JP6800247B2 - スプリットゲート型不揮発性フラッシュメモリセルの製造方法 - Google Patents
スプリットゲート型不揮発性フラッシュメモリセルの製造方法 Download PDFInfo
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- JP6800247B2 JP6800247B2 JP2018560532A JP2018560532A JP6800247B2 JP 6800247 B2 JP6800247 B2 JP 6800247B2 JP 2018560532 A JP2018560532 A JP 2018560532A JP 2018560532 A JP2018560532 A JP 2018560532A JP 6800247 B2 JP6800247 B2 JP 6800247B2
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- 238000004519 manufacturing process Methods 0.000 title 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 112
- 229920005591 polysilicon Polymers 0.000 claims description 112
- 239000000758 substrate Substances 0.000 claims description 92
- 230000015572 biosynthetic process Effects 0.000 claims description 80
- 238000000034 method Methods 0.000 claims description 27
- 239000004065 semiconductor Substances 0.000 claims description 19
- 238000005498 polishing Methods 0.000 claims description 4
- 239000000126 substance Substances 0.000 claims description 4
- 238000005137 deposition process Methods 0.000 claims 1
- 229920002120 photoresistant polymer Polymers 0.000 description 34
- 238000005530 etching Methods 0.000 description 28
- 239000000463 material Substances 0.000 description 24
- 125000006850 spacer group Chemical group 0.000 description 21
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 15
- 239000011248 coating agent Substances 0.000 description 8
- 238000000576 coating method Methods 0.000 description 8
- 229910052581 Si3N4 Inorganic materials 0.000 description 7
- 239000007943 implant Substances 0.000 description 7
- 235000012239 silicon dioxide Nutrition 0.000 description 7
- 239000000377 silicon dioxide Substances 0.000 description 7
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 7
- 239000002131 composite material Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000000151 deposition Methods 0.000 description 2
- 150000002500 ions Chemical class 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 238000000206 photolithography Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 238000001039 wet etching Methods 0.000 description 2
- BOTDANWDWHJENH-UHFFFAOYSA-N Tetraethyl orthosilicate Chemical compound CCO[Si](OCC)(OCC)OCC BOTDANWDWHJENH-UHFFFAOYSA-N 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 238000000137 annealing Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 238000001312 dry etching Methods 0.000 description 1
- 230000002977 hyperthermial effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 238000004886 process control Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
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Description
[関連出願]
本出願は、2016年5月18日出願の中国特許出願第201610330742.X号の利益を主張するものである。
Claims (1)
- 不揮発性メモリセルを形成する方法であって、
メモリセル領域及び論理回路領域を有する半導体基板を提供することと、
前記半導体基板の前記メモリセル領域にわたって配置され、かつ前記半導体基板の前記メモリセル領域から絶縁された一対の導電性浮遊ゲートを形成することと、
それぞれが前記導電性浮遊ゲートのうち一つにわたって配置され、かつ前記導電性浮遊ゲートのうち一つから絶縁された一対の導電性制御ゲートを形成することと、
それぞれが前記導電性制御ゲートのうち一つにわたって配置される一対の絶縁ブロックを形成することと、
前記一対の導電性浮遊ゲートの間で前記半導体基板内に第1のソース領域を形成することと、
単一ポリシリコン堆積プロセスを実施することにより、前記メモリセル領域及び前記論理回路領域内で、前記半導体基板にわたって、かつ前記半導体基板から絶縁された単一の共形ポリシリコン層を形成することであって、前記単一の共形ポリシリコン層が、前記一対の絶縁ブロックの上方に、及び前記一対の絶縁ブロックにわたって延在している、形成することと、
前記メモリセル及び論理回路領域内に前記単一の共形ポリシリコン層にわたって酸化物層を形成することと、
前記単一の共形ポリシリコン層を露出するために前記メモリセル領域から前記酸化物層を除去することと、
前記導電性浮遊ゲートの間、かつ前記第1のソース領域にわたる前記単一の共形ポリシリコン層の第1のブロックが、前記単一の共形ポリシリコン層の残りの部分から分離され、前記一対の絶縁ブロックの上側表面と同じ高さの上側表面を有するように、前記メモリセル領域内に前記単一の共形ポリシリコン層の化学機械研磨を実施することであって、前記化学機械研磨が前記論理回路領域内の露出された前記酸化物層を残す、実施することと、
前記論理回路領域から前記酸化物層を除去することと、
前記単一の共形ポリシリコン層の部分を選択的にエッチングして、
前記一対の導電性浮遊ゲートのうちの一方が前記単一の共形ポリシリコン層の第1及び第2のブロックの間に配置された状態で、前記半導体基板にわたって配置された前記単一の共形ポリシリコン層の第2のブロックと、
前記一対の導電性浮遊ゲートのうちの他方が前記単一の共形ポリシリコン層の第1及び第3のブロックの間に配置された状態で、前記半導体基板にわたって配置された前記単一の共形ポリシリコン層の第3のブロックと、
前記半導体基板の前記論理回路領域にわたって配置され、かつ前記半導体基板の前記論理回路領域から絶縁された前記単一の共形ポリシリコン層の第4のブロックと、をもたらすことと、
前記単一の共形ポリシリコン層の前記第2のブロックの側部に隣接して前記半導体基板内に第1のドレイン領域を形成することと、
前記単一の共形ポリシリコン層の前記第3のブロックの側部に隣接して前記半導体基板内に第2のドレイン領域を形成することと、
前記単一の共形ポリシリコン層の前記第4のブロックの第1の側部に隣接して前記半導体基板内に第3のドレイン領域を形成することと、
前記第4のブロックの前記第1の側部とは反対側の前記単一の共形ポリシリコン層の前記第4のブロックの第2の側部に隣接して前記半導体基板内に第2のソース領域を形成することと、を含む、方法。
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