JP6976190B2 - 記憶装置 - Google Patents
記憶装置 Download PDFInfo
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- JP6976190B2 JP6976190B2 JP2018027594A JP2018027594A JP6976190B2 JP 6976190 B2 JP6976190 B2 JP 6976190B2 JP 2018027594 A JP2018027594 A JP 2018027594A JP 2018027594 A JP2018027594 A JP 2018027594A JP 6976190 B2 JP6976190 B2 JP 6976190B2
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- 238000003860 storage Methods 0.000 title claims description 30
- 239000004065 semiconductor Substances 0.000 claims description 76
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 9
- 239000012535 impurity Substances 0.000 claims description 3
- 230000014759 maintenance of location Effects 0.000 claims description 3
- 150000002736 metal compounds Chemical class 0.000 claims description 3
- 239000003989 dielectric material Substances 0.000 claims description 2
- 239000012528 membrane Substances 0.000 claims description 2
- 150000004767 nitrides Chemical class 0.000 claims description 2
- 239000010408 film Substances 0.000 description 305
- 239000011229 interlayer Substances 0.000 description 26
- 238000004519 manufacturing process Methods 0.000 description 25
- 238000010586 diagram Methods 0.000 description 23
- 239000011810 insulating material Substances 0.000 description 19
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 13
- 229920005591 polysilicon Polymers 0.000 description 13
- 229910052814 silicon oxide Inorganic materials 0.000 description 12
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 11
- 239000010410 layer Substances 0.000 description 11
- 238000005530 etching Methods 0.000 description 9
- 230000006870 function Effects 0.000 description 6
- 238000001020 plasma etching Methods 0.000 description 5
- 101000613490 Homo sapiens Paired box protein Pax-3 Proteins 0.000 description 4
- 101000601661 Homo sapiens Paired box protein Pax-7 Proteins 0.000 description 4
- 102100040891 Paired box protein Pax-3 Human genes 0.000 description 4
- 102100037503 Paired box protein Pax-7 Human genes 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000000758 substrate Substances 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- 229920001709 polysilazane Polymers 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 101150004219 MCR1 gene Proteins 0.000 description 2
- 101100206347 Schizosaccharomyces pombe (strain 972 / ATCC 24843) pmh1 gene Proteins 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910004129 HfSiO Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/40—Electrodes ; Multistep manufacturing processes therefor
- H01L29/43—Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
- H01L29/49—Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
- H01L29/51—Insulating materials associated therewith
- H01L29/517—Insulating materials associated therewith the insulating material comprising a metallic compound, e.g. metal oxide, metal silicate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66825—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a floating gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66833—Unipolar field-effect transistors with an insulated gate, i.e. MISFET with a charge trapping gate insulator, e.g. MNOS transistors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/20—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/20—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B41/23—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B41/27—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B41/00—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates
- H10B41/30—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region
- H10B41/35—Electrically erasable-and-programmable ROM [EEPROM] devices comprising floating gates characterised by the memory core region with a cell select transistor, e.g. NAND
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B53/00—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors
- H10B53/20—Ferroelectric RAM [FeRAM] devices comprising ferroelectric memory capacitors characterised by the three-dimensional arrangements, e.g. with cells on different height levels
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
- H01L2924/143—Digital devices
- H01L2924/1434—Memory
- H01L2924/1435—Random access memory [RAM]
- H01L2924/1438—Flash memory
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B—ELECTRONIC MEMORY DEVICES
- H10B43/00—EEPROM devices comprising charge-trapping gate insulators
- H10B43/20—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels
- H10B43/23—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B43/27—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
Description
Claims (6)
- 第1方向に積層され、前記第1方向と交差する第2方向に延びる複数の第1電極膜と、
前記複数の第1電極膜に近接して設けられ、前記第1方向に延びる第1半導体膜と、
前記複数の第1電極膜のうちの1つの第1電極膜と前記第1半導体膜との間に設けられ、金属、金属化合物、または高誘電体材料のいずれか1つを含む第1電荷保持膜と、
前記第1半導体膜と前記第1電荷保持膜との間に位置し、前記複数の第1電極膜と前記第1半導体膜との間において、前記第1半導体膜に沿って前記第1方向に連続して延び、前記複数の第1電極膜、前記第1電荷保持膜および前記第1半導体膜から電気的に絶縁された第2半導体膜と、
を備えた記憶装置。 - 前記複数の第1電極膜の間にそれぞれ設けられた複数の絶縁膜をさらに備え、
前記複数の絶縁膜は、前記複数の第1電極膜のうちの前記1つの第1電極膜を挟むように設けられた第1絶縁膜および第2絶縁膜を含み、
前記第1電荷保持膜は、前記第1絶縁膜および前記第2絶縁膜の間に位置する請求項1記載の記憶装置。 - 前記第1電荷保持膜は、金属窒化物を含む請求項1または2に記載の記憶装置。
- 前記第2半導体膜は、前記第1半導体膜を囲むように設けられる請求項1〜3のいずれか1つに記載の記憶装置。
- 前記第2半導体膜は、P形不純物を含む請求項1〜4のいずれか1つに記載の記憶装置。
- 前記第1方向に積層され、前記第2方向に延びる複数の第2電極膜と、
前記複数の第2電極膜のうちの1つの第2電極膜と、前記第1半導体膜と、の間に設けられた第2電荷保持膜と、
をさらに備え、
前記第1半導体膜は、前記複数の第1電極膜と前記複数の第2電極膜との間に位置し、
前記第2半導体膜の一部は、前記第2電荷保持膜と前記第1半導体膜との間に位置する請求項1〜5のいずれか1つに記載の記憶装置。
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2018027594A JP6976190B2 (ja) | 2018-02-20 | 2018-02-20 | 記憶装置 |
TW107127260A TWI675451B (zh) | 2018-02-20 | 2018-08-06 | 記憶裝置 |
CN201810887534.9A CN110176457B (zh) | 2018-02-20 | 2018-08-06 | 存储装置 |
US16/124,112 US10818688B2 (en) | 2018-02-20 | 2018-09-06 | Storage device |
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JP2018027594A JP6976190B2 (ja) | 2018-02-20 | 2018-02-20 | 記憶装置 |
Publications (2)
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JP2019145635A JP2019145635A (ja) | 2019-08-29 |
JP6976190B2 true JP6976190B2 (ja) | 2021-12-08 |
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US (1) | US10818688B2 (ja) |
JP (1) | JP6976190B2 (ja) |
CN (1) | CN110176457B (ja) |
TW (1) | TWI675451B (ja) |
Families Citing this family (3)
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JP2021150593A (ja) | 2020-03-23 | 2021-09-27 | キオクシア株式会社 | 半導体記憶装置 |
JP2021150592A (ja) * | 2020-03-23 | 2021-09-27 | キオクシア株式会社 | 半導体記憶装置 |
JP2022146030A (ja) | 2021-03-22 | 2022-10-05 | キオクシア株式会社 | 半導体記憶装置及びその製造方法 |
Family Cites Families (19)
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KR100395762B1 (ko) * | 2001-07-31 | 2003-08-21 | 삼성전자주식회사 | 비휘발성 메모리 소자 및 그 제조방법 |
US7303959B2 (en) * | 2005-03-11 | 2007-12-04 | Sandisk 3D Llc | Bottom-gate SONOS-type cell having a silicide gate |
JP2009054707A (ja) * | 2007-08-24 | 2009-03-12 | Renesas Technology Corp | 半導体記憶装置およびその製造方法 |
KR20110132865A (ko) * | 2010-06-03 | 2011-12-09 | 삼성전자주식회사 | 3차원 반도체 메모리 장치 및 그 제조 방법 |
KR101699515B1 (ko) * | 2010-09-01 | 2017-02-14 | 삼성전자주식회사 | 3차원 반도체 장치 및 그 제조 방법 |
JP5998521B2 (ja) * | 2012-02-28 | 2016-09-28 | セイコーエプソン株式会社 | 不揮発性半導体メモリー及び不揮発性半導体メモリーの製造方法 |
KR20130116604A (ko) | 2012-04-16 | 2013-10-24 | 삼성전자주식회사 | 3차원 반도체 메모리 장치 및 그 제조 방법 |
FR3003077B1 (fr) | 2013-03-08 | 2016-08-05 | Accumulateurs Fixes | Supercondensateur asymetrique a electrolyte alcalin comportant une electrode negative tridimensionnelle et son procede de fabrication |
JP2014187286A (ja) * | 2013-03-25 | 2014-10-02 | Toshiba Corp | 不揮発性半導体記憶装置 |
KR102175763B1 (ko) * | 2014-04-09 | 2020-11-09 | 삼성전자주식회사 | 반도체 메모리 장치 및 이의 제조 방법 |
US9728546B2 (en) * | 2014-09-05 | 2017-08-08 | Sandisk Technologies Llc | 3D semicircular vertical NAND string with self aligned floating gate or charge trap cell memory cells and methods of fabricating and operating the same |
US9666593B2 (en) | 2014-09-29 | 2017-05-30 | Sandisk Technologies Llc | Alternating refractive index in charge-trapping film in three-dimensional memory |
US9570392B2 (en) * | 2015-04-30 | 2017-02-14 | Kabushiki Kaisha Toshiba | Memory device and method for manufacturing the same |
JP2017163044A (ja) | 2016-03-10 | 2017-09-14 | 東芝メモリ株式会社 | 半導体装置およびその製造方法 |
US10403636B2 (en) * | 2016-03-11 | 2019-09-03 | Toshiba Memory Corporation | Semiconductor memory device and method for manufacturing the same |
US9847342B2 (en) | 2016-03-14 | 2017-12-19 | Toshiba Memory Corporation | Semiconductor memory device and method for manufacturing same |
US9812463B2 (en) * | 2016-03-25 | 2017-11-07 | Sandisk Technologies Llc | Three-dimensional memory device containing vertically isolated charge storage regions and method of making thereof |
US9899410B1 (en) * | 2016-12-13 | 2018-02-20 | Sandisk Technologies Llc | Charge storage region in non-volatile memory |
US10038008B1 (en) * | 2017-01-30 | 2018-07-31 | Micron Technology, Inc. | Integrated structures and NAND memory arrays |
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2018
- 2018-02-20 JP JP2018027594A patent/JP6976190B2/ja active Active
- 2018-08-06 CN CN201810887534.9A patent/CN110176457B/zh active Active
- 2018-08-06 TW TW107127260A patent/TWI675451B/zh active
- 2018-09-06 US US16/124,112 patent/US10818688B2/en active Active
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TWI675451B (zh) | 2019-10-21 |
JP2019145635A (ja) | 2019-08-29 |
US20190259774A1 (en) | 2019-08-22 |
US10818688B2 (en) | 2020-10-27 |
CN110176457B (zh) | 2023-07-04 |
CN110176457A (zh) | 2019-08-27 |
TW201935662A (zh) | 2019-09-01 |
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