JP6804304B2 - X線管用の電子エミッタ及びx線デバイス - Google Patents
X線管用の電子エミッタ及びx線デバイス Download PDFInfo
- Publication number
- JP6804304B2 JP6804304B2 JP2016568132A JP2016568132A JP6804304B2 JP 6804304 B2 JP6804304 B2 JP 6804304B2 JP 2016568132 A JP2016568132 A JP 2016568132A JP 2016568132 A JP2016568132 A JP 2016568132A JP 6804304 B2 JP6804304 B2 JP 6804304B2
- Authority
- JP
- Japan
- Prior art keywords
- electron
- electron emitter
- ray
- emission
- emitters
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
- H01J35/065—Field emission, photo emission or secondary emission cathodes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J35/00—X-ray tubes
- H01J35/02—Details
- H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
- H01J35/06—Cathodes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
- G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
- G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V5/00—Prospecting or detecting by the use of ionising radiation, e.g. of natural or induced radioactivity
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30488—Nitrides
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J2201/00—Electrodes common to discharge tubes
- H01J2201/30—Cold cathodes
- H01J2201/304—Field emission cathodes
- H01J2201/30446—Field emission cathodes characterised by the emitter material
- H01J2201/30496—Oxides
Landscapes
- X-Ray Techniques (AREA)
- Cold Cathode And The Manufacture (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201461937677P | 2014-02-10 | 2014-02-10 | |
| PCT/EP2015/052789 WO2015118178A1 (en) | 2014-02-10 | 2015-02-10 | An electron emitter for an x-ray tube |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2017510052A JP2017510052A (ja) | 2017-04-06 |
| JP6804304B2 true JP6804304B2 (ja) | 2020-12-23 |
Family
ID=52473906
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016568132A Active JP6804304B2 (ja) | 2014-02-10 | 2015-02-10 | X線管用の電子エミッタ及びx線デバイス |
| JP2016568131A Pending JP2017510051A (ja) | 2014-02-10 | 2015-02-10 | X線デバイス |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2016568131A Pending JP2017510051A (ja) | 2014-02-10 | 2015-02-10 | X線デバイス |
Country Status (12)
| Country | Link |
|---|---|
| US (2) | US10319555B2 (enExample) |
| EP (2) | EP3105772B1 (enExample) |
| JP (2) | JP6804304B2 (enExample) |
| KR (2) | KR102368515B1 (enExample) |
| CN (2) | CN106463320B (enExample) |
| AU (2) | AU2015213990B2 (enExample) |
| BR (2) | BR112016018369B1 (enExample) |
| CA (2) | CA2939139A1 (enExample) |
| MX (2) | MX363864B (enExample) |
| RU (2) | RU2682182C2 (enExample) |
| SA (2) | SA516371636B1 (enExample) |
| WO (2) | WO2015118178A1 (enExample) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US10283311B2 (en) * | 2015-08-21 | 2019-05-07 | Electronics And Telecommunications Research Institute | X-ray source |
| GB2537196B (en) * | 2015-10-02 | 2017-05-10 | Mario Michan Juan | Apparatus and method for electron irradiation scrubbing |
| EP3384516A1 (en) | 2015-12-04 | 2018-10-10 | Luxbright AB | An electron guiding and receiving element |
| US10096148B1 (en) | 2017-04-26 | 2018-10-09 | The Aerospace Corporation | Portable x-ray computed tomography |
| TWI651748B (zh) * | 2017-07-10 | 2019-02-21 | 法商歐洲雷射系統與方案解決公司 | 低壓佈線離子電漿放電源,及其用於具有二次發射之電子源的應用 |
| DE102017008810A1 (de) * | 2017-09-20 | 2019-03-21 | Cetteen Gmbh | MBFEX-Röhre |
| CN108072672B (zh) * | 2017-12-14 | 2021-03-02 | 清华大学 | 一种烧蚀结构形貌及产物的在线监测装置及其监测方法 |
| AU2019248217B2 (en) * | 2018-04-06 | 2023-07-13 | Micro-X Limited | Large scale stable field emitter for high current applications |
| KR102027407B1 (ko) * | 2018-05-16 | 2019-11-04 | 원광대학교산학협력단 | 탄소나노튜브 실을 이용한 필드 에미터 및 냉음극 구조 |
| KR101956153B1 (ko) | 2018-10-04 | 2019-06-24 | 어썸레이 주식회사 | 탄소나노튜브를 포함하는 얀의 제조방법 및 이로부터 제조된 얀 |
| KR101962215B1 (ko) | 2018-11-30 | 2019-03-26 | 어썸레이 주식회사 | 일 방향으로 정렬된 얀을 포함하는 탄소나노튜브 시트를 제조하는 방법 및 이에 의해 제조된 탄소나노튜브 시트 |
| KR101992745B1 (ko) | 2019-01-24 | 2019-06-26 | 어썸레이 주식회사 | 구조적 안정성이 우수하고 전자 방출 효율이 향상된 이미터 및 이를 포함하는 x-선 튜브 |
| US10825634B2 (en) * | 2019-02-21 | 2020-11-03 | Varex Imaging Corporation | X-ray tube emitter |
| US11315751B2 (en) * | 2019-04-25 | 2022-04-26 | The Boeing Company | Electromagnetic X-ray control |
| RU2710455C1 (ru) * | 2019-06-06 | 2019-12-26 | Закрытое акционерное общество "СуперОкс" (ЗАО "СуперОкс") | Многополостной катод для плазменного двигателя |
| KR102099411B1 (ko) | 2019-07-26 | 2020-04-09 | 어썸레이 주식회사 | 구조적 안정성이 우수한 전계 방출 장치 및 이를 포함하는 x-선 튜브 |
| US11719652B2 (en) * | 2020-02-04 | 2023-08-08 | Kla Corporation | Semiconductor metrology and inspection based on an x-ray source with an electron emitter array |
| CN113311012A (zh) * | 2021-05-26 | 2021-08-27 | 西湖大学 | 基于多晶x射线衍射仪的电化学检测装置及其测试方法 |
| RU209775U1 (ru) * | 2021-08-31 | 2022-03-23 | Общество с ограниченной ответственностью "Пространство-время" | Импульсный пьезоэлектрический источник рентгеновского излучения |
| CN114551192A (zh) * | 2022-02-17 | 2022-05-27 | 海宁精奕电子有限公司 | 冷阴极x射线管及x射线发生装置 |
| CN115410880A (zh) * | 2022-09-15 | 2022-11-29 | 中国科学技术大学 | 一种低维结构电子源及其制备方法 |
| US20250201506A1 (en) * | 2023-12-18 | 2025-06-19 | Varex Imaging Corporation | Field emitter apparatuses and x-ray systems |
| CN119008360A (zh) * | 2024-08-12 | 2024-11-22 | 南京信息工程大学 | 一种蜂窝状碳纳米阵列的x射线管和制备方法 |
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| US4924485A (en) | 1987-09-22 | 1990-05-08 | Hoeberling Robert F | Portable radiography system using a relativistic electron beam |
| KR0141174B1 (ko) * | 1994-12-28 | 1998-06-15 | 윤종용 | 초 순간 수상관의 직렬형 음극 신호 개선장치 |
| JPH08250054A (ja) * | 1995-03-14 | 1996-09-27 | Hitachi Ltd | 拡散補給型電子線源およびそれを用いた電子線装置 |
| DE69823441T2 (de) | 1997-09-30 | 2004-09-23 | Noritake Co., Ltd., Nagoya | Elektronen emittierende Quelle |
| JP3631959B2 (ja) | 1997-12-04 | 2005-03-23 | プリンタブル フィールド エミッターズ リミテッド | 電界電子放出材料および装置 |
| US6277318B1 (en) * | 1999-08-18 | 2001-08-21 | Agere Systems Guardian Corp. | Method for fabrication of patterned carbon nanotube films |
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| US6334939B1 (en) * | 2000-06-15 | 2002-01-01 | The University Of North Carolina At Chapel Hill | Nanostructure-based high energy capacity material |
| US7085351B2 (en) * | 2000-10-06 | 2006-08-01 | University Of North Carolina At Chapel Hill | Method and apparatus for controlling electron beam current |
| US20040240616A1 (en) | 2003-05-30 | 2004-12-02 | Applied Nanotechnologies, Inc. | Devices and methods for producing multiple X-ray beams from multiple locations |
| US6876724B2 (en) * | 2000-10-06 | 2005-04-05 | The University Of North Carolina - Chapel Hill | Large-area individually addressable multi-beam x-ray system and method of forming same |
| US6553096B1 (en) | 2000-10-06 | 2003-04-22 | The University Of North Carolina Chapel Hill | X-ray generating mechanism using electron field emission cathode |
| JP2002238885A (ja) | 2001-02-02 | 2002-08-27 | Ge Medical Systems Global Technology Co Llc | X線焦点位置制御方法及びそのプログラム並びにx線ct装置及びx線管 |
| JP3810656B2 (ja) * | 2001-07-23 | 2006-08-16 | 株式会社神戸製鋼所 | 微小x線源 |
| US6672925B2 (en) | 2001-08-17 | 2004-01-06 | Motorola, Inc. | Vacuum microelectronic device and method |
| US6828717B2 (en) * | 2001-10-26 | 2004-12-07 | Matsushita Electric Industrial Co., Ltd. | Electron gun having short length and cathode-ray tube apparatus using such electron gun |
| US7233101B2 (en) * | 2002-12-31 | 2007-06-19 | Samsung Electronics Co., Ltd. | Substrate-supported array having steerable nanowires elements use in electron emitting devices |
| JP2004241295A (ja) * | 2003-02-07 | 2004-08-26 | Hitachi Zosen Corp | カーボンナノチューブを用いた電子放出素子用電極材料およびその製造方法 |
| KR101099487B1 (ko) * | 2004-05-17 | 2011-12-28 | 마퍼 리쏘그라피 아이피 비.브이. | 대전 입자 빔 노광 시스템 |
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| JP4984234B2 (ja) | 2007-03-30 | 2012-07-25 | 国立大学法人長岡技術科学大学 | X線発生装置 |
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| EP2079095B1 (en) * | 2008-01-11 | 2012-01-11 | UVIS Light AB | Method of manufacturing a field emission display |
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| JP2010186694A (ja) * | 2009-02-13 | 2010-08-26 | Toshiba Corp | X線源、x線発生方法およびx線源製造方法。 |
| CN102365703A (zh) | 2009-03-27 | 2012-02-29 | 皇家飞利浦电子股份有限公司 | 用于利用x射线管进行编码源成像的结构化的电子发射器 |
| JP2011034734A (ja) * | 2009-07-30 | 2011-02-17 | Stanley Electric Co Ltd | 電界放出型電子源 |
| EP2375435B1 (en) * | 2010-04-06 | 2016-07-06 | LightLab Sweden AB | Field emission cathode |
| US20110280371A1 (en) | 2010-05-12 | 2011-11-17 | Sabee Molloi | TiO2 Nanotube Cathode for X-Ray Generation |
| JP5578612B2 (ja) * | 2010-07-30 | 2014-08-27 | 株式会社リガク | 電子放出装置の電流制御装置 |
| US20140029728A1 (en) | 2011-04-04 | 2014-01-30 | Vsi Co., Ltd. | High-Efficiency Flat Type Photo Bar Using Field Emitter and Manufacturing Method Thereof |
| CN102262990A (zh) * | 2011-07-04 | 2011-11-30 | 中山大学 | 一种改善氧化铁纳米冷阴极发射特性的方法 |
| WO2013050570A1 (en) * | 2011-10-05 | 2013-04-11 | Lightlab Sweden Ab | Method for manufacturing nanostructures and cathode for field emission lighting arrangement |
| US20140321619A1 (en) * | 2011-11-28 | 2014-10-30 | Koninklijke Philips N.V. | X-ray tube with heatable field emission electron emitter and method for operating same |
| KR101917742B1 (ko) * | 2012-07-06 | 2018-11-12 | 삼성전자주식회사 | 메쉬 전극 접합 구조체, 전자 방출 소자, 및 전자 방출 소자를 포함하는 전자 장치 |
| DE102013214096A1 (de) | 2012-10-04 | 2014-04-10 | Siemens Aktiengesellschaft | Substrat für einen Feldemitter, Verfahren zur Herstellung des Substrates und Verwendung des Substrates |
-
2015
- 2015-02-10 MX MX2016010341A patent/MX363864B/es active IP Right Grant
- 2015-02-10 CA CA2939139A patent/CA2939139A1/en not_active Abandoned
- 2015-02-10 CN CN201580019020.6A patent/CN106463320B/zh active Active
- 2015-02-10 EP EP15704775.4A patent/EP3105772B1/en active Active
- 2015-02-10 RU RU2016135638A patent/RU2682182C2/ru active
- 2015-02-10 CA CA2939138A patent/CA2939138C/en active Active
- 2015-02-10 AU AU2015213990A patent/AU2015213990B2/en active Active
- 2015-02-10 MX MX2016010340A patent/MX360238B/es active IP Right Grant
- 2015-02-10 CN CN201580019030.XA patent/CN106463321B/zh active Active
- 2015-02-10 JP JP2016568132A patent/JP6804304B2/ja active Active
- 2015-02-10 AU AU2015213991A patent/AU2015213991B2/en active Active
- 2015-02-10 RU RU2016135642A patent/RU2675791C2/ru active
- 2015-02-10 WO PCT/EP2015/052789 patent/WO2015118178A1/en not_active Ceased
- 2015-02-10 BR BR112016018369-0A patent/BR112016018369B1/pt active IP Right Grant
- 2015-02-10 KR KR1020167025325A patent/KR102368515B1/ko active Active
- 2015-02-10 BR BR112016018345-2A patent/BR112016018345B1/pt active IP Right Grant
- 2015-02-10 WO PCT/EP2015/052788 patent/WO2015118177A1/en not_active Ceased
- 2015-02-10 KR KR1020167025324A patent/KR102313234B1/ko active Active
- 2015-02-10 EP EP15705247.3A patent/EP3105773B1/en active Active
- 2015-02-10 US US15/117,872 patent/US10319555B2/en active Active
- 2015-02-10 US US15/117,861 patent/US10825635B2/en active Active
- 2015-02-10 JP JP2016568131A patent/JP2017510051A/ja active Pending
-
2016
- 2016-08-09 SA SA516371636A patent/SA516371636B1/ar unknown
- 2016-08-09 SA SA516371645A patent/SA516371645B1/ar unknown
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