JP6865497B2 - ウエーハの加工方法 - Google Patents
ウエーハの加工方法 Download PDFInfo
- Publication number
- JP6865497B2 JP6865497B2 JP2017123912A JP2017123912A JP6865497B2 JP 6865497 B2 JP6865497 B2 JP 6865497B2 JP 2017123912 A JP2017123912 A JP 2017123912A JP 2017123912 A JP2017123912 A JP 2017123912A JP 6865497 B2 JP6865497 B2 JP 6865497B2
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- JP
- Japan
- Prior art keywords
- wafer
- fine particles
- polishing pad
- polishing
- pure water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 238000003672 processing method Methods 0.000 title claims description 5
- 238000005498 polishing Methods 0.000 claims description 171
- 239000010419 fine particle Substances 0.000 claims description 95
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 88
- 238000005247 gettering Methods 0.000 claims description 72
- 238000003746 solid phase reaction Methods 0.000 claims description 27
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 13
- 238000000034 method Methods 0.000 claims description 13
- 229910052710 silicon Inorganic materials 0.000 claims description 13
- 230000001681 protective effect Effects 0.000 claims description 12
- 239000010703 silicon Substances 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 6
- 239000003513 alkali Substances 0.000 claims description 5
- 238000003825 pressing Methods 0.000 claims description 2
- 238000006748 scratching Methods 0.000 claims description 2
- 230000002393 scratching effect Effects 0.000 claims description 2
- 239000012670 alkaline solution Substances 0.000 description 31
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 26
- 239000004065 semiconductor Substances 0.000 description 26
- 238000000227 grinding Methods 0.000 description 14
- 229910000029 sodium carbonate Inorganic materials 0.000 description 13
- 238000004090 dissolution Methods 0.000 description 11
- 239000002585 base Substances 0.000 description 9
- 230000007423 decrease Effects 0.000 description 6
- 239000007788 liquid Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000011230 binding agent Substances 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 239000000126 substance Substances 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- XEKOWRVHYACXOJ-UHFFFAOYSA-N Ethyl acetate Chemical compound CCOC(C)=O XEKOWRVHYACXOJ-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 238000005452 bending Methods 0.000 description 3
- 230000015572 biosynthetic process Effects 0.000 description 3
- IAZDPXIOMUYVGZ-UHFFFAOYSA-N Dimethylsulphoxide Chemical compound CS(C)=O IAZDPXIOMUYVGZ-UHFFFAOYSA-N 0.000 description 2
- GLUUGHFHXGJENI-UHFFFAOYSA-N Piperazine Chemical compound C1CNCCN1 GLUUGHFHXGJENI-UHFFFAOYSA-N 0.000 description 2
- 239000006061 abrasive grain Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000006386 memory function Effects 0.000 description 2
- 239000004745 nonwoven fabric Substances 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- JOYRKODLDBILNP-UHFFFAOYSA-N Ethyl urethane Chemical compound CCOC(N)=O JOYRKODLDBILNP-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 238000007517 polishing process Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000011856 silicon-based particle Substances 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 238000010671 solid-state reaction Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Landscapes
- Grinding Of Cylindrical And Plane Surfaces (AREA)
- Polishing Bodies And Polishing Tools (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
- Mechanical Treatment Of Semiconductor (AREA)
Description
21 チャックテーブル
23 保持面
46 支持基台
47 研磨パッド
48 研磨工具
61 純水供給源
62 低温純水供給源
65、66 バルブ
81 固相反応微粒子
82 ゲッタリング用微粒子
85 アルカリ微粒子
T 保護テープ(保護部材)
W ウエーハ
W1 (ウエーハの)表面
W2 (ウエーハの)裏面
Claims (1)
- シリコン基板の表面にデバイスが形成されたウエーハを加工するウエーハの加工方法であって、
ウエーハの表面に保護部材を貼着し、チャックテーブルの保持面に該保護部材側を保持するウエーハ保持工程と、
シリコンと固相反応を誘発する固相反応微粒子と、シリコンよりモース硬度が高くゲッタリング層を形成するためのゲッタリング用微粒子と、アルカリ微粒子とを含む研磨パッドに純水を供給しつつ、該研磨パッドを所定圧で該シリコン基板に押圧しつつ回転するとともに該チャックテーブルを回転させて溶解した該アルカリ微粒子の作用によりウエーハの裏面を研磨する研磨工程と、
該研磨工程を実施した後に、該アルカリ微粒子の溶解度が低下する水温の純水を供給しつつ、該研磨パッドを該所定圧よりも低圧で押圧しつつ回転するとともに該チャックテーブルを回転させながら該研磨パッドによってウエーハの裏面を研磨することにより裏面に傷を付けてゲッタリング層を形成するゲッタリング層形成工程と、を含むことを特徴とするウエーハの加工方法。
Priority Applications (1)
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JP2017123912A JP6865497B2 (ja) | 2017-06-26 | 2017-06-26 | ウエーハの加工方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017123912A JP6865497B2 (ja) | 2017-06-26 | 2017-06-26 | ウエーハの加工方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2019009291A JP2019009291A (ja) | 2019-01-17 |
JP6865497B2 true JP6865497B2 (ja) | 2021-04-28 |
Family
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Family Applications (1)
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JP2017123912A Active JP6865497B2 (ja) | 2017-06-26 | 2017-06-26 | ウエーハの加工方法 |
Country Status (1)
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JP (1) | JP6865497B2 (ja) |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6214704B1 (en) * | 1998-12-16 | 2001-04-10 | Memc Electronic Materials, Inc. | Method of processing semiconductor wafers to build in back surface damage |
JP5222626B2 (ja) * | 2008-05-20 | 2013-06-26 | 富士紡ホールディングス株式会社 | 研磨パッドおよび研磨パッドの製造方法 |
JP2010225987A (ja) * | 2009-03-25 | 2010-10-07 | Disco Abrasive Syst Ltd | ウェーハの研磨方法及び研磨パッド |
JP5404673B2 (ja) * | 2011-02-25 | 2014-02-05 | 株式会社東芝 | Cmp装置、研磨パッド及びcmp方法 |
JP6208498B2 (ja) * | 2013-08-29 | 2017-10-04 | 株式会社ディスコ | 研磨パッドおよびウエーハの加工方法 |
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2017
- 2017-06-26 JP JP2017123912A patent/JP6865497B2/ja active Active
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