JP6860356B2 - 塗布装置および塗布方法 - Google Patents

塗布装置および塗布方法 Download PDF

Info

Publication number
JP6860356B2
JP6860356B2 JP2017008112A JP2017008112A JP6860356B2 JP 6860356 B2 JP6860356 B2 JP 6860356B2 JP 2017008112 A JP2017008112 A JP 2017008112A JP 2017008112 A JP2017008112 A JP 2017008112A JP 6860356 B2 JP6860356 B2 JP 6860356B2
Authority
JP
Japan
Prior art keywords
coating
substrate
nozzle
upstream
transport direction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2017008112A
Other languages
English (en)
Japanese (ja)
Other versions
JP2018114475A (ja
Inventor
裕滋 安陪
裕滋 安陪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Screen Holdings Co Ltd
Original Assignee
Screen Holdings Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Screen Holdings Co Ltd filed Critical Screen Holdings Co Ltd
Priority to JP2017008112A priority Critical patent/JP6860356B2/ja
Priority to CN202010856746.8A priority patent/CN111992437A/zh
Priority to CN201810055183.5A priority patent/CN108325788B/zh
Publication of JP2018114475A publication Critical patent/JP2018114475A/ja
Application granted granted Critical
Publication of JP6860356B2 publication Critical patent/JP6860356B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0254—Coating heads with slot-shaped outlet
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00—Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
JP2017008112A 2017-01-20 2017-01-20 塗布装置および塗布方法 Active JP6860356B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2017008112A JP6860356B2 (ja) 2017-01-20 2017-01-20 塗布装置および塗布方法
CN202010856746.8A CN111992437A (zh) 2017-01-20 2018-01-19 涂敷装置以及涂敷方法
CN201810055183.5A CN108325788B (zh) 2017-01-20 2018-01-19 涂敷装置以及涂敷方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2017008112A JP6860356B2 (ja) 2017-01-20 2017-01-20 塗布装置および塗布方法

Publications (2)

Publication Number Publication Date
JP2018114475A JP2018114475A (ja) 2018-07-26
JP6860356B2 true JP6860356B2 (ja) 2021-04-14

Family

ID=62925272

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2017008112A Active JP6860356B2 (ja) 2017-01-20 2017-01-20 塗布装置および塗布方法

Country Status (2)

Country Link
JP (1) JP6860356B2 (zh)
CN (2) CN108325788B (zh)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6896008B2 (ja) * 2019-03-19 2021-06-30 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
JP6916833B2 (ja) * 2019-04-18 2021-08-11 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置および塗布方法
JP6907281B2 (ja) * 2019-09-19 2021-07-21 株式会社Ｓｃｒｅｅｎホールディングス 塗布装置、高さ検出方法および塗布方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4049751B2 (ja) * 2004-02-05 2008-02-20 東京エレクトロン株式会社 塗布膜形成装置
JP4571525B2 (ja) * 2005-03-10 2010-10-27 東京エレクトロン株式会社 基板処理装置及び基板処理方法
JP4634265B2 (ja) * 2005-09-27 2011-02-16 東京エレクトロン株式会社 塗布方法及び塗布装置
JP4673180B2 (ja) * 2005-10-13 2011-04-20 東京エレクトロン株式会社 塗布装置及び塗布方法
JP4884871B2 (ja) * 2006-07-27 2012-02-29 東京エレクトロン株式会社 塗布方法及び塗布装置
JP4753313B2 (ja) * 2006-12-27 2011-08-24 東京エレクトロン株式会社 基板処理装置
JP5221508B2 (ja) * 2009-12-25 2013-06-26 東京エレクトロン株式会社 基板処理装置
JP5437134B2 (ja) * 2010-03-31 2014-03-12 大日本スクリーン製造株式会社 塗布装置
JP5608469B2 (ja) * 2010-08-20 2014-10-15 東京応化工業株式会社 塗布装置
JP2012091122A (ja) * 2010-10-27 2012-05-17 Toray Eng Co Ltd 塗布システム
JP5485928B2 (ja) * 2011-03-09 2014-05-07 東京エレクトロン株式会社 基板浮上搬送装置及び基板処理装置
JP2013150946A (ja) * 2012-01-24 2013-08-08 Tatsumo Kk ウエブ塗布装置

Also Published As

Publication number Publication date
CN108325788A (zh) 2018-07-27
CN111992437A (zh) 2020-11-27
JP2018114475A (ja) 2018-07-26
CN108325788B (zh) 2020-09-15

Similar Documents

Publication Publication Date Title
JP6860356B2 (ja) 塗布装置および塗布方法
JP2018043200A (ja) 塗布装置および塗布方法
KR101942656B1 (ko) 기판 처리 장치 및 기판 처리 방법
JP6831406B2 (ja) 塗布装置および塗布方法
JP5399963B2 (ja) 基板搬送装置および基板処理装置
KR20120107871A (ko) 도포막 형성 장치 및 도포막 형성 방법
CN108525941B (zh) 涂覆装置以及涂覆方法
JP6860357B2 (ja) 塗布装置および塗布方法
US20220081227A1 (en) Devices, systems, and methods for controlling floatation of a substrate
TWI757814B (zh) 塗佈裝置、高度檢測方法及塗佈方法
JP6737649B2 (ja) 塗布装置および塗布方法
JP2018152441A (ja) 基板搬送装置、基板搬送方法および塗布装置
JP6896008B2 (ja) 基板処理装置および基板処理方法
JP6916833B2 (ja) 塗布装置および塗布方法
JP5372824B2 (ja) 基板処理装置および基板処理方法
TWI753324B (zh) 基板搬送裝置及塗布裝置
TW202304599A (zh) 塗佈處理裝置、塗佈處理方法及塗佈處理程式
KR101141146B1 (ko) 기판 반송 방법
JP2010000487A (ja) 塗布装置

Legal Events

Date Code Title Description
RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20170725

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20191223

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20201119

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20201201

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20210128

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20210302

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20210326

R150 Certificate of patent or registration of utility model

Ref document number: 6860356

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250