TWI782094B - 用鈷填充基板特徵的方法與設備 - Google Patents

用鈷填充基板特徵的方法與設備 Download PDF

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TWI782094B
TWI782094B TW107133304A TW107133304A TWI782094B TW I782094 B TWI782094 B TW I782094B TW 107133304 A TW107133304 A TW 107133304A TW 107133304 A TW107133304 A TW 107133304A TW I782094 B TWI782094 B TW I782094B
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cobalt
feature
substrate
layer
chamber
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TW107133304A
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Chinese (zh)
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TW201925532A (zh
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侯文婷
雷建新
李正周
龍 陶
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美商應用材料股份有限公司
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