KR102165797B1 - 광학 장치, 노광 장치 및 물품의 제조 방법 - Google Patents

광학 장치, 노광 장치 및 물품의 제조 방법 Download PDF

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Publication number
KR102165797B1
KR102165797B1 KR1020197002601A KR20197002601A KR102165797B1 KR 102165797 B1 KR102165797 B1 KR 102165797B1 KR 1020197002601 A KR1020197002601 A KR 1020197002601A KR 20197002601 A KR20197002601 A KR 20197002601A KR 102165797 B1 KR102165797 B1 KR 102165797B1
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KR
South Korea
Prior art keywords
reflective surface
optical device
permanent magnet
shape
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
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KR1020197002601A
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English (en)
Korean (ko)
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KR20190020139A (ko
Inventor
유고 시바타
고오헤이 나가노
Original Assignee
캐논 가부시끼가이샤
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Publication of KR20190020139A publication Critical patent/KR20190020139A/ko
Application granted granted Critical
Publication of KR102165797B1 publication Critical patent/KR102165797B1/ko
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/10—Mirrors with curved faces
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
    • G02B7/185—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the shape of the mirror surface
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
KR1020197002601A 2016-07-06 2017-06-16 광학 장치, 노광 장치 및 물품의 제조 방법 Expired - Fee Related KR102165797B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JPJP-P-2016-134000 2016-07-06
JP2016134000A JP6929024B2 (ja) 2016-07-06 2016-07-06 光学装置、露光装置及び物品の製造方法
PCT/JP2017/022311 WO2018008364A1 (ja) 2016-07-06 2017-06-16 光学装置、露光装置及び物品の製造方法

Publications (2)

Publication Number Publication Date
KR20190020139A KR20190020139A (ko) 2019-02-27
KR102165797B1 true KR102165797B1 (ko) 2020-10-14

Family

ID=60912605

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020197002601A Expired - Fee Related KR102165797B1 (ko) 2016-07-06 2017-06-16 광학 장치, 노광 장치 및 물품의 제조 방법

Country Status (4)

Country Link
JP (1) JP6929024B2 (enExample)
KR (1) KR102165797B1 (enExample)
CN (1) CN109416457B (enExample)
WO (1) WO2018008364A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109932804B (zh) * 2019-03-04 2021-06-01 杭州电子科技大学 一种小口径轻型反射镜的柔性记忆合金支撑装置
JP2022022912A (ja) * 2020-07-10 2022-02-07 キヤノン株式会社 露光装置および物品製造方法

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20080310287A1 (en) 2007-06-18 2008-12-18 Sony Corporation Deformable mirror apparatus, optical pickup and optical drive apparatus
JP2010098333A (ja) 2004-02-02 2010-04-30 Nikon Corp ステージ駆動方法及びステージ装置、露光装置、並びにデバイス製造方法
JP2011119551A (ja) * 2009-12-04 2011-06-16 Nikon Corp 光学部材変形装置、光学系、露光装置、デバイスの製造方法
JP5452497B2 (ja) 2007-11-02 2014-03-26 ユジエフ−フィリエール 分散型剛体を備えた可変ミラー、可変ミラー製造ツール、および可変ミラー製造方法
JP2014531189A (ja) 2011-10-27 2014-11-20 ザ・ユニバーシティ・オブ・ブリティッシュ・コロンビア 変位装置及び変位装置を製造、使用、制御する方法
JP2015050353A (ja) 2013-09-02 2015-03-16 キヤノン株式会社 光学装置、投影光学系、露光装置、並びに物品の製造方法
JP2015065246A (ja) * 2013-09-24 2015-04-09 キヤノン株式会社 光学装置、光学系、露光装置及び物品の製造方法
JP2015126037A (ja) 2013-12-25 2015-07-06 キヤノン株式会社 光学装置、投影光学系、露光装置、および物品の製造方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02101402A (ja) 1988-10-11 1990-04-13 Omron Tateisi Electron Co 反射鏡装置
US6840638B2 (en) * 2002-07-03 2005-01-11 Nikon Corporation Deformable mirror with passive and active actuators
FR2935054B1 (fr) * 2008-08-14 2011-01-28 Alpao Miroir deformable a actionneurs de force et raideur repartie
JP5875537B2 (ja) * 2013-01-28 2016-03-02 三菱電機株式会社 形状可変鏡装置
JP6168957B2 (ja) * 2013-09-30 2017-07-26 キヤノン株式会社 光学装置、投影光学系、露光装置および物品の製造方法
JP2016092366A (ja) * 2014-11-11 2016-05-23 キヤノン株式会社 光学装置、投影光学系、露光装置、および物品の製造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010098333A (ja) 2004-02-02 2010-04-30 Nikon Corp ステージ駆動方法及びステージ装置、露光装置、並びにデバイス製造方法
US20080310287A1 (en) 2007-06-18 2008-12-18 Sony Corporation Deformable mirror apparatus, optical pickup and optical drive apparatus
JP5452497B2 (ja) 2007-11-02 2014-03-26 ユジエフ−フィリエール 分散型剛体を備えた可変ミラー、可変ミラー製造ツール、および可変ミラー製造方法
JP2011119551A (ja) * 2009-12-04 2011-06-16 Nikon Corp 光学部材変形装置、光学系、露光装置、デバイスの製造方法
JP2014531189A (ja) 2011-10-27 2014-11-20 ザ・ユニバーシティ・オブ・ブリティッシュ・コロンビア 変位装置及び変位装置を製造、使用、制御する方法
JP2015050353A (ja) 2013-09-02 2015-03-16 キヤノン株式会社 光学装置、投影光学系、露光装置、並びに物品の製造方法
JP2015065246A (ja) * 2013-09-24 2015-04-09 キヤノン株式会社 光学装置、光学系、露光装置及び物品の製造方法
JP2015126037A (ja) 2013-12-25 2015-07-06 キヤノン株式会社 光学装置、投影光学系、露光装置、および物品の製造方法

Also Published As

Publication number Publication date
CN109416457A (zh) 2019-03-01
CN109416457B (zh) 2021-09-17
KR20190020139A (ko) 2019-02-27
WO2018008364A1 (ja) 2018-01-11
JP2018005068A (ja) 2018-01-11
JP6929024B2 (ja) 2021-09-01

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