JP6882045B2 - 集光点位置検出方法 - Google Patents
集光点位置検出方法 Download PDFInfo
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- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims description 7
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
- B23K26/359—Working by laser beam, e.g. welding, cutting or boring for surface treatment by providing a line or line pattern, e.g. a dotted break initiation line
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/035—Aligning the laser beam
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- H—ELECTRICITY
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/03—Observing, e.g. monitoring, the workpiece
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
- B23K26/046—Automatically focusing the laser beam
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/066—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms by using masks
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/0665—Shaping the laser beam, e.g. by masks or multi-focusing by beam condensation on the workpiece, e.g. for focusing
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0823—Devices involving rotation of the workpiece
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/0869—Devices involving movement of the laser head in at least one axial direction
- B23K26/0876—Devices involving movement of the laser head in at least one axial direction in at least two axial directions
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/14—Measuring arrangements characterised by the use of optical techniques for measuring distance or clearance between spaced objects or spaced apertures
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7003—Alignment type or strategy, e.g. leveling, global alignment
- G03F9/7023—Aligning or positioning in direction perpendicular to substrate surface
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
- G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography
- G03F9/7073—Alignment marks and their environment
- G03F9/7076—Mark details, e.g. phase grating mark, temporary mark
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67282—Marking devices
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- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
- H01L21/681—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
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Description
(1)集光器によって集光される集光点はウエーハの内部に適正に位置づけられなければならず、集光器によって集光される集光点の位置は集光器の光軸と同軸にレチクルを導きウエーハの上面に投影する位置と一致するように調整されていて、レチクルがウエーハの上面に鮮明に投影された時に集光器によって集光される集光点の位置がウエーハの上面に位置づけられたとしているが、実際はレチクルの投影位置と集光器によって集光される集光点の位置とに数μm程度の狂いがある。
(2)前記した狂いを調整するために、レチクルを基準として集光器の集光点をダミーウエーハの内部に位置づけてレーザー光線を照射してウエーハの内部に改質層を形成し、その後改質層が形成された領域を分割して改質層を露出させウエーハの上面から改質層までの長さを実測してレチクルを基準とした場合の集光点の位置の狂いを検出し補正値としているが、実測には相当の時間がかかり生産性が悪い。
パルスレーザー光線の波長 :1342nm
繰り返し周波数 :60kHz
平均出力 :0.1〜0.3W
加工送り速度 :600mm/s
6:保持手段
8:レーザー照射手段
10:送り手段
32:レーザー発振器
34:集光器
36:マスク
38:スリット部
40:集光点形成部
46:集光器位置づけ手段
70:レチクル
102:円形の照射痕
104:線状の照射痕
L:スリット部の長手方向
S:スリット部の短手方向
LB:パルスレーザー光線
Claims (4)
- 被加工物を保持する保持手段と、レーザー光線を集光する集光器を備えると共にレーザー光線を発振するレーザー発振器を備えたレーザー照射手段と、該保持手段と該レーザー照射手段とを相対的に加工送りする送り手段と、を少なくとも含み構成されたレーザー加工装置において、該集光器が集光する集光点の光軸方向の位置を検出する集光点位置検出方法であって、
該レーザー発振器が発振したレーザー光線の半径方向に延在しレーザー光線の一部を回折するスリット部と集光点を形成するレーザー光線の一部を通過させる集光点形成部とを有するマスクを準備するマスク準備工程と、
レーザー光線が照射された領域に照射痕が形成される基板を準備する基板準備工程と、
該保持手段に該基板を保持させる基板保持工程と、
該保持手段に保持された該基板に対して該集光器を光軸方向に移動しながらレーザー光線を照射して複数の照射痕を該基板に形成する照射痕形成工程と、
該基板に形成された複数の照射痕から適正な形状の照射痕を検出し、適正な照射痕を形成した集光点の位置を正確な集光点の位置として検出する集光点位置検出工程と、を少なくとも含み、
該照射痕形成工程において、
該集光器に予め設定された集光点を該基板の上面に位置づけてレーザー光線を照射すると、該マスクに形成された該スリット部に至った一部のレーザー光線は該スリット部を軸として半円柱状に回折し該集光器によって該スリット部の長手方向が集光され短手方向は集光されずに該スリット部に直交する線状の照射痕を形成し、該マスクに形成された集光点形成部に至った一部のレーザー光線は該集光器によって集光され円形の照射痕を形成し、
該集光器に予め設定された集光点から該集光器を正の光軸方向、負の光軸方向に移動して照射痕を複数形成すると該円形の照射痕の一方の端から他方の端に該線状の照射痕がコマ送り的に移動して複数の照射痕が形成され、
該集光点位置検出工程において、該線状の照射痕が該円形の照射痕を二等分する照射痕を適正な形状の照射痕として検出する集光点位置検出方法。 - 該レーザー加工装置は、該保持手段に保持された被加工物の上面に該集光器に予め設定された集光点の位置を示すレチクルを投影して、該集光器に予め設定された集光点を被加工物の上面に位置づける集光器位置づけ手段を含み、
該集光点位置検出工程において、検出された該集光器の正確な集光点の位置と該レチクルが示す集光点の位置との差を求めて補正値とする請求項1記載の集光点位置検出方法。 - 該基板準備工程において準備する基板は、プレートの上面に錫膜が被覆されている錫膜プレート、またはプレートの上面にチタン膜が被覆され更に錫膜が被覆された2層プレートである請求項1記載の集光点位置検出方法。
- 該照射痕形成工程において、該集光器を光軸方向に移動するピッチは0.5〜1.0μmである請求項1記載の集光点位置検出方法。
Priority Applications (7)
Application Number | Priority Date | Filing Date | Title |
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JP2017079681A JP6882045B2 (ja) | 2017-04-13 | 2017-04-13 | 集光点位置検出方法 |
TW107108549A TWI746820B (zh) | 2017-04-13 | 2018-03-14 | 聚光點位置檢測方法 |
SG10201802804WA SG10201802804WA (en) | 2017-04-13 | 2018-04-04 | Condensing point position detecting method |
US15/946,038 US10183359B2 (en) | 2017-04-13 | 2018-04-05 | Condensing point position detecting method |
KR1020180041175A KR102344826B1 (ko) | 2017-04-13 | 2018-04-09 | 집광점 위치 검출 방법 |
CN201810315184.9A CN108723599B (zh) | 2017-04-13 | 2018-04-10 | 聚光点位置检测方法 |
DE102018205546.7A DE102018205546A1 (de) | 2017-04-13 | 2018-04-12 | Detektionsverfahren für eine position eines bündelpunkts |
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JP7418169B2 (ja) * | 2019-08-27 | 2024-01-19 | 株式会社ディスコ | レーザー加工装置 |
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JP3265668B2 (ja) * | 1993-01-13 | 2002-03-11 | 株式会社ニコン | ベストフォーカス位置の算出方法 |
JPH10305420A (ja) | 1997-03-04 | 1998-11-17 | Ngk Insulators Ltd | 酸化物単結晶からなる母材の加工方法、機能性デバイスの製造方法 |
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