JP6860356B2 - 塗布装置および塗布方法 - Google Patents
塗布装置および塗布方法 Download PDFInfo
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- JP6860356B2 JP6860356B2 JP2017008112A JP2017008112A JP6860356B2 JP 6860356 B2 JP6860356 B2 JP 6860356B2 JP 2017008112 A JP2017008112 A JP 2017008112A JP 2017008112 A JP2017008112 A JP 2017008112A JP 6860356 B2 JP6860356 B2 JP 6860356B2
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- coating
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Links
- 238000000576 coating method Methods 0.000 title claims description 368
- 239000011248 coating agent Substances 0.000 title claims description 309
- 239000000758 substrate Substances 0.000 claims description 238
- 238000005339 levitation Methods 0.000 claims description 119
- 239000007788 liquid Substances 0.000 claims description 110
- 230000032258 transport Effects 0.000 claims description 103
- 238000011144 upstream manufacturing Methods 0.000 claims description 84
- 230000007246 mechanism Effects 0.000 claims description 73
- 238000007667 floating Methods 0.000 claims description 67
- 238000012546 transfer Methods 0.000 claims description 30
- 230000007723 transport mechanism Effects 0.000 claims description 18
- 238000007599 discharging Methods 0.000 claims description 10
- 238000003491 array Methods 0.000 claims 1
- 230000003028 elevating effect Effects 0.000 description 12
- 238000004140 cleaning Methods 0.000 description 11
- 230000004044 response Effects 0.000 description 10
- 238000001514 detection method Methods 0.000 description 9
- 238000000034 method Methods 0.000 description 7
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- 238000010586 diagram Methods 0.000 description 4
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- 239000010410 layer Substances 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 239000011247 coating layer Substances 0.000 description 2
- 239000011159 matrix material Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- KFYRPLNVJVHZGT-UHFFFAOYSA-N Amitriptyline hydrochloride Chemical compound Cl.C1CC2=CC=CC=C2C(=CCCN(C)C)C2=CC=CC=C21 KFYRPLNVJVHZGT-UHFFFAOYSA-N 0.000 description 1
- 230000001174 ascending effect Effects 0.000 description 1
- 239000011324 bead Substances 0.000 description 1
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- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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- 238000000926 separation method Methods 0.000 description 1
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- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
- B05C5/02—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
- B05C5/0254—Coating heads with slot-shaped outlet
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C13/00—Means for manipulating or holding work, e.g. for separate articles
- B05C13/02—Means for manipulating or holding work, e.g. for separate articles for particular articles
Landscapes
- Coating Apparatus (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017008112A JP6860356B2 (ja) | 2017-01-20 | 2017-01-20 | 塗布装置および塗布方法 |
CN202010856746.8A CN111992437A (zh) | 2017-01-20 | 2018-01-19 | 涂敷装置以及涂敷方法 |
CN201810055183.5A CN108325788B (zh) | 2017-01-20 | 2018-01-19 | 涂敷装置以及涂敷方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017008112A JP6860356B2 (ja) | 2017-01-20 | 2017-01-20 | 塗布装置および塗布方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2018114475A JP2018114475A (ja) | 2018-07-26 |
JP6860356B2 true JP6860356B2 (ja) | 2021-04-14 |
Family
ID=62925272
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2017008112A Active JP6860356B2 (ja) | 2017-01-20 | 2017-01-20 | 塗布装置および塗布方法 |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP6860356B2 (zh) |
CN (2) | CN108325788B (zh) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6896008B2 (ja) * | 2019-03-19 | 2021-06-30 | 株式会社Screenホールディングス | 基板処理装置および基板処理方法 |
JP6916833B2 (ja) * | 2019-04-18 | 2021-08-11 | 株式会社Screenホールディングス | 塗布装置および塗布方法 |
JP6907281B2 (ja) * | 2019-09-19 | 2021-07-21 | 株式会社Screenホールディングス | 塗布装置、高さ検出方法および塗布方法 |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4049751B2 (ja) * | 2004-02-05 | 2008-02-20 | 東京エレクトロン株式会社 | 塗布膜形成装置 |
JP4571525B2 (ja) * | 2005-03-10 | 2010-10-27 | 東京エレクトロン株式会社 | 基板処理装置及び基板処理方法 |
JP4634265B2 (ja) * | 2005-09-27 | 2011-02-16 | 東京エレクトロン株式会社 | 塗布方法及び塗布装置 |
JP4673180B2 (ja) * | 2005-10-13 | 2011-04-20 | 東京エレクトロン株式会社 | 塗布装置及び塗布方法 |
JP4884871B2 (ja) * | 2006-07-27 | 2012-02-29 | 東京エレクトロン株式会社 | 塗布方法及び塗布装置 |
JP4753313B2 (ja) * | 2006-12-27 | 2011-08-24 | 東京エレクトロン株式会社 | 基板処理装置 |
JP5221508B2 (ja) * | 2009-12-25 | 2013-06-26 | 東京エレクトロン株式会社 | 基板処理装置 |
JP5437134B2 (ja) * | 2010-03-31 | 2014-03-12 | 大日本スクリーン製造株式会社 | 塗布装置 |
JP5608469B2 (ja) * | 2010-08-20 | 2014-10-15 | 東京応化工業株式会社 | 塗布装置 |
JP2012091122A (ja) * | 2010-10-27 | 2012-05-17 | Toray Eng Co Ltd | 塗布システム |
JP5485928B2 (ja) * | 2011-03-09 | 2014-05-07 | 東京エレクトロン株式会社 | 基板浮上搬送装置及び基板処理装置 |
JP2013150946A (ja) * | 2012-01-24 | 2013-08-08 | Tatsumo Kk | ウエブ塗布装置 |
-
2017
- 2017-01-20 JP JP2017008112A patent/JP6860356B2/ja active Active
-
2018
- 2018-01-19 CN CN201810055183.5A patent/CN108325788B/zh active Active
- 2018-01-19 CN CN202010856746.8A patent/CN111992437A/zh active Pending
Also Published As
Publication number | Publication date |
---|---|
CN108325788A (zh) | 2018-07-27 |
CN111992437A (zh) | 2020-11-27 |
JP2018114475A (ja) | 2018-07-26 |
CN108325788B (zh) | 2020-09-15 |
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