WO2017010183A1 - 搬送制御装置及び搬送制御システム - Google Patents
搬送制御装置及び搬送制御システム Download PDFInfo
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- WO2017010183A1 WO2017010183A1 PCT/JP2016/066453 JP2016066453W WO2017010183A1 WO 2017010183 A1 WO2017010183 A1 WO 2017010183A1 JP 2016066453 W JP2016066453 W JP 2016066453W WO 2017010183 A1 WO2017010183 A1 WO 2017010183A1
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- 238000000034 method Methods 0.000 claims abstract description 116
- 238000012545 processing Methods 0.000 claims description 333
- 230000002159 abnormal effect Effects 0.000 claims description 48
- 238000001514 detection method Methods 0.000 claims description 33
- 238000011084 recovery Methods 0.000 claims description 29
- 238000012546 transfer Methods 0.000 claims description 26
- 238000012544 monitoring process Methods 0.000 claims description 2
- 238000005457 optimization Methods 0.000 abstract description 178
- 230000032258 transport Effects 0.000 description 81
- 238000013500 data storage Methods 0.000 description 33
- 238000003860 storage Methods 0.000 description 13
- 230000006870 function Effects 0.000 description 7
- 230000005856 abnormality Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000004891 communication Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
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- 238000004458 analytical method Methods 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/10—Sequence control of conveyors operating in combination
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/02—Control devices, e.g. for safety, warning or fault-correcting detecting dangerous physical condition of load carriers, e.g. for interrupting the drive in the event of overheating
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
- G05D1/02—Control of position or course in two dimensions
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
- G05D1/02—Control of position or course in two dimensions
- G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
- G05D1/0287—Control of position or course in two dimensions specially adapted to land vehicles involving a plurality of land vehicles, e.g. fleet or convoy travelling
- G05D1/0291—Fleet control
- G05D1/0297—Fleet control by controlling means in a control room
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/02—Control or detection
- B65G2203/0266—Control or detection relating to the load carrier(s)
Definitions
- the present invention relates to a conveyance control device and a conveyance control system.
- Patent Document 1 a system that controls the traveling of a carriage that transports articles such as semiconductors in a production line of a factory or the like that produces semiconductors is known.
- Patent Document 1 the state of the carriage is periodically reported from a plurality of carriages to the controller on the ground side, and a traveling command is periodically transmitted from the ground-side controller to the plurality of carriages.
- a cart system for controlling the inter-vehicle distance is described.
- the controller estimates the current position of each carriage based on the position notified from each carriage, the information indicating whether the vehicle is branched or straight, and the time, and the distribution of the estimated current position of each carriage. It is described that a travel route that avoids traffic congestion is searched based on the above. In this way, the future state is predicted based on the current state of the carriage, etc., and the carrying efficiency is improved by executing the optimization process for determining the traveling speed, the traveling route, etc. of the carriage based on the prediction result. I can expect that.
- the software (program) that executes the process is continuously improved for functions while verifying how it actually operates.
- An update may need to be implemented.
- an operator or the like executes a rollback process for switching back the software to the state before the update.
- the optimization process for determining the operation of the transporter is stopped until the rollback process is completed. For this reason, the operation
- an object of one aspect of the present invention is to provide a conveyance control device and a conveyance control system that can suppress the operation stop of the conveyance machine.
- a transfer control device is a transfer control device that controls the operation of one or more transfer machines that transfer an article, and that is based on first input data including an article transfer request.
- First instruction means for generating first instruction data indicating an operation instructed to the second apparatus and second instruction data indicating an operation instructed to the conveyor based on second input data including a request for conveying the article
- a second processing means for generating the first command data generated by the first processing means or an output means for outputting the second command data generated by the second processing means to the carrier, the first command data and the second And switching means for controlling the operation of at least one of the first processing means, the second processing means, and the output means so that any one of the two command data is output by the output means.
- command data to be output to the transfer machine can be generated by the first processing means and the second processing means.
- the switching means can switch which instruction data generated by the first processing means or the second processing means is output. Therefore, according to the transfer control device, even if one of the first processing means and the second processing means has a software bug or the like and an abnormal process occurs, it is generated by the other of the first processing means and the second processing means.
- the command data can be switched so as to be output. Thereby, the output of the command data to the transport machine by the output means can be continued. As a result, the operation based on the command data can be continued in the transport machine, so that the operation stop of the transport machine can be suppressed.
- the second input data includes basic items included in the first input data and additional items not included in the first input data, and the second command data is included in the first command data.
- the switching means includes the item and an additional item not included in the first command data, and the switching means first operates the second processing means and detects the trigger indicating the request to operate the first processing means. You may switch so that a processing means may operate
- the second processing means for generating the second command data including more information items than the first command data based on the second input data including more information items than the first input data It is operated with priority. As a result, it is possible to output the second command data, which is more detailed than the first command data, to the transport device during normal times, and to improve the transport operation (e.g., efficiency, optimization, etc.) of the transport device. it can.
- the switching means detects a trigger indicating a request for operating the first processing means, the switching means switches so that the first processing means operates. Thereby, for example, when it is necessary to change the processing content of the second processing means and the processing by the second processing means cannot be executed, the first command data generated by the first processing means is transferred to the transport machine. The operation of the transporter can be continued by outputting to.
- the transfer control device further includes an abnormal process detection unit that monitors the process by the second processing unit and detects the occurrence of the abnormal process, and the switching unit uses the detection of the occurrence of the abnormal process by the abnormal process detection unit as the trigger. It may be detected and switched so that the first processing means operates.
- the switching means automatically switches so that the first processing means operates. Accordingly, it is possible to prevent the abnormal process from being continued and to continue the operation of the transporter by the first command data generated by the first processing means.
- the transfer control device further includes a recovery means for recovering the processing content of the second processing means when the occurrence of the abnormal process is detected by the abnormal process detection means, and the switching means has been recovered by the recovery means And the second processing means may be switched to operate.
- the switching unit automatically switches the first processing unit to operate, and the recovery unit recovers the processing content of the second processing unit. . Then, after the restoration is completed, the switching unit switches so that the second processing unit operates again.
- operation of a conveying machine can be continued by operating a 1st processing means until restoration of the processing content of a 2nd processing means is completed. Further, after the restoration of the processing content of the second processing means is completed, the second processing means is operated again, so that the operation of the transporter can be enhanced (efficiency, optimization, etc.).
- a transport control system is a transport control system including one or more transporters that transport an article and a transport control device that controls the operation of the transporter.
- the first processing means for generating the first command data indicating the operation commanded to the transporter based on the first input data including the article transport request, and the second input data including the article transport request Based on the second processing means for generating the second command data indicating the operation commanded to the transporter, and the first command data generated by the first processing means or the second processing means generated by the second processing means.
- Output means for outputting the two command data to the conveyor, and the first processing means, the second processing means, and the output means so that either the first command data or the second command data is output by the output means.
- At least Switching means for controlling any one of the operations, and the conveyor receives the first command data, and controls the operation of the own device based on the first command data, and the second command Second operation control means for receiving data and controlling the operation of the own device based on the second command data.
- the transfer control device can generate command data to be output to the transfer machine by the first processing means and the second processing means.
- the transporter includes operation control means corresponding to each of the first command data and the second command data that can be received.
- the transport control device and the transport machine include a system (a pair of first processing means and first operation control means) for controlling operation of the transport machine based on the first command data, and a transport machine based on the second command data.
- a system (a pair of second processing means and second operation control means) for performing the operation control. Therefore, according to the transport control system, even if an abnormality process occurs in one system, for example, the operation control of the transport machine can be continued by switching the other system so that the other system operates. Thereby, the stop of operation
- FIG. 1 is a diagram showing a layout example of a transport control system according to an embodiment of the present invention.
- FIG. 2 is a block diagram illustrating a functional configuration of the transport control system.
- the transport control system 1 includes one or more carts (transport machines) 2 that transport articles, and a controller (transport control device) that controls the operation of each cart 2. 3.
- the transport control system 1 executes a control system that performs operation control of the carriage 2 based on a low-level operation instruction (basic instruction data), and performs operation control of the carriage 2 based on a high-level operation instruction (optimization instruction data). And a control system for switching between these control systems.
- the entire conveyance control can be optimized by controlling the operation of the carriage 2 based on a high-level operation command during normal operation.
- the operation control of the carriage 2 based on the low-level operation command can be switched. The operation control of the carriage 2 can be continued.
- the carriage 2 is provided so as to be able to travel along a conveyance path 4 such as a rail laid in the factory.
- the carriage 2 is not limited to a specific type, but is, for example, an overhead traveling vehicle, an automatic guided vehicle, a tracked carriage, or the like.
- the article conveyed by the carriage 2 is a cassette (so-called FOUP (Front Opening Unified Pod)) in which a plurality of semiconductor wafers are accommodated.
- FOUP Front Opening Unified Pod
- the conveyance path 4 is divided into a plurality of (12 in the example of FIG. 1) sections (bays), and a route (intrabay route) 5 in each bay and a route (interbay route) 6 connecting different bays. And form.
- a load port 7 and a buffer 8 are provided along the routes 5 and 6.
- the load port 7 is a point where FOUP is delivered between the processing apparatus (not shown) and the carriage 2.
- the buffer 8 is a point where the cart 2 can temporarily place the FOUP.
- the junction 9 is a point on the routes 5 and 6 where exclusive control for eliminating the simultaneous entry of a plurality of carriages 2 is required.
- the controller 3 controls the transport operation of each cart 2 by outputting a transport command to each cart 2 through wireless communication.
- the transport operation is a series of operations performed to transport the FOUP. For example, an operation of loading the FOUP (loading operation), an operation of lowering the FOUP (unloading operation), and the transport in the load port 7 and the buffer 8 and the like Including traveling operation traveling on the road 4.
- the controller 3 sends a transport request (for example, information indicating which FOUP is transported from which point to which point) from a host controller such as MES (Manufacturing Execution System) (not shown) indicating a request for transporting the FOUP. Accept and assign to cart 2.
- MES Manufacturing Execution System
- the controller 3 determines the carriage 2 to which the transfer request is assigned, and instructs the determined carriage 2 to execute the transfer request. Thereby, each conveyance request is executed by the carriage 2 to which the conveyance request is assigned.
- the configuration of control by the controller 3 is not limited to this example.
- the control target area may be divided into a plurality of zones, and a zone controller for controlling the carriage 2 in the zone may be provided for each zone. In this case, the controller 3 controls the carriage 2 via the zone controller.
- the carriage 2 includes a notification unit 21, a reception unit 22, a basic operation control unit 23, and an optimization operation control unit 24 as functional components.
- the controller 3 includes a receiving unit 31, a basic processing data storage unit 32, an optimization processing data storage unit 33, a basic processing unit 34, an optimization processing unit 35, and an output unit 36 as functional components. And an abnormal process detection unit 37, a switching unit 38, and a recovery unit 39.
- the controller 3 includes, as a hardware configuration, one or more CPUs (Central Processing Unit) 301, one or more RAMs (Random Access Memory) 302 that are main storage devices, and one or more ROMs (Read Only Memory) 303, an input device 304 such as a keyboard for an operator to input an operation, an output device 305 such as a display for presenting information to the operator, and a communication module for performing wired or wireless communication with the outside
- the computer system includes 306 and an auxiliary storage device 307 such as a hard disk drive and a semiconductor memory.
- the controller 3 may be configured as a single server device, or may be configured as a plurality of server devices operating in cooperation. Each function of the controller 3 illustrated in FIG.
- a predetermined program is, for example, by causing a predetermined program to be read on hardware such as the CPU 301 and the RAM 302 illustrated in FIG. 3 to control the input device 304 and the output device under the control of the CPU 301. It is realized by operating 305 and the communication module 306 to read and write data in the RAM 302 and the auxiliary storage device 307.
- the hardware configuration of the carriage 2 is, for example, a configuration in which the input device and the output device are omitted from the hardware configuration of the controller 3 described above.
- the communication module is operated under the control of the CPU by loading a predetermined program on the hardware such as the CPU and RAM. This is realized by reading and writing data in the RAM and the auxiliary storage device.
- FIG. 4A shows an example of data input to the controller 3.
- data relating to the conveyance path, load port, and conveyance request is data input to the controller 3 by external input from the above-described host controller or the like, for example.
- bogie are data which show the state of the trolley
- the basic items shown in FIG. 4A are items included in the basic input data (first input data) 32a including a FOUP transport request.
- the basic input data 32 a is data stored in the basic processing data storage unit 32.
- the basic input data 32a is data used by the basic processing unit 34 to generate basic command data (first command data) 32b.
- the basic command data 32b is command data for causing the carriage 2 to execute a relatively simple low-level transport operation.
- the optimization input data 33 a is data stored in the optimization processing data storage unit 33.
- the optimization input data 33a is data used by the optimization processing unit 35 to generate optimization instruction data (second instruction data) 33b.
- the optimization command data 33b is command data for causing the carriage 2 to perform a relatively complicated high-level transport operation.
- an additional item may be empty. That is, the basic input data 32a and the optimized input data 33a may be the same.
- the basic items related to the conveyance path are the conveyance path ID for identifying the conveyance path, the length of the conveyance path, the shape such as a curve or a straight line, and the conveyance path.
- the closed state indicates the presence or absence of a loop.
- An additional item related to the transport path is a transport path use plan (for example, plan information including a maintenance time zone and a usable time zone of the transport path).
- the basic items related to the load port (load port 7) are a load port ID for identifying the load port and the presence / absence of FOUP.
- An additional item related to the load port is a load port use plan (for example, plan information including a load port maintenance time zone and a usable time zone).
- the basic items related to the carriage are the carriage ID for identifying the carriage, the position of the carriage on the conveyance path 4, the time when the carriage is present at the position, the type of the carriage (for example, the type of the carriage such as an overhead traveling vehicle). And the command execution state indicating the presence / absence of a transfer request assigned to the carriage.
- the basic items related to the transport request are a transport request ID for identifying the transport request, “From” indicating the loading point, “To” indicating the unloading point, and FOUP ID for identifying the FOUP to be transported.
- An additional item related to the transport request is a priority among the plurality of transport requests.
- FIG. 4 shows an example of command data output from the controller 3 to the carriage 2.
- the basic items shown in FIG. 4B are items included in the basic instruction data 32b.
- the additional items shown in FIG. 4B are items included only in the optimized instruction data 33b. That is, the optimization instruction data 33b is data including both basic items and additional items.
- the basic items are a cart command ID for identifying a cart command, “From” indicating a loading point, “To” indicating an unloading point, and a FOUP ID identifying a FOUP to be transported. , And a transport request ID indicating the assigned transport request.
- the additional items include a travel route instructed to the carriage 2 (for example, an order passing through some specific points set in advance on the transport path 4), and one or more set information of the arrival position and time (for example, the above-mentioned specific information) The information etc. which matched the point and the time which should arrive at the said specific point.
- the notification unit 21 is a means for periodically notifying the controller 3 of the state of the carriage 2 (for example, in a cycle of 1 msec to 1 sec). Specifically, as shown in (a) of FIG. 4, the notification unit 21 includes data indicating the state of the carriage including the carriage ID, position, time, type, and command execution state (hereinafter “trolley report data”). To the controller 3.
- the receiving unit 22 is a means for receiving command data from the controller 3.
- the receiving unit 22 determines the type of instruction data from the controller 3 from information included in the header of the instruction data, for example. If the receiving unit 22 determines that the received command data is the basic command data 32b, the receiving unit 22 transfers the basic command data 32b to the basic operation control unit 23. On the other hand, when the receiving unit 22 determines that the received command data is the optimized command data 33b, the receiving unit 22 delivers the optimized command data 33b to the optimization operation control unit 24.
- the cart 2 is configured such that the receiving unit 22 determines the type of instruction data, and an appropriate operation control unit (basic operation control unit 23 or optimized operation control) according to the type of instruction data. Section 24) is allocated instruction data (basic instruction data 32b or optimized instruction data 33b). Thereby, it is possible to switch and execute two different systems of instructions.
- the basic operation control unit 23 is means (first operation control means) that receives the basic command data 32b and controls the operation of the own device based on the basic command data 32b.
- the optimization operation control unit 24 is means (second operation control means) that receives the optimization instruction data 33b and controls the operation of the own apparatus based on the optimization instruction data 33b.
- the optimization operation control unit 24 can execute control based on the set information of one or more of the travel route, the arrival position, and the time in addition to the basic command data 32b, and can execute more advanced control than the basic operation control unit 23. It has become.
- the travel route and the set information included in the optimization command data 33b are, for example, information generated by the optimization processing unit 35 from the viewpoint of overall optimization in the FOUP transport operation.
- the travel route is a travel route (optimized travel route) set for the carriage 2 so that execution of a plurality of transport requests can be completed in the shortest time.
- the set information of one or more of the arrival position and time causes interference between the plurality of carriages 2 (the distance between the vehicles is too tight, or one carriage 2 obstructs the traveling of the other carriages 2). It is the information decided not to be. Therefore, the optimization operation control unit 24 can move the aircraft along the optimized travel route based on the travel route included in the optimization command data.
- the optimization operation control unit 24 controls the acceleration / deceleration of the own machine based on the set information included in the optimization command data, for example, and adjusts the time of arrival at the specific point, thereby allowing another cart 2 It is possible to control the traveling of the aircraft so as not to cause interference with the vehicle.
- the accepting unit 31 is means for accepting data (data shown in FIG. 4A) that is the basis of the basic input data 32a and the optimized input data 33a from the host controller, the carriage 2, and the like.
- the accepting unit 31 stores data related to the basic item in the received data as basic input data 32a in the basic processing data storage unit 32, and among the received data, data related to the basic item and the additional item is optimized processing data storage unit 33. To store.
- the basic processing data storage unit 32 is storage means configured to allow data access (reading and writing) from the basic processing unit 34, stores basic input data 32a used for processing of the basic processing unit 34,
- the basic instruction data 32b generated by the processing unit 34 is stored.
- the optimization processing data storage unit 33 is a storage unit configured to be able to access data (read / write, etc.) from the optimization processing unit 35, and stores optimization input data 33a used for processing of the optimization processing unit 35.
- the optimization instruction data 33b generated by the optimization processing unit 35 is stored.
- the basic processing data storage unit 32 and the optimization processing data storage unit 33 may be configured as a common storage unit.
- the basic processing unit 34 that requires the basic input data 32a can execute processing using only the data related to the basic items among the data stored in the common storage unit.
- the optimization processing unit 35 that requires the optimization input data 33a can execute processing using data related to both basic items and additional items among the data stored in the storage unit.
- the basic processing unit 34 is means (first processing means) that generates basic command data 32b indicating an operation commanded to the carriage 2 based on the basic input data 32a.
- the optimization processing unit 35 is means (second processing means) that generates optimization command data 33b indicating an operation commanded to the carriage 2 based on the optimization input data 33a.
- the basic processing unit 34 and the optimization processing unit 35 are switched by the switching unit 38 so that one of them operates simultaneously. However, the basic processing unit 34 and the optimization processing unit 35 may be operated simultaneously. In this case, the switching unit 38 may switch the operation of the output unit 36 so that the output unit 36 outputs the instruction data generated by either the basic processing unit 34 or the optimization processing unit 35.
- the switching unit 38 controls the operations of the basic processing unit 34 and the optimization processing unit 35 so that either the basic processing unit 34 or the optimization processing unit 35 is operated. . More specifically, in this embodiment, the switching unit 38 switches so that the optimization processing unit 35 operates preferentially. That is, when there is no problem such as a bug on the software in the processing contents of the optimization processing unit 35, the optimization processing unit 35 operates with priority over the basic processing unit 34.
- the controller 3 executes allocation control for allocating the conveyance request to each trolley 2. The unit 34 and the optimization processing unit 35 will be described.
- the basic processing unit 34 performs processing at a lower level than the optimization processing unit 35.
- the basic processing unit 34 generates the basic command data 32b having relatively simple contents that do not depend on the layout of the transport path 4, the load port 7, the buffer 8, and the like.
- the basic processing unit 34 processes each transfer request notified from the host controller in the order in which the transfer request is notified.
- the basic processing unit 34 is a cart that is closest to a point where the FOUP to be transported indicated by the transport request (that is, the FOUP indicated by the FOUPID included in the transport request) exists (that is, the point indicated by “From” in the transport request). Assign to 2.
- the basic processing unit 34 refers to the trolley report data notified from each trolley 2 (that is, the item of the trolley in the basic input data 32a), so that the FOUP that is the transport target indicated by the transport request is the most.
- the cart 2 that exists in a close position is specified.
- the basic processing unit 34 generates basic instruction data 32b including information (that is, the basic item shown in FIG. 4A) that instructs the specified cart 2 to execute the transport request.
- the basic instruction data 32b generated by the basic processing unit 34 is stored in, for example, the basic processing data storage unit 32.
- the output part 36 takes out the said basic command data 32b, and outputs it to the cart 2 of a command object.
- the above-described processing by the basic processing unit 34 is merely an example, but the basic processing unit 34 executes relatively simple low-level processing in this way.
- the optimization processing unit 35 performs higher level processing than the basic processing unit 34 by using more information than the basic processing unit 34. For example, the optimization processing unit 35 gives priority to a transport request having a higher priority among a plurality of transport requests notified from the host controller based on information on “priority” that is an additional item of the transport request. To process. Further, the optimization processing unit 35 executes an optimization process for assigning each transport request to each carriage 2 so that a plurality of transport requests are completed in the shortest time. That is, the optimization processing unit 35 does not process the transport requests in the order in which they are notified as in the basic processing unit 34, but processes a plurality of transport requests with the highest efficiency while processing the transport requests with high priority. The allocation is optimized so that execution is completed in the shortest possible time.
- the optimization processing unit 35 determines which transport request is allocated to each carriage 2 in order to realize the above-described allocation, and also determines the travel route, arrival position, and time of each carriage 2. One or more set information is generated. And the optimization process part 35 contains the information (namely, basic item shown to (a) of FIG. 4) which instruct
- Optimized instruction data 33b including information (that is, the additional item shown in FIG. 4B) is generated.
- the optimization instruction data 33b generated by the optimization processing unit 35 is stored in, for example, the optimization processing data storage unit 33.
- the output part 36 takes out the said optimization command data 33b, and outputs it to the cart 2 of a command object.
- the above-described processing by the optimization processing unit 35 is merely an example, but the optimization processing unit 35 executes a relatively complicated high-level optimization process as described above.
- the output unit 36 is generated by the basic processing unit 34 and stored in the basic processing data storage unit 32, or is generated by the optimization processing unit 35 and stored in the optimization processing data storage unit 33. It is means (output means) for outputting the stored optimization command data 33b to the cart 2 to be commanded.
- Instruction data (basic instruction data 32b or optimization instruction data 33b) is stored in only one of the basic processing data storage unit 32 and the optimization processing data storage unit 33 for each control cycle of the controller 3, and the output unit 36 The command data may be output.
- instruction data is stored in both the basic processing data storage unit 32 and the optimization processing data storage unit 33 for each control cycle of the controller 3, and the output unit 36 includes the basic processing data storage unit 32 and the optimization processing data storage unit.
- the instruction data stored in one of 33 may be selected and output.
- the switching unit 38 may switch whether the output unit 36 selects the basic instruction data 32b or the optimized instruction data 33b. Any method may be used for causing the output unit 36 to grasp which instruction data (basic instruction data 32b or optimization instruction data 33b) is output to which carriage 2.
- the basic processing unit 34 or the optimization processing unit 35 may cause the output unit 36 to grasp the cart 2 to be commanded by including the cart ID to be commanded as an item of command data. Further, the basic processing unit 34 or the optimization processing unit 35 may individually notify the output unit 36 of information indicating the association between the cart instruction ID and the cart ID.
- the abnormal process detection unit 37 is a unit (abnormal process detection unit) that monitors the process by the optimization processing unit 35 and detects the occurrence of the abnormal process. For example, when an arbitrary exception process (for example, a process corresponding to a predetermined exception pattern) occurs in the calculation process performed by the optimization process unit 35, the abnormal process detection unit 37 detects the occurrence of the abnormal process. Further, the abnormal process detection unit 37 detects the occurrence of the abnormal process by monitoring the data (for example, the optimized input data 33a) stored in the optimization process data storage unit 33 accessed by the optimization process unit 35. May be.
- an arbitrary exception process for example, a process corresponding to a predetermined exception pattern
- the abnormality processing detection unit 37 has detected that the data stored in the optimization processing data storage unit 33 has been replaced with an incorrect value in the course of the data processing by the optimization processing unit 35 (for example, it is defined as a natural number in advance). It is also possible to detect that a negative value has been assigned to the data that is present) as the occurrence of abnormal processing.
- the abnormal process detection unit 37 notifies the switching unit 38 and the recovery unit 39 of detection information indicating that the occurrence of the abnormal process has been detected.
- the switching unit 38 includes at least one of the basic processing unit 34, the optimization processing unit 35, and the output unit 36 so that one of the basic command data 32b and the optimization command data 33b is output by the output unit 36. It is means (switching means) for controlling the operation. For example, the switching unit 38 may perform switching so that one of the basic processing unit 34 and the optimization processing unit 35 operates. Further, the switching unit 38 controls the operation of the output unit 36 so that both the basic processing unit 34 and the optimization processing unit 35 are operated simultaneously, and the output unit 36 outputs only one of the processing results. Also good. As described above, as an example in the present embodiment, the switching unit 38 operates the optimization processing unit 35 with priority and detects the trigger indicating the request to operate the basic processing unit 34. Switch to work.
- the switching unit 38 detects a trigger indicating a request for operating the optimization processing unit 35 when the basic processing unit 34 is operating, the switching unit 38 switches the optimization processing unit 35 to operate.
- the trigger is set in advance in the switching unit 38 as a trigger for processing switching.
- Specific examples of the trigger include, for example, a process switching request manually input by an operator operation, a control signal instructing a rollback process notified from the abnormal process detection unit 37, and the like.
- each trigger is associated with information indicating which of the basic processing unit 34 and the optimization processing unit 35 is switched to operate. In this case, the switching unit 38 can switch so that one of the basic processing unit 34 and the optimization processing unit 35 operates by referring to the information.
- the switching unit 38 operates the basic processing unit 34 to notify the detection information when the abnormal processing detection unit 37 detects the occurrence of the abnormal processing, that is, when the detection information is notified from the abnormal processing detection unit 37. This is detected as a trigger indicating a request to be executed, and the basic processing unit 34 is switched to operate. That is, the switching unit 38 stops the process of the optimization processing unit 35 in which the occurrence of the abnormal process is detected and starts the process of the basic processing unit 34. As described above, when the occurrence of abnormal processing is detected in the processing by the optimization processing unit 35, the switching unit 38 automatically switches the basic processing unit 34 to operate, whereby the abnormal processing is continued. In addition, the operation of the carriage 2 can be continued by the basic command data 32b generated by the basic processing unit 34.
- the switching unit 38 receives a notification of completion information from the recovery unit 39 described later, thereby detecting that the recovery of the processing content of the optimization processing unit 35 by the recovery unit 39 has been completed, and the optimization processing unit 35 Switch to work. That is, the switching unit 38 detects the notification of completion information from the recovery unit 39 as a trigger indicating a request for operating the optimization processing unit 35 and switches the optimization processing unit 35 to operate. As described above, the switching unit 38 operates the basic processing unit 34 until it receives notification of completion information from the recovery unit 39 until it receives notification of completion information from the recovery unit 39 after detecting the occurrence of abnormal processing. When it receives, it switches so that the optimization process part 35 may operate
- the operation of the carriage 2 can be continued by operating the basic processing unit 34 until the restoration of the processing content of the optimization processing unit 35 by the restoration unit 39 is completed.
- the optimization processing unit 35 is operated again, so that the transport operation (efficiency, optimization, etc.) of the carriage 2 can be enhanced. it can.
- the recovery unit 39 is means for recovering the processing content of the optimization processing unit 35 when the abnormal processing detection unit 37 detects the occurrence of the abnormal processing, that is, when the detection information is notified from the abnormal processing detection unit 37 ( Recovery means). Specifically, the restoration unit 39 restores the processing content of the optimization processing unit 35 that has been switched so that the operation is stopped by the switching unit 38 by a preset restoration method. At this time, when data destroyed by the optimization process data storage unit 33 is stored in the optimization process data storage unit 33, the restoration unit 39 is stored in the optimization process data storage unit 33. Perform data recovery (eg initialization). In addition, when it is necessary to initialize the data stored in the optimization processing data storage unit 33, the recovery unit 39 puts the data to be initialized in another storage area before executing the initialization. You may save (copy). The saved data can be used for cause analysis of the occurrence of abnormality.
- the restoration unit 39 can restore the processing content of the optimization processing unit 35 by executing a rollback process for switching the software of the optimization processing unit 35 back to the software before the update.
- the recovery unit 39 completes such recovery processing, the recovery unit 39 notifies the switching unit 38 of completion information indicating that the recovery has been completed.
- FIG. 5 is a schematic diagram for explaining the update process and the rollback process.
- the “optimization process v1” block indicates the process of the optimization processing unit 35 before the update process
- the “optimization process v2” block indicates the process of the optimization process unit 35 after the update process.
- the “basic processing” block indicates the processing of the basic processing unit 34.
- (A) in FIG. 5 shows a state before the update process.
- the optimized instruction data 33b generated by the processing of the optimization processing unit 35 (optimization processing v1) is It is output to the carriage 2.
- (C) in FIG. 5 shows a state after the update process.
- the optimization processing unit 35 is switched so as to operate with priority by the switching unit 38, the optimization instruction data 33b generated by the processing of the optimization processing unit 35 (optimization processing v2) is It is output to the carriage 2.
- FIG. 5 shows an intermediate state during update processing or rollback processing.
- This intermediate state indicates a state in which the process by the optimization processing unit 35 cannot be executed during the update process or the rollback process.
- the basic processing unit 34 is switched to operate by the switching unit 38, whereby the basic command data 32 b generated by the processing (basic processing) of the basic processing unit 34 is output to the carriage 2.
- step S1 and S2 An example of the operation of the controller 3 before and after the update process (steps S1 and S2) and an example of the operation of the controller 3 before and after the rollback process (steps S3 to S8) will be described with reference to FIG.
- the switching unit 38 changes the instruction to process switching. It detects as a trigger and switches so that the basic process part 34 may operate
- the update software (software defining the optimization process v2) is stored in advance in the auxiliary storage device 307 of the controller 3 or the like by an operation of an operator or the like before the update process. Further, the software before the update (software that defines the optimization process v1) is stored in the auxiliary storage device 307 of the controller 3 for the rollback process even after the update process.
- step S2 the switching unit 38 stops the processing of the basic processing unit 34 and restarts the processing of the optimization processing unit 35.
- the abnormality process detection unit 37 monitors the process of the optimization process unit 35.
- the abnormal process detection unit 37 notifies the detection information to the switching unit 38 and the recovery unit 39 (step S3).
- the switching unit 38 detects the detection information notification as a trigger, and switches the basic processing unit 34 to operate (step S4). That is, in step S4, the switching unit 38 stops the processing of the optimization processing unit 35 and starts the processing of the basic processing unit 34.
- the restoration unit 39 stops the processing of the optimization processing unit 35 by the switching unit 38 and then updates the software of the optimization processing unit 35 with the updated software (optimization Rollback processing is performed to switch back from the software that defines the optimization processing v2) to the software before the update (software that defines the optimization processing v1) (step S5). Further, when the data stored in the optimization processing data storage unit 33 is destroyed by the data processing of the optimization processing unit 35, the restoration unit 39 stores the data stored in the optimization processing data storage unit 33. Recovery (for example, initialization) is executed (step S6).
- step S5 and step S6 are not restricted to the order shown in FIG.
- step S5 and step S6 may be executed in parallel, or step S5 may be executed after step S6 is executed.
- step S7 the recovery unit 39 notifies the switching unit 38 of completion information indicating completion of the rollback processing (step S7).
- the switching unit 38 detects the notification of the completion information as a trigger and switches the optimization processing unit 35 to operate (step S8). That is, in step S8, the switching unit 38 stops the processing of the basic processing unit 34 and restarts the processing of the optimization processing unit 35. As a result, the state before the update processing shown in FIG.
- the command data to be output to the carriage 2 can be generated by the basic processing unit 34 and the optimization processing unit 35.
- the switching unit 38 can switch which instruction data generated by the basic processing unit 34 or the optimization processing unit 35 is output. Therefore, according to the controller 3, even if one of the basic processing unit 34 and the optimization processing unit 35 (in this embodiment, the optimization processing unit 35 as an example) has a software bug or the like, It is possible to switch so that the instruction data generated by the other of the processing unit 34 and the optimization processing unit 35 is output. Thereby, the output of the command data to the carriage 2 by the output unit 36 can be continued. As a result, the operation based on the command data can be continued in the cart 2, so that the operation stop of the cart 2 can be suppressed.
- the controller 3 generates an optimization instruction data 33b including more information items than the basic instruction data 32b based on the optimization input data 33a including more information items than the basic input data 32a. 35 is operated preferentially. As a result, it is possible to output optimization command data 33b more detailed than the basic command data 32b to the carriage 2 during normal times, and to improve the transport operation (efficiency, optimization, etc.) of the carriage 2. Can do.
- the switching unit 38 switches the basic processing unit 34 to operate when it detects a trigger indicating a request for operating the basic processing unit 34.
- the basic processing unit 35 By outputting the basic command data 32b generated by 34 to the carriage 2, the operation of the carriage 2 can be continued.
- the controller 3 can generate command data for output to the carriage 2 by the basic processing unit 34 and the optimization processing unit 35.
- the carriage 2 includes operation control units (basic operation control unit 23 and optimization operation control unit 24) corresponding to the basic command data 32b and the optimization command data 33b that can be received. That is, the controller 3 and the carriage 2 are based on the basic control system (a pair of the basic processing unit 34 and the basic operation control unit 23) for performing the operation control of the carriage 2 based on the basic command data 32b, and the optimization command data 33b.
- An optimization control system (a pair of an optimization processing unit 35 and an optimization operation control unit 24) for performing operation control of the carriage 2 is provided.
- the switching unit 38 switches the other system to operate.
- the operation control of the carriage 2 can be continued.
- bogie 2 can be suppressed.
- the allocation control for allocating the transport request to the carriage 2 has been described.
- the control by the transfer control system 1 may be a control other than the allocation control (for example, control of the order of entry of the carriage 2 into the junction 9, control of the distance between the carriages 2, etc.).
- the contents of the optimization process and the basic process are not limited to the specific process contents, and can be contents according to the contents of the control executed by the transport control system 1.
- the target transporter controlled by the controller 3 is not limited to the cart mentioned in the above embodiment, and may be a transporter other than the cart such as a stacker crane.
- the controller 3 is provided as a device different from the control target transport machine (cart 2) has been described.
- the controller 3 3 may be incorporated into the transporter.
- control signal instructing the rollback process is notified to the switching unit 38 and the recovery unit 39 when the abnormal process detection unit 37 detects the occurrence of the abnormal process.
- the rollback processing instruction to the recovery unit 39 may be performed manually by an operator.
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Abstract
Description
Claims (5)
- 物品を搬送する一以上の搬送機の動作を制御する搬送制御装置であって、
前記物品の搬送要求を含む第1入力データに基づいて、前記搬送機に対して命令される動作を示す第1命令データを生成する第1処理手段と、
前記物品の搬送要求を含む第2入力データに基づいて、前記搬送機に対して命令される動作を示す第2命令データを生成する第2処理手段と、
前記第1処理手段によって生成された前記第1命令データ又は前記第2処理手段によって生成された前記第2命令データを前記搬送機に出力する出力手段と、
前記第1命令データ及び前記第2命令データのいずれか一方が前記出力手段によって出力されるように、前記第1処理手段、前記第2処理手段、及び前記出力手段の少なくともいずれかの動作を制御する切替手段と、を備える、
搬送制御装置。 - 前記第2入力データは、前記第1入力データに含まれる基本項目と前記第1入力データに含まれない追加項目とを含み、
前記第2命令データは、前記第1命令データに含まれる基本項目と前記第1命令データに含まれない追加項目とを含み、
前記切替手段は、前記第2処理手段を優先的に動作させ、前記第1処理手段を動作させる要求を示すトリガを検出した際に、前記第1処理手段が動作するように切り替える、
請求項1記載の搬送制御装置。 - 前記第2処理手段による処理を監視し、異常処理の発生を検知する異常処理検知手段を更に備え、
前記切替手段は、前記異常処理検知手段により前記異常処理の発生が検知された際に、当該異常処理の発生の検知を前記トリガとして検出し、前記第1処理手段が動作するように切り替える、
請求項2記載の搬送制御装置。 - 前記異常処理検知手段により前記異常処理の発生が検知された際に、前記第2処理手段の処理内容を復旧する復旧手段を更に備え、
前記切替手段は、前記復旧手段による復旧が完了したことを検知し、前記第2処理手段が動作するように切り替える、
請求項3記載の搬送制御装置。 - 物品を搬送する一以上の搬送機と、前記搬送機の動作を制御する搬送制御装置とを含んで構成される搬送制御システムであって、
前記搬送制御装置は、
前記物品の搬送要求を含む第1入力データに基づいて、前記搬送機に対して命令される動作を示す第1命令データを生成する第1処理手段と、
前記物品の搬送要求を含む第2入力データに基づいて、前記搬送機に対して命令される動作を示す第2命令データを生成する第2処理手段と、
前記第1処理手段によって生成された前記第1命令データ又は前記第2処理手段によって生成された前記第2命令データを前記搬送機に出力する出力手段と、
前記第1命令データ及び前記第2命令データのいずれか一方が前記出力手段によって出力されるように、前記第1処理手段、前記第2処理手段、及び前記出力手段の少なくともいずれかの動作を制御する切替手段と、を備え、
前記搬送機は、
前記第1命令データを受け取り、当該第1命令データに基づいて自機の動作を制御する第1動作制御手段と、
前記第2命令データを受け取り、当該第2命令データに基づいて自機の動作を制御する第2動作制御手段と、を備える、
搬送制御システム。
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