JP6836663B2 - 発熱部材 - Google Patents
発熱部材 Download PDFInfo
- Publication number
- JP6836663B2 JP6836663B2 JP2019556151A JP2019556151A JP6836663B2 JP 6836663 B2 JP6836663 B2 JP 6836663B2 JP 2019556151 A JP2019556151 A JP 2019556151A JP 2019556151 A JP2019556151 A JP 2019556151A JP 6836663 B2 JP6836663 B2 JP 6836663B2
- Authority
- JP
- Japan
- Prior art keywords
- heater
- electrode
- base material
- face
- insulating layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000000463 material Substances 0.000 claims description 121
- 239000010409 thin film Substances 0.000 claims description 66
- 238000005507 spraying Methods 0.000 claims description 22
- 229910052751 metal Inorganic materials 0.000 claims description 11
- 150000001875 compounds Chemical class 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 229910052721 tungsten Inorganic materials 0.000 claims description 5
- 239000000203 mixture Substances 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 229910052782 aluminium Inorganic materials 0.000 claims description 3
- 229910052804 chromium Inorganic materials 0.000 claims description 3
- 229910052802 copper Inorganic materials 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 229910052750 molybdenum Inorganic materials 0.000 claims description 3
- 229910052759 nickel Inorganic materials 0.000 claims description 3
- 229910052758 niobium Inorganic materials 0.000 claims description 3
- 229910052697 platinum Inorganic materials 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 229910052709 silver Inorganic materials 0.000 claims description 3
- 239000000126 substance Substances 0.000 claims description 3
- 229910052715 tantalum Inorganic materials 0.000 claims description 3
- 229910052719 titanium Inorganic materials 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 54
- 235000012431 wafers Nutrition 0.000 description 32
- 238000000034 method Methods 0.000 description 18
- 230000002093 peripheral effect Effects 0.000 description 16
- 238000012545 processing Methods 0.000 description 14
- 239000000919 ceramic Substances 0.000 description 13
- 239000000470 constituent Substances 0.000 description 12
- 238000007751 thermal spraying Methods 0.000 description 11
- 239000011248 coating agent Substances 0.000 description 9
- 238000000576 coating method Methods 0.000 description 9
- 238000009826 distribution Methods 0.000 description 9
- 239000010408 film Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 6
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000007246 mechanism Effects 0.000 description 6
- 239000007789 gas Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 238000009413 insulation Methods 0.000 description 4
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 239000004020 conductor Substances 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 150000004767 nitrides Chemical class 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 238000005240 physical vapour deposition Methods 0.000 description 3
- 238000007750 plasma spraying Methods 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- 238000004088 simulation Methods 0.000 description 3
- 238000005299 abrasion Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000001312 dry etching Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000020169 heat generation Effects 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000001931 thermography Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- 229910016569 AlF 3 Inorganic materials 0.000 description 1
- 229910016036 BaF 2 Inorganic materials 0.000 description 1
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910001069 Ti alloy Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- -1 YF 3 Inorganic materials 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005422 blasting Methods 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 229910052576 carbides based ceramic Inorganic materials 0.000 description 1
- 238000010288 cold spraying Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Inorganic materials [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000005476 soldering Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32715—Workpiece holder
- H01J37/32724—Temperature
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
- H01L21/6833—Details of electrostatic chucks
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
- B23Q3/15—Devices for holding work using magnetic or electric force acting directly on the work
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67098—Apparatus for thermal treatment
- H01L21/67103—Apparatus for thermal treatment mainly by conduction
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6831—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using electrostatic chucks
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/687—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches
- H01L21/68714—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support
- H01L21/68757—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using mechanical means, e.g. chucks, clamps or pinches the wafers being placed on a susceptor, stage or support characterised by a coating or a hardness or a material
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B1/00—Details of electric heating devices
- H05B1/02—Automatic switching arrangements specially adapted to apparatus ; Control of heating devices
- H05B1/0227—Applications
- H05B1/023—Industrial applications
- H05B1/0233—Industrial applications for semiconductors manufacturing
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/02—Details
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/02—Details
- H05B3/03—Electrodes
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/28—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material
- H05B3/283—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor embedded in insulating material the insulating material being an inorganic material, e.g. ceramic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/68—Heating arrangements specially adapted for cooking plates or analogous hot-plates
- H05B3/72—Plates of sheet metal
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
- H01J2237/32—Processing objects by plasma generation
- H01J2237/33—Processing objects by plasma generation characterised by the type of processing
- H01J2237/334—Etching
- H01J2237/3341—Reactive etching
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B2203/00—Aspects relating to Ohmic resistive heating covered by group H05B3/00
- H05B2203/013—Heaters using resistive films or coatings
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Ceramic Engineering (AREA)
- Inorganic Chemistry (AREA)
- Plasma & Fusion (AREA)
- Analytical Chemistry (AREA)
- Mechanical Engineering (AREA)
- Resistance Heating (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Drying Of Semiconductors (AREA)
- Surface Heating Bodies (AREA)
Description
1a 載置面
1b 底面
2、52、62、72 基材部
2a 第1の端面
2b 第2の端面
2c 側面
3 絶縁層
3a 第1絶縁層
3b 第2絶縁層
3c 第3絶縁層
4、40、41 薄膜ヒータ
5 電極部
6 第1給電口
7 第2給電口
10、42、60、70 ヒータ本体
11、43、63、73 ヒータ延設部
11s 先端部分
12、48、65、75 ヒータ給電部
15、55、61、71 電極本体
16、56、64、74 電極延設部
17、57、66、76 電極給電部
30 プラズマ処理装置
31 真空チャンバ
32 静電チャック
33 ガス導入装置
34 上部電極
36 チャンバ壁
37 支持部
44、45、46、47、48、49 電源
51、77 段差部
W ウェハ
F フォーカスリング
Claims (9)
- 基材部と、この基材部の外部に設けられ給電によって発熱する薄膜ヒータとを備えた発熱部材であって、
前記薄膜ヒータは、ヒータ本体と、当該ヒータ本体の両端からそれぞれ延設されたヒータ延設部と、を有しており、
前記ヒータ本体と前記ヒータ延設部のいずれもが溶射皮膜からなり、
前記ヒータ本体は、帯状に形成されており、かつ折り返し部分を有し、折り返し前と折り返し後が互いに平行になっている繰返しパターンを有しており、
前記ヒータ本体の両端からそれぞれ延設された前記ヒータ延設部は、そのいずれもが前記基材部の前記ヒータ本体が配設された面と異なる面上まで延設されて、その先端部分が当該ヒータ本体に電力を供給するヒータ給電部を構成している発熱部材。 - 前記基材部は、第1の端面及びこの端面と対向する第2の端面を有する立体形状で構成されており、
前記ヒータ本体が前記第1の端面上に配設されており、
前記第1の端面上において、前記基材部と前記ヒータ本体との間には、溶射皮膜からなる第1絶縁層が配置されており、前記ヒータ本体の第1絶縁層側と反対側の面上には、溶射皮膜からなる第2絶縁層が配置されており、
前記ヒータ延設部が前記第1、第2の端面間を渡る側面上に延設されており、
前記第1の端面上及び前記側面上において、前記基材部と前記ヒータ延設部との間には、溶射皮膜からなる第1絶縁層が配置されており、前記ヒータ延設部の第1絶縁層側と反対側の面上には、溶射皮膜からなる第2絶縁層が配置されており、
前記ヒータ給電部が前記側面上で構成されている請求項1に記載の発熱部材。 - 前記基材部は、第1の端面及びこの端面と対向する第2の端面を有する立体形状で構成されており、
前記ヒータ本体が前記第1の端面上に配設されており、
前記第1の端面上において、前記基材部と前記ヒータ本体との間には、溶射皮膜からなる第1絶縁層が配置されており、前記ヒータ本体の第1絶縁層側と反対側の面上には、溶射皮膜からなる第2絶縁層が配置されており、
前記ヒータ延設部が前記第1、第2の端面間を渡る側面上に延設されており、
前記第1の端面上、前記側面上、及び前記第2の端面上において、前記基材部と前記ヒータ延設部との間には、溶射皮膜からなる第1絶縁層が配置されており、前記ヒータ延設部の第1絶縁層側と反対側の面上には、溶射皮膜からなる第2絶縁層が配置されており、
前記ヒータ給電部が前記第2の端面上で構成されている請求項1に記載の発熱部材。 - 前記ヒータ本体は略同心円状に形成されており、当該ヒータ本体の最外周にある両末端から、それぞれ前記ヒータ延設部が径方向外側へ向けて引き延ばされている請求項1〜3のいずれかに記載の発熱部材。
- 前記薄膜ヒータは、Mo、W、Ta、Cr、Ti、Al、Si、Ni、Nb、Fe、Cu、Ag、Ptから選択される金属元素単体、これら金属元素の1種以上を含む合金、これら金属元素の1種以上を含む導電性化合物、又はこれらの混合物からなる請求項1〜4のいずれかに記載の発熱部材。
- 前記ヒータ給電部は、給電ケーブルの先が接合された接続構造、給電ケーブルの先が給電ソケットを介して接続された接続構造、給電ケーブルの先が直接的に押し当てられた接続構造のいずれかを有する請求項1〜5のいずれかに記載の発熱部材。
- 前記基材部の外部に、電極部を更に備えており、
前記電極部は溶射皮膜からなると共に、電極本体と、当該電極本体から延設された電極延設部と、を有しており、
前記電極延設部は、当該基材部の前記電極本体が配設された面と異なる面上まで延設されて、その先端部分が当該電極本体に電力を供給する電極給電部を構成している請求項1〜6のいずれかに記載の発熱部材。 - 前記基材部は、第1の端面及びこの端面と対向する第2の端面を有する立体形状で構成されており、
前記電極本体が前記第1の端面上に配設されており、
前記電極延設部が前記第1、第2の端面間を渡る側面上に延設されており、
前記電極給電部が前記側面上で構成されている請求項7に記載の発熱部材。 - 前記基材部は、第1の端面及びこの端面と対向する第2の端面を有する立体形状で構成されており、
前記電極本体が前記第1の端面上に配設されており、
前記電極延設部が前記第1、第2の端面間を渡る側面上に延設されており、
前記電極給電部が前記第2の端面上で構成されている請求項7に記載の発熱部材。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017226296 | 2017-11-24 | ||
JP2017226296 | 2017-11-24 | ||
PCT/JP2018/040059 WO2019102794A1 (ja) | 2017-11-24 | 2018-10-29 | 発熱部材 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2019102794A1 JPWO2019102794A1 (ja) | 2020-07-16 |
JP6836663B2 true JP6836663B2 (ja) | 2021-03-03 |
Family
ID=66631431
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019556151A Active JP6836663B2 (ja) | 2017-11-24 | 2018-10-29 | 発熱部材 |
Country Status (6)
Country | Link |
---|---|
US (2) | US11631574B2 (ja) |
JP (1) | JP6836663B2 (ja) |
KR (1) | KR102398922B1 (ja) |
CN (1) | CN111357096A (ja) |
TW (1) | TWI732151B (ja) |
WO (1) | WO2019102794A1 (ja) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11631574B2 (en) | 2017-11-24 | 2023-04-18 | Tocalo Co., Ltd. | Heater component |
CN114080670A (zh) * | 2019-06-28 | 2022-02-22 | 日本碍子株式会社 | 静电卡盘加热器 |
JP2021132148A (ja) * | 2020-02-20 | 2021-09-09 | 東京エレクトロン株式会社 | ステージ、プラズマ処理装置及びプラズマ処理方法 |
AT524091B1 (de) * | 2020-07-28 | 2023-03-15 | Villinger Markus | Beheizbares Bauteil und Verfahren zum Herstellen desselben |
JP7296351B2 (ja) * | 2020-10-02 | 2023-06-22 | 日本碍子株式会社 | セラミックヒータ |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3238925B2 (ja) | 1990-11-17 | 2001-12-17 | 株式会社東芝 | 静電チャック |
JPH07161803A (ja) * | 1993-12-08 | 1995-06-23 | Tokyo Electron Ltd | アルミニウム部材とポリベンズイミダゾール部材との接合方法、静電チャックの電極構造およびその製造方法 |
US5528451A (en) | 1994-11-02 | 1996-06-18 | Applied Materials, Inc | Erosion resistant electrostatic chuck |
US5691876A (en) * | 1995-01-31 | 1997-11-25 | Applied Materials, Inc. | High temperature polyimide electrostatic chuck |
JP4435742B2 (ja) * | 2005-08-09 | 2010-03-24 | 信越化学工業株式会社 | 加熱素子 |
JP4508990B2 (ja) * | 2005-09-07 | 2010-07-21 | 株式会社巴川製紙所 | 給電コネクタ、及び当該給電コネクタを有する静電チャック装置 |
JP2007317772A (ja) | 2006-05-24 | 2007-12-06 | Shinko Electric Ind Co Ltd | 静電チャック装置 |
KR100759781B1 (ko) * | 2006-07-06 | 2007-09-20 | 삼성전자주식회사 | 반도체 메모리 장치의 입출력 센스앰프 제어회로 및 입출력센스앰프 제어방법 |
JP5032818B2 (ja) * | 2006-09-29 | 2012-09-26 | 新光電気工業株式会社 | 静電チャック |
KR100884327B1 (ko) * | 2007-03-30 | 2009-02-18 | 주식회사 유진테크 | 써모커플 장치 및 기판처리장치 |
JP2009170509A (ja) | 2008-01-11 | 2009-07-30 | Hitachi High-Technologies Corp | ヒータ内蔵静電チャックを備えたプラズマ処理装置 |
JP5423632B2 (ja) * | 2010-01-29 | 2014-02-19 | 住友大阪セメント株式会社 | 静電チャック装置 |
JP6359236B2 (ja) | 2012-05-07 | 2018-07-18 | トーカロ株式会社 | 静電チャック |
JP6319023B2 (ja) | 2013-09-27 | 2018-05-09 | 住友大阪セメント株式会社 | 静電チャック装置 |
TW201603164A (zh) * | 2014-04-01 | 2016-01-16 | 恩特格林斯公司 | 加熱靜電卡盤 |
US10410897B2 (en) | 2014-06-23 | 2019-09-10 | Ngk Spark Plug Co., Ltd. | Electrostatic chuck |
JP6442296B2 (ja) | 2014-06-24 | 2018-12-19 | 東京エレクトロン株式会社 | 載置台及びプラズマ処理装置 |
US11631574B2 (en) | 2017-11-24 | 2023-04-18 | Tocalo Co., Ltd. | Heater component |
-
2018
- 2018-10-29 US US16/764,042 patent/US11631574B2/en active Active
- 2018-10-29 KR KR1020207015152A patent/KR102398922B1/ko active IP Right Grant
- 2018-10-29 CN CN201880074361.7A patent/CN111357096A/zh active Pending
- 2018-10-29 JP JP2019556151A patent/JP6836663B2/ja active Active
- 2018-10-29 WO PCT/JP2018/040059 patent/WO2019102794A1/ja active Application Filing
- 2018-11-09 TW TW107139765A patent/TWI732151B/zh active
-
2022
- 2022-11-18 US US18/057,187 patent/US20230079853A1/en active Pending
Also Published As
Publication number | Publication date |
---|---|
TWI732151B (zh) | 2021-07-01 |
WO2019102794A1 (ja) | 2019-05-31 |
US11631574B2 (en) | 2023-04-18 |
CN111357096A (zh) | 2020-06-30 |
KR20200083517A (ko) | 2020-07-08 |
KR102398922B1 (ko) | 2022-05-16 |
US20200286718A1 (en) | 2020-09-10 |
TW201927068A (zh) | 2019-07-01 |
JPWO2019102794A1 (ja) | 2020-07-16 |
US20230079853A1 (en) | 2023-03-16 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6836663B2 (ja) | 発熱部材 | |
JP7335060B2 (ja) | Rfおよびガス供給のための金属化セラミック管を備える基板台座モジュール | |
TWI581361B (zh) | Electrostatic chuck and electrostatic chuck manufacturing method | |
US7446284B2 (en) | Etch resistant wafer processing apparatus and method for producing the same | |
US10373853B2 (en) | Electrostatic chuck and wafer processing apparatus | |
JP5524213B2 (ja) | 調整可能な電気抵抗率を有するウェーハ処理装置 | |
JP3582518B2 (ja) | 抵抗発熱体回路パターンとそれを用いた基板処理装置 | |
JPH11312570A (ja) | セラミックヒータ | |
TW202044463A (zh) | 溫度調節單元 | |
JP4122723B2 (ja) | 被処理物保持体 | |
JP6618159B2 (ja) | 発熱部材 | |
JP2001176646A (ja) | セラミックスヒータ | |
JP2002299015A (ja) | セラミックヒーター |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20200124 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20200918 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20201116 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20201214 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20210119 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20210205 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 6836663 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |