JP6781598B2 - プローブカード - Google Patents

プローブカード Download PDF

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Publication number
JP6781598B2
JP6781598B2 JP2016181382A JP2016181382A JP6781598B2 JP 6781598 B2 JP6781598 B2 JP 6781598B2 JP 2016181382 A JP2016181382 A JP 2016181382A JP 2016181382 A JP2016181382 A JP 2016181382A JP 6781598 B2 JP6781598 B2 JP 6781598B2
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Japan
Prior art keywords
probe
probes
adjacent
locking portion
rear direction
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JP2016181382A
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Japanese (ja)
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JP2018044912A5 (enExample
JP2018044912A (ja
Inventor
横山　和男
和男 横山
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Japan Electronic Materials Corp
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Japan Electronic Materials Corp
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Priority to JP2016181382A priority Critical patent/JP6781598B2/ja
Publication of JP2018044912A publication Critical patent/JP2018044912A/ja
Publication of JP2018044912A5 publication Critical patent/JP2018044912A5/ja
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Publication of JP6781598B2 publication Critical patent/JP6781598B2/ja
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  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2016181382A 2016-09-16 2016-09-16 プローブカード Active JP6781598B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2016181382A JP6781598B2 (ja) 2016-09-16 2016-09-16 プローブカード

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2016181382A JP6781598B2 (ja) 2016-09-16 2016-09-16 プローブカード

Publications (3)

Publication Number Publication Date
JP2018044912A JP2018044912A (ja) 2018-03-22
JP2018044912A5 JP2018044912A5 (enExample) 2019-10-03
JP6781598B2 true JP6781598B2 (ja) 2020-11-04

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ID=61693645

Family Applications (1)

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JP2016181382A Active JP6781598B2 (ja) 2016-09-16 2016-09-16 プローブカード

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JP (1) JP6781598B2 (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPWO2022059070A1 (enExample) 2020-09-15 2022-03-24
JP7658768B2 (ja) * 2021-03-19 2025-04-08 株式会社日本マイクロニクス 電気的接続装置
CN115248338B (zh) * 2021-04-27 2025-09-23 芯卓科技(浙江)有限公司 探针结构及其探针卡装置
CN115684677B (zh) * 2021-07-29 2025-08-01 芯卓科技(浙江)有限公司 探针及探针卡装置
KR20240093831A (ko) * 2021-12-06 2024-06-24 재팬 일렉트로닉 메트리얼스 코오포레이숀 프로브 카드

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7671610B2 (en) * 2007-10-19 2010-03-02 Microprobe, Inc. Vertical guided probe array providing sideways scrub motion
TWM342638U (en) * 2008-03-10 2008-10-11 Hon Hai Prec Ind Co Ltd Electrical connector
JP5341456B2 (ja) * 2008-10-06 2013-11-13 日本電子材料株式会社 プローブカード
JP2010091349A (ja) * 2008-10-06 2010-04-22 Japan Electronic Materials Corp 垂直型プローブカード
JP5487050B2 (ja) * 2010-08-19 2014-05-07 株式会社日本マイクロニクス プローブカードの製造方法
JP2012093127A (ja) * 2010-10-25 2012-05-17 Advanced Systems Japan Inc バーチカルプローブヘッド
US8832933B2 (en) * 2011-09-15 2014-09-16 Taiwan Semiconductor Manufacturing Co., Ltd. Method of fabricating a semiconductor test probe head
US10359447B2 (en) * 2012-10-31 2019-07-23 Formfactor, Inc. Probes with spring mechanisms for impeding unwanted movement in guide holes
US10866266B2 (en) * 2015-10-29 2020-12-15 Taiwan Semiconductor Manufacturing Company Ltd. Probe head receiver and probe card assembly having the same

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Publication number Publication date
JP2018044912A (ja) 2018-03-22

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