JP7113757B2 - 表示基板、表示基板の製造方法、および表示装置 - Google Patents

表示基板、表示基板の製造方法、および表示装置 Download PDF

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JP7113757B2
JP7113757B2 JP2018552877A JP2018552877A JP7113757B2 JP 7113757 B2 JP7113757 B2 JP 7113757B2 JP 2018552877 A JP2018552877 A JP 2018552877A JP 2018552877 A JP2018552877 A JP 2018552877A JP 7113757 B2 JP7113757 B2 JP 7113757B2
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layer
metal
display
conductive material
display area
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JP2020526778A (ja
JP2020526778A5 (https=
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▲ウェイ▼贇 ▲黄▼
▲海▼▲剛▼ 青
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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BOE Technology Group Co Ltd
Chengdu BOE Optoelectronics Technology Co Ltd
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    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/441Interconnections, e.g. scanning lines
    • H10D86/443Interconnections, e.g. scanning lines adapted for preventing breakage, peeling or short circuiting
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/01Manufacture or treatment
    • H10D86/021Manufacture or treatment of multiple TFTs
    • H10D86/0231Manufacture or treatment of multiple TFTs using masks, e.g. half-tone masks
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10DINORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D86/00Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
    • H10D86/40Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs
    • H10D86/60Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates characterised by multiple TFTs wherein the TFTs are in active matrices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/1201Manufacture or treatment
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/131Interconnections, e.g. wiring lines or terminals
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/131Interconnections, e.g. wiring lines or terminals
    • H10K59/1315Interconnections, e.g. wiring lines or terminals comprising structures specially adapted for lowering the resistance
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/12Active-matrix OLED [AMOLED] displays
    • H10K59/122Pixel-defining structures or layers, e.g. banks
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10KORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10OLED displays
    • H10K59/17Passive-matrix OLED displays
    • H10K59/173Passive-matrix OLED displays comprising banks or shadow masks
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/019Manufacture or treatment of bond pads
    • H10W72/01908Manufacture or treatment of bond pads using permanent auxiliary members, e.g. using alignment marks
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/01Manufacture or treatment
    • H10W72/019Manufacture or treatment of bond pads
    • H10W72/01951Changing the shapes of bond pads
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/30Die-attach connectors
    • H10W72/321Structures or relative sizes of die-attach connectors
    • H10W72/325Die-attach connectors having a filler embedded in a matrix
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/30Die-attach connectors
    • H10W72/351Materials of die-attach connectors
    • H10W72/352Materials of die-attach connectors comprising metals or metalloids, e.g. solders
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/921Structures or relative sizes of bond pads
    • H10W72/923Bond pads having multiple stacked layers
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/941Dispositions of bond pads
    • H10W72/942Dispositions of bond pads relative to underlying supporting features, e.g. bond pads, RDLs or vias
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/951Materials of bond pads
    • H10W72/952Materials of bond pads comprising metals or metalloids, e.g. PbSn, Ag or Cu
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/90Bond pads, in general
    • H10W72/951Materials of bond pads
    • H10W72/953Materials of bond pads not comprising solid metals or solid metalloids, e.g. polymers, ceramics or liquids
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/731Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors
    • H10W90/734Package configurations characterised by the relative positions of pads or connectors relative to package parts of die-attach connectors between a chip and a stacked insulating package substrate, interposer or RDL

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Devices For Indicating Variable Information By Combining Individual Elements (AREA)
  • Electroluminescent Light Sources (AREA)
JP2018552877A 2017-07-17 2018-01-10 表示基板、表示基板の製造方法、および表示装置 Active JP7113757B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN201710584603.4A CN109273483B (zh) 2017-07-17 2017-07-17 显示基板及其制备方法和显示装置
CN201710584603.4 2017-07-17
PCT/CN2018/072071 WO2019015270A1 (zh) 2017-07-17 2018-01-10 显示基板及其制备方法和显示装置

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JP2020526778A JP2020526778A (ja) 2020-08-31
JP2020526778A5 JP2020526778A5 (https=) 2020-12-17
JP7113757B2 true JP7113757B2 (ja) 2022-08-05

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US (1) US10756034B2 (https=)
EP (1) EP3457438A4 (https=)
JP (1) JP7113757B2 (https=)
CN (1) CN109273483B (https=)
WO (1) WO2019015270A1 (https=)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2020191623A1 (zh) * 2019-03-26 2020-10-01 京东方科技集团股份有限公司 显示基板及其制备方法、显示装置
CN113809095B (zh) * 2020-05-27 2024-12-31 京东方科技集团股份有限公司 阵列基板及其制备方法
CN111682050B (zh) * 2020-06-22 2022-04-01 武汉华星光电半导体显示技术有限公司 触控显示装置及其制造方法
CN111708465B (zh) * 2020-07-08 2023-07-25 武汉华星光电半导体显示技术有限公司 触控显示装置及其制造方法
CN112002251B (zh) * 2020-08-06 2022-05-31 Tcl华星光电技术有限公司 显示面板及其制备方法
CN111916463B (zh) * 2020-08-20 2023-03-24 武汉华星光电技术有限公司 阵列基板、其制备方法及显示面板
WO2022048538A1 (zh) 2020-09-07 2022-03-10 京东方科技集团股份有限公司 阵列基板及其制备方法、显示面板和背光模组
CN120152481A (zh) * 2020-09-10 2025-06-13 京东方科技集团股份有限公司 一种发光基板、显示装置及制作方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000267595A (ja) 1999-03-15 2000-09-29 Toshiba Corp 表示装置用アレイ基板の製造方法
US20110084257A1 (en) 2009-10-09 2011-04-14 Samsung Mobile Display Co., Ltd. Organic light emitting diode display and method of manufacturing the same
JP2014145857A (ja) 2013-01-28 2014-08-14 Sony Corp 表示装置およびその製造方法、並びに電子機器
US20160020422A1 (en) 2014-07-16 2016-01-21 Lg Display Co., Ltd. Organic light emitting display device and method of manufacturing the same

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2988159B2 (ja) * 1992-11-13 1999-12-06 日本電気株式会社 液晶表示装置
US6639265B2 (en) * 2000-01-26 2003-10-28 Semiconductor Energy Laboratory Co., Ltd. Semiconductor device and method of manufacturing the semiconductor device
KR20020083249A (ko) 2001-04-26 2002-11-02 삼성전자 주식회사 배선의 접촉 구조 및 그의 제조 방법과 이를 포함하는박막 트랜지스터 기판 및 그 제조 방법
JP4036154B2 (ja) * 2002-09-12 2008-01-23 セイコーエプソン株式会社 配線構造の製造方法、電気光学装置の製造方法、電気光学装置および電子機器
JP2006047827A (ja) * 2004-08-06 2006-02-16 Mitsubishi Electric Corp 液晶表示装置およびその製造方法
KR101232549B1 (ko) * 2005-12-29 2013-02-12 엘지디스플레이 주식회사 유기 전계 발광 표시 장치 및 이의 제조 방법
CN101645456A (zh) * 2008-08-06 2010-02-10 奇美电子股份有限公司 电子装置、薄膜晶体管、显示装置及导体接触工艺
US8780310B2 (en) * 2008-11-26 2014-07-15 Sharp Kabushiki Kaisha Display device having higher-layer wiring that does not overlap connection portion
KR20110134444A (ko) * 2009-03-05 2011-12-14 코닌클리즈케 필립스 일렉트로닉스 엔.브이. 직렬 연결된 oled
KR101407814B1 (ko) * 2011-07-19 2014-06-17 파나소닉 주식회사 표시 장치 및 표시 장치의 제조 방법
CN102496616B (zh) * 2011-11-28 2016-04-27 日月光半导体制造股份有限公司 具有整合被动元件的半导体元件及其制造方法
KR101980766B1 (ko) * 2012-12-27 2019-05-21 엘지디스플레이 주식회사 터치 패널 내장형 유기 발광 다이오드 표시 장치
KR102077144B1 (ko) * 2013-05-30 2020-02-14 삼성디스플레이 주식회사 유기발광표시장치 및 그 제조 방법
US10181573B2 (en) 2014-07-11 2019-01-15 Lg Display Co., Ltd. Organic light-emitting diode display device and method of fabricating the same
KR102230692B1 (ko) 2014-07-29 2021-03-19 엘지디스플레이 주식회사 유기 발광 표시 장치 및 유기 발광 표시 장치 제조 방법
EP3220410A4 (en) 2014-11-13 2018-07-18 Renesas Electronics Corporation Semiconductor device and manufacturing method for same
US10032844B2 (en) 2014-12-29 2018-07-24 Lg Display Co., Ltd. Organic light emitting display device and method of manufacturing the same
KR102377531B1 (ko) 2015-01-23 2022-03-22 삼성디스플레이 주식회사 유기 발광 표시 장치 및 그 제조 방법
KR101879180B1 (ko) 2015-11-16 2018-07-17 엘지디스플레이 주식회사 유기 발광 표시 장치 및 그 제조 방법
CN106338866B (zh) * 2016-10-18 2019-08-02 武汉华星光电技术有限公司 一种液晶面板的焊盘区域结构
KR102854033B1 (ko) * 2016-11-30 2025-09-02 엘지디스플레이 주식회사 유기 발광 표시 장치

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000267595A (ja) 1999-03-15 2000-09-29 Toshiba Corp 表示装置用アレイ基板の製造方法
US20110084257A1 (en) 2009-10-09 2011-04-14 Samsung Mobile Display Co., Ltd. Organic light emitting diode display and method of manufacturing the same
JP2014145857A (ja) 2013-01-28 2014-08-14 Sony Corp 表示装置およびその製造方法、並びに電子機器
US20160020422A1 (en) 2014-07-16 2016-01-21 Lg Display Co., Ltd. Organic light emitting display device and method of manufacturing the same

Also Published As

Publication number Publication date
JP2020526778A (ja) 2020-08-31
WO2019015270A1 (zh) 2019-01-24
CN109273483A (zh) 2019-01-25
US20190189573A1 (en) 2019-06-20
EP3457438A4 (en) 2020-03-11
CN109273483B (zh) 2021-04-02
US10756034B2 (en) 2020-08-25
EP3457438A1 (en) 2019-03-20

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