JP6907011B2 - レーザー加工装置、及びレーザー加工方法 - Google Patents
レーザー加工装置、及びレーザー加工方法 Download PDFInfo
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- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
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- B23K37/00—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups
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- B23K37/0408—Auxiliary devices or processes, not specially adapted to a procedure covered by only one of the preceding main groups for holding or positioning work for planar work
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- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/26—Bombardment with radiation
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- H01L22/10—Measuring as part of the manufacturing process
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- B23K2103/00—Materials to be soldered, welded or cut
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Description
よって、高さ情報を記憶するメモリを節約すべく、加工が予定される加工領域、例えば複数の分割予定ライン毎に一つの分割予定ラインを選択して、一方向(例えば往路方向)に高さ検出手段をなぞりながら計測した高さ情報を代表値として記憶し、該高さの計測を実施した分割予定ラインのみならず、高さ計測をしていない近傍の分割予定ラインに対して該高さ情報を代用値として適用し、加工用のレーザー光線の集光点位置を調整してレーザー加工を施すことが試みられている。
集光点を内部に位置付けて照射しウエーハの内部に加工を施す集光器を備えたレーザー照射手段と、該保持手段と該集光器とを相対的にX軸方向に加工送りするX軸送り手段と、該保持手段と該集光器とをX軸方向に直交するY軸方向に相対的に加工送りするY軸送り手段と、レーザー光線の集光点が位置付けられるウエーハの上面高さを検出する高さ検出手段と、該高さ検出手段が検出した高さ情報を加工送り方向の座標に対応して記憶する記憶手段と、各手段を制御する制御手段と、を少なくとも備えたレーザー加工装置によって実行されるレーザー加工方法であって、該高さ検出手段をウエーハの加工すべき領域に位置付けて該保持手段と該高さ検出手段とを相対的に往路のX軸方向に移動させながら高さを検出してX座標に対応して高さ情報を該記憶手段に記憶する往路高さ記憶ステップと、該保持手段と該高さ検出手段とを相対的に復路のX軸方向に移動させながらウエーハの次に加工すべき領域の高さを検出してX座標に対応して高さ情報を該記憶手段に記憶する復路高さ記憶ステップと、該集光器をウエーハの加工すべき領域に位置付け該往路高さ記憶ステップで記憶された高さ情報に基づいて該集光器を上下に移動させながら該集光器と該保持手段とを相対的に往路のX軸方向に移動させてウエーハの加工すべき領域の内部にレーザー光線の集光点を位置付けて上面に平行な改質層を一定の深さで形成する加工を施す往路加工ステップと、該集光器をウエーハの次に加工すべき領域に位置付け該復路高さ記憶ステップで記憶された高さ情報に基づいて該集光器を上下に移動させながら該集光器と該保持手段とを相対的に復路のX軸方向に移動させてウエーハの次に加工すべき領域の内部にレーザー光線の集光点を位置づけて上面に平行な改質層を一定の深さで形成する加工を施す復路加工ステップと、を備え、該往路高さ記憶ステップと、該復路高さ記憶ステップと、該往路加工ステップと、該復路加工ステップと、を繰り返し実施してウエーハに加工を施すレーザー加工方法が提供される。
波長 :1064nm
繰り返し周波数 :50kHz
平均出力 :0.5W
加工送り速度 :200mm/秒
6:保持手段
8:移動手段
10:ウエーハ
20:制御手段
24:レーザー照射手段
24a:集光器
241:レーザー発振器
242:ダイクロイックミラー
243:反射ミラー
244:集光レンズ
245:ボイスコイルモータ
25:高さ検出手段
251:発光手段
252:第1のビームスプリッター
253:バンドパスフィルター
254:第2のビームスプリッター
256:受光素子
258:マスク
259:スリット
260:受光素子
26:撮像手段
40:X軸送り手段
41:Y軸送り手段
Claims (2)
- レーザー加工装置であって、
ウエーハを保持する保持手段と、該保持手段に保持されたウエーハに対して透過性を有する波長のレーザー光線の集光点を内部に位置付けて照射しウエーハの内部に加工を施す集光器を備えたレーザー照射手段と、該保持手段と該集光器とを相対的にX軸方向に加工送りするX軸送り手段と、該保持手段と該集光器とをX軸方向に直交するY軸方向に相対的に加工送りするY軸送り手段と、レーザー光線の集光点が位置付けられるウエーハの上面高さを検出する高さ検出手段と、該高さ検出手段が検出した高さ情報を加工送り方向の座標に対応して記憶する記憶手段と、各手段を制御する制御手段と、を少なくとも備え、
該制御手段は、
該高さ検出手段をウエーハの加工すべき領域に位置付けて該保持手段と該高さ検出手段とを相対的に往路のX軸方向に移動させながら高さを検出してX座標に対応して高さ情報を該記憶手段に記憶する往路高さ記憶ステップと、
該保持手段と該高さ検出手段とを相対的に復路のX軸方向に移動させながらウエーハの次に加工すべき領域の高さを検出してX座標に対応して高さ情報を該記憶手段に記憶する復路高さ記憶ステップと、
該集光器を高さ情報が記憶されたウエーハの加工すべき領域に位置付け該往路高さ記憶ステップで記憶された高さ情報に基づいて該集光器を上下に移動させながら該集光器と該保持手段とを相対的に往路のX軸方向に移動させてウエーハの加工すべき領域の内部にレーザー光線の集光点を位置付けて上面に平行な改質層を一定の深さで形成する加工を施す往路加工ステップと、
該集光器をウエーハの次に加工すべき領域に位置付け該復路高さ記憶ステップに記憶された高さ情報に基づいて該集光器を上下に移動させながら該集光器と該保持手段とを相対的に復路のX軸方向に移動させてウエーハの加工すべき領域の内部にレーザー光線の集光点を位置付けて上面に平行な改質層を一定の深さで形成する加工を施す復路加工ステップと、を備え、
該往路高さ記憶ステップと、該復路高さ記憶ステップと、該往路加工ステップと、該復路加工ステップと、を繰り返して実行する、ウエーハに加工を施すレーザー加工装置。 - ウエーハを保持する保持手段と、該保持手段に保持されたウエーハに対して透過性を有する波長のレーザー光線の集光点を内部に位置付けて照射しウエーハの内部に加工を施す集光器を備えたレーザー照射手段と、該保持手段と該集光器とを相対的にX軸方向に加工送りするX軸送り手段と、該保持手段と該集光器とをX軸方向に直交するY軸方向に相対的に加工送りするY軸送り手段と、レーザー光線の集光点が位置付けられるウエーハの上面高さを検出する高さ検出手段と、該高さ検出手段が検出した高さ情報を加工送り方向の座標に対応して記憶する記憶手段と、各手段を制御する制御手段と、を少なくとも備えたレーザー加工装置によって実行されるレーザー加工方法であって、
該高さ検出手段をウエーハの加工すべき領域に位置付けて該保持手段と該高さ検出手段とを相対的に往路のX軸方向に移動させながら高さを検出してX座標に対応して高さ情報を該記憶手段に記憶する往路高さ記憶ステップと、
該保持手段と該高さ検出手段とを相対的に復路のX軸方向に移動させながらウエーハの次に加工すべき領域の高さを検出してX座標に対応して高さ情報を該記憶手段に記憶する復路高さ記憶ステップと、
該集光器をウエーハの加工すべき領域に位置付け該往路高さ記憶ステップで記憶された高さ情報に基づいて該集光器を上下に移動させながら該集光器と該保持手段とを相対的に往路のX軸方向に移動させてウエーハの加工すべき領域の内部にレーザー光線の集光点を位置付けて上面に平行な改質層を一定の深さで形成する加工を施す往路加工ステップと、
該集光器をウエーハの次に加工すべき領域に位置付け該復路高さ記憶ステップで記憶された高さ情報に基づいて該集光器を上下に移動させながら該集光器と該保持手段とを相対的に復路のX軸方向に移動させてウエーハの次に加工すべき領域の内部にレーザー光線の集光点を位置づけて上面に平行な改質層を一定の深さで形成する加工を施す復路加工ステップと、を備え、
該往路高さ記憶ステップと、該復路高さ記憶ステップと、該往路加工ステップと、該復路加工ステップと、を繰り返し実施してウエーハに加工を施すレーザー加工方法。
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