JP6826955B2 - プラズマ処理装置及びプラズマ処理方法 - Google Patents

プラズマ処理装置及びプラズマ処理方法 Download PDF

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JP6826955B2
JP6826955B2 JP2017116950A JP2017116950A JP6826955B2 JP 6826955 B2 JP6826955 B2 JP 6826955B2 JP 2017116950 A JP2017116950 A JP 2017116950A JP 2017116950 A JP2017116950 A JP 2017116950A JP 6826955 B2 JP6826955 B2 JP 6826955B2
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plasma processing
voltage
high frequency
focus ring
power supply
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JP2019004027A5 (enExample
JP2019004027A (ja
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幸一 永海
幸一 永海
夏実 鳥井
夏実 鳥井
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Tokyo Electron Ltd
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Tokyo Electron Ltd
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Priority to JP2017116950A priority Critical patent/JP6826955B2/ja
Priority to TW107118901A priority patent/TWI740049B/zh
Priority to SG10201804881QA priority patent/SG10201804881QA/en
Priority to US16/003,954 priority patent/US10431433B2/en
Priority to KR1020180067114A priority patent/KR102494181B1/ko
Priority to CN201810612044.8A priority patent/CN109087843B/zh
Publication of JP2019004027A publication Critical patent/JP2019004027A/ja
Publication of JP2019004027A5 publication Critical patent/JP2019004027A5/ja
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32091—Radio frequency generated discharge the radio frequency energy being capacitively coupled to the plasma
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32623—Mechanical discharge control means
    • H01J37/32642—Focus rings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32137—Radio frequency generated discharge controlling of the discharge by modulation of energy
    • H01J37/32155—Frequency modulation
    • H01J37/32165—Plural frequencies
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32366—Localised processing
    • H01J37/32385—Treating the edge of the workpieces
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32532—Electrodes
    • H01J37/32577—Electrical connecting means
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32697—Electrostatic control
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32697—Electrostatic control
    • H01J37/32706—Polarising the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32917—Plasma diagnostics
    • H01J37/3299—Feedback systems
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24564—Measurements of electric or magnetic variables, e.g. voltage, current, frequency

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Drying Of Semiconductors (AREA)
  • Plasma Technology (AREA)
JP2017116950A 2017-06-14 2017-06-14 プラズマ処理装置及びプラズマ処理方法 Active JP6826955B2 (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2017116950A JP6826955B2 (ja) 2017-06-14 2017-06-14 プラズマ処理装置及びプラズマ処理方法
TW107118901A TWI740049B (zh) 2017-06-14 2018-06-01 電漿處理裝置及電漿處理方法
US16/003,954 US10431433B2 (en) 2017-06-14 2018-06-08 Plasma processing apparatus and plasma processing method
SG10201804881QA SG10201804881QA (en) 2017-06-14 2018-06-08 Plasma processing apparatus and plasma processing method
KR1020180067114A KR102494181B1 (ko) 2017-06-14 2018-06-12 플라즈마 처리 장치 및 플라즈마 처리 방법
CN201810612044.8A CN109087843B (zh) 2017-06-14 2018-06-14 等离子体处理装置和等离子体处理方法

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JP2017116950A JP6826955B2 (ja) 2017-06-14 2017-06-14 プラズマ処理装置及びプラズマ処理方法

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JP2019004027A JP2019004027A (ja) 2019-01-10
JP2019004027A5 JP2019004027A5 (enExample) 2020-02-20
JP6826955B2 true JP6826955B2 (ja) 2021-02-10

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US (1) US10431433B2 (enExample)
JP (1) JP6826955B2 (enExample)
KR (1) KR102494181B1 (enExample)
CN (1) CN109087843B (enExample)
SG (1) SG10201804881QA (enExample)
TW (1) TWI740049B (enExample)

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KR102494181B1 (ko) 2023-01-31
TW201906006A (zh) 2019-02-01
CN109087843B (zh) 2020-06-09
TWI740049B (zh) 2021-09-21
KR20180136390A (ko) 2018-12-24
CN109087843A (zh) 2018-12-25
US20180366305A1 (en) 2018-12-20
US10431433B2 (en) 2019-10-01
SG10201804881QA (en) 2019-01-30
JP2019004027A (ja) 2019-01-10

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