JP6929024B2 - 光学装置、露光装置及び物品の製造方法 - Google Patents

光学装置、露光装置及び物品の製造方法 Download PDF

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Publication number
JP6929024B2
JP6929024B2 JP2016134000A JP2016134000A JP6929024B2 JP 6929024 B2 JP6929024 B2 JP 6929024B2 JP 2016134000 A JP2016134000 A JP 2016134000A JP 2016134000 A JP2016134000 A JP 2016134000A JP 6929024 B2 JP6929024 B2 JP 6929024B2
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JP
Japan
Prior art keywords
permanent magnet
optical device
shape
mirror
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2016134000A
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English (en)
Japanese (ja)
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JP2018005068A5 (enExample
JP2018005068A (ja
Inventor
柴田　雄吾
雄吾 柴田
浩平 長野
浩平 長野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2016134000A priority Critical patent/JP6929024B2/ja
Priority to CN201780040473.6A priority patent/CN109416457B/zh
Priority to PCT/JP2017/022311 priority patent/WO2018008364A1/ja
Priority to KR1020197002601A priority patent/KR102165797B1/ko
Publication of JP2018005068A publication Critical patent/JP2018005068A/ja
Publication of JP2018005068A5 publication Critical patent/JP2018005068A5/ja
Application granted granted Critical
Publication of JP6929024B2 publication Critical patent/JP6929024B2/ja
Expired - Fee Related legal-status Critical Current
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/10—Mirrors with curved faces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/185—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the shape of the mirror surface
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
JP2016134000A 2016-07-06 2016-07-06 光学装置、露光装置及び物品の製造方法 Expired - Fee Related JP6929024B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2016134000A JP6929024B2 (ja) 2016-07-06 2016-07-06 光学装置、露光装置及び物品の製造方法
CN201780040473.6A CN109416457B (zh) 2016-07-06 2017-06-16 光学装置、曝光装置及物品的制造方法
PCT/JP2017/022311 WO2018008364A1 (ja) 2016-07-06 2017-06-16 光学装置、露光装置及び物品の製造方法
KR1020197002601A KR102165797B1 (ko) 2016-07-06 2017-06-16 광학 장치, 노광 장치 및 물품의 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016134000A JP6929024B2 (ja) 2016-07-06 2016-07-06 光学装置、露光装置及び物品の製造方法

Publications (3)

Publication Number Publication Date
JP2018005068A JP2018005068A (ja) 2018-01-11
JP2018005068A5 JP2018005068A5 (enExample) 2019-08-08
JP6929024B2 true JP6929024B2 (ja) 2021-09-01

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2016134000A Expired - Fee Related JP6929024B2 (ja) 2016-07-06 2016-07-06 光学装置、露光装置及び物品の製造方法

Country Status (4)

Country Link
JP (1) JP6929024B2 (enExample)
KR (1) KR102165797B1 (enExample)
CN (1) CN109416457B (enExample)
WO (1) WO2018008364A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109932804B (zh) * 2019-03-04 2021-06-01 杭州电子科技大学 一种小口径轻型反射镜的柔性记忆合金支撑装置
JP2022022912A (ja) * 2020-07-10 2022-02-07 キヤノン株式会社 露光装置および物品製造方法

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02101402A (ja) 1988-10-11 1990-04-13 Omron Tateisi Electron Co 反射鏡装置
US6840638B2 (en) * 2002-07-03 2005-01-11 Nikon Corporation Deformable mirror with passive and active actuators
US7589822B2 (en) * 2004-02-02 2009-09-15 Nikon Corporation Stage drive method and stage unit, exposure apparatus, and device manufacturing method
JP2008310925A (ja) * 2007-06-18 2008-12-25 Sony Corp 変形可能ミラー装置、光ピックアップ、光学ドライブ装置
FR2923301B1 (fr) * 2007-11-02 2010-09-17 Ujf Filiale Miroir deformable a raideur repartie,outil et procede pour realiser un tel miroir
FR2935054B1 (fr) * 2008-08-14 2011-01-28 Alpao Miroir deformable a actionneurs de force et raideur repartie
JP2011119551A (ja) * 2009-12-04 2011-06-16 Nikon Corp 光学部材変形装置、光学系、露光装置、デバイスの製造方法
CN103891114B (zh) * 2011-10-27 2018-01-02 不列颠哥伦比亚大学 位移装置及其制造、使用和控制方法
JP5875537B2 (ja) * 2013-01-28 2016-03-02 三菱電機株式会社 形状可変鏡装置
JP2015050353A (ja) * 2013-09-02 2015-03-16 キヤノン株式会社 光学装置、投影光学系、露光装置、並びに物品の製造方法
JP2015065246A (ja) * 2013-09-24 2015-04-09 キヤノン株式会社 光学装置、光学系、露光装置及び物品の製造方法
JP6168957B2 (ja) * 2013-09-30 2017-07-26 キヤノン株式会社 光学装置、投影光学系、露光装置および物品の製造方法
JP6336274B2 (ja) * 2013-12-25 2018-06-06 キヤノン株式会社 光学装置、投影光学系、露光装置、および物品の製造方法
JP2016092366A (ja) * 2014-11-11 2016-05-23 キヤノン株式会社 光学装置、投影光学系、露光装置、および物品の製造方法

Also Published As

Publication number Publication date
CN109416457A (zh) 2019-03-01
KR102165797B1 (ko) 2020-10-14
CN109416457B (zh) 2021-09-17
KR20190020139A (ko) 2019-02-27
WO2018008364A1 (ja) 2018-01-11
JP2018005068A (ja) 2018-01-11

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