JP6949455B2 - 非接触搬送装置、および非接触吸着盤 - Google Patents

非接触搬送装置、および非接触吸着盤 Download PDF

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Publication number
JP6949455B2
JP6949455B2 JP2015243182A JP2015243182A JP6949455B2 JP 6949455 B2 JP6949455 B2 JP 6949455B2 JP 2015243182 A JP2015243182 A JP 2015243182A JP 2015243182 A JP2015243182 A JP 2015243182A JP 6949455 B2 JP6949455 B2 JP 6949455B2
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contact
suction
flow path
pressurized gas
gas flow
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JP2015243182A
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Japanese (ja)
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JP2016121015A (ja
Inventor
忠浩 長妻
忠浩 長妻
さおり 鬼束
さおり 鬼束
清隆 藤平
清隆 藤平
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Tanken Seal Seiko Co Ltd
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Tanken Seal Seiko Co Ltd
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Priority to TW104143334A priority Critical patent/TWI665146B/zh
Priority to KR1020150184748A priority patent/KR102552128B1/ko
Priority to CN201510989948.9A priority patent/CN105731068B/zh
Publication of JP2016121015A publication Critical patent/JP2016121015A/ja
Priority to JP2021112845A priority patent/JP2021167251A/ja
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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Power Engineering (AREA)
  • Nonlinear Science (AREA)
  • Manipulator (AREA)
  • Fluid Mechanics (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
JP2015243182A 2014-12-24 2015-12-14 非接触搬送装置、および非接触吸着盤 Active JP6949455B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
TW104143334A TWI665146B (zh) 2014-12-24 2015-12-23 非接觸搬送裝置及非接觸吸著盤
KR1020150184748A KR102552128B1 (ko) 2014-12-24 2015-12-23 비접촉 반송 장치 및 비접촉 흡착반
CN201510989948.9A CN105731068B (zh) 2014-12-24 2015-12-24 非接触输送装置和非接触吸附盘
JP2021112845A JP2021167251A (ja) 2014-12-24 2021-07-07 非接触搬送装置、および非接触吸着盤

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2014260764 2014-12-24
JP2014260764 2014-12-24

Related Child Applications (1)

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JP2021112845A Division JP2021167251A (ja) 2014-12-24 2021-07-07 非接触搬送装置、および非接触吸着盤

Publications (2)

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JP2016121015A JP2016121015A (ja) 2016-07-07
JP6949455B2 true JP6949455B2 (ja) 2021-10-13

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JP2015243182A Active JP6949455B2 (ja) 2014-12-24 2015-12-14 非接触搬送装置、および非接触吸着盤
JP2021112845A Pending JP2021167251A (ja) 2014-12-24 2021-07-07 非接触搬送装置、および非接触吸着盤

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JP2021112845A Pending JP2021167251A (ja) 2014-12-24 2021-07-07 非接触搬送装置、および非接触吸着盤

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JP (2) JP6949455B2 (ko)
KR (1) KR102552128B1 (ko)
TW (1) TWI665146B (ko)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6949455B2 (ja) * 2014-12-24 2021-10-13 株式会社タンケンシールセーコウ 非接触搬送装置、および非接触吸着盤
CN106743662A (zh) * 2017-03-30 2017-05-31 武汉华星光电技术有限公司 玻璃基板输送机构
US10513011B2 (en) 2017-11-08 2019-12-24 Core Flow Ltd. Layered noncontact support platform
CN108508638B (zh) * 2018-03-15 2021-03-09 中电科风华信息装备股份有限公司 一种液晶屏搬运机械手对接装置
JP6853520B2 (ja) * 2018-09-20 2021-03-31 株式会社Ｎｓｃ 浮上搬送装置
US20200266092A1 (en) * 2019-02-19 2020-08-20 Corning Incorporated Apparatuses and methods for non-contact holding and measurement of thin substrates
CN110498233B (zh) * 2019-07-26 2021-04-27 江苏科技大学 二维无接触输送平台装置
CN110743882B (zh) * 2019-10-28 2021-11-23 衡阳海之波商贸有限公司 一种垂直运送式玻璃清洁送料机构
CN117836461A (zh) 2021-10-12 2024-04-05 日本制铁株式会社 热冲压成形体
CN115156142B (zh) * 2022-05-30 2024-04-30 江苏亚电科技股份有限公司 Psg水膜喷淋机构及光伏硅片附水膜方法

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5512052B2 (ko) * 1972-12-12 1980-03-29
JPS5512052U (ko) 1978-07-11 1980-01-25
JP4307872B2 (ja) * 2003-03-18 2009-08-05 オリンパス株式会社 基板検査装置
US7908885B2 (en) * 2004-11-08 2011-03-22 New Way Machine Components, Inc. Non-contact porous air bearing and glass flattening device
JP2007008644A (ja) * 2005-06-29 2007-01-18 Ckd Corp 板状ワークの搬送装置
JP4553376B2 (ja) 2005-07-19 2010-09-29 東京エレクトロン株式会社 浮上式基板搬送処理装置及び浮上式基板搬送処理方法
KR100859835B1 (ko) * 2008-05-13 2008-09-23 한국뉴매틱(주) 비접촉식 진공패드
JP2010260715A (ja) * 2009-04-07 2010-11-18 Myotoku Ltd 浮上ユニット及び浮上装置
JP2010253567A (ja) * 2009-04-21 2010-11-11 Seiko Epson Corp 吸引保持ハンド、吸引保持方法、及び搬送装置
JP2010258129A (ja) * 2009-04-23 2010-11-11 Seiko Epson Corp 吸引保持装置、吸引保持方法、搬送装置、及び搬送方法
JP2010254453A (ja) * 2009-04-27 2010-11-11 Myotoku Ltd 浮上装置
TWI527747B (zh) * 2012-02-28 2016-04-01 炭研軸封精工股份有限公司 非接觸吸著盤
JP6949455B2 (ja) * 2014-12-24 2021-10-13 株式会社タンケンシールセーコウ 非接触搬送装置、および非接触吸着盤

Also Published As

Publication number Publication date
JP2021167251A (ja) 2021-10-21
KR20160078280A (ko) 2016-07-04
TW201634369A (zh) 2016-10-01
TWI665146B (zh) 2019-07-11
JP2016121015A (ja) 2016-07-07
KR102552128B1 (ko) 2023-07-06

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