JP6825532B2 - 搬送システム - Google Patents
搬送システム Download PDFInfo
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- JP6825532B2 JP6825532B2 JP2017198770A JP2017198770A JP6825532B2 JP 6825532 B2 JP6825532 B2 JP 6825532B2 JP 2017198770 A JP2017198770 A JP 2017198770A JP 2017198770 A JP2017198770 A JP 2017198770A JP 6825532 B2 JP6825532 B2 JP 6825532B2
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- 238000000034 method Methods 0.000 claims description 23
- 230000008569 process Effects 0.000 claims description 12
- 230000032258 transport Effects 0.000 description 138
- 239000013256 coordination polymer Substances 0.000 description 18
- 238000004140 cleaning Methods 0.000 description 17
- 238000003860 storage Methods 0.000 description 16
- 238000012546 transfer Methods 0.000 description 9
- 238000012545 processing Methods 0.000 description 8
- 239000000428 dust Substances 0.000 description 5
- 238000011144 upstream manufacturing Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000004065 semiconductor Substances 0.000 description 3
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- 238000003384 imaging method Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67259—Position monitoring, e.g. misposition detection or presence detection
- H01L21/67265—Position monitoring, e.g. misposition detection or presence detection of substrates stored in a container, a magazine, a carrier, a boat or the like
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0492—Storage devices mechanical with cars adapted to travel in storage aisles
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
- B65G1/1373—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed for fulfilling orders in warehouses
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- G—PHYSICS
- G08—SIGNALLING
- G08G—TRAFFIC CONTROL SYSTEMS
- G08G1/00—Traffic control systems for road vehicles
- G08G1/01—Detecting movement of traffic to be counted or controlled
- G08G1/0104—Measuring and analyzing of parameters relative to traffic conditions
- G08G1/0137—Measuring and analyzing of parameters relative to traffic conditions for specific applications
- G08G1/0145—Measuring and analyzing of parameters relative to traffic conditions for specific applications for active traffic flow control
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67046—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly scrubbing means, e.g. brushes
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
- H01L21/67051—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing using mainly spraying means, e.g. nozzles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67276—Production flow monitoring, e.g. for increasing throughput
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67724—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations by means of a cart or a vehicule
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Automation & Control Theory (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
- Control Of Conveyors (AREA)
- Pharmaceuticals Containing Other Organic And Inorganic Compounds (AREA)
- Liquid Crystal Substances (AREA)
Description
前記搬送経路上を前記搬送車よりも低速で走行しながら、前記物品を搬送するための作業以外の特定の作業を行う特定車と、
前記特定車の後方における渋滞の有無を判定する渋滞判定部と、を更に備え、
前記渋滞判定部が渋滞有りと判定した場合に、前記特定車が、前記作業を中断すると共に前記作業を行っていた作業地点から退避する退避走行を実行する点にある。
搬送システムの第1実施形態について、図面を参照して説明する。
図1に示すように、搬送システム1は、搬送経路99上を走行して物品9(図2参照)を搬送する搬送車2を複数備えている。搬送車2は、物品9を各所に搬送する。例えば、搬送対象の物品9としては、半導体ウェハを収容する容器(Front Opening Unified Pod;FOUP)などである。この場合、搬送車2は、半導体基板を処理するための処理装置や、仕掛品を一時保管するための保管庫等に、物品9を搬送する。以下では、搬送システム1が、半導体製造設備に適用される場合を例として説明する。
図3に示すように、搬送システム1は、システム全体を制御する統括制御装置4Hと、搬送車2の動作を制御する搬送車制御装置2Hと、特定車3の動作を制御する特定車制御装置3Hと、を備えている。搬送車制御装置2Hは、複数の搬送車2のそれぞれに備えられている。特定車制御装置3Hは、特定車3に備えられている。これらの制御装置は、例えば、マイクロコンピュータ等のプロセッサ、メモリ等の周辺回路等を備えている。そして、これらのハードウェアと、コンピュータ等のプロセッサ上で実行されるプログラムと、の協働により、各機能が実現される。
次に、搬送システム1の第2実施形態について説明する。本実施形態では、上記第1実施形態に比べて、制御構成が異なる。以下では、主に、上記第1実施形態と異なる点について説明する。特に説明しない点については、上記第1実施形態と同様である。
次に、搬送システム1のその他の実施形態について説明する。
以下、上記において説明した搬送システムの概要について説明する。
前記搬送経路上を前記搬送車よりも低速で走行しながら、前記物品を搬送するための作業以外の特定の作業を行う特定車と、
前記特定車の後方における渋滞の有無を判定する渋滞判定部と、を更に備え、
前記渋滞判定部が渋滞有りと判定した場合に、前記特定車が、前記作業を中断すると共に前記作業を行っていた作業地点から退避する退避走行を実行する。
前記優先地点判定部が、優先地点有りと判定した場合には、前記特定車は、前記退避走行の実行後、前記優先地点に移動して前記作業を開始すると好適である。
1つの前記作業エリア内での前記作業の中断回数が、予め設定した中断しきい値に達した場合には、前記渋滞判定部が渋滞有りと判定した場合であっても、前記特定車は、当該作業エリアにおける前記作業が完了するまで前記作業を継続すると好適である。
前記特定車が前記作業を行っている前記作業エリア内に存在する前記搬送車の台数に応じて、当該台数が多い場合には、当該台数が少ない場合に比べて、前記渋滞判定部が渋滞有りと判定し易くするように渋滞判定基準が可変設定されると好適である。
2 :搬送車
3 :特定車
9 :物品
44 :優先地点判定部
45 :渋滞判定部
99 :搬送経路
WA :作業エリア
WP :作業地点
CP :中断地点
PP :優先地点
T :継続時間
Tt :判定開始しきい値
N :中断回数
Nt :中断しきい値
Claims (7)
- 搬送経路上を走行して物品を搬送する搬送車を複数備える搬送システムであって、
前記搬送経路上を前記搬送車よりも低速で走行しながら、前記物品を搬送するための作業以外の特定の作業を行う特定車と、
前記特定車の後方における渋滞の有無を判定する渋滞判定部と、を更に備え、
前記渋滞判定部が渋滞有りと判定した場合に、前記特定車が、前記作業を中断すると共に前記作業を行っていた作業地点から退避する退避走行を実行する搬送システム。 - 前記特定車は、前記退避走行の実行後、前記作業を中断した前記作業地点に戻り前記作業を再開する請求項1に記載の搬送システム。
- 前記作業を中断した前記作業地点よりも先に前記作業を行うべき地点である優先地点の有無を判定する優先地点判定部を更に備え、
前記優先地点判定部が、優先地点有りと判定した場合には、前記特定車は、前記退避走行の実行後、前記優先地点に移動して前記作業を開始する請求項1又は2に記載の搬送システム。 - 前記退避走行中における前記特定車の走行速度が、前記作業中における前記特定車の走行速度よりも速い速度に設定されている請求項1から3のいずれか一項に記載の搬送システム。
- 前記渋滞判定部は、前記作業の継続時間が予め設定した判定開始しきい値を超えるまでは渋滞の有無の判定処理を行わない請求項1から4のいずれか一項に記載の搬送システム。
- 前記搬送経路中に複数の作業エリアが設定されており、
1つの前記作業エリア内での前記作業の中断回数が、予め設定した中断しきい値に達した場合には、前記渋滞判定部が渋滞有りと判定した場合であっても、前記特定車は、当該作業エリアにおける前記作業が完了するまで前記作業を継続する請求項1から5のいずれか一項に記載の搬送システム。 - 前記搬送経路中に複数の作業エリアが設定されており、
前記特定車が前記作業を行っている前記作業エリア内に存在する前記搬送車の台数に応じて、当該台数が多い場合には、当該台数が少ない場合に比べて、前記渋滞判定部が渋滞有りと判定し易くするように渋滞判定基準が可変設定される請求項1から6のいずれか一項に記載の搬送システム。
Priority Applications (5)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2017198770A JP6825532B2 (ja) | 2017-10-12 | 2017-10-12 | 搬送システム |
TW107135575A TWI772532B (zh) | 2017-10-12 | 2018-10-09 | 搬送系統 |
US16/156,084 US10699925B2 (en) | 2017-10-12 | 2018-10-10 | Transfer system |
KR1020180120284A KR102501289B1 (ko) | 2017-10-12 | 2018-10-10 | 반송 시스템 |
CN201811189697.6A CN109649974B (zh) | 2017-10-12 | 2018-10-12 | 搬运系统 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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JP2017198770A JP6825532B2 (ja) | 2017-10-12 | 2017-10-12 | 搬送システム |
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JP2019073349A JP2019073349A (ja) | 2019-05-16 |
JP6825532B2 true JP6825532B2 (ja) | 2021-02-03 |
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JP2017198770A Active JP6825532B2 (ja) | 2017-10-12 | 2017-10-12 | 搬送システム |
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US (1) | US10699925B2 (ja) |
JP (1) | JP6825532B2 (ja) |
KR (1) | KR102501289B1 (ja) |
CN (1) | CN109649974B (ja) |
TW (1) | TWI772532B (ja) |
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KR102303109B1 (ko) | 2019-07-05 | 2021-09-15 | 세메스 주식회사 | 반송체 제어 장치 및 이를 구비하는 반송체 제어 시스템 |
CN111599169A (zh) * | 2020-04-01 | 2020-08-28 | 广东中科臻恒信息技术有限公司 | 路侧单元巡检方法、设备、计算机可读存储介质 |
JP7400666B2 (ja) | 2020-08-31 | 2023-12-19 | 株式会社ダイフク | 清掃システム |
KR102664132B1 (ko) * | 2020-11-06 | 2024-05-10 | 세메스 주식회사 | 대상물 이송 방법 |
CN113401677B (zh) * | 2021-06-29 | 2023-04-07 | 上海华力微电子有限公司 | 自动物料传输系统及自动化物料传输方法 |
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US6308818B1 (en) * | 1999-08-02 | 2001-10-30 | Asyst Technologies, Inc. | Transport system with integrated transport carrier and directors |
JP4182874B2 (ja) * | 2003-12-09 | 2008-11-19 | アシスト テクノロジーズ ジャパン株式会社 | 台車制御装置及び制御方法 |
JP2007257154A (ja) * | 2006-03-22 | 2007-10-04 | Asyst Shinko Inc | 搬送車管理装置、搬送車管理システム、搬送車管理方法及び搬送車管理プログラム |
WO2007132650A1 (ja) * | 2006-05-12 | 2007-11-22 | Murata Kikai Kabushiki Kaisha | 搬送システムと搬送方法 |
JP5344366B2 (ja) * | 2008-09-05 | 2013-11-20 | 村田機械株式会社 | 搬送システム |
JP2010079407A (ja) * | 2008-09-24 | 2010-04-08 | Toyota Motor Corp | 無人搬送車の走行制御方法 |
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