JP7434908B2 - 炭化珪素半導体装置 - Google Patents
炭化珪素半導体装置 Download PDFInfo
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- JP7434908B2 JP7434908B2 JP2020002469A JP2020002469A JP7434908B2 JP 7434908 B2 JP7434908 B2 JP 7434908B2 JP 2020002469 A JP2020002469 A JP 2020002469A JP 2020002469 A JP2020002469 A JP 2020002469A JP 7434908 B2 JP7434908 B2 JP 7434908B2
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- 239000004065 semiconductor Substances 0.000 title claims description 124
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims description 63
- 229910010271 silicon carbide Inorganic materials 0.000 title claims description 62
- 229910021332 silicide Inorganic materials 0.000 claims description 114
- FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims description 114
- 239000000758 substrate Substances 0.000 claims description 52
- 239000010936 titanium Substances 0.000 claims description 37
- 229910021334 nickel silicide Inorganic materials 0.000 claims description 9
- RUFLMLWJRZAWLJ-UHFFFAOYSA-N nickel silicide Chemical compound [Ni]=[Si]=[Ni] RUFLMLWJRZAWLJ-UHFFFAOYSA-N 0.000 claims description 9
- 230000001681 protective effect Effects 0.000 claims description 6
- QIJNJJZPYXGIQM-UHFFFAOYSA-N 1lambda4,2lambda4-dimolybdacyclopropa-1,2,3-triene Chemical compound [Mo]=C=[Mo] QIJNJJZPYXGIQM-UHFFFAOYSA-N 0.000 claims description 5
- 229910039444 MoC Inorganic materials 0.000 claims description 5
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 claims description 4
- 229910052719 titanium Inorganic materials 0.000 claims description 4
- MTPVUVINMAGMJL-UHFFFAOYSA-N trimethyl(1,1,2,2,2-pentafluoroethyl)silane Chemical compound C[Si](C)(C)C(F)(F)C(F)(F)F MTPVUVINMAGMJL-UHFFFAOYSA-N 0.000 claims description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 claims description 3
- 239000010408 film Substances 0.000 description 71
- 229910015338 MoNi Inorganic materials 0.000 description 45
- 238000010586 diagram Methods 0.000 description 26
- 229910052751 metal Inorganic materials 0.000 description 26
- 239000002184 metal Substances 0.000 description 26
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 24
- 229920005989 resin Polymers 0.000 description 19
- 239000011347 resin Substances 0.000 description 19
- 238000005224 laser annealing Methods 0.000 description 17
- 239000000463 material Substances 0.000 description 13
- 238000004519 manufacturing process Methods 0.000 description 12
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 8
- 229910052799 carbon Inorganic materials 0.000 description 8
- 238000000034 method Methods 0.000 description 8
- 229910000679 solder Inorganic materials 0.000 description 8
- 238000007789 sealing Methods 0.000 description 7
- 239000010409 thin film Substances 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000010931 gold Substances 0.000 description 5
- 230000007774 longterm Effects 0.000 description 5
- 229910052759 nickel Inorganic materials 0.000 description 5
- 238000005498 polishing Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 239000003822 epoxy resin Substances 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 4
- 229920000647 polyepoxide Polymers 0.000 description 4
- 229910010380 TiNi Inorganic materials 0.000 description 3
- JNDMLEXHDPKVFC-UHFFFAOYSA-N aluminum;oxygen(2-);yttrium(3+) Chemical compound [O-2].[O-2].[O-2].[Al+3].[Y+3] JNDMLEXHDPKVFC-UHFFFAOYSA-N 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- 239000002131 composite material Substances 0.000 description 3
- 230000005669 field effect Effects 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229910052750 molybdenum Inorganic materials 0.000 description 3
- 229910019901 yttrium aluminum garnet Inorganic materials 0.000 description 3
- 239000006061 abrasive grain Substances 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000010894 electron beam technology Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000013464 silicone adhesive Substances 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000005036 potential barrier Methods 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000001878 scanning electron micrograph Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000002210 silicon-based material Substances 0.000 description 1
- 239000011856 silicon-based particle Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/12—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/16—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by the materials of which they are formed including, apart from doping materials or other impurities, only elements of Group IV of the Periodic Table
- H01L29/1608—Silicon carbide
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/45—Ohmic electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/0445—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising crystalline silicon carbide
- H01L21/048—Making electrodes
- H01L21/0485—Ohmic electrodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
- H01L21/263—Bombardment with radiation with high-energy radiation
- H01L21/268—Bombardment with radiation with high-energy radiation using electromagnetic radiation, e.g. laser radiation
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- High Energy & Nuclear Physics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Ceramic Engineering (AREA)
- Electrodes Of Semiconductors (AREA)
Description
図1は、実施の形態にかかるパワー半導体モジュールの構成を示す断面図である。図1に示すように、パワー半導体モジュール50は、パワー半導体チップ1と、絶縁基板2と、接合材3a、3b、3cと、電極パターン4と、金属基板5と、リードフレーム配線6と、樹脂ケース7と、封止樹脂8と、金属端子9と、金属ワイヤ10と、を備える。
次に、実施の形態にかかる炭化珪素半導体装置の製造方法について、説明する。図11~図13は、実施の形態にかかるパワー半導体モジュールの裏面電極の製造途中の状態を示す断面図である。まず、従来技術による炭化珪素半導体装置の製造方法と同様に、炭化珪素半導体基板上に炭化珪素半導体素子20を形成する。例えば、炭化珪素半導体装置がMOSFETである場合、炭化珪素半導体基板上にエピタキシャル成長によりドリフト層を形成し、イオン注入で不純物を注入することにより、おもて面にベース領域、ソース領域等を形成する。次に、おもて面に熱酸化等でゲート絶縁膜を選択的に形成し、MOSゲート構造を形成する。次に、上面電極を形成する。ここまでの状態が、図11に記載される。図11では、炭化珪素半導体素子20の素子構造および上面電極の記載は省略されている。
2 絶縁基板
3a、3b、3c 接合材
4 電極パターン
5 金属基板
6 リードフレーム配線
7 樹脂ケース
8 封止樹脂
9 金属端子
10 金属ワイヤ
12 積層基板
20 炭化珪素半導体素子
21 オーミック電極
22 Ti膜
23 Ni/Au膜
24 はんだ
30 シリサイドが厚い第1領域
31 シリサイドが薄い第2領域
32 Mo膜
33 Ni膜
34 ダメージ層
Claims (3)
- 半導体基板上に設けられた半導体素子と、
前記半導体素子の裏面に設けられた、ニッケルシリサイドとモリブデンカーバイド、またはニッケルシリサイドとチタンカーバイドから構成されたオーミック電極と、
を備え、
前記オーミック電極は、シリサイドが厚い第1領域と、シリサイドが薄い第2領域とから構成され、前記オーミック電極の面積に対する前記第2領域の面積の比率は、10%以上30%以下であることを特徴とする炭化珪素半導体装置。 - 前記半導体素子の裏面の粗さ(Ra)は、0.1μm以上0.15μm以下であることを特徴とする請求項1に記載の炭化珪素半導体装置。
- 前記オーミック電極の、前記半導体素子と反対側の面に設けられたチタン、窒化チタンまたはタンタルから構成された保護膜を備えることを特徴とする請求項1または2に記載の炭化珪素半導体装置。
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JP2020002469A JP7434908B2 (ja) | 2020-01-09 | 2020-01-09 | 炭化珪素半導体装置 |
US17/107,605 US11469303B2 (en) | 2020-01-09 | 2020-11-30 | Silicon carbide semiconductor device and method of manufacturing silicon carbide semiconductor device |
JP2023189655A JP2023181546A (ja) | 2020-01-09 | 2023-11-06 | 炭化珪素半導体装置の製造方法 |
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JP2020002469A JP7434908B2 (ja) | 2020-01-09 | 2020-01-09 | 炭化珪素半導体装置 |
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JP2023189655A Division JP2023181546A (ja) | 2020-01-09 | 2023-11-06 | 炭化珪素半導体装置の製造方法 |
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JP2021111686A JP2021111686A (ja) | 2021-08-02 |
JP7434908B2 true JP7434908B2 (ja) | 2024-02-21 |
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JP2020002469A Active JP7434908B2 (ja) | 2020-01-09 | 2020-01-09 | 炭化珪素半導体装置 |
JP2023189655A Pending JP2023181546A (ja) | 2020-01-09 | 2023-11-06 | 炭化珪素半導体装置の製造方法 |
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JP (2) | JP7434908B2 (ja) |
Families Citing this family (1)
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JP2023088518A (ja) | 2021-12-15 | 2023-06-27 | 住友重機械工業株式会社 | シリサイド膜形成方法 |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008135611A (ja) | 2006-11-29 | 2008-06-12 | Denso Corp | 半導体装置の製造方法 |
WO2013021786A1 (ja) | 2011-08-10 | 2013-02-14 | 三菱電機株式会社 | 半導体装置の製造方法 |
WO2015122065A1 (ja) | 2014-02-13 | 2015-08-20 | 三菱電機株式会社 | 炭化珪素半導体装置およびその製造方法 |
JP2016046308A (ja) | 2014-08-20 | 2016-04-04 | 住友電気工業株式会社 | 炭化珪素半導体装置 |
JP2017063145A (ja) | 2015-09-25 | 2017-03-30 | 三菱電機株式会社 | 炭化珪素半導体装置及びその製造方法 |
JP2017199807A (ja) | 2016-04-27 | 2017-11-02 | 株式会社デンソー | 炭化珪素半導体装置およびその製造方法 |
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JP5460975B2 (ja) | 2008-05-23 | 2014-04-02 | 株式会社デンソー | 半導体装置の製造方法 |
JP5369762B2 (ja) | 2009-03-02 | 2013-12-18 | 株式会社デンソー | 炭化珪素半導体装置の製造方法 |
JP6099298B2 (ja) * | 2011-05-30 | 2017-03-22 | 富士電機株式会社 | SiC半導体デバイス及びその製造方法 |
JP7283053B2 (ja) * | 2018-11-09 | 2023-05-30 | 富士電機株式会社 | 炭化珪素半導体装置、炭化珪素半導体組立体および炭化珪素半導体装置の製造方法 |
-
2020
- 2020-01-09 JP JP2020002469A patent/JP7434908B2/ja active Active
- 2020-11-30 US US17/107,605 patent/US11469303B2/en active Active
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2023
- 2023-11-06 JP JP2023189655A patent/JP2023181546A/ja active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008135611A (ja) | 2006-11-29 | 2008-06-12 | Denso Corp | 半導体装置の製造方法 |
WO2013021786A1 (ja) | 2011-08-10 | 2013-02-14 | 三菱電機株式会社 | 半導体装置の製造方法 |
WO2015122065A1 (ja) | 2014-02-13 | 2015-08-20 | 三菱電機株式会社 | 炭化珪素半導体装置およびその製造方法 |
JP2016046308A (ja) | 2014-08-20 | 2016-04-04 | 住友電気工業株式会社 | 炭化珪素半導体装置 |
JP2017063145A (ja) | 2015-09-25 | 2017-03-30 | 三菱電機株式会社 | 炭化珪素半導体装置及びその製造方法 |
JP2017199807A (ja) | 2016-04-27 | 2017-11-02 | 株式会社デンソー | 炭化珪素半導体装置およびその製造方法 |
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US11469303B2 (en) | 2022-10-11 |
JP2021111686A (ja) | 2021-08-02 |
US20210217852A1 (en) | 2021-07-15 |
JP2023181546A (ja) | 2023-12-21 |
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