JP7283053B2 - 炭化珪素半導体装置、炭化珪素半導体組立体および炭化珪素半導体装置の製造方法 - Google Patents
炭化珪素半導体装置、炭化珪素半導体組立体および炭化珪素半導体装置の製造方法 Download PDFInfo
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- JP7283053B2 JP7283053B2 JP2018211827A JP2018211827A JP7283053B2 JP 7283053 B2 JP7283053 B2 JP 7283053B2 JP 2018211827 A JP2018211827 A JP 2018211827A JP 2018211827 A JP2018211827 A JP 2018211827A JP 7283053 B2 JP7283053 B2 JP 7283053B2
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- titanium
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- 239000004065 semiconductor Substances 0.000 title claims description 145
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 78
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 76
- 238000000034 method Methods 0.000 title claims description 41
- 238000004519 manufacturing process Methods 0.000 title claims description 21
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 178
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 127
- 239000010936 titanium Substances 0.000 claims description 122
- 229910052751 metal Inorganic materials 0.000 claims description 120
- 239000002184 metal Substances 0.000 claims description 120
- 229910052719 titanium Inorganic materials 0.000 claims description 120
- 239000000758 substrate Substances 0.000 claims description 99
- 229910052759 nickel Inorganic materials 0.000 claims description 81
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 71
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims description 59
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- 239000010931 gold Substances 0.000 claims description 56
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- 229910052750 molybdenum Inorganic materials 0.000 claims description 27
- 239000011733 molybdenum Substances 0.000 claims description 27
- 229910021334 nickel silicide Inorganic materials 0.000 claims description 19
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 claims description 19
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- 125000004432 carbon atom Chemical group C* 0.000 claims description 11
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- 229910021332 silicide Inorganic materials 0.000 claims description 7
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 7
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 5
- QIJNJJZPYXGIQM-UHFFFAOYSA-N 1lambda4,2lambda4-dimolybdacyclopropa-1,2,3-triene Chemical compound [Mo]=C=[Mo] QIJNJJZPYXGIQM-UHFFFAOYSA-N 0.000 claims description 3
- 229910039444 MoC Inorganic materials 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 387
- 238000009792 diffusion process Methods 0.000 description 25
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 7
- PEUPIGGLJVUNEU-UHFFFAOYSA-N nickel silicon Chemical compound [Si].[Ni] PEUPIGGLJVUNEU-UHFFFAOYSA-N 0.000 description 5
- 230000015572 biosynthetic process Effects 0.000 description 4
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- 150000001721 carbon Chemical group 0.000 description 3
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- 239000000463 material Substances 0.000 description 3
- 238000002161 passivation Methods 0.000 description 3
- 238000005476 soldering Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 238000010306 acid treatment Methods 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
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- 239000012535 impurity Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- CNEOGBIICRAWOH-UHFFFAOYSA-N methane;molybdenum Chemical compound C.[Mo] CNEOGBIICRAWOH-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 238000003917 TEM image Methods 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
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- 230000005540 biological transmission Effects 0.000 description 1
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- 238000010030 laminating Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- QPJSUIGXIBEQAC-UHFFFAOYSA-N n-(2,4-dichloro-5-propan-2-yloxyphenyl)acetamide Chemical compound CC(C)OC1=CC(NC(C)=O)=C(Cl)C=C1Cl QPJSUIGXIBEQAC-UHFFFAOYSA-N 0.000 description 1
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Description
実施の形態にかかる炭化珪素(SiC)半導体装置および炭化珪素半導体組立体の構造について説明する。図1は、実施の形態にかかる炭化珪素半導体組立体の構造を示す断面図である。図1に示す実施の形態にかかる炭化珪素半導体組立体12は、組立工程後の製品であり、ベース基板11に実装された部品として、実施の形態にかかる炭化珪素半導体装置10が作製(製造)された半導体基板(半導体チップ)1を備えたパッケージである。半導体基板1は、はんだ層9を介してベース基板11に接合され実装されている。
次に、チタン層4の組成について検証した。図7は、実施例の金属接続層を電子顕微鏡で観察した様子を模式的に示す断面図である。図7には、実施例の金属接続層7を透過型電子顕微鏡(Transmission Electron Microscope:TEM)で観察した様子を模式的に示す。図8は、図7の切断線A-A’における組成を示す分布図である。図8には、エネルギー分散型X線分光法(EDS:Energy Dispersive X-ray Spectroscopy)により測定した、コンタクト電極3とチタン層4との界面14付近の組成分布を示す。
2 おもて面電極
3 コンタクト電極
3a 炭素層
4 チタン層
4a 高濃度で炭素を含む炭素拡散層
5 ニッケル層
6 金層
7 金属接続層
8 裏面電極
9 はんだ層
10 炭化珪素半導体装置
11 ベース基板
12 炭化珪素半導体組立体
21 モリブデン層
22 ニッケル層
13 レーザーアニール
14 チタン層とコンタクト電極との界面
t1 チタン層の厚さ
t1’ チタン層の初期厚さ
t2 ニッケル層の厚さ
t2’ ニッケル層の初期厚さ
t3 金層の厚さ
t3’ 金層の初期厚さ
t4 高濃度で炭素を含む炭素拡散層の厚さ
t11 モリブデン層の厚さ
t12 ニッケル層の厚さ
Claims (10)
- 炭化珪素からなる半導体基板と、
前記半導体基板の表面に設けられ、前記半導体基板とのオーミックコンタクトを形成する、ニッケルを含むシリサイド層であるコンタクト電極と、
前記コンタクト電極の表面に設けられた金属接続層と、
を備え、
前記金属接続層は、前記コンタクト電極の表面にチタン層、ニッケル層および金層が順に積層された積層構造を有し、
前記チタン層は、前記チタン層と前記コンタクト電極との界面側に高濃度で炭素を含む炭素層を有し、
前記チタン層の形成時の初期厚さは100nm以上300nm以下であり、
前記ニッケル層の形成時の初期厚さは1000nm以上1500nm以下であり、
前記金層の形成時の初期厚さは20nm以上200nm以下であり、
前記コンタクト電極は、金属炭化物からなるカーバイドを含むニッケルシリサイド層であり、
前記コンタクト電極のニッケル原子濃度は、前記金属炭化物を構成する金属の原子濃度よりも高いことを特徴とする炭化珪素半導体装置。 - 前記金属炭化物を構成する金属は、モリブデンまたはチタンであることを特徴とする請求項1に記載の炭化珪素半導体装置。
- 前記金属炭化物を構成する金属は、モリブデンであり、
前記チタン層と前記コンタクト電極との界面に、モリブデンの深さ方向の原子濃度分布のピークと、炭素の深さ方向の原子濃度分布のピークと、を有することを特徴とする請求項1に記載の炭化珪素半導体装置。 - 前記高濃度で炭素を含む炭素層は、少なくとも20原子%の炭素を含み、前記チタン層と前記コンタクト電極との界面の全面に対向することを特徴とする請求項1~3のいずれか一つに記載の炭化珪素半導体装置。
- 炭化珪素からなる半導体基板と、
前記半導体基板の表面に設けられ、前記半導体基板とのオーミックコンタクトを形成する、ニッケルを含むシリサイド層であるコンタクト電極と、
前記コンタクト電極の表面に設けられた金属接続層と、
はんだ層を介して前記金属接続層が接合され、前記半導体基板が実装されたベース基板と、
を備え、
前記金属接続層は、前記コンタクト電極の表面にチタン層、ニッケル層および金層が順に積層された積層構造を有し、
前記チタン層は、前記チタン層と前記コンタクト電極との界面側に高濃度で炭素を含む炭素層を有し、
前記チタン層の組立工程後の厚さは100nm以上300nm以下であり、
前記ニッケル層の組立工程後の厚さは50nm以上であり、
前記コンタクト電極は、金属炭化物からなるカーバイドを含むニッケルシリサイド層であり、
前記コンタクト電極のニッケル原子濃度は、前記金属炭化物を構成する金属の原子濃度よりも高いことを特徴とする炭化珪素半導体組立体。 - 前記金属炭化物を構成する金属は、モリブデンまたはチタンであることを特徴とする請求項5に記載の炭化珪素半導体組立体。
- 前記金属炭化物を構成する金属は、モリブデンであり、
前記チタン層と前記コンタクト電極との界面に、モリブデンの深さ方向の原子濃度分布のピークと、炭素の深さ方向の原子濃度分布のピークと、を有することを特徴とする請求項5に記載の炭化珪素半導体組立体。 - 炭化珪素からなる半導体基板の表面に、ニッケルを含む金属層を形成する第1工程と、
熱処理により前記半導体基板中のシリコン原子と前記金属層中のニッケル原子とを反応させてなるニッケルシリサイド層を、前記半導体基板とのコンタクト電極として形成する第2工程と、
前記コンタクト電極の表面に、チタン層、ニッケル層および金層を順に積層した積層構造を有する金属接続層を形成する第3工程と、
を含み、
前記第3工程では、
前記チタン層の厚さを100nm以上300nm以下とし、
前記ニッケル層の厚さを1000nm以上1500nm以下とし、
前記金層の厚さを20nm以上200nm以下とし、
前記第3工程による熱履歴により、前記第2工程で生じた余剰の炭素原子を前記コンタクト電極側から前記チタン層の内部へ拡散させて、前記チタン層の、前記チタン層と前記コンタクト電極との界面側に高濃度で炭素を含む炭素層を形成することを特徴とする炭化珪素半導体装置の製造方法。 - 前記第1工程は、
前記半導体基板の表面に、金属炭化物からなる第1金属層を形成する工程と、
前記第1金属層の表面に、ニッケルを含む第2金属層を形成する工程と、を含み、
前記第2工程では、前記第1金属層中の金属原子と前記半導体基板中の炭素原子とを反応させてなるカーバイドを含んだ、前記半導体基板中のシリコン原子と前記第2金属層中のニッケル原子とを反応させてなる前記ニッケルシリサイド層を形成することを特徴とする請求項8に記載の炭化珪素半導体装置の製造方法。 - 前記第1工程では、モリブデンまたはチタンからなる前記第1金属層を形成し、
前記第2工程では、モリブデンカーバイドまたはチタンカーバイドを含んだ前記ニッケルシリサイド層を形成することを特徴とする請求項9に記載の炭化珪素半導体装置の製造方法。
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