JP7273055B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP7273055B2 JP7273055B2 JP2020553428A JP2020553428A JP7273055B2 JP 7273055 B2 JP7273055 B2 JP 7273055B2 JP 2020553428 A JP2020553428 A JP 2020553428A JP 2020553428 A JP2020553428 A JP 2020553428A JP 7273055 B2 JP7273055 B2 JP 7273055B2
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Description
図1~図9Dに基づき、本開示の第1実施形態にかかる半導体装置A10について説明する。半導体装置A10は、支持部材10、第1金属層19、導電部材20、第2金属層29、第1端子31、第2端子32、半導体素子40、導通部材50および封止樹脂60を備える。これらに加え、半導体装置A10は、絶縁層23、ゲート層24、検出層25、ゲート端子36、検出端子37、ゲートワイヤ51、検出ワイヤ52、第1ワイヤ531および第2ワイヤ532をさらに備える。これらの図が示す半導体装置A10は、半導体素子40がたとえばMOSFETである電力変換装置(パワーモジュール)である。半導体装置A10は、モータの駆動源、様々な電気製品のインバータ装置、およびDC/DCコンバータなどに用いられる。ここで、図3は、理解の便宜上、封止樹脂60を透過している。図3において透過した封止樹脂60を想像線(二点鎖線)で示している。図9Cおよび図9Dは、ともに図9Bに示す構成に対応するとともに、断面位置が互いに異なる。
次に、図10A~図10Dに基づき、半導体装置A10の変形例である半導体装置A11について説明する。半導体装置A11は、第1金属層19および第2金属層29の構成が、先述した半導体装置A10におけるこれらの構成と異なる。ここで、図10Cおよび図10Dは、ともに図10Bに示す構成に対応するとともに、断面位置が互いに異なる。
図11~図17に基づき、本開示の第2実施形態にかかる半導体装置A20について説明する。これらの図において、先述した半導体装置A10の同一または類似の要素には同一の符号を付して、重複する説明を省略する。ここで、図11は、理解の便宜上、封止樹脂60を透過している。透過した封止樹脂60を想像線で示している。
図18~図29に基づき、本開示の第3実施形態にかかる半導体装置A30について説明する。これらの図において、先述した半導体装置A10の同一または類似の要素には同一の符号を付して、重複する説明を省略する。ここで、図20は、理解の便宜上、封止樹脂60を透過している。図21は、理解の便宜上、図20に対してさらに第2入力端子34(詳細は後述)および複数の導通部材50を透過している。図20および図21において透過したこれらの要素を想像線で示している。
図30~図35に基づき、本開示の第4実施形態にかかる半導体装置A40について説明する。これらの図において、先述した半導体装置A10の同一または類似の要素には同一の符号を付して、重複する説明を省略する。ここで、図30は、理解の便宜上、封止樹脂60を透過している。透過した封止樹脂60を想像線で示している。
図36~図39に基づき、本開示の第5実施形態にかかる半導体装置A50について説明する。これらの図において、先述した半導体装置A10の同一または類似の要素には同一の符号を付して、重複する説明を省略する。ここで、図36は、理解の便宜上、封止樹脂60を透過している。透過した封止樹脂60を想像線で示している。
図40~図43Bに基づき、本開示の第5実施形態にかかる半導体装置A60について説明する。これらの図において、先述した半導体装置A10の同一または類似の要素には同一の符号を付して、重複する説明を省略する。ここで、図40は、図8に対応している。
前記厚さ方向において前記支持面と同じ側を向く主面と、前記主面とは反対側を向く裏面と、を有するとともに、前記裏面が前記支持面に対向するように前記支持部材に接合された導電部材と、
前記主面に接合された半導体素子と、を備え、
前記支持面の少なくとも一部を覆う第1金属層と、前記裏面を覆う第2金属層と、をさらに備え、
前記第1金属層と前記第2金属層とが固相拡散により互いに接合されている、半導体装置。
前記第1金属層と前記第2層とが固相拡散により互いに接合されている、付記1に記載の半導体装置。
前記第1層のビッカース硬さは、前記第2層のビッカース硬さよりも小である、付記2に記載の半導体装置。
前記凹部に前記第1層が接している、付記3に記載の半導体装置。
前記第3層の厚さは、前記第1層および前記第2層の各々の厚さよりも小である、付記2ないし5のいずれかに記載の半導体装置。
前記裏面と、前記一対の第2層のうち一方の当該第2層と、が固相拡散により互いに接合され、
前記第1金属層と、前記一対の第2層のうち他方の当該第2層と、が固相拡散により互いに接合されている、付記1に記載の半導体装置。
前記第1層のビッカース硬さは、前記一対の第2層の各々のビッカース硬さよりも小である、付記7に記載の半導体装置。
前記厚さ方向において、前記第2湾曲部が湾曲する向きは、前記第1湾曲部が湾曲する向きと同一である、付記9に記載の半導体装置。
前記一対の第3層の各々の厚さは、前記第1層、および前記一対の第2層の各々の厚さよりも小である、付記7ないし10のいずれかに記載の半導体装置。
前記導電部材は、金属板であり、
前記導電部材の厚さは、前記第2支持板の厚さよりも大である、付記2ないし11のいずれかに記載の半導体装置。
前記導電部材は、前記主面を含む第1配線層と、前記裏面を含む第2配線層と、前記第1配線層と前記第2配線層との間に位置し、かつ組成に炭素を含む基層と、を有し、
前記基層の厚さは、前記支持部材の厚さよりも大である、付記2または3に記載の半導体装置。
前記グラファイトの面内方向は、前記厚さ方向に沿っている、付記13に記載の半導体装置。
前記導電部材および前記半導体素子と、前記支持部材の一部と、を覆う封止樹脂をさらに備え、
前記底面は、前記封止樹脂から露出している、付記12ないし14のいずれかに記載の半導体装置。
Claims (17)
- 厚さ方向を向く支持面を有する支持部材と、
前記厚さ方向において前記支持面と同じ側を向く主面と、前記主面とは反対側を向く裏面と、を有するとともに、前記裏面が前記支持面に対向するように前記支持部材に接合された導電部材と、
前記主面に接合された半導体素子と、
前記支持面の少なくとも一部を覆う第1金属層と、
前記裏面を覆う第2金属層と、を備え、
前記第1金属層と前記第2金属層とが固相拡散により互いに接合されており、
前記支持部材は、電気絶縁性を有する第1支持板と、前記支持面を含み、かつ前記第1支持板に積層された金属製の第2支持板と、を有し、
前記導電部材は、金属板であり、
前記導電部材の厚さは、前記第2支持板の厚さよりも大きい、半導体装置。 - 厚さ方向を向く支持面を有する支持部材と、
前記厚さ方向において前記支持面と同じ側を向く主面と、前記主面とは反対側を向く裏面と、を有するとともに、前記裏面が前記支持面に対向するように前記支持部材に接合された導電部材と、
前記主面に接合された半導体素子と、
前記支持面の少なくとも一部を覆う第1金属層と、
前記裏面を覆う第2金属層と、を備え、
前記第1金属層と前記第2金属層とが固相拡散により互いに接合されており、
前記支持部材は、絶縁板であり、
前記導電部材は、前記主面を含む第1配線層と、前記裏面を含む第2配線層と、前記第1配線層と前記第2配線層との間に位置し、かつ組成に炭素を含む基層と、を有し、
前記基層の厚さは、前記支持部材の厚さよりも大きい、半導体装置。 - 前記基層は、グラファイトからなり、
前記グラファイトの面内方向は、前記厚さ方向に沿っている、請求項2に記載の半導体装置。 - 前記支持部材の一部と、前記導電部材および前記半導体素子とを覆う封止樹脂をさらに備え、
前記支持部材は、前記支持面とは反対側を向く底面を有し、
前記底面は、前記封止樹脂から露出している、請求項1ないし3のいずれかに記載の半導体装置。 - 厚さ方向において互いに反対側を向く支持面および底面と、前記支持面を含む第1金属箔と、前記底面を含む第2金属箔と、を有する支持部材と、
前記厚さ方向において前記支持面と同じ側を向く主面と、前記主面とは反対側を向く裏面と、を有するとともに、前記裏面が前記支持面に対向するように前記支持部材に接合された導電部材と、
前記厚さ方向において前記主面に対向する側とは反対側に位置する第1電極を有するとともに、前記主面に接合された半導体素子と、
前記第1電極に導電接合された導通部材と、
前記支持部材の一部と、前記導電部材、前記半導体素子および前記導通部材とを覆う封止樹脂と、
前記支持面の少なくとも一部を覆う第1金属層と、
前記裏面を覆う第2金属層と、を備え、
前記第1金属層と前記第2金属層とが固相拡散により互いに接合されており、
前記第2金属箔は、前記封止樹脂から露出しており、
前記導電部材の厚さは、前記支持部材の厚さよりも大きい、半導体装置。 - 前記第2金属層は、前記裏面を覆う第1層と、前記第1層を基準として前記導電部材とは反対側に位置する第2層と、有し、
前記第1金属層と前記第2層とが固相拡散により互いに接合されている、請求項1ないし5のいずれかに記載の半導体装置。 - 前記第1層の厚さは、前記第2層の厚さよりも大きく、
前記第1層のビッカース硬さは、前記第2層のビッカース硬さよりも小さい、請求項6に記載の半導体装置。 - 前記厚さ方向に視て、前記導電部材の周縁部には、前記裏面から凹む凹部が形成されており、
前記凹部に前記第1層が接している、請求項6または7に記載の半導体装置。 - 前記厚さ方向に視て、前記第1層の中央部の最大厚さは、前記第1層の周縁部の最大厚さよりも小さい、請求項8に記載の半導体装置。
- 前記第2金属層は、前記第1層と前記第2層との間に挟まれた第3層を有し、
前記第3層の厚さは、前記第1層および前記第2層の各々の厚さよりも小さい、請求項6ないし9のいずれかに記載の半導体装置。 - 前記第2金属層は、第1層と、前記厚さ方向において前記第1層の両側に位置する一対の第2層と、を有し、
前記裏面と、前記一対の第2層のうちの一方とが固相拡散により互いに接合されており、
前記第1金属層と、前記一対の第2層のうちの他方とが固相拡散により互いに接合されている、請求項1ないし5のいずれかに記載の半導体装置。 - 前記第1層の厚さは、前記一対の第2層の各々の厚さよりも大きく、
前記第1層のビッカース硬さは、前記一対の第2層の各々のビッカース硬さよりも小さい、請求項11に記載の半導体装置。 - 前記厚さ方向に視て、前記第2金属層の周縁部に接する前記第1金属層には、前記厚さ方向に湾曲する第1湾曲部が形成されている、請求項11または12に記載の半導体装置。
- 前記厚さ方向に視て、前記一対の第2層の少なくともいずれかの周縁部には、前記厚さ方向に湾曲する第2湾曲部が形成されており、
前記厚さ方向において、前記第2湾曲部が湾曲する向きは、前記第1湾曲部が湾曲する向きと同一である、請求項13に記載の半導体装置。 - 前記第2金属層は、前記第1層を間に挟み、かつ前記一対の第2層に挟まれた一対の第3層を有し、
前記一対の第3層の各々の厚さは、前記第1層、および前記一対の第2層の各々の厚さよりも小さい、請求項11ないし14のいずれかに記載の半導体装置。 - 前記半導体素子は、炭化ケイ素を主とする半導体材料を用いて構成されたMOSFETであり、
前記半導体素子は、前記厚さ方向において互いに反対側を向く第1面および第2面を有し、
前記第1面には、ソース電流が流れており、
前記第2面には、ドレイン電流が流れており、
前記第2面は、前記主面に導電接合されている、請求項1ないし15のいずれかに記載の半導体装置。 - 前記主面および前記裏面を有する追加の導電部材と、
前記追加の導電部材の前記主面に接合された追加の半導体素子と、をさらに備え、
前記追加の導電部材の前記裏面が前記支持面に対向するように、前記追加の導電部材は、前記支持部材に接合されている、請求項1ないし16のいずれかに記載の半導体装置。
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CN116825768B (zh) | 2020-10-14 | 2024-02-23 | 罗姆股份有限公司 | 半导体模块 |
US20230245960A1 (en) | 2020-10-14 | 2023-08-03 | Rohm Co., Ltd. | Semiconductor module |
WO2023100980A1 (ja) * | 2021-12-03 | 2023-06-08 | ニデック株式会社 | 半導体モジュール、電力変換装置および電力変換装置の製造方法 |
WO2023162700A1 (ja) * | 2022-02-24 | 2023-08-31 | ローム株式会社 | 半導体装置 |
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JP2014022579A (ja) | 2012-07-19 | 2014-02-03 | Rohm Co Ltd | パワーモジュール半導体装置 |
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JP4924411B2 (ja) | 2007-12-27 | 2012-04-25 | 三菱電機株式会社 | 電力半導体装置 |
WO2014142310A1 (ja) * | 2013-03-14 | 2014-09-18 | 三菱マテリアル株式会社 | 接合体、パワーモジュール用基板、及びヒートシンク付パワーモジュール用基板 |
KR20170073618A (ko) * | 2014-10-16 | 2017-06-28 | 미쓰비시 마테리알 가부시키가이샤 | 냉각기가 장착된 파워 모듈용 기판 및 그 제조 방법 |
JP2016152385A (ja) * | 2015-02-19 | 2016-08-22 | 三菱マテリアル株式会社 | パワーモジュール用基板及びパワーモジュール |
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JP2003068953A (ja) | 2001-08-28 | 2003-03-07 | Toyota Industries Corp | 放熱板 |
JP2013222909A (ja) | 2012-04-19 | 2013-10-28 | Showa Denko Kk | 絶縁基板の製造方法 |
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US20230253283A1 (en) | 2023-08-10 |
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