JP7272421B2 - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
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- JP7272421B2 JP7272421B2 JP2021506219A JP2021506219A JP7272421B2 JP 7272421 B2 JP7272421 B2 JP 7272421B2 JP 2021506219 A JP2021506219 A JP 2021506219A JP 2021506219 A JP2021506219 A JP 2021506219A JP 7272421 B2 JP7272421 B2 JP 7272421B2
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- 239000005380 borophosphosilicate glass Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
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Description
[先行技術文献]
[特許文献]
特許文献1 特開2016-25124号公報
特許文献2 特開2015-207736号公報
特許文献3 特開2014-53552号公報
特許文献4 特開2018-174295号公報
Claims (12)
- 半導体基板と、
前記半導体基板の上面視において間隔を有して配置された少なくとも2つの部分電極を有するエミッタ電極と、
2つの前記部分電極に挟まれて配置された活性側ゲート配線および活性側ダミー配線と
を備え、
前記半導体基板は、
前記活性側ゲート配線と接続され、前記上面視における第1方向に長手を有するゲートトレンチ部と、
前記活性側ダミー配線と接続され、前記第1方向に長手を有するダミートレンチ部と
を有し、
前記活性側ゲート配線および前記活性側ダミー配線の一方は、前記第1方向における全体が、前記活性側ゲート配線および前記活性側ダミー配線の他方に覆われ、
前記エミッタ電極は、2つの前記部分電極どうしを接続するブリッジ部を有し、
前記活性側ゲート配線は、前記ブリッジ部と交差して設けられている半導体装置。 - 第1導電型のドリフト領域を有する半導体基板と、
前記半導体基板の上面視において間隔を有して配置された少なくとも2つの部分電極を有するエミッタ電極と、
2つの前記部分電極に挟まれて配置された活性側ゲート配線および活性側ダミー配線と
を備え、
前記半導体基板は、
前記活性側ゲート配線と接続され、前記上面視における第1方向に長手を有し、前記活性側ゲート配線および前記活性側ダミー配線を前記第1方向に横切るゲートトレンチ部と、
前記活性側ダミー配線と接続され、前記第1方向に長手を有するダミートレンチ部と
を有し、
前記活性側ゲート配線および前記活性側ダミー配線の一方は、前記第1方向における全体が、前記活性側ゲート配線および前記活性側ダミー配線の他方に覆われ、
前記半導体基板は、
前記ゲートトレンチ部および前記ダミートレンチ部が設けられたトランジスタ部を有し、
前記トランジスタ部における前記半導体基板の下面には、第2導電型のコレクタ領域が設けられ、
前記トランジスタ部の前記ダミートレンチ部は、前記活性側ダミー配線と接続されている半導体装置。 - 半導体基板と、
前記半導体基板の上面視において間隔を有して配置された少なくとも2つの部分電極を有するエミッタ電極と、
2つの前記部分電極に挟まれて配置された活性側ゲート配線および活性側ダミー配線と
を備え、
前記半導体基板は、
前記活性側ゲート配線と接続され、前記上面視における第1方向に長手を有するゲートトレンチ部と、
前記活性側ダミー配線と接続され、前記第1方向に長手を有するダミートレンチ部と
を有し、
前記活性側ゲート配線および前記活性側ダミー配線の一方は、前記第1方向における全体が、前記活性側ゲート配線および前記活性側ダミー配線の他方に覆われ、
前記活性側ゲート配線は、半導体材料の配線であり、前記活性側ダミー配線は、金属材料の配線であり、
前記エミッタ電極は、2つの前記部分電極どうしを接続するブリッジ部を有し、
前記活性側ダミー配線は、前記ブリッジ部により少なくとも2つの部分配線に分割されており、
前記ブリッジ部と交差して設けられ、2つの前記部分配線どうしを接続する、半導体材料の交差ダミー配線を更に備える半導体装置。 - 前記活性側ゲート配線の前記第1方向における全体が、前記活性側ゲート配線の上方に配置された前記活性側ダミー配線に覆われている
請求項2に記載の半導体装置。 - 前記活性側ダミー配線は、前記活性側ゲート配線と重ならない部分において、前記ダミートレンチ部と接続されている
請求項4に記載の半導体装置。 - 前記交差ダミー配線は、前記ダミートレンチ部と接続されている
請求項3に記載の半導体装置。 - 前記半導体基板は、前記ゲートトレンチ部および前記ダミートレンチ部が設けられたトランジスタ部と、前記ダミートレンチ部が設けられたダイオード部とを有し、
前記交差ダミー配線は、前記ダイオード部の前記ダミートレンチ部と接続されている
請求項6に記載の半導体装置。 - 前記トランジスタ部の前記ダミートレンチ部は、前記活性側ダミー配線と接続されている
請求項7に記載の半導体装置。 - 前記活性側ゲート配線は、前記ブリッジ部と交差して設けられている
請求項3または6から8のいずれか一項に記載の半導体装置。 - 前記半導体基板と前記エミッタ電極との間に設けられ、且つ、前記エミッタ電極を前記半導体基板に接続するコンタクトホールを有する層間絶縁膜を更に備え、
前記活性側ダミー配線は、前記半導体基板の上面視において前記コンタクトホールと重ならない範囲に設けられている
請求項1から9のいずれか一項に記載の半導体装置。 - 前記上面視において前記エミッタ電極と前記半導体基板の端辺との間に配置され、前記活性側ゲート配線と接続された外周ゲート配線と、
前記上面視において前記エミッタ電極と前記半導体基板の端辺との間に配置され、前記活性側ダミー配線と接続された外周ダミー配線と
更に備え、
前記外周ゲート配線と、前記外周ダミー配線は、前記半導体基板の上面視において重ならずに配置されている
請求項1から10のいずれか一項に記載の半導体装置。 - 前記外周ダミー配線と接続されたスクリーニングパッドを更に備える
請求項11に記載の半導体装置。
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