KR102368515B1 - X-선 튜브용 전자 에미터 - Google Patents

X-선 튜브용 전자 에미터 Download PDF

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Publication number
KR102368515B1
KR102368515B1 KR1020167025325A KR20167025325A KR102368515B1 KR 102368515 B1 KR102368515 B1 KR 102368515B1 KR 1020167025325 A KR1020167025325 A KR 1020167025325A KR 20167025325 A KR20167025325 A KR 20167025325A KR 102368515 B1 KR102368515 B1 KR 102368515B1
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electron
emission
electrically conductive
conductive substrate
electron emitter
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Korean (ko)
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KR20170007238A (ko
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키우-홍 후
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럭스브라이트 에이비
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • H01J35/065—Field emission, photo emission or secondary emission cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00—X-ray tubes
    • H01J35/02—Details
    • H01J35/04—Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06—Cathodes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/046—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V5/00—Prospecting or detecting by the use of ionising radiation, e.g. of natural or induced radioactivity
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30488—Nitrides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00—Electrodes common to discharge tubes
    • H01J2201/30—Cold cathodes
    • H01J2201/304—Field emission cathodes
    • H01J2201/30446—Field emission cathodes characterised by the emitter material
    • H01J2201/30496—Oxides
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2235/00—X-ray tubes
    • H01J2235/12—Cooling
    • H01J2235/1225—Cooling characterised by method
    • H01J2235/1229—Cooling characterised by method employing layers with high emissivity
    • H01J2235/1233—Cooling characterised by method employing layers with high emissivity characterised by the material

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  • X-Ray Techniques (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
KR1020167025325A 2014-02-10 2015-02-10 X-선 튜브용 전자 에미터 Active KR102368515B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201461937677P 2014-02-10 2014-02-10
US61/937,677 2014-02-10
PCT/EP2015/052789 WO2015118178A1 (en) 2014-02-10 2015-02-10 An electron emitter for an x-ray tube

Publications (2)

Publication Number Publication Date
KR20170007238A KR20170007238A (ko) 2017-01-18
KR102368515B1 true KR102368515B1 (ko) 2022-02-25

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KR1020167025324A Active KR102313234B1 (ko) 2014-02-10 2015-02-10 X-선 장치
KR1020167025325A Active KR102368515B1 (ko) 2014-02-10 2015-02-10 X-선 튜브용 전자 에미터

Family Applications Before (1)

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US (2) US10319555B2 (enExample)
EP (2) EP3105773B1 (enExample)
JP (2) JP6804304B2 (enExample)
KR (2) KR102313234B1 (enExample)
CN (2) CN106463321B (enExample)
AU (2) AU2015213990B2 (enExample)
BR (2) BR112016018345B1 (enExample)
CA (2) CA2939139A1 (enExample)
MX (2) MX363864B (enExample)
RU (2) RU2682182C2 (enExample)
SA (2) SA516371636B1 (enExample)
WO (2) WO2015118177A1 (enExample)

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KR102027407B1 (ko) * 2018-05-16 2019-11-04 원광대학교산학협력단 탄소나노튜브 실을 이용한 필드 에미터 및 냉음극 구조
KR101956153B1 (ko) 2018-10-04 2019-06-24 어썸레이 주식회사 탄소나노튜브를 포함하는 얀의 제조방법 및 이로부터 제조된 얀
KR101962215B1 (ko) 2018-11-30 2019-03-26 어썸레이 주식회사 일 방향으로 정렬된 얀을 포함하는 탄소나노튜브 시트를 제조하는 방법 및 이에 의해 제조된 탄소나노튜브 시트
KR101992745B1 (ko) 2019-01-24 2019-06-26 어썸레이 주식회사 구조적 안정성이 우수하고 전자 방출 효율이 향상된 이미터 및 이를 포함하는 x-선 튜브
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KR102099411B1 (ko) * 2019-07-26 2020-04-09 어썸레이 주식회사 구조적 안정성이 우수한 전계 방출 장치 및 이를 포함하는 x-선 튜브
US11719652B2 (en) * 2020-02-04 2023-08-08 Kla Corporation Semiconductor metrology and inspection based on an x-ray source with an electron emitter array
CN113311012A (zh) * 2021-05-26 2021-08-27 西湖大学 基于多晶x射线衍射仪的电化学检测装置及其测试方法
RU209775U1 (ru) * 2021-08-31 2022-03-23 Общество с ограниченной ответственностью "Пространство-время" Импульсный пьезоэлектрический источник рентгеновского излучения
CN114551192A (zh) * 2022-02-17 2022-05-27 海宁精奕电子有限公司 冷阴极x射线管及x射线发生装置
CN115410880A (zh) * 2022-09-15 2022-11-29 中国科学技术大学 一种低维结构电子源及其制备方法
US20250201506A1 (en) * 2023-12-18 2025-06-19 Varex Imaging Corporation Field emitter apparatuses and x-ray systems
CN119008360A (zh) * 2024-08-12 2024-11-22 南京信息工程大学 一种蜂窝状碳纳米阵列的x射线管和制备方法

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RU2675791C2 (ru) 2018-12-25
NZ723276A (en) 2021-07-30
AU2015213990B2 (en) 2019-07-11
BR112016018369A2 (enExample) 2017-08-08
BR112016018345B1 (pt) 2022-08-30
EP3105773A1 (en) 2016-12-21
WO2015118178A1 (en) 2015-08-13
JP6804304B2 (ja) 2020-12-23
RU2016135638A (ru) 2018-03-15
JP2017510051A (ja) 2017-04-06
SA516371636B1 (ar) 2021-01-25
US10319555B2 (en) 2019-06-11
KR20160145548A (ko) 2016-12-20
JP2017510052A (ja) 2017-04-06
US10825635B2 (en) 2020-11-03
US20160358740A1 (en) 2016-12-08
MX363864B (es) 2019-04-05
CN106463321A (zh) 2017-02-22
CN106463320A (zh) 2017-02-22
EP3105772A1 (en) 2016-12-21
KR20170007238A (ko) 2017-01-18
RU2682182C2 (ru) 2019-03-15
EP3105772B1 (en) 2018-04-04
CA2939138C (en) 2022-05-03
RU2016135638A3 (enExample) 2018-08-27
WO2015118177A1 (en) 2015-08-13
RU2016135642A3 (enExample) 2018-08-23
SA516371645B1 (ar) 2020-10-22
US20170011880A1 (en) 2017-01-12
MX2016010340A (es) 2017-04-27
MX360238B (es) 2018-10-26
CN106463320B (zh) 2020-02-04
BR112016018369B1 (pt) 2022-08-30
MX2016010341A (es) 2017-04-27
NZ723275A (en) 2021-09-24
AU2015213991A1 (en) 2016-09-01
CA2939139A1 (en) 2015-08-13
RU2016135642A (ru) 2018-03-15
AU2015213991B2 (en) 2019-09-26
EP3105773B1 (en) 2018-10-10
BR112016018345A2 (enExample) 2017-08-08
KR102313234B1 (ko) 2021-10-14
CN106463321B (zh) 2019-06-07
CA2939138A1 (en) 2015-08-13
AU2015213990A1 (en) 2016-09-01

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