CN106463320B - 用于x射线管的电子发射器 - Google Patents

用于x射线管的电子发射器 Download PDF

Info

Publication number
CN106463320B
CN106463320B CN201580019020.6A CN201580019020A CN106463320B CN 106463320 B CN106463320 B CN 106463320B CN 201580019020 A CN201580019020 A CN 201580019020A CN 106463320 B CN106463320 B CN 106463320B
Authority
CN
China
Prior art keywords
electron
emission
electron emitter
ray
exemplary embodiments
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201580019020.6A
Other languages
English (en)
Chinese (zh)
Other versions
CN106463320A (zh
Inventor
胡秋红
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lebot Co
Original Assignee
Lebot Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lebot Co filed Critical Lebot Co
Publication of CN106463320A publication Critical patent/CN106463320A/zh
Application granted granted Critical
Publication of CN106463320B publication Critical patent/CN106463320B/zh
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/04Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06Cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J35/00X-ray tubes
    • H01J35/02Details
    • H01J35/04Electrodes ; Mutual position thereof; Constructional adaptations therefor
    • H01J35/06Cathodes
    • H01J35/065Field emission, photo emission or secondary emission cathodes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/04Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material
    • G01N23/046Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and forming images of the material using tomography, e.g. computed tomography [CT]
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01VGEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V5/00Prospecting or detecting by the use of ionising radiation, e.g. of natural or induced radioactivity
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/304Field emission cathodes
    • H01J2201/30446Field emission cathodes characterised by the emitter material
    • H01J2201/30488Nitrides
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2201/00Electrodes common to discharge tubes
    • H01J2201/30Cold cathodes
    • H01J2201/304Field emission cathodes
    • H01J2201/30446Field emission cathodes characterised by the emitter material
    • H01J2201/30496Oxides

Landscapes

  • X-Ray Techniques (AREA)
  • Cold Cathode And The Manufacture (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
CN201580019020.6A 2014-02-10 2015-02-10 用于x射线管的电子发射器 Active CN106463320B (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201461937677P 2014-02-10 2014-02-10
US61/937,677 2014-02-10
PCT/EP2015/052789 WO2015118178A1 (en) 2014-02-10 2015-02-10 An electron emitter for an x-ray tube

Publications (2)

Publication Number Publication Date
CN106463320A CN106463320A (zh) 2017-02-22
CN106463320B true CN106463320B (zh) 2020-02-04

Family

ID=52473906

Family Applications (2)

Application Number Title Priority Date Filing Date
CN201580019030.XA Active CN106463321B (zh) 2014-02-10 2015-02-10 X射线装置
CN201580019020.6A Active CN106463320B (zh) 2014-02-10 2015-02-10 用于x射线管的电子发射器

Family Applications Before (1)

Application Number Title Priority Date Filing Date
CN201580019030.XA Active CN106463321B (zh) 2014-02-10 2015-02-10 X射线装置

Country Status (12)

Country Link
US (2) US10319555B2 (enExample)
EP (2) EP3105773B1 (enExample)
JP (2) JP6804304B2 (enExample)
KR (2) KR102313234B1 (enExample)
CN (2) CN106463321B (enExample)
AU (2) AU2015213991B2 (enExample)
BR (2) BR112016018369B1 (enExample)
CA (2) CA2939139A1 (enExample)
MX (2) MX360238B (enExample)
RU (2) RU2675791C2 (enExample)
SA (2) SA516371645B1 (enExample)
WO (2) WO2015118178A1 (enExample)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10283311B2 (en) * 2015-08-21 2019-05-07 Electronics And Telecommunications Research Institute X-ray source
GB2537196B (en) * 2015-10-02 2017-05-10 Mario Michan Juan Apparatus and method for electron irradiation scrubbing
RU2705092C1 (ru) 2015-12-04 2019-11-05 Люксбрайт Аб Направляющий и принимающий электроны элемент
US10096148B1 (en) 2017-04-26 2018-10-09 The Aerospace Corporation Portable x-ray computed tomography
TWI651748B (zh) * 2017-07-10 2019-02-21 法商歐洲雷射系統與方案解決公司 低壓佈線離子電漿放電源,及其用於具有二次發射之電子源的應用
DE102017008810A1 (de) 2017-09-20 2019-03-21 Cetteen Gmbh MBFEX-Röhre
CN108072672B (zh) * 2017-12-14 2021-03-02 清华大学 一种烧蚀结构形貌及产物的在线监测装置及其监测方法
US11955306B2 (en) * 2018-04-06 2024-04-09 Micro-X Limited Large scale stable field emitter for high current applications
KR102027407B1 (ko) * 2018-05-16 2019-11-04 원광대학교산학협력단 탄소나노튜브 실을 이용한 필드 에미터 및 냉음극 구조
KR101956153B1 (ko) 2018-10-04 2019-06-24 어썸레이 주식회사 탄소나노튜브를 포함하는 얀의 제조방법 및 이로부터 제조된 얀
KR101962215B1 (ko) 2018-11-30 2019-03-26 어썸레이 주식회사 일 방향으로 정렬된 얀을 포함하는 탄소나노튜브 시트를 제조하는 방법 및 이에 의해 제조된 탄소나노튜브 시트
KR101992745B1 (ko) 2019-01-24 2019-06-26 어썸레이 주식회사 구조적 안정성이 우수하고 전자 방출 효율이 향상된 이미터 및 이를 포함하는 x-선 튜브
US10825634B2 (en) * 2019-02-21 2020-11-03 Varex Imaging Corporation X-ray tube emitter
US11315751B2 (en) * 2019-04-25 2022-04-26 The Boeing Company Electromagnetic X-ray control
RU2710455C1 (ru) * 2019-06-06 2019-12-26 Закрытое акционерное общество "СуперОкс" (ЗАО "СуперОкс") Многополостной катод для плазменного двигателя
KR102099411B1 (ko) 2019-07-26 2020-04-09 어썸레이 주식회사 구조적 안정성이 우수한 전계 방출 장치 및 이를 포함하는 x-선 튜브
US11719652B2 (en) * 2020-02-04 2023-08-08 Kla Corporation Semiconductor metrology and inspection based on an x-ray source with an electron emitter array
CN113311012A (zh) * 2021-05-26 2021-08-27 西湖大学 基于多晶x射线衍射仪的电化学检测装置及其测试方法
RU209775U1 (ru) * 2021-08-31 2022-03-23 Общество с ограниченной ответственностью "Пространство-время" Импульсный пьезоэлектрический источник рентгеновского излучения
CN114551192A (zh) * 2022-02-17 2022-05-27 海宁精奕电子有限公司 冷阴极x射线管及x射线发生装置
CN115410880A (zh) * 2022-09-15 2022-11-29 中国科学技术大学 一种低维结构电子源及其制备方法
US20250201506A1 (en) * 2023-12-18 2025-06-19 Varex Imaging Corporation Field emitter apparatuses and x-ray systems
CN119008360A (zh) * 2024-08-12 2024-11-22 南京信息工程大学 一种蜂窝状碳纳米阵列的x射线管和制备方法

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1280703A (zh) * 1997-12-04 2001-01-17 可印刷发射体有限公司 场致电子发射材料与装置
US6277318B1 (en) * 1999-08-18 2001-08-21 Agere Systems Guardian Corp. Method for fabrication of patterned carbon nanotube films
CN1447916A (zh) * 2000-06-15 2003-10-08 北卡罗来纳-查佩尔山大学 纳米结构基高能量物质
CN1643641A (zh) * 2002-01-22 2005-07-20 北卡罗来纳-查佩尔山大学 大区域可单独寻址的多束x射线系统
CN102262990A (zh) * 2011-07-04 2011-11-30 中山大学 一种改善氧化铁纳米冷阴极发射特性的方法
WO2013080074A1 (en) * 2011-11-28 2013-06-06 Koninklijke Philips Electronics N.V. X-ray tube with heatable field emission electron emitter and method for operating same
CN103531422A (zh) * 2012-07-06 2014-01-22 三星电子株式会社 网状电极附接结构、电子发射器件和电子装置

Family Cites Families (36)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4924485A (en) 1987-09-22 1990-05-08 Hoeberling Robert F Portable radiography system using a relativistic electron beam
KR0141174B1 (ko) * 1994-12-28 1998-06-15 윤종용 초 순간 수상관의 직렬형 음극 신호 개선장치
JPH08250054A (ja) * 1995-03-14 1996-09-27 Hitachi Ltd 拡散補給型電子線源およびそれを用いた電子線装置
EP0905737B1 (en) 1997-09-30 2004-04-28 Noritake Co., Ltd. Electron-emitting source
EP1123558B1 (en) * 1999-08-20 2004-01-21 Fei Company Schottky emitter having extended life
JP2001250496A (ja) * 2000-03-06 2001-09-14 Rigaku Corp X線発生装置
US6456691B2 (en) 2000-03-06 2002-09-24 Rigaku Corporation X-ray generator
US20040240616A1 (en) 2003-05-30 2004-12-02 Applied Nanotechnologies, Inc. Devices and methods for producing multiple X-ray beams from multiple locations
US6553096B1 (en) * 2000-10-06 2003-04-22 The University Of North Carolina Chapel Hill X-ray generating mechanism using electron field emission cathode
US7085351B2 (en) * 2000-10-06 2006-08-01 University Of North Carolina At Chapel Hill Method and apparatus for controlling electron beam current
JP2002238885A (ja) 2001-02-02 2002-08-27 Ge Medical Systems Global Technology Co Llc X線焦点位置制御方法及びそのプログラム並びにx線ct装置及びx線管
JP3810656B2 (ja) * 2001-07-23 2006-08-16 株式会社神戸製鋼所 微小x線源
US6672925B2 (en) * 2001-08-17 2004-01-06 Motorola, Inc. Vacuum microelectronic device and method
US6828717B2 (en) * 2001-10-26 2004-12-07 Matsushita Electric Industrial Co., Ltd. Electron gun having short length and cathode-ray tube apparatus using such electron gun
US7233101B2 (en) * 2002-12-31 2007-06-19 Samsung Electronics Co., Ltd. Substrate-supported array having steerable nanowires elements use in electron emitting devices
JP2004241295A (ja) * 2003-02-07 2004-08-26 Hitachi Zosen Corp カーボンナノチューブを用いた電子放出素子用電極材料およびその製造方法
ATE441202T1 (de) * 2004-05-17 2009-09-15 Mapper Lithography Ip Bv Belichtungssystem mit einem geladenen teilchenstrahl
JP2005332735A (ja) 2004-05-21 2005-12-02 Ci Techno:Kk 電子放出素子及びその製造方法
EP1791186A1 (en) * 2005-11-25 2007-05-30 Stormled AB Light emitting diode and method for manufacturing the same
US7850941B2 (en) * 2006-10-20 2010-12-14 General Electric Company Nanostructure arrays and methods for forming same
JP4984234B2 (ja) 2007-03-30 2012-07-25 国立大学法人長岡技術科学大学 X線発生装置
US7839028B2 (en) * 2007-04-03 2010-11-23 CJP IP Holding, Ltd. Nanoelectromechanical systems and methods for making the same
US7627087B2 (en) 2007-06-28 2009-12-01 General Electric Company One-dimensional grid mesh for a high-compression electron gun
DE102007034222A1 (de) 2007-07-23 2009-01-29 Siemens Ag Röntgenröhre mit einer Feldemissionskathode
KR100911434B1 (ko) * 2007-12-17 2009-08-11 한국전자통신연구원 Cnt를 이용한 삼극형 구조의 초소형 x 선관
EP2079095B1 (en) * 2008-01-11 2012-01-11 UVIS Light AB Method of manufacturing a field emission display
JP5294653B2 (ja) * 2008-02-28 2013-09-18 キヤノン株式会社 マルチx線発生装置及びx線撮影装置
JP2010186694A (ja) * 2009-02-13 2010-08-26 Toshiba Corp X線源、x線発生方法およびx線源製造方法。
RU2011143319A (ru) * 2009-03-27 2013-05-10 Конинклейке Филипс Электроникс Н.В. Структурированный эмиттер электронов для визуализации с кодированным источником с помощью рентгеновской трубки
JP2011034734A (ja) * 2009-07-30 2011-02-17 Stanley Electric Co Ltd 電界放出型電子源
EP2375435B1 (en) 2010-04-06 2016-07-06 LightLab Sweden AB Field emission cathode
US20110280371A1 (en) 2010-05-12 2011-11-17 Sabee Molloi TiO2 Nanotube Cathode for X-Ray Generation
JP5578612B2 (ja) 2010-07-30 2014-08-27 株式会社リガク 電子放出装置の電流制御装置
JP2014502014A (ja) 2011-04-04 2014-01-23 ヴァキューム・サイエンス・アンド・インストゥルメント・カンパニー・リミテッド 電界放出源を用いた高効率平面型フォトバーおよびその製造方法
EP2764529B1 (en) * 2011-10-05 2016-02-10 LightLab Sweden AB Method for manufacturing nanostructures
DE102013214096A1 (de) * 2012-10-04 2014-04-10 Siemens Aktiengesellschaft Substrat für einen Feldemitter, Verfahren zur Herstellung des Substrates und Verwendung des Substrates

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1280703A (zh) * 1997-12-04 2001-01-17 可印刷发射体有限公司 场致电子发射材料与装置
US6277318B1 (en) * 1999-08-18 2001-08-21 Agere Systems Guardian Corp. Method for fabrication of patterned carbon nanotube films
CN1447916A (zh) * 2000-06-15 2003-10-08 北卡罗来纳-查佩尔山大学 纳米结构基高能量物质
CN1643641A (zh) * 2002-01-22 2005-07-20 北卡罗来纳-查佩尔山大学 大区域可单独寻址的多束x射线系统
CN102262990A (zh) * 2011-07-04 2011-11-30 中山大学 一种改善氧化铁纳米冷阴极发射特性的方法
WO2013080074A1 (en) * 2011-11-28 2013-06-06 Koninklijke Philips Electronics N.V. X-ray tube with heatable field emission electron emitter and method for operating same
CN103531422A (zh) * 2012-07-06 2014-01-22 三星电子株式会社 网状电极附接结构、电子发射器件和电子装置

Also Published As

Publication number Publication date
JP6804304B2 (ja) 2020-12-23
CA2939138A1 (en) 2015-08-13
WO2015118178A1 (en) 2015-08-13
KR102313234B1 (ko) 2021-10-14
US10825635B2 (en) 2020-11-03
EP3105772A1 (en) 2016-12-21
EP3105773B1 (en) 2018-10-10
CA2939139A1 (en) 2015-08-13
AU2015213991B2 (en) 2019-09-26
CN106463321B (zh) 2019-06-07
US20170011880A1 (en) 2017-01-12
NZ723276A (en) 2021-07-30
CN106463321A (zh) 2017-02-22
CN106463320A (zh) 2017-02-22
KR20160145548A (ko) 2016-12-20
BR112016018369B1 (pt) 2022-08-30
MX2016010340A (es) 2017-04-27
RU2682182C2 (ru) 2019-03-15
RU2016135638A3 (enExample) 2018-08-27
KR20170007238A (ko) 2017-01-18
MX360238B (es) 2018-10-26
MX363864B (es) 2019-04-05
RU2016135638A (ru) 2018-03-15
RU2016135642A3 (enExample) 2018-08-23
EP3105772B1 (en) 2018-04-04
JP2017510052A (ja) 2017-04-06
CA2939138C (en) 2022-05-03
AU2015213991A1 (en) 2016-09-01
US20160358740A1 (en) 2016-12-08
BR112016018369A2 (enExample) 2017-08-08
AU2015213990A1 (en) 2016-09-01
BR112016018345A2 (enExample) 2017-08-08
EP3105773A1 (en) 2016-12-21
NZ723275A (en) 2021-09-24
MX2016010341A (es) 2017-04-27
WO2015118177A1 (en) 2015-08-13
US10319555B2 (en) 2019-06-11
KR102368515B1 (ko) 2022-02-25
RU2675791C2 (ru) 2018-12-25
JP2017510051A (ja) 2017-04-06
BR112016018345B1 (pt) 2022-08-30
SA516371645B1 (ar) 2020-10-22
AU2015213990B2 (en) 2019-07-11
RU2016135642A (ru) 2018-03-15
SA516371636B1 (ar) 2021-01-25

Similar Documents

Publication Publication Date Title
CN106463320B (zh) 用于x射线管的电子发射器
CN111448637B (zh) Mbfex管
JP2007265981A (ja) マルチx線発生装置
Kato et al. Development of an X-ray tube for irradiation experiments using a field emission electron gun
CN103959422A (zh) 具有可加热场致发射电子发射器的x射线管和操作其的方法
US20070235772A1 (en) Field emitter array with split gates and method for operating the same
JP6980740B2 (ja) X線デバイス
JP5312555B2 (ja) マルチx線発生装置
NZ723276B2 (en) An x-ray device
Chepusov et al. Study of Changes in the Characteristics of Massive Field Electron Emission Cathodes Made of Industrial Carbon Materials Under Ar+ Ion Bombardment
NZ723275B2 (en) An electron emitter for an x-ray tube
Kang et al. A carbon nanotube based compact X-ray tube for medical diagnoses

Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
C10 Entry into substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant