JP7185422B2 - 感知素子のためのアルミナ拡散バリア - Google Patents
感知素子のためのアルミナ拡散バリア Download PDFInfo
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- JP7185422B2 JP7185422B2 JP2018103655A JP2018103655A JP7185422B2 JP 7185422 B2 JP7185422 B2 JP 7185422B2 JP 2018103655 A JP2018103655 A JP 2018103655A JP 2018103655 A JP2018103655 A JP 2018103655A JP 7185422 B2 JP7185422 B2 JP 7185422B2
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
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- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- C23C14/221—Ion beam deposition
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- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/48—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation
- C23C16/483—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating by irradiation, e.g. photolysis, radiolysis, particle radiation using coherent light, UV to IR, e.g. lasers
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- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K1/00—Details of thermometers not specially adapted for particular types of thermometer
- G01K1/08—Protective devices, e.g. casings
- G01K1/12—Protective devices, e.g. casings for preventing damage due to heat overloading
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- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
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- G01K7/16—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements
- G01K7/18—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using resistive elements the element being a linear resistance, e.g. platinum resistance thermometer
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- G01K2205/00—Application of thermometers in motors, e.g. of a vehicle
- G01K2205/04—Application of thermometers in motors, e.g. of a vehicle for measuring exhaust gas temperature
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Description
Claims (15)
- 温度センサのための感知素子であって、
基板と、
前記基板に適用されるプラチナトレースまたはメアンダと、
前記プラチナトレースまたはメアンダに電気的に接続されるチップパッドを備えるリードワイヤと、
前記プラチナトレースまたはメアンダを覆い、汚染に対する保護および構造安定化を提供する第1のアルミナ拡散バリア(ADB)と、
を含み、
前記第1のアルミナ拡散バリアが、アルミナおよびおおよそ1重量%のルチルまたは鋭錐石添加剤から製造された隣接する多結晶層であり、ネットワーク状の多孔性が実質的に欠けている、感知素子。 - 請求項1に記載の感知素子であって、さらに、
前記第1のADB上に適用されるガラス層と、
前記ガラス層に適用される第2のアルミナ拡散バリアと、
前記第2のアルミナ拡散バリアに適用される第2のガラス層と、
前記第2のガラス層に適用されるカバープレートと、
前記カバープレートに適用される固定ガラスと、
前記基板、前記プラチナトレースまたはメアンダ、前記リードワイヤ、前記ガラス層、前記第1および第2のアルミナ拡散バリア、前記カバープレート、および、前記固定ガラスを囲むケースと、を含む、感知素子。 - 請求項1に記載の感知素子であって、前記ルチルまたは鋭錐石添加剤が、ナノTiO2の形態である、感知素子。
- 基板上にプラチナメアンダを有する温度感知素子のためのアルミナ拡散バリアを製造する方法であって、前記方法が、
ナノアルミナおよびナノルチル粉末を、調合物をつくるように混合するステップと、
前記調合物を前記プラチナメアンダに適用し、層を形成するステップと、
前記層を焼結し、前記基板上の前記プラチナメアンダを覆う隣接する多結晶層をつくるステップと、を含む、方法。 - 請求項4に記載の方法であって、前記ナノアルミナおよびナノルチル粉末が、実質的に、典型的に大きさが150nmより小さい粒子から成る、方法。
- 請求項4に記載の方法であって、さらに、焼結促進剤、わずかなフリットガラス、および、酸化マグネシウム(MgO)の少なくとも1つを前記調合物と混合するステップを含む、方法。
- 請求項4に記載の方法であって、ルチル対酸化マグネシウムの割合が2:1である、方法。
- 請求項4に記載の方法であって、前記調合物が、高いせん断速度の遊星ボールミルプロセスによって調合される、方法。
- 請求項4に記載の方法であって、前記調合物が堆積プロセスを用いて適用される、方法。
- 請求項4に記載の方法であって、前記層がおおよそ2μmの厚さである、方法。
- 請求項4に記載の方法であって、前記焼結が、1250~1350℃の間である、方法。
- 請求項4に記載の方法であって、前記基板が、アルミナ(Al2O3)およびチタン酸マグネシウム(MgTiO3)から成るグループから選択される、方法。
- プラチナメアンダを有する感知素子のための拡散バリアであって、前記拡散バリアが実質的にネットワーク状の孔が無いように、アルミナおよびおおよそ1重量%のルチル添加剤から製造される隣接する多結晶層から成る、拡散バリア。
- 請求項13に記載の拡散バリアであって、前記隣接する多結晶層が粒を含み、典型的な粒の大きさが、0.5~3μmの範囲である、拡散バリア。
- 請求項13に記載の拡散バリアであって、前記隣接する多結晶層が少なくとも2μmの厚さである、拡散バリア。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
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US15/612,583 | 2017-06-02 | ||
US15/612,583 US10371581B2 (en) | 2017-06-02 | 2017-06-02 | Alumina diffusion barrier for sensing elements |
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JP2018205315A JP2018205315A (ja) | 2018-12-27 |
JP7185422B2 true JP7185422B2 (ja) | 2022-12-07 |
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US (1) | US10371581B2 (ja) |
JP (1) | JP7185422B2 (ja) |
KR (1) | KR102603003B1 (ja) |
CN (1) | CN108981958B (ja) |
DE (1) | DE102018111884A1 (ja) |
GB (1) | GB2565190B (ja) |
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US10371581B2 (en) * | 2017-06-02 | 2019-08-06 | Sensata Technologies, Inc. | Alumina diffusion barrier for sensing elements |
US11226244B2 (en) | 2019-01-30 | 2022-01-18 | Sensata Technologies, Inc. | Automotive exhaust gas sensor with two calibration portions |
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JP5451879B2 (ja) | 2010-06-10 | 2014-03-26 | Necディスプレイソリューションズ株式会社 | プロジェクターおよびその制御方法 |
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Patent Citations (2)
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JP2000323174A (ja) | 1999-05-12 | 2000-11-24 | Japan Storage Battery Co Ltd | 非水電解質二次電池 |
JP5451879B2 (ja) | 2010-06-10 | 2014-03-26 | Necディスプレイソリューションズ株式会社 | プロジェクターおよびその制御方法 |
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CN108981958B (zh) | 2021-08-24 |
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CN108981958A (zh) | 2018-12-11 |
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JP2018205315A (ja) | 2018-12-27 |
DE102018111884A1 (de) | 2018-12-06 |
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GB2565190A (en) | 2019-02-06 |
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