JP6384613B2 - 搬送制御装置及び搬送制御システム - Google Patents
搬送制御装置及び搬送制御システム Download PDFInfo
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- JP6384613B2 JP6384613B2 JP2017528325A JP2017528325A JP6384613B2 JP 6384613 B2 JP6384613 B2 JP 6384613B2 JP 2017528325 A JP2017528325 A JP 2017528325A JP 2017528325 A JP2017528325 A JP 2017528325A JP 6384613 B2 JP6384613 B2 JP 6384613B2
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- 238000012545 processing Methods 0.000 claims description 331
- 238000000034 method Methods 0.000 claims description 114
- 230000008569 process Effects 0.000 claims description 112
- 230000002159 abnormal effect Effects 0.000 claims description 48
- 238000001514 detection method Methods 0.000 claims description 33
- 238000011084 recovery Methods 0.000 claims description 29
- 238000012546 transfer Methods 0.000 claims description 21
- 238000012544 monitoring process Methods 0.000 claims description 2
- 238000005457 optimization Methods 0.000 description 172
- 230000032258 transport Effects 0.000 description 83
- 238000013500 data storage Methods 0.000 description 33
- 238000003860 storage Methods 0.000 description 13
- 230000006870 function Effects 0.000 description 7
- 230000005856 abnormality Effects 0.000 description 6
- 238000010586 diagram Methods 0.000 description 6
- 238000004891 communication Methods 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 4
- WBMKMLWMIQUJDP-STHHAXOLSA-N (4R,4aS,7aR,12bS)-4a,9-dihydroxy-3-prop-2-ynyl-2,4,5,6,7a,13-hexahydro-1H-4,12-methanobenzofuro[3,2-e]isoquinolin-7-one hydrochloride Chemical compound Cl.Oc1ccc2C[C@H]3N(CC#C)CC[C@@]45[C@@H](Oc1c24)C(=O)CC[C@@]35O WBMKMLWMIQUJDP-STHHAXOLSA-N 0.000 description 2
- 238000004458 analytical method Methods 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/10—Sequence control of conveyors operating in combination
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
- B65G43/02—Control devices, e.g. for safety, warning or fault-correcting detecting dangerous physical condition of load carriers, e.g. for interrupting the drive in the event of overheating
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
- G05D1/02—Control of position or course in two dimensions
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D1/00—Control of position, course, altitude or attitude of land, water, air or space vehicles, e.g. using automatic pilots
- G05D1/02—Control of position or course in two dimensions
- G05D1/021—Control of position or course in two dimensions specially adapted to land vehicles
- G05D1/0287—Control of position or course in two dimensions specially adapted to land vehicles involving a plurality of land vehicles, e.g. fleet or convoy travelling
- G05D1/0291—Fleet control
- G05D1/0297—Fleet control by controlling means in a control room
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
- B65G2203/02—Control or detection
- B65G2203/0266—Control or detection relating to the load carrier(s)
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- Engineering & Computer Science (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Power Engineering (AREA)
- Aviation & Aerospace Engineering (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- Automation & Control Theory (AREA)
- Control Of Position, Course, Altitude, Or Attitude Of Moving Bodies (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
Claims (5)
- 物品を搬送する一以上の搬送機の動作を制御する搬送制御装置であって、
前記物品の搬送要求を含む第1入力データに基づいて、前記搬送機に対して命令される動作を示す第1命令データを生成する第1処理手段と、
前記物品の搬送要求を含む第2入力データに基づいて、前記搬送機に対して命令される動作を示す第2命令データを生成する第2処理手段と、
前記第1処理手段によって生成された前記第1命令データ又は前記第2処理手段によって生成された前記第2命令データを前記搬送機に出力する出力手段と、
前記第1命令データ及び前記第2命令データのいずれか一方が前記出力手段によって出力されるように、前記第1処理手段、前記第2処理手段、及び前記出力手段の少なくともいずれかの動作を制御する切替手段と、を備える、
搬送制御装置。 - 前記第2入力データは、前記第1入力データに含まれる基本項目と前記第1入力データに含まれない追加項目とを含み、
前記第2命令データは、前記第1命令データに含まれる基本項目と前記第1命令データに含まれない追加項目とを含み、
前記切替手段は、前記第2処理手段を優先的に動作させ、前記第1処理手段を動作させる要求を示すトリガを検出した際に、前記第1処理手段が動作するように切り替える、
請求項1記載の搬送制御装置。 - 前記第2処理手段による処理を監視し、異常処理の発生を検知する異常処理検知手段を更に備え、
前記切替手段は、前記異常処理検知手段により前記異常処理の発生が検知された際に、当該異常処理の発生の検知を前記トリガとして検出し、前記第1処理手段が動作するように切り替える、
請求項2記載の搬送制御装置。 - 前記異常処理検知手段により前記異常処理の発生が検知された際に、前記第2処理手段の処理内容を復旧する復旧手段を更に備え、
前記切替手段は、前記復旧手段による復旧が完了したことを検知し、前記第2処理手段が動作するように切り替える、
請求項3記載の搬送制御装置。 - 物品を搬送する一以上の搬送機と、前記搬送機の動作を制御する搬送制御装置とを含んで構成される搬送制御システムであって、
前記搬送制御装置は、
前記物品の搬送要求を含む第1入力データに基づいて、前記搬送機に対して命令される動作を示す第1命令データを生成する第1処理手段と、
前記物品の搬送要求を含む第2入力データに基づいて、前記搬送機に対して命令される動作を示す第2命令データを生成する第2処理手段と、
前記第1処理手段によって生成された前記第1命令データ又は前記第2処理手段によって生成された前記第2命令データを前記搬送機に出力する出力手段と、
前記第1命令データ及び前記第2命令データのいずれか一方が前記出力手段によって出力されるように、前記第1処理手段、前記第2処理手段、及び前記出力手段の少なくともいずれかの動作を制御する切替手段と、を備え、
前記搬送機は、
前記第1命令データを受け取り、当該第1命令データに基づいて自機の動作を制御する第1動作制御手段と、
前記第2命令データを受け取り、当該第2命令データに基づいて自機の動作を制御する第2動作制御手段と、を備える、
搬送制御システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2015141065 | 2015-07-15 | ||
JP2015141065 | 2015-07-15 | ||
PCT/JP2016/066453 WO2017010183A1 (ja) | 2015-07-15 | 2016-06-02 | 搬送制御装置及び搬送制御システム |
Publications (2)
Publication Number | Publication Date |
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JPWO2017010183A1 JPWO2017010183A1 (ja) | 2017-12-21 |
JP6384613B2 true JP6384613B2 (ja) | 2018-09-05 |
Family
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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JP2017528325A Active JP6384613B2 (ja) | 2015-07-15 | 2016-06-02 | 搬送制御装置及び搬送制御システム |
Country Status (4)
Country | Link |
---|---|
US (1) | US10410895B2 (ja) |
JP (1) | JP6384613B2 (ja) |
TW (1) | TWI679510B (ja) |
WO (1) | WO2017010183A1 (ja) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP6825532B2 (ja) * | 2017-10-12 | 2021-02-03 | 株式会社ダイフク | 搬送システム |
DE102018132608A1 (de) * | 2018-12-18 | 2020-06-18 | Krones Ag | Vorrichtung und Verfahren zum Behandeln von Behältnissen |
TWI733593B (zh) * | 2020-04-28 | 2021-07-11 | 盟立自動化股份有限公司 | 防碰撞的控制方法及軌道車控制系統 |
US11542101B2 (en) * | 2020-07-23 | 2023-01-03 | Intelligrated Headquarters, Llc | Systems, methods, and computer program products for improved container transportation |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4856904A (en) * | 1985-01-21 | 1989-08-15 | Nikon Corporation | Wafer inspecting apparatus |
JP3894003B2 (ja) * | 2002-03-08 | 2007-03-14 | 村田機械株式会社 | 搬送システム |
JP4438095B2 (ja) | 2005-05-26 | 2010-03-24 | 村田機械株式会社 | 搬送システム |
JP2007200040A (ja) | 2006-01-26 | 2007-08-09 | Sharp Corp | 制御装置、製造システム、制御アプリケーション切替プログラム、および記録媒体 |
EP2404846B1 (en) * | 2009-03-03 | 2019-04-03 | Murata Machinery, Ltd. | Transfer system |
US9244443B2 (en) * | 2010-10-15 | 2016-01-26 | Yoshimasa Kobayashi | Recovery method for logistics system |
JP5446055B2 (ja) * | 2012-01-27 | 2014-03-19 | 村田機械株式会社 | 台車システム |
JP6121846B2 (ja) * | 2013-08-15 | 2017-04-26 | 株式会社Screenホールディングス | 基板処理装置、基板処理方法、および基板処理システム |
-
2016
- 2016-06-02 US US15/744,415 patent/US10410895B2/en active Active
- 2016-06-02 WO PCT/JP2016/066453 patent/WO2017010183A1/ja active Application Filing
- 2016-06-02 JP JP2017528325A patent/JP6384613B2/ja active Active
- 2016-07-14 TW TW105122225A patent/TWI679510B/zh active
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Publication number | Publication date |
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US20180208404A1 (en) | 2018-07-26 |
US10410895B2 (en) | 2019-09-10 |
TW201708997A (zh) | 2017-03-01 |
WO2017010183A1 (ja) | 2017-01-19 |
JPWO2017010183A1 (ja) | 2017-12-21 |
TWI679510B (zh) | 2019-12-11 |
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