼성전자 주식회사 | 반도체 장치 및 그 제조 방법 |
KR102128465B1 (ko) * | 2014-01-03 | 2020-07-09 | 삼성전자주식회사 | 수직 구조의 비휘발성 메모리 소자 |
KR102154093B1 (ko) | 2014-02-14 | 2020-09-10 | 삼성전자주식회사 | 3차원 반도체 소자 |
US9224747B2 (en) | 2014-03-26 | 2015-12-29 | Sandisk Technologies Inc. | Vertical NAND device with shared word line steps |
KR102118159B1 (ko) | 2014-05-20 | 2020-06-03 | 삼성전자주식회사 | 반도체 소자 및 그 제조 방법 |
KR102150253B1 (ko) * | 2014-06-24 | 2020-09-02 | 삼성전자주식회사 | 반도체 장치 |
KR102240024B1 (ko) * | 2014-08-22 | 2021-04-15 | 삼성전자주식회사 | 반도체 장치, 반도체 장치의 제조방법 및 에피택시얼층의 형성방법 |
US9412749B1 (en) | 2014-09-19 | 2016-08-09 | Sandisk Technologies Llc | Three dimensional memory device having well contact pillar and method of making thereof |
KR20160039739A (ko) * | 2014-10-01 | 2016-04-12 | 삼성전자주식회사 | 하드 마스크막의 형성 방법 및 이를 이용한 반도체 소자의 제조 방법 |
KR20160045457A (ko) | 2014-10-17 | 2016-04-27 | 에스케이하이닉스 주식회사 | 반도체 장치 및 그 제조 방법 |
KR102251366B1 (ko) * | 2014-11-03 | 2021-05-14 | 삼성전자주식회사 | 반도체 소자 및 그 제조 방법 |
KR102341716B1 (ko) * | 2015-01-30 | 2021-12-27 | 삼성전자주식회사 | 반도체 메모리 장치 및 그 제조 방법 |
US9478561B2 (en) * | 2015-01-30 | 2016-10-25 | Samsung Electronics Co., Ltd. | Semiconductor memory device and method of fabricating the same |
KR102337175B1 (ko) * | 2015-03-10 | 2021-12-10 | 삼성전자주식회사 | 수직형 메모리 장치 및 이의 제조 방법 |
KR102333478B1 (ko) * | 2015-03-31 | 2021-12-03 | 삼성전자주식회사 | 3차원 반도체 장치 |
KR102334914B1 (ko) * | 2015-04-01 | 2021-12-07 | 삼성전자주식회사 | 3차원 반도체 소자 |
US9627403B2 (en) | 2015-04-30 | 2017-04-18 | Sandisk Technologies Llc | Multilevel memory stack structure employing support pillar structures |
KR102358302B1 (ko) | 2015-05-21 | 2022-02-04 | 삼성전자주식회사 | 수직형 낸드 플래시 메모리 소자 및 그 제조 방법 |
US9589981B2 (en) * | 2015-06-15 | 2017-03-07 | Sandisk Technologies Llc | Passive devices for integration with three-dimensional memory devices |
KR102378820B1 (ko) | 2015-08-07 | 2022-03-28 | 삼성전자주식회사 | 메모리 장치 |
KR102461150B1 (ko) * | 2015-09-18 | 2022-11-01 | 삼성전자주식회사 | 3차원 반도체 메모리 장치 |
KR20170036878A (ko) * | 2015-09-18 | 2017-04-03 | 삼성전자주식회사 | 3차원 반도체 메모리 장치 |
US9806089B2 (en) | 2015-09-21 | 2017-10-31 | Sandisk Technologies Llc | Method of making self-assembling floating gate electrodes for a three-dimensional memory device |
US9711528B2 (en) | 2015-10-06 | 2017-07-18 | Kabushiki Kaisha Toshiba | Semiconductor memory device |
US9419013B1 (en) * | 2015-10-08 | 2016-08-16 | Samsung Electronics Co., Ltd. | Semiconductor device and method of manufacturing the same |
US9799670B2 (en) | 2015-11-20 | 2017-10-24 | Sandisk Technologies Llc | Three dimensional NAND device containing dielectric pillars for a buried source line and method of making thereof |
KR102611438B1 (ko) * | 2016-01-07 | 2023-12-08 | 삼성전자주식회사 | 반도체 메모리 소자 |
US9786681B1 (en) * | 2016-04-01 | 2017-10-10 | Sandisk Technologies Llc | Multilevel memory stack structure employing stacks of a support pedestal structure and a support pillar structure |
US9576967B1 (en) * | 2016-06-30 | 2017-02-21 | Sandisk Technologies Llc | Method of suppressing epitaxial growth in support openings and three-dimensional memory device containing non-epitaxial support pillars in the support openings |
US9754963B1 (en) | 2016-08-22 | 2017-09-05 | Sandisk Technologies Llc | Multi-tier memory stack structure containing two types of support pillar structures |
KR102522164B1 (ko) * | 2017-11-20 | 2023-04-17 | 삼성전자주식회사 | 3차원 반도체 메모리 장치 및 그 제조 방법 |
-
2017
- 2017-11-20 KR KR1020170155163A patent/KR102522164B1/ko active IP Right Grant
-
2018
- 2018-06-25 US US16/017,013 patent/US10777565B2/en active Active
- 2018-09-26 EP EP18196741.5A patent/EP3493260A1/en active Pending
- 2018-11-08 JP JP2018210362A patent/JP7313131B2/ja active Active
- 2018-11-19 CN CN201811375084.1A patent/CN109817628B/zh active Active
-
2020
- 2020-09-03 US US17/011,051 patent/US11424259B2/en active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20150145015A1 (en) | 2013-11-26 | 2015-05-28 | Yoocheol Shin | Three-dimensional semiconductor memory device |
WO2017034646A1 (en) | 2015-08-21 | 2017-03-02 | Sandisk Technologies Llc | A three dimensional memory device with epitaxial semiconductor pedestal for peripheral transistors |
US20170077137A1 (en) | 2015-09-10 | 2017-03-16 | Ki Jeong Kim | Memory device and method of manufacturing the same |
US20170103997A1 (en) | 2015-10-08 | 2017-04-13 | Samsung Electronics Co., Ltd. | Semiconductor device and method of fabricating the same |
US20170221921A1 (en) | 2016-01-28 | 2017-08-03 | Kohji Kanamori | Vertical memory devices and methods of manufacturing the same |
US20170294445A1 (en) | 2016-04-11 | 2017-10-12 | Yong-Hoon Son | Nonvolatile semiconductor devices including non-circular shaped channel patterns and methods of manufacturing the same |
Also Published As
Publication number | Publication date |
---|---|
US11424259B2 (en) | 2022-08-23 |
KR20190057803A (ko) | 2019-05-29 |
US20200402991A1 (en) | 2020-12-24 |
CN109817628B (zh) | 2024-04-09 |
US10777565B2 (en) | 2020-09-15 |
KR102522164B1 (ko) | 2023-04-17 |
US20190157283A1 (en) | 2019-05-23 |
EP3493260A1 (en) | 2019-06-05 |
CN109817628A (zh) | 2019-05-28 |
JP2019096870A (ja) | 2019-06-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7313131B2 (ja) | 3次元半導体メモリ装置及びその製造方法 | |
US10854622B2 (en) | Vertical memory devices and methods of manufacturing the same | |
US10790358B2 (en) | Three-dimensional semiconductor memory devices | |
US10490570B2 (en) | Method of fabricating vertical memory devices having a plurality of vertical channels on a channel layer | |
US9905664B2 (en) | Semiconductor devices and methods of manufacturing the same | |
KR102533145B1 (ko) | 3차원 반도체 메모리 장치 | |
US11696442B2 (en) | Vertical memory devices and methods of manufacturing the same | |
US10177164B2 (en) | Semiconductor device | |
US10916554B2 (en) | Three-dimensional semiconductor memory device | |
US10998330B2 (en) | Semiconductor device having a peripheral active pattern and method of manufacturing the same | |
US10700085B2 (en) | Vertical memory devices | |
JP7303622B2 (ja) | 3次元半導体メモリ装置 | |
KR20200080464A (ko) | 3차원 반도체 메모리 장치 | |
KR20200051100A (ko) | 3차원 반도체 메모리 장치 및 그 제조 방법 | |
KR102532496B1 (ko) | 3차원 반도체 메모리 장치 | |
KR20160109989A (ko) | 수직형 메모리 장치 | |
KR20200040351A (ko) | 3차원 반도체 메모리 소자 | |
KR20170042451A (ko) | 반도체 소자 및 이의 제조 방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20211029 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20221206 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230303 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230620 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230711 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7313131 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |