JP7194306B1 - アルミナ焼結体及び静電チャック - Google Patents

アルミナ焼結体及び静電チャック Download PDF

Info

Publication number
JP7194306B1
JP7194306B1 JP2022119883A JP2022119883A JP7194306B1 JP 7194306 B1 JP7194306 B1 JP 7194306B1 JP 2022119883 A JP2022119883 A JP 2022119883A JP 2022119883 A JP2022119883 A JP 2022119883A JP 7194306 B1 JP7194306 B1 JP 7194306B1
Authority
JP
Japan
Prior art keywords
mass
sintered body
less
alumina sintered
terms
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022119883A
Other languages
English (en)
Japanese (ja)
Other versions
JP2024017328A (ja
Inventor
希一郎 中村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Krosaki Harima Corp
Original Assignee
Krosaki Harima Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Krosaki Harima Corp filed Critical Krosaki Harima Corp
Priority to JP2022119883A priority Critical patent/JP7194306B1/ja
Application granted granted Critical
Publication of JP7194306B1 publication Critical patent/JP7194306B1/ja
Priority to TW112121965A priority patent/TW202408968A/zh
Priority to KR1020230086351A priority patent/KR20240015570A/ko
Publication of JP2024017328A publication Critical patent/JP2024017328A/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
    • C04B35/01—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics
    • C04B35/10—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on oxide ceramics based on aluminium oxide
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
    • H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
    • H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3224—Rare earth oxide or oxide forming salts thereof, e.g. scandium oxide
    • C04B2235/3225—Yttrium oxide or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3232—Titanium oxides or titanates, e.g. rutile or anatase
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3241—Chromium oxides, chromates, or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3231—Refractory metal oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3244—Zirconium oxides, zirconates, hafnium oxides, hafnates, or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3262—Manganese oxides, manganates, rhenium oxides or oxide-forming salts thereof, e.g. MnO
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/327—Iron group oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/32—Metal oxides, mixed metal oxides, or oxide-forming salts thereof, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/327—Iron group oxides, their mixed metal oxides, or oxide-forming salts thereof
    • C04B2235/3272—Iron oxides or oxide forming salts thereof, e.g. hematite, magnetite
    • C—CHEMISTRY; METALLURGY
    • C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
    • C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
    • C04B2235/00—Aspects relating to ceramic starting mixtures or sintered ceramic products
    • C04B2235/02—Composition of constituents of the starting material or of secondary phases of the final product
    • C04B2235/30—Constituents and secondary phases not being of a fibrous nature
    • C04B2235/34—Non-metal oxides, non-metal mixed oxides, or salts thereof that form the non-metal oxides upon heating, e.g. carbonates, nitrates, (oxy)hydroxides, chlorides
    • C04B2235/3418—Silicon oxide, silicic acids, or oxide forming salts thereof, e.g. silica sol, fused silica, silica fume, cristobalite, quartz or flint

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ceramic Engineering (AREA)
  • Organic Chemistry (AREA)
  • Structural Engineering (AREA)
  • Materials Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Compositions Of Oxide Ceramics (AREA)
JP2022119883A 2022-07-27 2022-07-27 アルミナ焼結体及び静電チャック Active JP7194306B1 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2022119883A JP7194306B1 (ja) 2022-07-27 2022-07-27 アルミナ焼結体及び静電チャック
TW112121965A TW202408968A (zh) 2022-07-27 2023-06-13 氧化鋁燒結體及靜電吸盤
KR1020230086351A KR20240015570A (ko) 2022-07-27 2023-07-04 알루미나 소결체 및 정전 척

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022119883A JP7194306B1 (ja) 2022-07-27 2022-07-27 アルミナ焼結体及び静電チャック

Publications (2)

Publication Number Publication Date
JP7194306B1 true JP7194306B1 (ja) 2022-12-21
JP2024017328A JP2024017328A (ja) 2024-02-08

Family

ID=84534691

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022119883A Active JP7194306B1 (ja) 2022-07-27 2022-07-27 アルミナ焼結体及び静電チャック

Country Status (3)

Country Link
JP (1) JP7194306B1 (ko)
KR (1) KR20240015570A (ko)
TW (1) TW202408968A (ko)

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004099413A (ja) 2002-09-12 2004-04-02 Sodick Co Ltd セラミックスおよびその製造方法
JP2008024583A (ja) 2006-06-23 2008-02-07 Nippon Soken Inc アルミナ複合焼結体、その評価方法、及びスパークプラグ
JP2008260645A (ja) 2007-04-10 2008-10-30 Nitsukatoo:Kk 黒色アルミナ焼結体とその製造方法
JP2014220408A (ja) 2013-05-09 2014-11-20 新光電気工業株式会社 静電チャック及び半導体製造装置
JP2015104746A (ja) 2013-11-29 2015-06-08 日立金属株式会社 はんだ接合材料及びその製造方法
JP6738505B1 (ja) 2020-05-28 2020-08-12 黒崎播磨株式会社 静電チャック用誘電体
JP2020180020A (ja) 2019-04-25 2020-11-05 京セラ株式会社 黒色セラミックス

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60176966A (ja) * 1984-02-20 1985-09-11 日本特殊陶業株式会社 着色アルミナ磁器組成物
JPS6442359A (en) * 1987-08-11 1989-02-14 Narumi China Corp Black alumina ceramic composition
JP2772174B2 (ja) 1991-09-06 1998-07-02 茨城日本電気株式会社 磁気ディスク装置の磁気ヘッド固定機構
JPH05194024A (ja) * 1992-01-22 1993-08-03 Sumitomo Cement Co Ltd アルミナ基複合焼結体
JPH05238810A (ja) * 1992-02-27 1993-09-17 Onoda Cement Co Ltd 黒色アルミナ焼結体
JP3051603B2 (ja) * 1993-06-30 2000-06-12 京セラ株式会社 チタン化合物焼結体
JP3287149B2 (ja) * 1994-02-14 2002-05-27 松下電器産業株式会社 アルミナ質のセラミックス

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2004099413A (ja) 2002-09-12 2004-04-02 Sodick Co Ltd セラミックスおよびその製造方法
JP2008024583A (ja) 2006-06-23 2008-02-07 Nippon Soken Inc アルミナ複合焼結体、その評価方法、及びスパークプラグ
JP2008260645A (ja) 2007-04-10 2008-10-30 Nitsukatoo:Kk 黒色アルミナ焼結体とその製造方法
JP2014220408A (ja) 2013-05-09 2014-11-20 新光電気工業株式会社 静電チャック及び半導体製造装置
JP2015104746A (ja) 2013-11-29 2015-06-08 日立金属株式会社 はんだ接合材料及びその製造方法
JP2020180020A (ja) 2019-04-25 2020-11-05 京セラ株式会社 黒色セラミックス
JP6738505B1 (ja) 2020-05-28 2020-08-12 黒崎播磨株式会社 静電チャック用誘電体

Also Published As

Publication number Publication date
JP2024017328A (ja) 2024-02-08
TW202408968A (zh) 2024-03-01
KR20240015570A (ko) 2024-02-05

Similar Documents

Publication Publication Date Title
US5998320A (en) Aluminum nitride sintered body, metal including member, electrostatic chuck, method of producing aluminum nitride sintered body, and method of producing metal including member
CN1301517C (zh) 介电陶瓷及其制造方法和叠层陶瓷电容器
JP5761691B2 (ja) 複合セラミックス、半導体製造装置の構成部材及びこれらの製造方法
US8236722B2 (en) Aluminum oxide sintered product and method for producing the same
CN1238533A (zh) 介电陶瓷组合物和层状陶瓷电容器
JP6636307B2 (ja) 高温特性及び耐食性に優れたアルミナ焼結体
JP5084155B2 (ja) アルミナ焼結体及びその製造方法、並びに、このアルミナ焼結体を用いた静電チャック及びその製造方法
KR100459296B1 (ko) 저체적저항 재료, 질화알루미늄 소결체 및 반도체 제조용부재
JP7194306B1 (ja) アルミナ焼結体及び静電チャック
TWI753835B (zh) 靜電吸盤用介電質
CN113597665A (zh) 用于静电卡盘的高密度耐腐蚀层布置
US8231964B2 (en) Aluminum oxide sintered body, method for producing the same and member for semiconductor producing apparatus
EP2189431A2 (en) Aluminum nitride sintered product, method for producing the same and electrostatic chuck including the same
JP5188898B2 (ja) セラミックス溶射膜及びそれを用いた耐食性部材
US20200350196A1 (en) Composite sintered body, semiconductor manufacturing apparatus member, and method of manufacturing composite sintered body
JP2008266069A (ja) 導電性アルミナ質焼結体
JP4429742B2 (ja) 焼結体及びその製造方法
JP4939379B2 (ja) 静電チャック用窒化アルミニウム焼結体
JP6489467B2 (ja) 複合酸化物セラミックスおよび半導体製造装置の構成部材
JP4364593B2 (ja) アルミナ質セラミック板及びその製造方法
JP4641758B2 (ja) 窒化アルミニウム焼結体およびそれを用いた静電チャック
JP4342002B2 (ja) 静電チャックとその製造方法
JP4708153B2 (ja) 導電性アルミナ質焼結体
JP2023150882A (ja) 静電チャック誘電体層およびそれを有する静電チャック
JPH0442860A (ja) 黒色窒化アルミニウム焼結体

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20220727

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20220727

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20220823

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20220928

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20221011

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20221115

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20221209

R150 Certificate of patent or registration of utility model

Ref document number: 7194306

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150