JP7309697B2 - 基板のフィーチャをコバルトで充填する方法および装置 - Google Patents

基板のフィーチャをコバルトで充填する方法および装置 Download PDF

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JP7309697B2
JP7309697B2 JP2020516638A JP2020516638A JP7309697B2 JP 7309697 B2 JP7309697 B2 JP 7309697B2 JP 2020516638 A JP2020516638 A JP 2020516638A JP 2020516638 A JP2020516638 A JP 2020516638A JP 7309697 B2 JP7309697 B2 JP 7309697B2
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cobalt
feature
substrate
chamber
vapor deposition
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JP2020534702A (ja
JP2020534702A5 (https=
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ウェンティン ホウ
ジャンシン レイ
ジョン ジュ リー
ロン タオ
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Applied Materials Inc
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Applied Materials Inc
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