JP6859443B2 - メモリ・アレイおよびメモリ・アレイを形成する方法 - Google Patents
メモリ・アレイおよびメモリ・アレイを形成する方法 Download PDFInfo
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- 230000015654 memory Effects 0.000 title claims description 60
- 239000000463 material Substances 0.000 claims description 219
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 36
- 238000000034 method Methods 0.000 claims description 28
- 229910052751 metal Inorganic materials 0.000 claims description 26
- 239000002184 metal Substances 0.000 claims description 26
- 239000003989 dielectric material Substances 0.000 claims description 21
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 20
- 239000010703 silicon Substances 0.000 claims description 20
- 235000012239 silicon dioxide Nutrition 0.000 claims description 18
- 239000000377 silicon dioxide Substances 0.000 claims description 18
- 239000011800 void material Substances 0.000 claims description 16
- 230000000903 blocking effect Effects 0.000 claims description 12
- 229910052581 Si3N4 Inorganic materials 0.000 claims description 11
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 11
- 238000009413 insulation Methods 0.000 claims description 9
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 claims description 8
- 229910021529 ammonia Inorganic materials 0.000 claims description 4
- 229910001925 ruthenium oxide Inorganic materials 0.000 claims description 4
- WOCIAKWEIIZHES-UHFFFAOYSA-N ruthenium(iv) oxide Chemical compound O=[Ru]=O WOCIAKWEIIZHES-UHFFFAOYSA-N 0.000 claims description 4
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 claims description 3
- 229910052731 fluorine Inorganic materials 0.000 claims description 3
- 239000011737 fluorine Substances 0.000 claims description 3
- 239000001257 hydrogen Substances 0.000 claims description 3
- 229910052739 hydrogen Inorganic materials 0.000 claims description 3
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims description 3
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical compound [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims 1
- 229910052700 potassium Inorganic materials 0.000 claims 1
- 239000011591 potassium Substances 0.000 claims 1
- 239000011810 insulating material Substances 0.000 description 27
- 239000000203 mixture Substances 0.000 description 27
- 238000012545 processing Methods 0.000 description 17
- 239000004020 conductor Substances 0.000 description 15
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- 238000000231 atomic layer deposition Methods 0.000 description 5
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- 150000004767 nitrides Chemical class 0.000 description 5
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- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 4
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 4
- WGTYBPLFGIVFAS-UHFFFAOYSA-M tetramethylammonium hydroxide Chemical compound [OH-].C[N+](C)(C)C WGTYBPLFGIVFAS-UHFFFAOYSA-M 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 239000010937 tungsten Substances 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 3
- 239000002800 charge carrier Substances 0.000 description 3
- 238000005530 etching Methods 0.000 description 3
- 229910052732 germanium Inorganic materials 0.000 description 3
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 3
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 229910052719 titanium Inorganic materials 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 3
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- 230000006870 function Effects 0.000 description 2
- 229910000449 hafnium oxide Inorganic materials 0.000 description 2
- WIHZLLGSGQNAGK-UHFFFAOYSA-N hafnium(4+);oxygen(2-) Chemical compound [O-2].[O-2].[Hf+4] WIHZLLGSGQNAGK-UHFFFAOYSA-N 0.000 description 2
- 230000014759 maintenance of location Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 150000001247 metal acetylides Chemical class 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 2
- RVTZCBVAJQQJTK-UHFFFAOYSA-N oxygen(2-);zirconium(4+) Chemical compound [O-2].[O-2].[Zr+4] RVTZCBVAJQQJTK-UHFFFAOYSA-N 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 229910021332 silicide Inorganic materials 0.000 description 2
- 239000011232 storage material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 229910001936 tantalum oxide Inorganic materials 0.000 description 2
- 229910001928 zirconium oxide Inorganic materials 0.000 description 2
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000007385 chemical modification Methods 0.000 description 1
- 238000013500 data storage Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000012634 fragment Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 230000006911 nucleation Effects 0.000 description 1
- 238000010899 nucleation Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 239000002243 precursor Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 230000006798 recombination Effects 0.000 description 1
- 238000005215 recombination Methods 0.000 description 1
- 239000003870 refractory metal Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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- H10B43/23—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels
- H10B43/27—EEPROM devices comprising charge-trapping gate insulators characterised by three-dimensional arrangements, e.g. with cells on different height levels with source and drain on different levels, e.g. with sloping channels the channels comprising vertical portions, e.g. U-shaped channels
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Description
44のセグメント43の各々は、ワード線レベル20に隣接し、ギャップ45の各々は、絶縁性レベル18の1つに隣接する。図示された実施形態では、電荷捕獲材料44のセグメント43は、ワード線レベル20を越えては垂直方向に延びない(すなわち、絶縁性レベル18には垂直方向に重ならない)。他の実施形態では、電荷捕獲材料44のセグメント43は、絶縁性レベル18に部分的に重なるように導電性レベル20を越えて垂直方向に延び得る。
つかの実施形態では、積層15に沿って垂直方向に延びるものと見なされ得る)。電荷トンネル材料46は、チャネル材料48と電荷捕獲材料44との間に横方向に存在する。チャネル材料48は、任意の適切な組成物または組成物の組合せを含んでよく、いくつかの実施形態では、適切にドープされたシリコンを含むか、基本的にはそのシリコンから成るか、またはそのシリコンから成るものであり得る。
料44の選択的な形成を誘導するために材料68の表面を活性化する。代替のまたは追加の処理は、材料66の表面の非活性化を含み得る。たとえば、材料66の表面に沿った電荷捕獲材料44の形成を妨げるか、または不可能にするために、バリアが材料66の表面に沿って(たとえば、表面66に沿ったバリア材料の堆積、材料66の表面の化学的修飾、材料66の表面の物理的修飾などの1つまたは複数によって)形成され得る。
リエーションを提供するものである場合があり、いずれかの重要な化学的差異または電気的差異を示すのには利用されない。
2のレベルは第2の材料を含む。第1および第2のレベルは、第1および第2のレベルを通って延びる開口部に沿って露出された表面を有する。電荷捕獲材料は、第1のレベルの露出された表面よりも第2のレベルの露出された表面に沿って選択的に形成される。電荷トンネル材料は、第1および第2のレベルに沿って垂直方向に延びるように形成され、電荷捕獲材料によって第2のレベルから離間される。チャネル材料は、電荷トンネル材料に沿って垂直方向に延びるように形成される。第2の材料が除去されて、空隙を残す。導電性レベルは、第2の空隙内に形成される。導電性レベルは、NANDメモリ・アレイのワード線レベルであり、制御ゲート領域に対応する終端部を有する。
Claims (8)
- 交互の絶縁性レベルおよびワード線レベルの垂直積層であって、前記ワード線レベルが制御ゲート領域に対応する終端部を有し、前記ワード線レベルが、第1の領域を有し、かつ前記第1の領域に横方向に隣接する第2の領域を有し、前記第2の領域が、前記第1の領域よりも前記終端部に近く、前記第1の領域が、前記第2の領域よりも垂直方向に厚く、前記第2の領域が、前記終端部を含む、垂直積層と、
前記ワード線レベルの前記制御ゲート領域に沿い、前記絶縁性レベルには沿わない、電荷捕獲材料であって、電荷遮断材料によって前記制御ゲート領域から離間された、電荷捕獲材料であって、前記電荷遮断材料が高k誘電材料を含み、前記高k誘電材料が、前記ワード線レベルの前記第2の領域の頂部表面および底部表面に沿い、かつ前記終端部に沿っており、前記高k誘電材料が、前記ワード線レベルの前記第1の領域には沿っておらず、前記ワード線レベルの前記第1の領域が、前記ワード線レベルの前記第2の領域よりも前記高k誘電材料の厚さの約2倍だけ厚い、電荷捕獲材料と、
前記積層に沿って垂直方向に延び、誘電材料によって前記電荷捕獲材料から横方向に離間された、チャネル材料と
を含む、メモリ・アレイ。 - 交互の絶縁性レベルおよびワード線レベルの垂直積層であって、前記ワード線レベルが、制御ゲート領域に対応する終端部を有し、並びに第1の領域と、前記第1の領域に横方向に隣接する第2の領域とを有し、前記第2の領域が、前記第1の領域よりも前記終端部に近く、前記第1の領域が、前記第2の領域よりも垂直方向に厚く、前記第2の領域が、前記終端部を含む、垂直積層と、
前記ワード線レベルの前記制御ゲート領域に沿い、電荷遮断材料によって前記制御ゲート領域から離間された、電荷捕獲材料であって、前記電荷遮断材料が高k誘電材料を含み、前記高k誘電材料が、前記ワード線レベルの前記第2の領域の頂部表面および底部表面に沿い、かつ前記終端部に沿っており、前記高k誘電材料が、前記ワード線レベルの前記第1の領域には沿っておらず、前記ワード線レベルの前記第1の領域が、前記ワード線レベルの前記第2の領域よりも前記高k誘電材料の厚さの約2倍だけ厚く、前記電荷捕獲材料が、複数のセグメントとして構成され、前記ワード線レベルの各々が、前記電荷捕獲材料の前記セグメントの1つに隣接し、前記電荷捕獲材料の前記セグメントが、互いに上に配置され、介在ギャップによって互いに垂直方向に離間される、電荷捕獲材料と、
前記積層に沿って垂直方向に延び、電荷トンネル材料によって前記電荷捕獲材料から横方向に離間された、チャネル材料と
を含む、NANDメモリ・アレイ。 - 前記電荷トンネル材料の領域が、前記電荷捕獲材料の前記垂直方向に離間されたセグメント間の前記ギャップ内に延びる、請求項2に記載のNANDメモリ・アレイ。
- 交互の第1および第2のレベルの垂直積層を形成することであって、前記第1のレベルが第1の材料を含み、前記第2のレベルが第2の材料を含み、前記第1および第2のレベルが、前記第1および第2のレベルを通って延びる開口部に沿って露出された表面を有する、垂直積層を形成することと、
前記第1のレベルの前記露出された表面よりも前記第2のレベルの前記露出された表面に沿って電荷捕獲材料を選択的に形成することと、
前記第1および第2のレベルに沿って垂直方向に延び、前記電荷捕獲材料によって前記第2のレベルから離間された、電荷トンネル材料を形成することと、
前記電荷トンネル材料に沿って垂直方向に延びるチャネル材料を形成することと、
空隙を残すように前記第2の材料を除去することと、
前記空隙をライニングするために前記空隙内に高k誘電材料を形成することと、
前記空隙の第2のセグメントが前記高k誘電材料でライニングされたままで、前記空隙の第1のセグメントが前記高k誘電材料でライニングされないように、前記空隙内の前記高k誘電材料を引っ込めることと、
前記空隙内に導電性レベルを形成することであって、前記導電性レベルが、NANDメモリ・アレイのワード線レベルであり、制御ゲート領域に対応する終端部を有し、前記空隙内に形成された前記導電性レベルが、前記第1のセグメント内の第1の領域と前記第2のセグメント内の第2の領域とを有し、前記第1の領域が、前記第2の領域よりも垂直方向に厚い、導電性レベルを形成することと
を含む、NANDメモリ・アレイを形成する方法。 - 交互の第1および第2のレベルの垂直積層を形成することであって、前記第1のレベルが二酸化ケイ素を含み、前記第2のレベルがシリコンを含み、前記第1および第2のレベルが、前記第1および第2のレベルを通って延びる開口部に沿って露出された表面を有する、垂直積層を形成することと、
水素、アンモニア、およびフッ素の1つまたは複数で前記第2のレベルの前記露出された表面を処理することと、
前記第1のレベルの前記露出された表面よりも前記第2のレベルの前記処理された表面に沿って電荷捕獲材料を選択的に形成することと、
前記第1および第2のレベルに沿って垂直方向に延び、前記電荷捕獲材料によって前記第2のレベルから離間された、電荷トンネル材料を形成することと、
前記電荷トンネル材料に沿って垂直方向に延びるチャネル材料を形成することと、
空隙を残すように前記第2のレベルの前記シリコンを除去することと、
前記空隙内に金属含有導電性レベルを形成することであって、前記金属含有導電性レベルが、NANDメモリ・アレイのワード線レベルであり、制御ゲート領域に対応する終端部を有し、前記金属含有導電性レベルが、第1の領域および第2の領域を有し、前記第2の領域が、前記第1の領域よりも前記終端部により近接し、前記第1の領域が、前記第2の領域よりも垂直方向に厚い、金属含有導電性レベルを形成することと
を含む、NANDメモリ・アレイを形成する方法。 - 前記電荷捕獲材料が、窒化ケイ素、酸窒化ケイ素、および酸化ルテニウムの1つまたは複数を含む、請求項5に記載の方法。
- 前記空隙内に前記金属含有導電性レベルを形成する前に、前記空隙をライニングするために前記空隙内に高k誘電材料を形成することを含む、請求項5に記載の方法。
- 前記空隙の第2のセグメントが前記高k誘電材料でライニングされたままで、前記空隙の第1のセグメントが前記高k誘電材料でライニングされないように、前記空隙内の前記高k誘電材料を引っ込めることを含み、金属含有導電性レベルの前記第1の領域が、前記第1のセグメント内に形成され、金属含有導電性レベルの前記第2の領域が、前記第2のセグメント内に形成される、請求項7に記載の方法。
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